JP2004146676A - Storing container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a storing container by which a purge effect can be maintained for a comparatively long period and the infiltration of an organic matter or the like from the outside into the inside can be effectively suppressed and in which the fitting structure of a valve can be simplified and metallic parts for the valve can be omitted. <P>SOLUTION: The storing container is provided with a plurality of valve bodies 20 allowed to be inserted into a plurality of through holes 4 formed in a container body 1 to control the circulation of gas to the container body 1. Each valve body 20 is constituted of a fixed cylinder 21 inserted into the through hole 4 to circulate gas, a holding cylinder 25 screwed into the fixed cylinder 21, a check valve 31 built in the fixed cylinder 21 and the holding cylinder 25, an elastic deformation member 33 for deforming the check valve 31, an inner lid cylinder 34 brought into contact with the elastic deformation member 33, and a filter 36 arranged between the inner lid cylinder 34 and the holding cylinder 25 to allow the check valve 31 to regulate the circulation of gas when the member 33 is not compressed and allow the check valve 31 to permit the circulation of gas when the member 33 is compressed. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a gas purging storage container that stores a substrate such as a semiconductor wafer or a photomask glass, and more particularly to a gas purge check valve that controls the flow of a fluid into and out of the storage container.
[0002]
[Prior art]
In recent years, in the semiconductor industry, as represented by DRAM (Dynamic Random Access Memory), there has been competition for gaining shares by reducing the cost of semiconductor components, and accordingly, a production system for reducing the cost of semiconductor manufacturing. Or the diameter of a substrate used in the manufacture of semiconductor components (for example, 300 mm or more in the case of a semiconductor wafer) is being implemented.
[0003]
A semiconductor production system separates a plurality of processing steps of a substrate from a conventional method of manufacturing a semiconductor component while maintaining an entire semiconductor manufacturing factory in a highly clean state (for example, a clean degree of 10 or less). The method has been shifted to a method in which each of the partitioned small internal spaces is made a highly clean environment, and the substrate is transferred between processing steps using a storage container. According to such a method, it is possible to remarkably reduce equipment costs for constructing a clean room and running costs for maintaining the same, and it is possible to improve the yield of semiconductor component production.
[0004]
The storage containers used in semiconductor manufacturing plants where such a clean environment is separated locally have FIMS that can be transported in the semiconductor manufacturing plant by an automatic machine and lids that can be attached and detached by the automatic machine. A corresponding lid is provided. In addition, high sealing is required so as not to contaminate the substrates to be stored, and in order to keep the inside of the container in a clean state, it is required to use a clean raw material that emits less volatile gas. .
[0005]
However, the minimum line width of an electronic circuit formed on a semiconductor component in recent years is in the direction of increasingly lower pitch (0.13 μm or less), and the surface of a substrate stored in a storage container in a part or a plurality of semiconductor manufacturing processes is required. In order to prevent the formation of a natural oxide film and organic contamination, it has been found effective to replace (gas purge) the interior of the container with dry gas from which an inert gas such as nitrogen or moisture has been removed (1% or less). .
In view of this point, there has been proposed a technique in which a filter is attached by opening a part of a storage container or a valve component such as a check valve is attached to a peripheral portion of the opening (see Patent Documents 1 and 2).
[0006]
[Patent Document 1]
JP-A-11-191587
[Patent Document 2]
Japanese Unexamined Patent Publication No. 2002-510150
[0007]
[Problems to be solved by the invention]
Since the conventional storage container is configured as described above, there are the following problems. First, in the case of a storage container in which a filter is simply attached, purging can be performed with a simple configuration, but it is not configured to have a structure in which a gas purged through an opening and a filter can be maintained inside. That is, since the gas in the storage container easily flows out to the outside, there is a problem that the effect of the gas purge can be maintained only for a short time. Further, since the inside and outside of the storage container communicate with each other, there is a problem that it is impossible to completely prevent a small amount of organic substances existing in the clean room from flowing into the storage container from the outside.
