JP4895222B2 - Substrate storage container - Google Patents

Description

  The present invention is a filter or a valve body provided in a through hole that communicates the inside and the outside of a substrate storage container for storing a substrate such as a semiconductor wafer or mask glass. ) In the rotational direction of the housing member.

A substrate storage container that stores a substrate and is sealed by a lid (see, for example, Patent Document 1) transports the substrate between factories, transports it in a process of processing or processing the substrate, and stores it. Has been used to. Such a substrate storage container is provided with a communication portion that communicates the inside and the outside, and the communication portion is provided with, for example, a filter to perform vacuum suction when the lid is opened from the sealed substrate storage container. It was preventing. In addition, an open / close valve for replacing the gas inside the substrate storage container with dry air or inert gas may be provided in the communication part. In this case, oxidation of the substrate surface and excessive polymerization of the resist are prevented. It helps to maintain the quality of the surface of the substrate to be stored.
Such a substrate storage container is cleaned after a certain period of use and used repeatedly.

In this case, the filter and the open / close valve include a ventilation member in an internal space formed by a fixed cylinder and a holding cylinder (hereinafter, both may be referred to as a housing member) that are coupled to each other by a screw groove. And stored and held in the communication portion.
However, the substrate storage container is subject to acceleration and vibration during high-speed conveyance in the process, when it is lowered to the LP device from the height of the ceiling conveyance, and when it is transported between factories, etc., and is periodically cleaned. Since it is dried, it will receive a heat history regularly. Due to these external factors, the locking part of the housing member provided in the communication part loosens in the rotation direction, impairs the sealing property of the substrate storage container, contaminates the substrate stored inside, or is severe There was also a risk that the housing parts would fall off.

JP 2004-146676 A

  In the present invention, the housing member housed and held in the through-hole (communication portion) of the substrate storage container is also subjected to acceleration and vibration during transfer and storage, and heat history during cleaning and drying. It is an object of the present invention to provide a substrate storage container having a structure in which a threaded portion does not loosen.

The present invention has been made to solve the above-described problems, and the substrate storage container of the present invention has a container body having an opening at one end and storing the substrate, and a lid for closing the opening. The substrate storage container 1 is provided with a through-hole that communicates the inside and the outside of the container body, and the through-hole includes a housing member that stores and holds a ventilation member including a filter. The housing member is composed of a holding cylinder and a fixed cylinder having screw grooves that engage with each other, and is rotated and attached to the substrate storage container, and the holding cylinder is attached to one end portion. It has a hollow cylindrical shape with a lattice-shaped window and a ring-shaped flange, with an opening formed at the other end, the fixed tube has an opening at one end, and a ring-shaped flange at the other end Penetrating hole formed in the center of the cylinder bottom And a cylindrical shape having the door, on the inside of the fixed tube and the holding tube, the ventilation member provided with a filter is locked, the means for preventing the housing member from loosening in the rotational direction The loosening prevention means is provided with a plurality of loosening prevention protrusions provided at intervals on the opposing contact surfaces of the holding cylinder and the fixed cylinder, and the loosening prevention protrusions are loosened in the tightening direction. A sloping surface is formed, and a second sloping surface having a larger angle than the first sloping surface is formed in the opposite direction, and the slack preventing projections mesh with each other to exert a slack preventing function. The angle of the first inclined surface of the holding cylinder facing the tightening direction and the angle of the first inclined surface of the fixed cylinder are different from each other, and are not in surface contact .

The vent member is preferably a one-way valve .

  The present invention effectively prevents loosening of the housing member attached to the communicating portion of the substrate storage container. By providing the loosening prevention means, the housing member does not loosen during transportation or cleaning and drying. It is possible to provide a substrate storage container that can be safely transported and stored without contaminating the substrate.

