JP2009277687A - Valve mechanism and substrate storage container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a valve mechanism which suppresses elution of ion component from metal components to contaminate a substrate and so on and which has simplified constitution, and to provide a substrate storage container. <P>SOLUTION: The valve mechanism includes: a holding cylinder 31; a filter 37 which covers a partially open surface of the holding cylinder 31; an inner lid cylinder 38 incorporated in the holding cylinder 31; a bottomed cylindrical fixed cylinder 44, threadedly engaging with an opening reverse surface side of the holding cylinder 31; and a valve element 50, interposed in between the inner cylinder 38 and fixed cylinder 44 to control circulation of a gas; the holding cylinder 31 and fixed cylinder 44 are molded from a molding material containing a resin; and an air vent 45 for gas circulation is formed in a bottom portion 52 of the fixed cylinder 44. Furthermore, the valve element 50 is molded from an elastic material to be expandable and contractable, in the threadable engagement direction of the holding cylinder 31 and fixed cylinder 44; and the bottom portion 52 of the valve element 50 is brought into contact with the air vent 45 in a separable fashion and compressed, to make its bottom portion 52 of the valve element 50 leave the air vent 45, thereby circulating the gas between the holding cylinder 31 and fixed cylinder 44 through the filter 37. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a valve mechanism and a substrate storage container that control the flow of a gas composed of air, an inert gas, or the like.

  Although not shown, the conventional substrate storage container includes a front open box type container main body for aligning and storing, for example, φ300 mm semiconductor wafers, and a detachable lid that opens and closes the opened front portion of the container main body. (See Patent Document 1).

  A plurality of through holes are drilled in the bottom of the container body, and a valve mechanism that communicates the inside and outside of the substrate storage container is attached to each through hole. When the valve mechanism is removed from the container body Functions to prevent the surface of the semiconductor wafer from being oxidized by replacing the air in the substrate storage container with an inert gas. The valve mechanism is composed of a large number of parts including a housing with a vent and a valve body that is built in the housing and controls the flow of air and inert gas. The valve body is made of metal in the vent of the housing. It is biased by a spring.

Such substrate storage containers are repeatedly used by being transported and stored in semiconductor wafer processing processes, transported between factories, used for a certain period of time, and then subjected to cleaning and drying operations. .
JP 2004-146676 A

  The conventional substrate storage container is configured as described above, and a metal spring is used for the valve mechanism. Therefore, the spring corrodes with repeated cleaning, contaminates the semiconductor wafer, and ion components from the spring. Elution may cause contamination of the semiconductor wafer. Further, since the valve mechanism is composed of a large number of parts, there is a problem that time and labor are required for assembly.

  The present invention has been made in view of the above, and provides a valve mechanism and a substrate storage container that can suppress the elution of ionic components from metal parts and cause substrate contamination and the like, and can simplify the configuration. It is an object.

In the present invention, in order to solve the above problems, a substantially cylindrical holding cylinder, a filter that covers a partially opened surface of the holding cylinder, and a bottomed cylindrical shape that is fitted to the opening back side of the holding cylinder. Including a fixed cylinder, and a valve body that is interposed between the holding cylinder and the fixed cylinder to control the flow of gas,
The holding cylinder and the fixed cylinder are each made of a resin-containing molding material, and a vent hole for gas flow is provided at the bottom of the fixed cylinder, and the valve body is formed of an elastic material, and the holding cylinder and the fixed cylinder are fitted. The valve body can be expanded and contracted in the fitting direction, and the bottom of the valve body is brought into contact with and separated from the vent of the fixed cylinder, and the valve body is compressed to separate (separate) the bottom from the vent of the fixed cylinder. Thus, the gas is circulated through the filter between the holding cylinder and the fixed cylinder.

In addition, a resin inner lid cylinder sandwiching the valve element between the holding cylinder and the fixed cylinder is built in the holding cylinder via a seal member, and the surface of the inner lid cylinder is partially opened, and the holding cylinder and the inner lid cylinder A filter can be interposed between the partially open surfaces.
In addition, a concave portion is formed on one of the inner peripheral surface of the holding cylinder and the outer peripheral surface of the inner lid cylinder, and a convex portion is formed on the other, so that the concave and convex portions interfere with each other. The top of the valve body can be supported inside.