[0008]
Further, when a valve is attached to the gas purge opening, there is a problem that the locking structure for attaching the valve becomes very complicated. Furthermore, in the case of a normal valve, a metal part such as a spring for operating the valve is built in, so that a small amount of metal ions oozing out of the metal part during storage or cleaning of the storage container enter the storage container. May contaminate the substrate.
[0009]
The present invention has been made in view of the above, and it is possible to maintain the effect of purging for a relatively long period of time, and to effectively prevent and prevent organic substances and the like from entering the inside from the outside of the container. An object of the present invention is to provide a storage container capable of simplifying the mounting structure of the above and eliminating metal parts from the valve.
[0010]
[Means for Solving the Problems]
In the present invention, in order to achieve the above object, a container main body, a lid for opening and closing the opening of the container main body, and a fluid attached to at least one of the through holes of the container main body and the lid for the container main body. A valve body for controlling the flow of
A valve body, a fixed cylinder fitted in the through-hole to allow fluid to flow, a holding cylinder fitted in the through-hole and combined with the fixed cylinder, and an elastic non-return built in the fixed cylinder and the holding cylinder via a gap. A valve and an inner lid tube that comes into contact with the elastic check valve,
When the elastic check valve is not compressed, the flow of the fluid is regulated, and when the elastic check valve is compressed, the fluid flows.
[0011]
In addition, a rib is formed on the peripheral portion of the through hole and extended to the outside, the fixed tube and the holding tube are screwed together, and a flange that contacts the peripheral portion of the rib is formed on the fixed tube. A flange can be formed in contact with the peripheral portion, and a filter can be provided between the holding cylinder and the inner lid cylinder.
Further, the elastic check valve is formed of at least an elastic check valve built in the holding cylinder via a gap and an elastic deformation member built in the holding cylinder and deforming the check valve. While being supported by the holding cylinder, the inner lid cylinder is brought into contact with one of the check valve and the elastically deformable member to regulate the flow of fluid when the check valve is not compressed, and to flow the fluid when the check valve is compressed. Can be done.
[0012]
Further, the elastic check valve is formed of an elastic check valve built at least in the holding cylinder through a gap, and a telescopic bellows body built in the check valve and deforming the check valve, A flow port is provided in the peripheral wall of the bellows body to regulate the flow of the fluid when the check valve is not compressed, and to flow the fluid when the check valve is compressed.
Further, the elastic check valve is formed of at least an elastic check valve built in the holding cylinder via a gap and an elastic skirt body which is integrated with the check valve and deforms the check valve. , A flow opening is provided in the check valve, a thin skirt piece is extended from the peripheral edge of the skirt body in a bendable manner and provided on the peripheral surface of the check valve, and restricts the flow of fluid when the check valve is not compressed. At the time of compression of the stop valve, a fluid can be circulated.
[0013]
Here, in the container body in the claims, one or more substrates such as a semiconductor wafer and a photomask glass, various electric and electronic components, small articles, and the like are appropriately stored. The opening of the container body may be any of the front, top, and side. The fluid is mainly a gas composed of an inert gas or dry air, but is not limited thereto. Further, the valve body may be a single or a plurality of valve bodies, may be provided in the through holes of the container body and the lid, or may be provided in the through holes of the lid. The elastic check valve of the valve body may be made of a single elastic material, but may be composed of a check valve and an elastic deformation member, which are separate components. The elastically deformable member may or may not be built in the holding cylinder via a gap. Further, the inner lid cylinder is supported by the holding cylinder via an engagement means such as an uneven surface.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 7, a storage container according to the present embodiment is a container main body 1 in which a plurality of substrates W are arranged and stored vertically. A lid 10 for removably closing an opening of the container body 1, and a plurality of valve bodies 20 disposed at the bottom of the container body 1 to control gas flow to the container body 1. A part of the valve body 20 located behind the container body 1 is used as a gas introduction valve 20A, and the remaining part located in front of the container body 1 is used as a gas exhaust valve 20B.
[0015]
Examples of the plurality of substrates W include a plurality of semiconductor wafers. More specifically, a 300 mm (for example, 25 or 26) silicon wafer or the like is used.
