JP4201583B2 - Substrate storage container - Google Patents

Description

[0001]
[Technical field to which the invention belongs]
The present invention relates to a substrate storage container that can store a substrate such as a semiconductor wafer or a photomask glass and can perform gas purge, and more particularly, to a substrate storage container that includes a gas purging valve body that controls the passage of gas to the inside and outside of the substrate storage container. It is about.
[0002]
[Prior art]
In recent years, as represented by DRAM (Dynamic Random Access Memory) in the semiconductor industry, competition for shares due to cost reduction of semiconductor components has intensified, and accordingly, review of production systems to reduce the cost of semiconductor manufacturing Alternatively, an increase in the diameter of a substrate used for manufacturing a semiconductor component (for example, 300 mm or more in the case of a semiconductor wafer) has been implemented.
[0003]
In the semiconductor production system, a plurality of substrate processing steps are divided separately from the conventional method of manufacturing a semiconductor component while maintaining the entire semiconductor manufacturing factory in a highly clean state (for example, a cleanness of 10 or less). As a result, the internal space thus partitioned is made into a highly clean environment, and a method of transferring a substrate between processing steps using a substrate storage container has been shifted. According to such a method, the equipment cost for constructing the clean room and the running cost for maintaining the equipment can be remarkably reduced, and the yield of semiconductor component manufacturing can be improved.
[0004]
Substrate storage containers used in semiconductor factories that are partitioned and separated in such a locally clean environment are defined by SEMI standards (E19, E47.1, E62, E63, etc.) Is provided with a FIMS-compatible device capable of transporting the lid with an automatic machine and capable of attaching and removing the lid with the automatic machine. In addition, in order to prevent contamination of the substrate to be stored, high sealing performance is required, or in order to clean the inside of the container, it must be formed using clean raw materials that generate little volatile gas from the inside of the container. Is required.
[0005]
However, the minimum line width of electronic circuits formed in recent semiconductor components is increasingly in the direction of decreasing pitch (0.10 μm or less), and the surface of a substrate stored in a storage container in a part or a plurality of semiconductor manufacturing processes. In order to prevent the formation of natural oxide film and organic contamination, it has been found effective to replace the internal space of the substrate storage container with an inert gas such as nitrogen or dry air from which moisture has been removed (gas purge). .
In view of this point, a technique has been proposed in which a part of the substrate storage container is opened to attach a filter, or a valve such as a check valve is attached to the periphery of the opening to perform gas purging. (See Patent Documents 1 and 2)
[0006]
[Patent Document 1]
Japanese Patent Laid-Open No. 11-191487 (page 3 to page 4, FIG. 1)
[Patent Document 2]
Japanese translation of PCT publication No. 2002-521189 (page 11-18, FIG. 2)
[0007]
[Problems to be solved by the invention]
Since the conventional substrate storage container is configured as described above, it has the following problems. When a valve is attached to the opening for gas purge, there is a problem that a locking structure for attaching the valve is actually complicated. Furthermore, in the case of a normal valve, a narrow opening is provided in the hollow portion, and an on-off valve that closes the opening is in contact with a tapered portion provided in the opening portion to perform sealing. There is a problem in that it easily shifts, the seal tends to be incomplete, and leakage tends to occur.
[0008]
The present invention has been made in view of the above-described problems. The valve can be stably operated even after repeated use, and the purge effect can be maintained for a long time. An object of the present invention is to provide a substrate storage container including a gas purge valve that can perform gas purge efficiently in a relatively short time.