Further, a projection can be provided on at least one of the holding cylinder and the fixed cylinder.
Moreover, it is possible to attach the sealing member which contacts the bottom part of a valve body to the peripheral part of the vent hole of a fixed cylinder.
Moreover, it is possible to attach a seal member to either the peripheral edge of the vent of the fixed cylinder or the bottom of the valve body.
Further, it is possible to form the valve body into a bottomed cylindrical shape, bend the peripheral wall thereof into a substantially rectangular shape, and laminate a resin protective layer on the bottom of the valve body.

In addition, a cylindrical rib extending in the direction of the holding cylinder is provided at the peripheral edge of the vent of the fixed cylinder, the tip thereof is an inclined surface, the valve body is formed into a bottomed cylinder, and the holding cylinder side of the peripheral wall is a bellows. The bottom of the valve body can be formed to be tapered so as to contact the inclined surface of the cylindrical rib.
Moreover, it is good to laminate | stack the elastic layer which consists of a thermoplastic elastomer or a rubber composition on the inclined surface of a cylindrical rib.
Moreover, it is good to laminate | stack the elastic layer which consists of a thermoplastic elastomer or a rubber composition on the taper bottom part of a valve body.

Further, in order to solve the above problems in the present invention, a container main body for storing a substrate, and a detachable lid for opening and closing the opening of the container main body,
A through hole is provided in at least one of the container main body and the lid, and the valve mechanism according to any one of claims 1 to 8 is fitted into the through hole.

In addition, the gas displacement apparatus which mounts a container main body can be provided in this gas displacement apparatus, and the pin which penetrates the vent hole of a valve mechanism and pushes up a valve body can be provided.
Also, a through hole can be drilled in the bottom of the container body, and the through hole can be positioned outside the projection area projected on the bottom of the container body of the substrate.
In addition, a sealing member may be interposed between the through hole and the valve mechanism, and a flange that is caught by the peripheral edge of the through hole may be provided on the holding cylinder or the fixed cylinder of the valve mechanism.

  Here, the filters in the claims do not particularly have to be singular. Further, it is preferable that the valve body is displaced and compressed by pins of various devices (for example, a semiconductor processing device, a lid opening / closing device, a gas replacement device, etc.) penetrating through the vent of the fixed cylinder, or by an external pressure of gas. The substrate includes at least φ200 mm, φ300 mm, φ450 mm semiconductor wafer, glass substrate, mask glass, and the like. Further, the substrate storage container may be any of a front open box type, a top open box type, and a bottom open box type.

  According to the present invention, the holding cylinder, the inner lid cylinder, and the fixed cylinder constituting the valve mechanism are made of a resin-containing molding material, and the valve body is formed of an elastic material. Can be omitted.

According to the present invention, it is possible to suppress the ion component from eluting from the metal part to cause contamination of the substrate, and to simplify the configuration of the valve mechanism.
In addition, if a resin inner lid cylinder with a valve element sandwiched between the holding cylinder and the holding cylinder is incorporated via a seal member, gas can be prevented from leaking between the holding cylinder and the inner lid cylinder. it can. Further, if the surface of the inner lid cylinder is partially opened and a filter is interposed between the partially opened surfaces of the holding cylinder and the inner lid cylinder, it is possible to restrict the filter from dropping off.

In addition, a simple configuration can be obtained by forming a concave portion on one of the inner peripheral surface of the holding cylinder and the outer peripheral surface of the inner lid cylinder and forming a convex portion on the other, and causing the concave portion and the convex portion to interfere with each other. Thus, it is possible to prevent the inner lid cylinder from falling out of the holding cylinder. In addition, if the top of the valve body is supported in the inner lid cylinder, it is possible to suppress the valve body from fluctuating inside the valve mechanism.
Also, if a protrusion is provided on at least one of the holding cylinder and the fixed cylinder, this protrusion can be used to prevent problems with the mounting operation of the fixed cylinder or improve the workability of the mounting work. It becomes.

Further, if a sealing member that contacts the bottom of the valve body is attached to the peripheral edge of the vent of the fixed cylinder, it is possible to prevent gas from leaking from between the vent and the bottom of the valve.
In addition, if the valve body is formed into a bottomed cylindrical shape and its peripheral wall is bent into a substantially square cross section, the bottom of the valve body can be reliably brought into contact with the vent of the fixed cylinder by the repulsive force of the peripheral wall of the valve body Can do. Further, if a protective layer made of resin is laminated on the bottom of the valve body, the protective layer can be expected to prevent wear and deformation of the bottom of the valve body.