[0016]
As shown in FIG. 1, the container main body 1 is formed in a front open box type having an open front surface, for example, using a transparent polycarbonate or the like. Supporting members are provided. The container body 1 is provided with a bottom plate 2 having a substantially Y-shaped plane and having a through hole for detecting and distinguishing the type of the storage container, at the bottom shown in FIG. A positioning member 3 for a processing device having a substantially V-shaped cross section is formed on the rear portion.
[0017]
As shown in FIG. 2, through holes 4 are respectively formed in front and rear sides of the bottom of the container body 1, in other words, in a region that does not overlap the projected area of the substrate W, and an outer peripheral portion of each through hole 4 A cylindrical rib 5 protruding downward is integrally formed. A handle 6 is detachably mounted on the ceiling of the container body 1, and the handle 6 is held by an automatic machine called OHT (overhead hoist transfer), so that the storage container is transported in the process. A rim portion 7 for fitting a lid is formed in a wide and integral manner in front of the opening of the container body 1, and locking grooves 8 for the lid are respectively formed in the upper and lower sides of the rim portion. On both outer sides of the container body 1, grip handles 9 for manual conveyance are detachably mounted.
[0018]
As shown in FIG. 1, the lid body 10 is formed in a horizontally-long, substantially rectangular shape with four rounded corners, and a locking mechanism (not shown) is provided inside the lid 10. The locking claw protrudes from the protrusion / recess hole 11 of the peripheral wall, fits into the locking groove 8 of the rim portion 7, and functions to close the lid 10 fitted to the container body 1. On the back surface of the lid 10, a step portion that fits with the rim portion 7 of the container body 1 is formed so as to protrude. The step portion horizontally supports a plurality of substrates W in a vertical direction at a predetermined pitch. The front retainer 12 is mounted. An endless seal gasket 13 is fitted into the step portion of the lid 10, and the seal gasket 13 ensures the sealing performance when the lid is closed.
[0019]
In addition, the container main body 1, the bottom plate 2, the handle 6, the pair of grip handles 9, and the lid 10 are molded using, for example, a thermoplastic resin made of polycarbonate, polyetherimide, polyetheretherketone, cyclic olefin resin, or the like. Is done.
[0020]
As shown in an exploded perspective view of FIG. 3 showing a cross section of a center line portion of each component, each valve body 20 is fixedly inserted into a rib 5 of a through hole 4 from below and allows a gas to flow therethrough, A holding cylinder 25 which is inserted into the through-hole 4 from above via a sealing O-ring 30 and is removably screwed into the fixed cylinder 21 from above, and the reverse of the elasticity built in the fixed cylinder 21 and the holding cylinder 25. A stop valve 31, a gas-permeable and air-permeable elastically deformable member 33 that presses and deforms the check valve 31 from above, an inner lid tube 34 that contacts the elastically deformable member 33, A disk-shaped filter 36 is interposed between the holding cylinder 25 and the filter 36 (for this point, see the cross section taken along the line II in FIG. 1), and the check valve 31 and the elastic deformation member 33 are elastically inverted. A stop valve is formed, and gas flowing from the fixed cylinder 21 to the holding cylinder 25 is Functions to Gosuru.
[0021]
The fixed cylinder 21 is basically formed in a cylindrical shape with a bottom using a predetermined resin made of, for example, polycarbonate, polyetherimide, polyetheretherketone, and the like. Is formed by threading. At the center of the bottom of the fixed cylinder 21, a round vent 23 for gas flow is perforated, and a ring-shaped flange 24 extending radially outward is provided on the outer peripheral surface of the bottom. It comes into contact with the peripheral edge of the opening of the rib 5 (see FIGS. 4 to 7).
[0022]
The holding cylinder 25 is basically formed in a cylindrical shape using a predetermined resin made of, for example, polycarbonate, polyether imide, polyether ether ketone, and the like, and has a plurality of ventilation holes for gas flow at an open upper portion. Are partitioned in a grid or radial pattern, and a step 27 is formed on the back surface of the partition rib 26 in accordance with the shape of the filter 36. A ring-shaped flange 28 extending radially outward is provided around the upper outer peripheral surface of the holding cylinder 25, and the flange 28 contacts the opening peripheral portion of the through hole 4 (see FIGS. 4 to 7).