[0009]
[Means for Solving the Problems]
In the present invention, in order to solve the above-described problem, a container main body that accommodates a substrate, a lid that opens and closes an opening of the container main body, and is attached to at least one through-hole of the container main body and the lid body and A valve body for controlling the flow of gas, and formed ribs around the through hole,
The valve body is fitted into the through-hole and has a bottomed cylindrical fixed cylinder that contacts the flange on the outer peripheral surface with the rib around the through-hole, and is fitted into the through-hole and is detachably screwed into the fixed cylinder. A cylindrical holding cylinder that contacts the peripheral edge of the opening of the through hole, a breathable inner lid cylinder that is held on the inner wall of the holding cylinder, and a reverse that is built into the fixed cylinder and the holding cylinder via a gap. A check valve and an elastic support member that movably supports the check valve. A gap serving as a gas passage is formed between the inner wall of the fixed cylinder and the outer wall of the check valve. A first engagement portion is formed on the inner surface of the cylinder, and the check valve is crushed by a contact portion in a direction in which it is in contact with the peripheral edge of the fixed cylinder or the open end of the inner lid cylinder and is pressed by the elastic support member. A seal member that forms a seal is mounted and a second engagement portion that engages with the first engagement portion of the inner lid cylinder is formed. And,
When the check valve moves under the control of the first and second engaging portions by the pressure of the gas, the seal is released, and through the gap between the inner wall of the fixed cylinder and the outer wall of the check valve It is characterized by allowing gas to flow.
A filter can be provided between the holding cylinder and the inner lid cylinder.
[0010]
A second engagement portion provided in the check valve to prevent displacement when the check valve is operated; and a first engagement portion provided on the inner surface of the inner lid cylinder facing the check valve; Need only be in a shape that can be engaged with each other, such as a cylindrical projection and a cylindrical recess into which it fits, a conical or pyramidal projection having an inclined side surface, and a recess having an inclined side wall into which these fit. Can be provided as a combination.
[0011]
Here, the container body in the claims appropriately accommodates a plurality of substrates such as semiconductor wafers and photomask glass. The opening of the container body may be any of the front, top, bottom and side surfaces. The gas is mainly an inert gas such as nitrogen or dry air, but is not limited to this. In addition, the valve body may be a single or a plurality of valve bodies, may be provided in the through holes of the container main body and the lid body, or may be provided in the through holes of the lid body.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 7, the substrate storage container according to the embodiment of the present invention has an opening at one end, and stores one or a plurality of substrates W by aligning them vertically in the horizontal direction. A plurality of main bodies, a lid body 10 that detachably closes the opening of the container body, and at least one pair of valve bodies 20 that are disposed at the bottom of the container body 1 and that control the flow of gas to the container body 1. One of the valve bodies 20 is provided as a gas introduction valve 20A and the other as a gas exhaust valve 20B. At this time, the introduction valve and the discharge valve are preferably provided outside the region where the substrate to be stored is projected onto the bottom surface of the container body 1.
[0013]
As shown in FIG. 1, the container body 1 is formed as a front open box type having one end opened using, for example, a polycarbonate resin to which carbon fiber, a conductive polymer, or the like is added to impart conductivity. Support members that support the peripheral edges of the side of the substrate W are provided at regular intervals on the opposing side walls inside the container body 1. At the bottom of the container body 1, a bottom plate 2 formed in a substantially Y shape is provided with a member for detecting the type of the substrate storage container from the outside and positioning and fixing when mounted on a processing apparatus. It is mounted through. The bottom plate 2 is formed with a plurality of through holes for attaching an identification member, a positioning member 3, and a clamp hole for fixing the container body 1.
[0014]
A robotic handle 6 having a substantially square top plate portion, a column portion extending perpendicularly to the top plate portion, and an attachment portion at the tip thereof is detachably mounted on the ceiling of the container body 1, and this handle 6 is attached to the OHT. It is held by an automatic ceiling transport machine called (overhead hoist transfer) and used for transport within and between processes. Further, a rim portion 7 for fitting the lid body 10 is integrally formed on the front surface of the opening of the container body 1, and a plurality of locking grooves 8 for locking the lid body 10 are formed on the upper and lower surfaces of the inner surface of the rim portion 7. Is formed. A grip handle 9 used for manual handling is detachably attached to the outer wall of the container body 1.