In the substrate storage container of the present invention, the cassette is stored in the container main body, the upper opening is closed with a lid, or the cassette is placed on a door provided at the bottom, and the dome-shaped main body is covered and sealed. A substrate support groove that can horizontally support the substrate is formed inside the main assembly body, and the front opening may be closed by a door, or other forms.
The through hole (vent) has a filter for eliminating the pressure difference between the inside and outside of the substrate storage container, and an open / close valve that replaces the gas inside the substrate storage space with inert gas or dry air. ,It is attached. Such a through-hole (ventilation part) is provided in the container main body and / or a cover body in 1 or multiple places.
The substrate stored in the substrate storage container may be one or a plurality of substrates, and is usually formed so as to be able to store 25 or 26 disk-shaped substrates.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
As shown in FIGS. 1 to 2, the substrate storage container 1 according to an embodiment of the present invention has an opening at one end, and one or a plurality of substrates W (not shown) in a horizontal state in a vertical direction. The container body 2 is stored in an aligned manner, and the lid 3 is configured to detachably close the opening of the container body 2. In the illustrated example, the flow of gas to the container body 2 is controlled at the bottom of the container body 2. A pair of housing members 4 are arranged. The housing member 4 houses an on-off valve valve. The one-way valve 5 (FIG. 3) for introducing gas into the interior of the container body 2 is provided in one of the plurality of on-off valve valves, and the one-way valve 6 (for exhausting the gas in the container body 2) is disposed on the other. FIG. 7) is provided.
At this time, the housing member 4 provided with the one-way valve 5 for gas introduction and the housing member 4 provided with the one-way valve 6 for gas discharge have a region in which the substrate W to be stored is projected onto the bottom surface of the container body 2. It is preferable to provide it outside.

The container body 2 is formed as a front open box type having one end opened as shown in FIG. 1 using a polycarbonate resin to which carbon fiber, a conductive polymer, or the like is added to provide conductivity. Although not shown in the drawings, support members that support the peripheral edge of the side of the substrate W are provided on the opposing side walls inside the container body 2 at regular intervals in the vertical direction.
Further, a bottom plate 7 formed in a substantially trapezoidal shape is provided at the bottom of the container body 2 and includes a member for detecting the type of the substrate storage container from the outside and positioning and fixing when mounted on the processing apparatus. It is mounted via a member. As usual, the bottom plate 7 is formed with a plurality of through holes for attaching a member for identification, a positioning member 8, and a clamp hole for fixing the container body 2.

  The outer surface of the substantially square top plate forming the ceiling of the container body 2 is not described in detail, but, as usual, a robotic handle comprising a column extending vertically with the top plate and a mounting portion at the tip thereof. The robotic handle is held by an automatic ceiling conveyor called OHT (overhead hoist transfer) and is used for conveyance within and between processes. Further, a rim portion (not shown) for fitting the lid body 3 is integrally formed on the front surface of the opening of the container body 2, and a locking groove for locking the lid body 3 is formed on the upper and lower surfaces of the inner surface of the rim portion. A plurality of are formed.

As shown in FIG. 1, the lid 3 is formed in a substantially rectangular shape with four rounded corners, and a locking mechanism (not shown) is arranged on the inner side. It protrudes from an intrusion hole provided in the peripheral wall of the lid body 3 and is fitted into a locking groove of the rim portion, and the container body 2 and the lid body 3 are fitted to close the opening. An endless gasket member that forms a seal with the container body 2 is attached to the peripheral wall of the lid 3. In addition, a front retainer is mounted on the back surface of the lid 3 so as to contact and support the substrates W accommodated in the container main body 2 by aligning them horizontally in the vertical direction at a predetermined pitch.
The container body 2, the bottom plate 7, the robotic handle, and the lid 3 are made of a thermoplastic resin such as polycarbonate / polyetheretherketone, polyetherimide, cyclic olefin resin (COP), or these thermoplastic resins. It is formed from what gave electroconductivity.

  As shown in FIG. 3 as an exploded perspective view, the housing member 4 is inserted into the through-hole 10 of the container body 2 and the peripheral rim 11 provided at the periphery thereof from the lower side to allow the gas to flow, and the through-hole 10. Between the holding cylinder 14 and the holding cylinder 14. The holding cylinder 14 is inserted from above through a sealing member 13 for sealing and is detachably screwed to the fixed cylinder 12 from above, and is attached to the inner peripheral wall of the holding cylinder 14. An inner lid cylinder 16 that holds the filter 15, a one-way valve 5 that comes into contact with one end of an opening of the inner lid cylinder 16 that is built in between the fixed cylinder 12 and the holding cylinder 14, And an elastic member 17 that is pressed and deformed. The one-way valve 5 controls the gas to flow in one direction from the fixed cylinder 12 to the holding cylinder 14.