[0023]
A screw groove 29 for attachment is formed on the outer peripheral surface of the holding cylinder 25 by screwing, and the screw groove 29 is screwed with the screw groove 22 of the fixed cylinder 21. The O-ring 30 interposed between the outer peripheral surface of the holding cylinder 25 and the peripheral surface of the through hole 4 effectively prevents invasion of outside air into the container body 1 and leakage of gas from the container body 1.
[0024]
The check valve 31, which is a part of the elastic check valve, is formed in a substantially H-shaped cross section by using a predetermined elastomer or the like. To form a slight gap 32 that is a gas flow path between the holding cylinder 25 and the inner peripheral surface. Examples of the material of the check valve 31 having flexibility include rubber such as melamine rubber, isoprene rubber, butyl rubber, silicone rubber, and fluorine rubber, polyester-based thermoplastic elastomer, and various thermoplastic elastomers. On the opposing surface of the check valve 31 opposing the fixed cylinder 21, an uneven portion for forming a seal is appropriately formed.
[0025]
When the valve body 20 is used as the gas introduction valve 20A, the check valve 31 covers the ventilation port 23 of the fixed cylinder 21 (see FIGS. 3, 4, and 5). Is used as the gas exhaust valve 20B, it is arranged upside down with respect to the elastically deformable member 33 and is mounted and supported on the elastically deformable member 33 (see FIGS. 6 and 7).
[0026]
The elastic deformation member 33, which is the remaining part of the elastic check valve, is formed in a ring shape with open cells communicating the inside and outside of the container body 1 using a predetermined foam material or the like, and is fitted into the holding cylinder 25. Thus, a small gap 32 </ b> A, which is a gas flow path, is formed between the check valve 31 and the outer peripheral surface of the holding cylinder 25. The endless elastically deformable member 33 is made of, for example, melamine rubber, silicone rubber, urethane rubber, fluorine rubber, polyethylene, or an elastic or breathable nonwoven fabric, and is compressed and deformed to operate the check valve 31. In addition, the compression distortion is set low.
The elastic deformation member 33 is not limited to a ring shape as long as air permeability can be ensured, and may be another shape such as a cylindrical shape.
[0027]
When the valve body 20 is used as the gas introduction valve 20A, the elastic deformation member 33 is mounted on the outer periphery of the check valve 31 (see FIGS. 3, 4, and 5). When 20 is used as the gas exhaust valve 20B, it is arranged upside down with the check valve 31 and is fitted and mounted on the inner bottom surface of the fixed cylinder 21 (see FIGS. 6 and 7).
[0028]
The inner lid cylinder 34 is basically formed in a cylindrical shape using a predetermined resin made of, for example, polycarbonate, polyetherimide, polyetheretherketone, or the like. Partition ribs 35 for partitioning the mouth are arranged in a lattice or radial manner, and come into contact with the elastically deformable member 33 while being incorporated between the fixed cylinder 21 and the holding cylinder 25. The inner cover cylinder 34 has a concave / convex engagement mechanism inside the holding cylinder 25 (for example, a groove formed on the inner peripheral surface of the holding cylinder 25 or the outer peripheral surface of the inner lid cylinder 34, the outer peripheral surface of the inner lid cylinder 34 or An O-ring 30 </ b> A that is supported via a projection formed on the inner peripheral surface of the holding cylinder 25 and fits in the groove, etc., and that secures a seal with the upper inside of the holding cylinder 25 is interposed.
[0029]
When the valve body 20 is used as the gas introduction valve 20A, the inner lid cylinder 34 contacts a part of the elastically deformable member 33, and when the valve body 20 is used as the gas exhaust valve 20B. The lower part which is held and held by the holding cylinder 25 so as to be in contact with the outer periphery of the check valve 31 is closed (see FIGS. 6 and 7).