[0015]
As shown in FIG. 1, the lid body 10 is formed in a substantially rectangular shape with four rounded corners, and a locking mechanism (not shown) is arranged inside. The locking claw at the tip of the locking mechanism is a lid body 10. It protrudes from the intrusion hole provided in the peripheral wall of the rim, and is fitted into the locking groove 8 of the rim portion 7, and the container body 1 and the lid body 10 are fitted to close the opening. An endless gasket member 13 that forms a seal with the container body 1 is attached to the peripheral wall of the lid 10. Further, a front retainer 12 is mounted on the back surface of the lid 10 for supporting the substrate W accommodated in the container main body 1 by aligning it horizontally in the vertical direction at a predetermined pitch.
[0016]
The container body 1, the bottom plate 2, the robotic handle 6, the pair of grip handles 9, and the lid body 10 are made of a thermoplastic resin such as polycarbonate, polyetheretherketone, polyetherimide, or cyclic olefin resin (COP), Or it forms from what provided electroconductivity to these thermoplastic resins.
[0017]
As shown in FIG. 3, each valve body 20 is inserted into the through-hole 4 and the peripheral rib 5 from below so as to circulate gas, and the through-hole 4 via a seal member 30 for sealing. A holding cylinder 25 that is inserted from above and is detachably screwed into the fixed cylinder 21 from above, and an inner lid cylinder 34 that is attached to the inner peripheral wall of the holding cylinder 25 and holds the filter 36 between the holding cylinder 25 and A check valve 31 is provided between the fixed cylinder 21 and the holding cylinder 25 and comes into contact with one end of the opening of the inner lid member, and an elastic member 33 that presses and deforms the check valve 31 from one side.
The check valve 31 controls the gas to flow in one direction from the fixed cylinder 21 to the holding cylinder 25.
[0018]
The fixed cylinder 21 is basically formed in a bottomed cylindrical shape having an opening at one end, for example, using a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, etc., and is attached to the inner peripheral surface. The screw groove 22 is formed by threading. A round air vent 23 for gas flow is formed in the center of the bottom of the fixed cylinder 21, and a ring-shaped flange 24 extending radially outward is provided on the outer peripheral surface of the bottom, and the opening periphery of the rib 5 is provided. Touch the part.
[0019]
The holding cylinder 25 is basically formed in a cylindrical shape having an opening at one end (bottom side) using, for example, a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, etc. At the end (upper surface side), partition ribs 26 for partitioning a plurality of gas flow vents 23 are arranged in a lattice shape or a radial shape, and a housing for storing the filter 36 is placed on the back surface of the partition ribs 26. Part is formed. Further, a ring-shaped flange 28 extending in the radially outward direction is provided around the upper outer peripheral surface of the holding cylinder 25, and this flange 28 contacts the opening periphery of the through hole 4.
[0020]
A screw groove 29 for attachment is formed on the outer peripheral surface of the holding cylinder 25, and the screw groove 29 is screwed with the screw groove 22 of the fixed cylinder 21. The seal member 30 interposed between the outer peripheral surface of the holding cylinder 25 and the peripheral surface of the through-hole 4 effectively prevents intrusion of outside air into the container main body 1 and gas leakage from the container main body 1.
[0021]
The check valve 31 is formed in a substantially circular plane with a U-shaped cross section using a thermoplastic resin, is fitted and mounted on the inner bottom surface of the fixed cylinder 21, covers the round vent 23, and A slight gap 32 is formed between the peripheral surface and a gas flow path. In the central portion of the check valve 31, a concave portion or a circumferential rib serving as a second engagement portion for preventing displacement is formed. Examples of the material of the check valve 31 include various thermoplastic elastomer materials such as polyethylene, polypropylene, polycarbonate, cyclic polyolefin resin, and thermoplastic polyester elastomer. Seal members 37, 38 that can be pressed by these are attached to the peripheral portion of the fixed cylinder 21 of the check valve 31 or the portion that contacts the open end of the inner lid. The seal members 37 and 38 are made of a material such as fluorine rubber, NBR rubber, urethane rubber, EPDM rubber, or silicone rubber. Further, the surface of the core portion made of these materials may be coated with fluorosilicone or may be coated.