  The fixed cylinder 12 is basically formed in a bottomed cylindrical shape having an opening at one end, for example, using a thermoplastic resin such as polycarbonate, polyimide, polyetheretherketone and the like, and is attached to the inner peripheral surface. A screw groove 18 (FIG. 4) is formed by screwing. An opening surrounded by a cylinder is formed at one end of the fixed cylinder 12, and a first loosening prevention projection 19 serving as a loosening prevention means is equally divided into eight parts in the circumferential direction at the tip of the cylinder. Has been provided. In addition, a round air vent 20 (FIG. 3) for gas circulation is formed at the center of the bottom which is the other end, and a ring-shaped flange 21 extending radially outward is provided around the outer peripheral surface of the bottom. The peripheral edge of the peripheral rim 11 is brought into contact with the peripheral edge of the opening. The flange 21 is formed with four protrusions 22 protruding from the flange surface, and is used for slip prevention when fastening the fixed cylinder 12, positioning when docking with the purge device, and the like.

The first loosening prevention projection 19 provided on the fixed cylinder 12 is formed as a projection protruding from the end of the cylinder, and the slope of the projection in the direction of tightening the screw (18) formed on the inner periphery of the cylinder is gentle. A steep slope 24 that is formed in an inclined surface 23 (the angle between the inclined surface of the protrusion and the horizontal plane is 30 ° to 60 °) and the other direction has an inclination angle larger than this (approximately 90 °). As shown, it is asymmetrical.
The holding cylinder 14 is basically formed in a cylindrical shape having an opening at one end (bottom side) using, for example, a thermoplastic resin such as polycarbonate, polyethylene terimide, polyether ether ketone, and the like. On the other end (upper surface side), there are provided vent holes 26 in which partitioning ribs 25 for gas flow (FIG. 5) are arranged in a grid pattern or a radial pattern. On the back surface of the partition rib 25, a storage portion for storing the filter 15 (FIG. 3) is formed.

Further, a ring-shaped flange 27 extending radially outward is provided around the upper outer peripheral surface of the holding cylinder 14, and the inner surface of the flange 27 is in contact with the opening peripheral edge of the through hole 10. In addition, four protrusions 28 (FIG. 5) projecting from the flange surface are formed, which can be used for preventing reverse rotation during tightening.
A screw groove 29 for attachment is formed on the outer peripheral surface of the holding cylinder 14, and the screw groove 29 is screwed with the screw groove 18 of the fixed cylinder 12. Here, the end portion where the screw groove 29 is formed is formed with one or more second loosening prevention protrusions 30 (FIGS. 5 and 6) protruding in the direction in which the screw groove 29 is formed. When the fixed cylinder 12 is tightened, the first slack prevention projection 19 formed at one end of the fixed cylinder 12 is loosely inclined on the inclined surface 23 and on the opposite side, the inclined surface 31 (30 ° different from this). ~ 60 °) is formed. Further, the sealing member 33 (FIG. 3) interposed between the outer peripheral surface of the holding cylinder 14 and the peripheral surface of the through hole 10 effectively prevents intrusion of outside air into the container main body 2 and gas leakage from the container main body 2. To prevent.

The one-way valve 5 on the introduction side is formed in a substantially circular plane with a U-shaped cross section using a thermoplastic resin, is fitted and mounted on the inner bottom surface of the fixed cylinder 12, covers the round vent hole 20, and holds the holding cylinder A slight gap serving as a gas flow path is formed between the 14 inner peripheral surfaces. At the central portion of the one-way valve 5, there are a convex portion 34 as an engagement portion for preventing displacement and a pair of circumferential ribs 35 (an example of the one-way valve 6 is shown in FIG. 7). Is formed.
Examples of the material of the one-way valve 5 include various thermoplastic elastomer materials such as polyethylene, polypropylene, polycarbonate, cyclic polyolefin resin, and thermoplastic polyester elastomer.
Sealing members 13 and 36 that can be suppressed by these are mounted on a portion of the one-way valve 5 that comes into contact with the opening peripheral edge of the fixed cylinder 12 or the opening end of the middle cylinder lid 16. The seal members 13, 33, and 36 are made of a material such as fluorine rubber, NBR rubber, urethane rubber, EPDM rubber, or silicone rubber. Further, the surface of the core portion made of these materials may be coated with fluorosilicone or may be coated.