[0030]
The filter 36 is composed of a molecular filtration filter made of ethylene tetrafluoride, polyester fiber, porous Teflon (registered trademark) membrane, glass fiber, and the like, and a chemical filter in which a filter medium such as activated carbon fiber carries a chemical adsorbent. Is inserted between the step 27 of the holding cylinder 25 and the partition rib 35 of the inner lid cylinder 34 to cover the vent of the inner lid cylinder 34. A protective member made of polypropylene, polyethylene, or the like is appropriately laminated on the front and back surfaces of the filter 36.
[0031]
When a plurality of filters 36 are used, the same type may be used, but different types may be used. For example, if a molecular filtration filter and a chemical filter are combined, it is possible to prevent not only particle contamination of the substrate W but also organic gas contamination.
[0032]
Further, when assembling the valve body 20, screw connection may be adopted, but other methods may be adopted or used together. For example, a concave portion may be formed in one of the fixed tube 21 and the holding tube 25, and a convex portion may be formed in the other, and these may be fitted and fixed. Similarly, a concave portion may be formed on one of the holding cylinder 25 and the inner lid cylinder 34 and a convex portion may be formed on the other, and these may be fitted together.
[0033]
In the above configuration, when the valve body 20 is used as the gas introduction valve 20 </ b> A, the elastically deformable member 33 held by the inner lid cylinder 34 is substantially deformed by an elastic force when a gas such as an inert gas or dry air is not supplied from the outside. The flat check valve 31 is pressed against the inner bottom surface of the fixed cylinder 21 to close the ventilation port 23, so that a sealed state is formed. Therefore, it is possible to effectively prevent gas or the like from flowing into the inside from the outside of the storage container or leaking out of the gas from the inside of the storage container to the outside (see FIG. 4).
[0034]
On the other hand, when a gas (indicated by an arrow in FIG. 5) composed of an inert gas or dry air is supplied from the introduction nozzle 70 of the processing apparatus to the valve body 20, the check valve 31 is moved in the holding cylinder direction by the pressure of the gas to be ejected. To deform the elastically deformable member 33 in the same direction, and the deformed check valve 31 forms a gap between the check valve 31 and the vent 23 of the fixed cylinder 21 to release the sealed state. As a result, the gas passes from the outside of the storage container through the gap between the ventilation port 23 of the fixed cylinder 21 and the check valve 31, the gap 32, the elastically deformable member 33, the middle lid cylinder 34, the filter 36, and the holding cylinder 25 sequentially. And flows into the storage container (see FIG. 5).
[0035]
When the valve body 20 is used as the gas exhaust valve 20B, the elastic deformation member 33 presses the check valve 31 against the lower part of the opening of the inner cover cylinder 34 by an elastic force to form a sealed state. Therefore, it is possible to effectively prevent gas or the like from flowing into the inside from the outside of the storage container or from leaking out of the inside of the storage container to the outside (see FIG. 6).
[0036]
On the other hand, when the gas is filled in the storage container (see the arrow in FIG. 7), the check valve 31 is pressed in the direction of the fixed cylinder by the pressure of the filled gas, and the elastically deformable member 33 is compressed and deformed in the same direction. Then, the deformed check valve 31 forms a gap between the check valve 31 and the inner cover cylinder 34 to release the sealed state. Thereby, gas flows from the inside of the storage container to the holding cylinder 25, the filter 36, the inner lid cylinder 34, the gap between the check valve 31 and the inner lid cylinder 34, the gap 32, the elastic deformation member 33, and the fixed cylinder 21. It flows out to the exhaust nozzle 71 of the external processing device via the port 23 sequentially (see FIG. 7). At this time, if the pressure of the exhaust nozzle 71 is reduced, a gas composed of an inert gas or the like can be efficiently purged.
[0037]
According to the above configuration, since the valve body 20 with the filter 36 is set in the container main body 1, the gas in the storage container does not easily flow out to the outside, whereby the effect of gas purging can be maintained for a long time. it can. Further, since the inside and outside of the storage container are indirectly communicated with each other via the valve body 20, it is possible to almost completely prevent a trace amount of organic substances existing in the clean room from flowing from the outside to the inside of the storage container. . In addition, if the fixing tube 21 and the flanges 24 and 28 of the holding tube 25 screwed to the through holes 4 and the ribs 5 thereof are brought into contact with each other, a strong locking structure that does not fall off can be obtained. In addition, it is possible to easily solve the problem that the locking structure for mounting the valve is complicated, and to simplify the mold for the container body.