[0022]
When the valve body 20 is used as the gas introduction valve 20A, the check valve 31 is pressed by the elastic member 33 so as to cover the vent 23 of the fixed cylinder 21, but the valve body 20 is used as the gas exhaust valve 20B. When used, it is disposed upside down with respect to the elastic deformation member, and is pressed by the elastic deformation member so as to come into contact with the opening end of the inner lid member.
[0023]
The elastic member 33 can be a metal spring such as SUS or a resin spring. Further, the elastic member 33 can be a leaf spring formed of various rubbers, thermoplastic elastomer resins, or the like. In addition, a support made of a synthetic resin foam having elasticity, various rubbers, or a thermoplastic elastomer can be used. When using a metal part here, it is preferable to coat the surface with resin.
[0024]
The inner lid cylinder 34 is basically formed in a cylindrical shape having an opening at one end (bottom side) using, for example, a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, and is opposed to the opening. On the other end (upper surface side), partition ribs 26 for partitioning a plurality of gas flow vents 23 are arranged in a lattice shape or radially, and a filter 36 is mounted and held on the upper surface of the partition ribs 26. Is done. The inner lid cylinder 34 includes a seal member 30 that secures a seal with the upper part of the holding cylinder 25. At the center of the inner surface of the inner lid cylinder 34, a cylindrical protrusion is formed as a first engaging portion 39 that prevents a displacement when the check valve 31 is assembled or when the check valve 31 is movable. Thus, the second engaging portion 40 provided on the surface of the valve body 20 is engaged with the concave portion. As described above, since the mechanism for controlling the position of the check valve 31 when it is moved is provided, the operation of the check valve 31 is stabilized even if it is repeatedly used, and the check valve 31 is caught during the operation. Thus, it is possible to prevent accidents in which the valve is left open or the gas passage is blocked and the gas cannot be replaced successfully.
[0025]
The filter 36 is selected from a porous membrane made of tetrafluoroethylene, polyester fiber, fluorine resin, etc., a molecular filtration filter 36 made of glass fiber, etc., or a chemical filter 36 in which a chemical adsorbent is supported on a filter medium such as activated carbon fiber. In a state where these are sandwiched between the step 27 of the holding cylinder 25 and the partition rib 26 of the inner lid cylinder 34, a single or a plurality of them are inserted to cover the vent hole 23 of the inner lid cylinder 34. The front and back surfaces of these filters 36 are made of polyethylene, polypropylene, or the like, and are formed as grid-like ribs that connect a circumferential frame. The same type of filter 36 may be used, but it is preferable to combine the filters 36 having different properties, in order to prevent contamination of organic matters in addition to particles.
[0026]
In the above configuration, when the valve body 20 is used as the gas introduction valve 20A, the elastic member 33 held at the opening peripheral end portion of the inner lid cylinder 34 when an inert gas or a gas composed of dry air is not supplied from the outside. The substantially flat check valve 31 is pressed against the inner fixed surface of the fixed cylinder 21 by the elastic force, but an O-ring is provided as a seal member 37 on the surface of the check valve 31 facing the inner bottom surface of the fixed cylinder 21. Are provided so as to protrude, and these contact portions form a seal. Here, since the O-ring is crushed by the plane in contact with it, it can be reliably sealed.