When the one-way valve 5 is used as a gas introduction valve, the vent hole 20 of the fixed cylinder 12 is sealed by an elastic member 17 disposed between the holding cylinder 14 and one of the one-way valves 5. The other sealing surface of the one-way valve 5 is assembled and used so that it is pressed against the fixed cylinder 12.
In the gas introduction valve (one-way valve 5), the elastic member is compressed by the pressure of the supplied inert gas, whereby a flow path is formed inside the valve, and the inert gas is supplied into the substrate storage container. Supply.
When the exhaust-side one-way valve 6 is used as a gas exhaust valve, as shown in FIG. 7, the elastic member 17 and the one-way valve 5 shown in FIG. 12 and the elastic member 17 provided in the other image of the one-way valve 5 are pressed so that one sealing surface of the one-way valve 6 is in contact with the opening end of the inner lid cylinder 16. The exhaust valve can compress the elastic member 17 by supplying an inert gas to the inside of the substrate storage container to increase the internal pressure or applying a negative pressure from the outside of the exhaust valve. Is formed, and the gas inside the substrate storage container can be exhausted.

In general, half of the two or four through-holes 10 provided in the container body 2 are provided with a housing member 4 having a one-way valve 5 for introducing gas, and the remaining half of the through-holes 10 are provided with gas. A housing member 4 having a one-way valve 6 for exhaust is attached.
The elastic member 17 can be a metal spring such as SUS or a resin spring. The elastic member 17 can also be a leaf spring formed from various rubbers, thermoplastic elastomer resins, or the like. In addition, a support made of a synthetic resin foam having elasticity, various rubbers, or a thermoplastic elastomer can be used. When using metal parts here, it is preferable to coat the surface with resin.

  The inner cover cylinder 16 is basically formed in a cylindrical shape having an opening at one end (bottom side) using a thermoplastic resin such as polycarbonate, polyether imide, polyether ether ketone, or the like, and is opposed to the opening. On the other end (upper surface side), partition ribs 37 (FIG. 5) partitioning a plurality of vent holes 26 (FIG. 3) for gas flow are arranged in a lattice shape or a radial shape. The filter 15 is mounted and held in the. Further, the inner lid cylinder 16 includes a seal member 13 that secures a seal with the upper part of the holding cylinder 14. At the center of the inner surface of the inner lid cylinder 16, a pair of cylindrical ribs 35 are formed so as to protrude when the one-way valves 5, 6 are assembled or to prevent displacement when the one-way valves 5, 6 move. It is fitted with a convex part 34 which is an engaging part provided in the one-way valves 5 and 6.

  The filter 15 is selected from a porous membrane made of tetrafluoroethylene, polyester fiber, fluorine resin, etc., a molecular filtration filter made of glass fiber, etc., a chemical filter in which a chemical adsorbent is supported on a filter medium such as activated carbon fiber, etc. Thus, one or a plurality of these are inserted between the holding cylinder 14 and the partition rib 37 of the inner lid cylinder 16 to cover the air passage of the inner lid cylinder 16. The front and back surfaces of these filters 15 are made of polyethylene, polypropylene, or the like, and are formed with a lattice-shaped rib 39 formed so as to connect the cylindrical frame 38 of the holding cylinder 14 and the cylindrical shape of the inner lid cylinder 16. It is sandwiched by lattice-like ribs 41 (not visible behind the object in FIGS. 3 and 7) formed so as to connect the frames 40. A plurality of filters of the same type may be used. However, it is preferable to combine filters having different properties to prevent organic contamination such as particles.

Next, assembly of the housing member 4 described above and attachment to the container body 2 will be described.
First, the holding cylinder 14 is inserted into the through-hole 10 from the inside of the container body 2, and the recess 42 formed on the inner wall of the holding cylinder 14 and the latch formed on the outer peripheral wall of the inner lid cylinder 16 provided with a filter. The claw 9 is engaged to integrate the holding cylinder and the inner lid cylinder. Next, the elastic member 17, the one-way valve 5, or the one-way valve 6 is disposed in the fixed cylinder 12 in a predetermined order. When the screw groove 29 (FIG. 5) of the holding cylinder 14 exposed to the outside of the container is engaged with the screw groove 18 formed on the inner surface of the fixed cylinder 12 and rotated counterclockwise, the holding cylinder 14 A second loosening prevention projection 30 (FIG. 6) formed in the last screw groove 29 is formed by a first loosening prevention projection 19 formed at one end of the fixed cylinder 12 and the respective loose inclined surfaces 22 and 31. The flange 27 (FIG. 5) at one end of the holding cylinder 14 and the flange 21 (FIG. 4) at the other end of the fixed cylinder 12 are in contact with each other. Is in contact with the distal peripheral rim 11 (FIG. 3) of the cylindrical portion extending downward through the through hole 10 of the container body 2, so that these housing members 4 are fixed to the container body 2.