[0038]
Further, since the valve body 20 is made of a synthetic resin, and no metal parts such as springs are incorporated in the valve body 20, a small amount of metal ions oozing out of the metal parts during storage and cleaning of the storage container are stored in the storage container. There is no risk of invading the inside of the substrate and contaminating the substrate W. Further, since the configuration of the valve body 20 is very simple, easiness of assembly and cost reduction can be greatly expected.
[0039]
Next, FIG. 8 shows a second embodiment of the present invention. In this case, a plurality of nozzle towers 50 communicating with the valve body 20 are provided upright inside the container body 1. .
The nozzle tower 50 is basically formed in a hollow cylindrical shape using a predetermined resin made of, for example, polycarbonate, polyetherimide, polyetheretherketone, cycloolefin polymer (COP), or the like. A plurality of ejection ports 51 are perforated in the up and down direction at predetermined intervals on the peripheral wall opposite to the above, and gas (see arrows) is supplied from the plurality of ejection ports 51 toward the substrate. The areas of the plurality of outlets 51 may all be the same area, or may gradually expand as going upward from below. The other parts are the same as those in the above-described embodiment, and a description thereof will be omitted.
[0040]
In this embodiment, the same operation and effect as those of the above embodiment can be expected. Further, since the gas flows from the ejection port 51 toward the substrate, the stagnant portion in the container body 1 can be eliminated when the inert gas is introduced. Clearly, the purge time can be significantly reduced.
[0041]
Next, FIG. 9 shows a third embodiment of the present invention. In this case, a plurality of deflecting plates 60 located above the valve body 20 are provided upright in the container body 1. ing.
The deflecting plate 60 is basically formed in a substantially L-shaped cross section using a predetermined resin such as polycarbonate, polyetherimide, polyetheretherketone, or cycloolefin polymer (COP). (See the arrow) in the direction of the substrate, and the gas in the storage container to the valve body 20. The other parts are the same as those in the above-described embodiment, and a description thereof will be omitted.
[0042]
In this embodiment, the same operation and effect as those of the above embodiment can be expected. Further, since the deflection plate 60 controls the gas flow, the gas directly collides with the substrate W stored in the lowermost stage, and the particles are sprayed. Obviously, it is possible to effectively prevent or prevent the particles from rolling up.
[0043]
10 and 11 show a fourth embodiment of the present invention. In this case, an elastic check valve of each valve body 20 is formed to have a substantially U-shaped cross section and at least a holding cylinder 25. An elastic check valve 31 inserted through a gap 32 which is a flow path therein, and an elastic bellows 37 which is inserted into the bottomed cylindrical check valve 31 and deforms the check valve 31. The elastically deformable member 33 is integrally formed, and a part of the plurality of valve bodies 20 is used as the gas introduction valve 20A and the remaining part is used as the gas exhaust valve 20B.
[0044]
The bellows body 37 is formed in a hollow, substantially cylindrical shape having flexibility and elasticity, and a plurality of ventilation holes 38 for ventilation are formed in the peripheral wall at predetermined intervals. It is laminated inside the check valve 31 located between the lower peripheral wall of the cylinder 34. The other parts are the same as those in the above-described embodiment, and a description thereof will be omitted.
[0045]
In the above configuration, when the valve body 20 is used as the gas introduction valve 20A, when the gas is not supplied from the outside, the bellows body 37 presses the lower check valve 31 against the inner bottom surface of the fixed cylinder 21 to close the ventilation port 23. Therefore, a sealed state is formed. Therefore, it is possible to effectively prevent gas or the like from flowing into the inside of the storage container from the outside, or to leak gas from the inside of the storage container to the outside (see FIG. 10).