[0027]
On the other hand, when the gas which consists of inert gas or dry air is supplied to the valve body 20 from the gas introduction part of a processing apparatus, the check valve 31 is pressed in the direction of the holding | maintenance cylinder 25 with the pressure of the gas to eject. Therefore, the seal of the opening of the fixed cylinder 21 is released, and the gas can flow through the valve body 20 and into the substrate storage container. That is, the gas enters the hollow portion of the inner lid cylinder 34 through the gap 32 between the vent 23 of the fixed cylinder 21 and the check valve 31 and the gap 32 between the check valve 31 and the holding cylinder 25. It flows into the substrate storage container through a filter 36 held between the cylinder 34 and the holding cylinder 25.
[0028]
When the valve body 20 is used as the gas exhaust valve 20 </ b> B, the elastic member 33 presses the check valve 31 against the opening end of the inner lid cylinder 34 by the elastic force. At this time, a sealing member 38 having an L-shaped cross section is provided on the side wall facing the opening end of the valve body 20, and the seal is stably brought into surface contact with the opening end of the inner lid cylinder 34. Form. Therefore, it is possible to effectively prevent gas or the like from flowing into the inside from the outside of the substrate storage container or gas from leaking from the inside to the outside of the substrate storage container.
[0029]
On the other hand, when the gas is filled in the substrate storage container, the check valve 31 is pressed in the direction of the fixed cylinder 21 by the pressure of the gas to be filled, so that the inner lid cylinder 34 and the check valve 31 The seal between the two is released, and the gas can be exhausted through the valve body 20 to the outside of the substrate storage container. That is, the gas enters the hollow portion of the inner lid cylinder 34 from the inside of the substrate storage container through the filter 36 sandwiched between the inner lid cylinder 34 and the holding cylinder 25, and the gap between the check valve 31 and the holding cylinder 25. The gas is exhausted from the vent 23 of the fixed cylinder 21 to the outside of the substrate storage container (exhaust nozzle portion of the processing apparatus) through the gap 32 with the check valve 31 through 32A. At this time, if the pressure of the exhaust nozzle is reduced, the gas can be replaced more efficiently.
[0030]
In the embodiment of the present invention, since the pressure is pressed in the direction perpendicular to the surface of the valve body 20 that holds the seal-forming seal members 37 and 38, a seal is reliably formed regardless of whether it is used as an introduction valve or an exhaust valve. can do. Therefore, the holding time of the gas substituted in the substrate storage container is prolonged, and the effect of the gas purge is maintained for a longer time. Further, since the gas is replaced through the plurality of ventilation gaps 32 on the outer peripheral side of the check valve 31 accommodated in the valve body 20, the replacement is performed through a narrow inner space at one central position as in the conventional example. Compared with the case where the gas is replaced, the gas can be replaced more efficiently, so that productivity is improved.
[0031]
The substrate storage container with the valve body 20 of the present invention can be replaced with gas when placed on the lid body 10 opening / closing device (load port or lid body opener), stored in the stocker or in the process. It can also be performed during transport to the stocker. At this time, a gas purging jig 72 having an air supply nozzle portion and an exhaust nozzle portion and respective gas flow paths as shown in FIGS. 8 and 9 is provided on the apparatus side, and a substrate is accommodated thereon. Gas replacement can be performed by setting the container. On the surface of the jig 72, it is preferable that three positioning pins 73 for the substrate storage container are provided in a Y shape. At least one pair of air supply nozzle portion 70 and exhaust nozzle portion 71 are formed as cylindrical protrusions at a position facing the valve body 20 at a position facing the valve body 20. An air channel 74 and an exhaust channel 75 are formed and communicate with a gas supply source and an exhaust device, respectively. The air supply nozzle unit 70 and the exhaust nozzle unit 71 are provided so as to be movable, the surface of the jig is made flat before use, and after the substrate storage container is placed, You may make it each of the exhaust nozzle part 71 approach valve body 20A, 20B. In addition, it is preferable to provide seal forming means for preventing leakage of the purged gas around the projections of the supply nozzle unit 70 and the exhaust nozzle unit 71.