Moreover, in order to reduce the resistance at the time of fastening, by making the loose inclined surfaces 23 and 31 have different angles (for example, 45 ° and 30 °), it is possible to prevent the loosening prevention projections from coming into surface contact with each other, The load during tightening can be reduced. Moreover, it is preferable that the overlap amount of the tip of the protrusion when the first loosening prevention protrusion 19 and the second loosening prevention protrusion 30 are tightened is set to 0.2 mm to 1.0 mm.
When the overlap amount of the loosening prevention protrusion is 0.2 mm or more, the loosening prevention function can be sufficiently exerted, and when it is 1 mm or less, wear due to rubbing can be prevented and the tightening load can be reduced.
Providing a minute R (0.05 to 0.8 mm) at the tips of the first loosening prevention protrusion 19 and the second loosening prevention protrusion 30 reduces wear and reduces the load during tightening. Is more preferable.

In this embodiment of the present invention, the fixed cylinder 12 and the holding cylinder 14 constituting the housing member 4 are each provided with loosening prevention protrusions 19 and 30, which are fixed to the container body 2 by engaging them. When rotating in the slack direction, the inclined surfaces 24 and 32 having a steep angle between the protrusions come into contact with each other. Therefore, even if there is an impact due to vibration or thermal history, it cannot be easily overcome. It is possible to effectively prevent the housing member 4 from being loosened.
FIG. 7 shows an embodiment in which the direction of the one-way valve is reversed and the gas passage direction is reversed in the embodiment shown in FIG. 3, and detailed description thereof is omitted.

FIG. 8 shows another embodiment, which is a housing member 44 (fixed cylinder 45, holding member) provided with a filter 43 for eliminating the pressure difference of the substrate storage container and facilitating opening and closing of the lid. Cylinder 46). In this case, the housing member 44 does not include a one-way valve, and is held by being sandwiched between the fixed cylinder 45, the holding cylinder 46, the middle lid cylinder 47, and the holding cylinder 46 and the middle lid cylinder 47. The fixed cylinder 45 and the holding cylinder 46 have the same loosening prevention means as that of the above-described embodiment (details are omitted), and the same effect can be obtained.
Such a filter-containing housing member 44 can be used by being provided at a plurality of locations on the container body 2 and / or the lid of the substrate storage container.

9 to 11 show still another embodiment. As shown in FIG. 9, the housing member is provided with an opening end portion in which a vent is defined by a radial rib at one end, and at the other end. It is formed as a hollow substantially cylindrical cartridge 48 having an opening end portion and a locking claw 49 provided on the outer wall of the opening end portion, and inside the filter holding member as in the above-described embodiment And a valve member can be engaged with each other via a seal member, and can be built in from the one end to the other end so that the inside and outside of the substrate storage container can be vented. A plurality of locking claws 49 project in the radial direction on the outer wall of the other end of the cartridge, and as shown in FIGS. 10 and 11, a notch 52 in a through hole 54 provided in the bottom plate provided in the bottom of the container body. The cartridge 48 is sandwiched and held between the container body 2 and the bottom plate 53 by being inserted and rotated.
FIG. 11 is an explanatory cut elevation view showing a state in which the cartridge of this embodiment is inserted into the through hole. The cartridge 48 is inserted into the through hole 54 of the bottom plate 53, and the locking claw 49 is attached to the bottom plate 53. Passing through the notch 52 provided in the through hole 54, the housing is rotated in a predetermined direction so that the locking claw 49 is brought into contact with the upper surface of the bottom plate 53, and is further rotated to be formed on the upper surface of the bottom plate 53. It can be fixed beyond the loosening prevention projection 56. Further, a protrusion receiving groove (not shown) may be formed on the lower surface of the locking claw 49 and fixed by engaging them.
At least a pair of the loosening prevention protrusions 56 are arranged diagonally in the rotation direction of the cartridge. Further, further loosening prevention protrusions can be provided with a gap larger than the width of the locking claw so as to sandwich the locking claw of the cartridge that is rotated and locked from both sides in the radial direction.
Reference numeral 55 denotes a filter holding member.
An inclined surface can be formed on at least one of the surfaces where the locking claw 49 and the bottom plate 53 are in contact with each other.