On the other hand, when the valve body 20 is used as the gas exhaust valve 20B, the lower bellows body 37 presses the upper check valve 31 against the lower portion of the opening of the inner lid tube 34 to form a sealed state. Therefore, it is possible to effectively prevent gas or the like from flowing into the inside from the outside of the storage container, or leakage of gas from the inside of the storage container to the outside (see FIG. 11).
[0046]
In this embodiment, the same operation and effect as those of the above embodiment can be expected. Further, the elastic check valve is not formed of a plurality of separate parts, but a check valve 31 that allows gas to flow at the time of deformation is provided. Since it is integrally formed with the bellows body 37 having the above, the number of parts can be expected to be reduced, thereby simplifying the structure, improving the assemblability, and facilitating the production management.
[0047]
Next, FIGS. 12 and 13 show a fifth embodiment of the present invention. In this case, the elastic check valves of the respective valve bodies 20 are connected to the gaps 32 which are flow paths in the holding cylinder 25. An elastic check member 31 is inserted into the check valve 31 and an elastic skirt body 40 that is integrated with the check valve 31 through a gap to deform the check valve 31 to omit the elastic deformation member 33, A part of the plurality of valve bodies 20 is used as a gas introduction valve 20A, and the remaining part is used as a gas exhaust valve 20B.
[0048]
Examples of the material of the check valve 31 and the skirt body 40 include rubbers such as melamine rubber, isoprene rubber, butyl rubber, silicone rubber, and fluorine rubber, polyester-based thermoplastic elastomers, and various thermoplastic elastomers. The check valve 31 is provided with a plurality of ventilation openings 38A at predetermined intervals. The skirt body 40 is formed in a substantially disk shape or a cylindrical shape having a substantially concave cross section, and a thin skirt piece 41 having a spring property is extended from the periphery thereof in a bendable manner. The piece 41 is integrally connected to the peripheral surface of the check valve 31. The other parts are the same as those in the above-described embodiment, and a description thereof will be omitted.
[0049]
In the above configuration, when the valve body 20 is used as the gas introduction valve 20A, when the gas is not supplied from the outside, the upper skirt body 40 connects the lower check valve 31 to the inner bottom surface of the fixed cylinder 21 via the skirt piece 41. Since the air vent 23 is closed by pressing, a sealed state is formed. Therefore, it is possible to effectively prevent gas or the like from flowing into the inside of the storage container from inside, or leaking gas from the inside of the storage container to the outside (see FIG. 13).
[0050]
On the other hand, when the valve body 20 is used as the gas exhaust valve 20B, the lower skirt body 40 presses the upper check valve 31 through the skirt piece 41 against the lower portion of the opening of the middle lid tube 34 to form a sealed state. . Therefore, it is possible to effectively prevent gas or the like from flowing into the inside from the outside of the storage container, or to leak gas from the inside of the storage container to the outside (see FIG. 12).
[0051]
In this embodiment, the same operation and effect as those of the above embodiment can be expected. Further, since the elastic check valve is formed integrally with the check valve 31 that allows gas to flow at the time of deformation and the skirt body 40 that has a spring function. Therefore, it is possible to reduce the number of parts, thereby simplifying the structure, improving the assemblability, and facilitating the production management.
[0052]
In the above-described embodiment, the locking groove 8 is formed on the inner peripheral surface of the rim portion of the container body 1, but this may be omitted. In this case, the locking mechanism of the lid 10 that operates based on an external operation can be omitted. Further, it is also possible to provide a projection for opening and closing a valve, a suction hand, and the like in a processing apparatus for supplying and discharging gas.
[0053]
【The invention's effect】
As described above, according to the present invention, the effect of purging can be maintained for a relatively long time, and there is an effect that organic substances and the like can be effectively suppressed or prevented from entering the inside from the outside of the container. . Further, the mounting structure of the valve can be simplified, and the metal parts of the valve can be omitted.
[Brief description of the drawings]
FIG. 1 is an exploded perspective view showing an embodiment of a storage container according to the present invention.
FIG. 2 is a bottom view showing a container main body in the embodiment of the storage container according to the present invention.
FIG. 3 is an exploded perspective view showing a valve body in the embodiment of the storage container according to the present invention.