In addition, a cylindrical rib extending in the direction of the holding cylinder is provided at the peripheral edge of the vent of the fixed cylinder, the tip thereof is an inclined surface, the valve body is formed into a bottomed cylinder, and the holding cylinder side of the peripheral wall is a bellows. If the bottom of the valve body is tapered so as to contact the inclined surface of the cylindrical rib, diversification of the configuration of the valve mechanism can be expected.
In addition, if an elastic layer made of a thermoplastic elastomer or rubber composition is laminated on the inclined surface of the cylindrical rib, the elastic layer elastically contacts the bottom of the valve body, so that the bottom of the valve body is damaged. Can be effectively protected from.

  Further, if a seal member is interposed between the through hole and the valve mechanism, it can be expected to ensure airtightness between them. Furthermore, if the holding cylinder or the fixed cylinder of the valve mechanism is provided with a flange that catches the peripheral edge of the through hole, it is possible to prevent the holding cylinder or the fixed cylinder from falling out of the through hole with a simple configuration.

  Hereinafter, a preferred embodiment of a substrate storage container according to the present invention will be described with reference to the drawings. The substrate storage container in this embodiment is a front open box type for storing semiconductor wafers as shown in FIGS. A container body 1, a lid body 20 that opens and closes an open front portion of the container body 1, and a plurality of valve mechanisms 30 that are mounted on the container body 1. 31, a filter 37 that covers a partially opened surface of the holding cylinder 31, an inner lid cylinder 38 that is built in the holding cylinder 31, and a fixed cylinder 44 that is screwed onto the opening back side of the holding cylinder 31 The holding cylinder 31 is interposed between the middle lid cylinder 38 and the fixed cylinder 44, and is constituted by an elastic valve body 50 that controls the flow of gas.

  Although not shown, each semiconductor wafer is made of, for example, a thin, round φ300 mm silicon wafer, and an orientation flat or a substantially semi-circular notch is selectively formed on the peripheral edge of the silicon wafer. The Such a semiconductor wafer made of silicon is stored in a substrate storage container and transported between factories and processes, and various processes and processing are performed for the production of semiconductor chip components. Then, by processing and processing in various processes, a circuit pattern is formed on the front surface, and finally the back surface is back-ground according to the thickness of the semiconductor chip component, and then cut into individual pieces to produce the semiconductor chip component. Is done.

  As shown in FIG. 1, the container body 1 is injection-molded into a front open box in which 25 semiconductor wafers are aligned and stored by injecting a molding material containing a predetermined resin into a molding die. Then, the same shape lid 20 is detachably fitted to the opened front portion via an endless gasket, and is positioned and mounted on a semiconductor processing device or a gas replacement device (not shown).

  A pair of left and right teeth that horizontally support both sides of the periphery of the semiconductor wafer are provided on opposite sides of the container body 1, and a plurality of pairs of teeth are arranged at intervals in the vertical direction of the container body 1. Is done. In addition, an arbitrary rear retainer that selectively separates the rear end of the peripheral edge of the semiconductor wafer in the vertical direction is projected from the inner back surface of the container body 1. The rear retainer includes a plurality of partition shelves arranged at intervals in the vertical direction of the container body 1. When vibration or impact is applied, adjacent semiconductor wafers come into contact with each other or the semiconductor wafers are separated from the spacing between the teeth. It functions to prevent it from coming off.

  As shown in FIGS. 2, 4, and 5, a pair of left and right through holes 2 are drilled in front of the bottom of the container body 1, and the valve mechanism 30 is an endless seal member 4 in the pair of through holes 2. The valve mechanism 30 of one through hole 2 functions as a valve mechanism for supplying air from the outside to the inside of the substrate storage container, and the other through holes 2 The valve mechanism 30 functions as an exhaust valve mechanism that exhausts air from the substrate storage container to the outside.

  The pair of through holes 2 are respectively drilled outside the projection area projected onto the bottom surface of the container main body 1 of the semiconductor wafer, and cylindrical holding ribs 3 extending downward are integrally formed on the periphery of each through hole 2. It is formed. Further, the seal member 4 is not particularly limited, but for example, an O-ring or the like is used.

