JP2004156981A - 形状測定装置 - Google Patents

形状測定装置 Download PDF

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Publication number
JP2004156981A
JP2004156981A JP2002322026A JP2002322026A JP2004156981A JP 2004156981 A JP2004156981 A JP 2004156981A JP 2002322026 A JP2002322026 A JP 2002322026A JP 2002322026 A JP2002322026 A JP 2002322026A JP 2004156981 A JP2004156981 A JP 2004156981A
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JP
Japan
Prior art keywords
light
objective lens
pupil
test object
pupil diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002322026A
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English (en)
Japanese (ja)
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JP2004156981A5 (enrdf_load_stackoverflow
Inventor
Hiroshi Nishimura
宏 西村
Takeo Omori
健雄 大森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2002322026A priority Critical patent/JP2004156981A/ja
Publication of JP2004156981A publication Critical patent/JP2004156981A/ja
Publication of JP2004156981A5 publication Critical patent/JP2004156981A5/ja
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
JP2002322026A 2002-11-06 2002-11-06 形状測定装置 Pending JP2004156981A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002322026A JP2004156981A (ja) 2002-11-06 2002-11-06 形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002322026A JP2004156981A (ja) 2002-11-06 2002-11-06 形状測定装置

Publications (2)

Publication Number Publication Date
JP2004156981A true JP2004156981A (ja) 2004-06-03
JP2004156981A5 JP2004156981A5 (enrdf_load_stackoverflow) 2005-10-27

Family

ID=32802330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002322026A Pending JP2004156981A (ja) 2002-11-06 2002-11-06 形状測定装置

Country Status (1)

Country Link
JP (1) JP2004156981A (enrdf_load_stackoverflow)

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