FIG. 4 is an explanatory sectional view showing a gas introduction valve in the embodiment of the storage container according to the present invention.
5 is an explanatory sectional view showing a state in which gas is supplied to the gas introduction valve of FIG. 4;
FIG. 6 is a sectional explanatory view showing a gas exhaust valve in the embodiment of the storage container according to the present invention.
FIG. 7 is an explanatory sectional view showing a state in which gas flows out of the gas exhaust valve of FIG. 6 to the outside;
FIG. 8 is a schematic sectional explanatory view showing a second embodiment of the storage container according to the present invention.
FIG. 9 is a schematic sectional explanatory view showing a third embodiment of the storage container according to the present invention.
FIG. 10 is an explanatory cross-sectional view showing a state in which a valve body in a fourth embodiment of the storage container according to the present invention is used as a gas introduction valve.
FIG. 11 is an explanatory sectional view showing a state in which a valve body in a fourth embodiment of the storage container according to the present invention is used as a gas exhaust valve.
FIG. 12 is an explanatory sectional view showing a state in which a valve body in a fifth embodiment of the storage container according to the present invention is used as a gas exhaust valve.
FIG. 13 is an explanatory sectional view showing a state in which a valve body in a fifth embodiment of the storage container according to the present invention is used as a gas introduction valve.
[Explanation of symbols]
1 container body
4 Through hole
5 ribs
10 Lid
20 Valve body
20A gas introduction valve
20B Gas exhaust valve
21 fixed cylinder
22 screw groove
23 Vent
24 flange
25 Holding tube
28 flange
29 screw groove
31 Check valve (elastic check valve)
32 gap
32A gap
33 elastic deformation member (elastic check valve)
34 Middle lid tube
36 Filter
37 Bellows (elastic check valve)
38 Distribution outlet
38A Distribution port
40 Skirt body (elastic check valve)
41 Skirt Piece
W substrate

Claims (5)

A container body; a lid body for opening and closing the opening of the container body; and a valve body attached to at least one of the through holes of the container body and the lid body for controlling fluid flow to the container body. A storage container,
A valve body, a fixed cylinder fitted in the through-hole to allow fluid to flow, a holding cylinder fitted in the through-hole and combined with the fixed cylinder, and an elastic non-return built in the fixed cylinder and the holding cylinder via a gap. A valve and an inner lid tube that comes into contact with the elastic check valve,
A storage container, wherein the flow of fluid is regulated when the elastic check valve is not compressed, and the fluid is circulated when the elastic check valve is compressed. A rib is formed on the periphery of the through hole and extended to the outside, the fixed cylinder and the holding cylinder are screwed together, a flange is formed on the fixed cylinder to contact the periphery of the rib, and the periphery of the through hole is formed on the holding cylinder. The storage container according to claim 1, wherein a flange is formed in contact with the holding cylinder, and a filter is provided between the holding cylinder and the inner lid cylinder. The elastic check valve is formed of at least an elastic check valve built in the holding cylinder via a gap, and an elastic deformation member built in the holding cylinder and deforming the check valve, and In addition, the inner lid cylinder is brought into contact with one of the check valve and the elastically deformable member to restrict the flow of the fluid when the check valve is not compressed, and to allow the fluid to flow when the check valve is compressed. The storage container according to claim 1 or 2, wherein The elastic check valve is formed of at least an elastic check valve built in the holding cylinder via a gap, and a telescopic bellows body built in the check valve and deforming the check valve. 3. The storage container according to claim 1, wherein a flow port is provided in a peripheral wall of the body to restrict fluid flow when the check valve is not compressed and fluid flows when the check valve is compressed. The elastic check valve is formed of at least an elastic check valve built in the holding cylinder via a gap, and an elastic skirt body that is integrated with the check valve and deforms the check valve. A flow opening is provided in the stop valve, and a thin skirt piece is extended from the peripheral edge of the skirt body in a bendable manner and provided on the peripheral surface of the check valve. When the check valve is not compressed, the flow of fluid is regulated. 3. The storage container according to claim 1, wherein a fluid is circulated during compression.

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