[0032]
10 and 11 are cross-sectional views showing another embodiment of the valve body 20 of the present invention. In this case, the check valve 31 on the gas introduction side and the check valve 31 on the gas exhaust side can be combined. It is a simple structure. The valve body 20 includes a central disc portion and peripheral seal members 37 and 38, and the center portion can be fitted with a first engagement portion 39 provided at the center of the inner lid tube 34. A second engaging portion 40 is formed. The recesses that are the seal member holding portion 41 and / or the second engaging portion 40 are provided on both surfaces of the disk portion, and the valve body 20 is used when used as an introduction valve and when used as an exhaust valve. By changing the insertion direction at the time of assembly, the seal members 37 and 38 can be inserted at locations where sealing is required. In this case, since the parts to be used are made common, the assembly work and the management can be made more efficient.
[0033]
Next, the details of the dual use will be described. FIG. 10 is a cross-sectional view illustrating a case where the valve body 20 of the present embodiment is used as the gas introduction valve 20A, and FIG. 11 is a cross-sectional view illustrating a case where the valve body 20 of the present embodiment is used as the gas exhaust valve 20B. It is. In this case, the check valve 20 is turned upside down and incorporated between the fixed cylinder 21 and the inner lid cylinder 34, and the installation position of the elastic member 33, that is, the sealing direction of the check valve is changed accordingly, thereby introducing gas. The valve and the gas exhaust valve can be used in common. The use of the check valve is not limited to this embodiment. Seal member holding portions 41 may be provided on both the upper and lower surfaces of the check valve 31, and a seal member may be attached to the check valve 31 as necessary. A concave portion serving as a second engaging portion 40 that can be fitted to the first engaging portion 39 of the inner lid cylinder 34 and an elastic member 33 accommodating portion may be provided on both upper and lower surfaces of the inner cover cylinder 34. In this case, even if the check valve 31 is shared, the direction of the check valve 31 is not changed, and the check valve 31 can be used as it is by changing the mounting position of the elastic member.
[0034]
The position and number of the valve bodies 20 according to the present invention are not particularly limited. Two valve bodies 20 may be provided on each of the opening side and the rear side, or a pair of valve bodies 20 may be provided in the opening. Or a pair of valve bodies 20 on the rear side.
[0035]
The first engagement portion 39 provided on the inner lid tube may be formed as a recess surrounded by ribs in addition to the protrusions shown in the above embodiment. It is good to form the projection part engaged with the said groove part or a recessed part as the 2nd engaging part 40, and to engage these.
[0036]
【The invention's effect】
As described above, according to the present invention, since the engagement portion for preventing the displacement when the check valve is movable is provided, there is an effect that the gas can be stably replaced even if it is repeatedly used. . Also, since the gas is replaced through the ventilation gap outside the check valve housed in the valve body, when the gas is replaced through a narrow inner space in the center as in the conventional example, In comparison, gas replacement can be performed more efficiently, and productivity can be improved. Furthermore, since the seal is reliably formed by the surface pressing, the replacement gas can be prevented from leaking and maintained for a long time.
[0037]
【Example】
Measurement of the oxygen concentration when the substrate storage container of the present invention to which the pair of valve bodies shown in FIGS. 4 and 6 is attached is replaced with nitrogen gas, and the holding time capable of maintaining such a low oxygen state. Went. As a result, when nitrogen gas was supplied at a rate of 20 L / min, it was possible to reduce the oxygen concentration to 10 ppm or less in about 15 minutes. Further, when the supply of nitrogen gas is stopped in this state and the change in the oxygen concentration when the substrate storage container is left unchecked, it takes about 5 hours for the oxygen concentration to rise to 1%. Thus, since the low oxygen state can be maintained for a certain time, such as when the substrate is temporarily stored during processing, contamination of the substrate and oxidation of the surface can be suppressed.