It is a perspective view of the substrate storage container of the present invention. It is a bottom view of the substrate storage container of the embodiment of the present invention. It is an expansion | deployment perspective view showing the use condition according to the housing member of one embodiment of this invention. It is a perspective view showing the fixed cylinder of one embodiment of the present invention. It is a perspective view showing the holding | maintenance cylinder of one embodiment of this invention. It is a side view showing the state which meshed the fixed cylinder and holding cylinder of one embodiment of the present invention. It is an expansion | deployment perspective view showing the use condition according to the housing member of other embodiment of this invention. It is an expansion | deployment perspective view showing the housing member of another embodiment of this invention. In another embodiment of the present invention, it is an explanatory perspective view showing an example using a hollow cylindrical cartridge having an open end provided with a radial rib at one end as a housing member. FIG. 10 is an explanatory plan view showing an engagement relationship between a bottom plate and a cartridge in a loosening prevention mechanism according to still another embodiment of the present invention. FIG. 6 is an explanatory cut elevation view showing a loosening prevention mechanism in still another embodiment of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container body 3 Cover body 4 Housing member 5 One-way valve (introduction side)
6 One-way valve (exhaust side)
7 Bottom plate 8 Positioning member 9 Locking claw 10 Through hole 11 Peripheral rim 12 Fixed cylinder 13 Sealing member 14 Holding cylinder 15 Filter 16 Inner lid cylinder 17 Elastic member 18 Screw groove 19 (of the fixed cylinder 12) First loosening prevention protrusion 20 (Round) Vent 21 (Ring) Flange 22 Protrusion 23 Gradually Inclined Surface 24 Steep Inclined Surface 25 Partition Rib 26 (For Gas Flow) Vent 27 27 (Ring) Flange 28 (Flange 27 Surface Projection 29 (from holding cylinder 14) (attachment) screw groove 30 Second loosening prevention projection 31 Parallel inclined surface (gradual inclined surface)
32 Inclined surface with large angle (steep inclined surface)
33 Seal member 34 Protruding portion 35 (being an engaging portion for preventing misalignment) Circumferential rib 36 (being an engaging portion for preventing misalignment) Seal member 37 Partition rib 38 (for inner lid cylinder 16) Cylindrical frame 39 (for holding cylinder 14) Lattice-like ribs 40 (for connecting cylindrical frame 38) Cylindrical frame 41 (for inner lid cylinder 16) (for connecting cylindrical frame 40) ) Grid-like ribs 42 (formed on the inner wall of the holding cylinder 14) Recess 43 Filter 44 Housing member 45 Fixed cylinder 46 Holding cylinder 47 Inner lid cylinder 48 (as a housing member in still another embodiment) Cartridge 49 Stopper 50 Through-hole 51 Rib 52 Notch 53 Bottom plate 54 Through-hole 55 Filter holding member 56 Loosening prevention protrusion

Claims (2)

A substrate storage container having a container body having an opening at one end and storing a substrate and a lid for closing the opening, and having a through-hole communicating the inside and the outside of the container body. A housing member for housing and holding a ventilation member provided with a filter is attached to the through-hole, and the housing member includes a holding cylinder and a fixed cylinder having screw grooves that engage with each other, and the rotation direction The holding cylinder has a hollow cylindrical shape having a lattice-shaped window and a ring-shaped flange at one end and an opening formed at the other end. The fixed cylinder has an opening at one end, has a ring-shaped flange at the other end, and has a cylindrical shape having a through-hole formed at the center of the cylinder bottom. A filter provided with a filter is provided inside the fixed cylinder. Member is locked, the housing member is provided with means to prevent the loosening in the rotational direction, the moderate seen prevention means, at an interval in respective opposing contact surface of the holding cylinder and the fixed cylinder A plurality of loosening prevention projections provided, the loosening prevention projections forming a first inclined surface that is loose in the tightening direction, and a second inclined surface having a larger angle than the first inclined surface in the opposite direction; These loosening prevention projections mesh with each other to exert a loosening prevention function, and the angle of the first inclined surface of the holding cylinder and the angle of the first inclined surface of the fixed cylinder relative to the tightening direction Are formed at different angles and do not come into surface contact with each other . The substrate storage container according to claim 1, wherein the ventilation member is a one-way valve .

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