For comparison, when the substrate storage container with a valve taken up in the prior art was used, it took only about 70 minutes for the oxygen concentration to rise from 10 ppm to 1%. For measurement, two through-holes are provided in the substrate storage container, a pipe line for measurement is created so as to connect the two through-holes, and an oxygen concentration meter is installed in the middle of the pipe path. Was measured every minute. After sealing the periphery of the through hole, nitrogen gas was supplied into the substrate storage container through the introduction valve at a constant rate. Moreover, the oxygen concentration used the oxygen concentration meter by the Toray Engineering company (measurement range 0.1ppm-100VOL%).
[Brief description of the drawings]
FIG. 1 is an exploded perspective view showing an embodiment of a substrate storage container according to the present invention.
FIG. 2 is a bottom view showing a container body in an embodiment of a substrate storage container according to the present invention.
FIG. 3 is an exploded perspective view showing a valve body in the embodiment of the substrate storage container according to the present invention.
FIG. 4 is an explanatory cross-sectional view showing a gas introduction valve in an embodiment of a substrate storage container according to the present invention.
5 is a cross-sectional explanatory diagram illustrating a state in which gas is supplied to the gas introduction valve of FIG.
FIG. 6 is an explanatory cross-sectional view showing a gas exhaust valve in an embodiment of a substrate storage container according to the present invention.
7 is a cross-sectional explanatory diagram illustrating a state in which gas is exhausted from the gas exhaust valve of FIG. 6;
FIG. 8 is a plan view showing a gas supply / exhaust jig for replacing gas in a substrate storage container according to the present invention.
9 is a side view showing the jig shown in FIG. 8. FIG.
FIG. 10 is an explanatory cross-sectional view showing a gas introduction valve in another embodiment of a substrate storage container according to the present invention.
FIG. 11 is an explanatory cross-sectional view showing a gas exhaust valve in another embodiment of a substrate storage container according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Container body 4 Through-hole 5 Rib 10 Lid body 20 Valve body 20A Gas introduction valve 20B Gas exhaust valve 21 Fixed cylinder 22 Screw groove 23 Vent 24 Flange 25 Holding cylinder 28 Flange 29 Screw groove 30 Seal member 31 Check valve 32 Crevice 32A Clearance 33 Elastic member 34 Inner lid cylinder 36 Filter 37 Seal member 38 Seal member 39 First engagement portion 40 First engagement portion 41 Seal member holding portion 70 Air supply nozzle portion 71 Exhaust nozzle portion W Substrate

Claims (2)

A container body for storing the substrate; a lid body for opening and closing the opening of the container body; and a valve body attached to at least one through hole of the container body and the lid body to control the flow of gas to the container body. A substrate storage container in which a rib is formed around the through-hole ,
The valve body is fitted into the through-hole and has a bottomed cylindrical fixed cylinder that contacts the flange on the outer peripheral surface with the rib around the through-hole, and is fitted into the through-hole and is detachably screwed into the fixed cylinder. A cylindrical holding cylinder that contacts the peripheral edge of the opening of the through hole, a breathable inner lid cylinder that is held on the inner wall of the holding cylinder, and a reverse that is built into the fixed cylinder and the holding cylinder via a gap. A check valve and an elastic support member that movably supports the check valve. A gap serving as a gas passage is formed between the inner wall of the fixed cylinder and the outer wall of the check valve. A first engagement portion is formed on the inner surface of the cylinder, and the check valve is crushed by a contact portion in a direction in which it is in contact with the peripheral edge of the fixed cylinder or the open end of the inner lid cylinder and is pressed by the elastic support member. A seal member that forms a seal is mounted and a second engagement portion that engages with the first engagement portion of the inner lid cylinder is formed. And,
When the check valve moves under the control of the first and second engaging portions by the pressure of the gas, the seal is released, and through the gap between the inner wall of the fixed cylinder and the outer wall of the check valve A substrate storage container characterized in that gas can be circulated . The substrate storage container according to claim 1 , further comprising a filter between the holding cylinder and the inner lid cylinder .

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