  As shown in FIG. 2, a substantially trapezoidal bottom plate 5 is integrally attached to the bottom of the container body 1 via a fixture, and a plurality of attachment holes are perforated in the bottom plate 5. By selectively inserting the detachable identification pad 6 into the mounting hole, the type or the like of the substrate storage container is detected by the detection sensor of the semiconductor processing apparatus or the gas replacement apparatus.

  Clamp holes 7 for fixing the container main body 1 on the semiconductor processing apparatus or the gas replacement apparatus are drilled in the central portion of the bottom plate 5, and the semiconductor processing apparatus is provided at both the front side and the rear center of the bottom plate 5. A plurality of positioning tools 8 for positioning the container main body 1 are arranged on the positioning pins of the gas replacement device. Further, on both sides of the front portion of the bottom plate 5, opposed holes that face the pair of through holes 2 of the container body 1 are respectively drilled, and each opposed hole functions to expose the valve mechanism 30 of the through hole 2.

  As shown in FIG. 1, a detachable robotic handle 9 is attached to the central part of the ceiling of the container body 1, and this robotic handle 9 is held by an automatic transfer machine called OHT (overhead hoist transfer). As a result, the substrate storage container is supplied to the inside and outside of the process. Further, the peripheral edge of the front portion of the container body 1 is formed to bulge outward to form a rim portion 10 for fitting the lid body, and the lid body 20 is provided on both upper and lower sides of the inner peripheral surface of the rim portion 10. Each of the locking grooves 11 to be locked is formed as a recess.

  As shown in FIG. 1, the lid body 20 is detachably fitted into the front portion of the container body 1, in other words, the rim portion 10, and a housing 21 containing a locking mechanism 22, and the housing 21. And a front cover 25 that is attached to and covers the front portion (surface portion) that is opened, and is attached to and detached from the container body 1 by a lid opening / closing device of a semiconductor processing apparatus.

  The casing 21 is formed into a substantially rectangular shape in front view with rounded chamfers at the four corners, and a front retainer that elastically holds the front ends of the peripheral edges of the plurality of semiconductor wafers with elastic pieces is attached to the center of the back surface. . A frame-shaped fitting groove is cut out at the peripheral edge of the rear surface of the casing 21, and an elastic gasket interposed between the rim portion 10 of the container body 1 is fitted into the fitting groove. . This gasket is molded into an elastically deformable frame using, for example, silicone rubber, fluoro rubber, various thermoplastic elastomers (for example, olefins) with excellent heat resistance, flame resistance, cold resistance, and compression properties as molding materials. Is done.

  As shown in the figure, the locking mechanism 22 includes a pair of rotating plates 23 that are rotatably supported at the centers of both sides of the surface of the casing and are operated from the outside, and are connected to the respective rotating plates 23 to form a casing. A pair of slide plates 24 slidable in the up / down / inside / outward direction of 21, and are pivotally supported in a projecting / retracting hole of the peripheral wall of the housing 21 so as to be connected to and supported by the front end of the slide plate 24. And a pair of swingable locking claws that fit and interfere with each other.

  Examples of the predetermined resin of the molding material for molding the container body 1, the bottom plate 5, the lid 20, and the locking mechanism 22 include polycarbonate, polyether ether ketone, polyether imide, and cyclic resin that are excellent in mechanical properties, heat resistance, and the like. Examples thereof include olefin resins. Carbon, carbon fiber, metal fiber, carbon nanotube, conductive polymer, antistatic agent, flame retardant and the like are selectively added to these resins.

  The holding cylinder 31, the inner lid cylinder 38, and the fixed cylinder 44 of each valve mechanism 30 are injection-molded by injection of a molding material containing a predetermined resin. Examples of the predetermined resin include polycarbonate, polyether ether ketone, polyether imide and the like which are excellent in mechanical properties and heat resistance.

  As shown in FIGS. 3 to 6, the holding cylinder 31 is formed in a cylindrical shape that is fitted into the through hole 2 of the container body 1 from above, and a lattice shape or a radial shape that partially covers the filter 37 on the opened surface. The partition ribs 32 are integrally formed so as to partially open so that gas can flow therethrough, and a seal member 4 such as an O-ring is interposed between the through holes 2 of the container body 1. In the holding cylinder 31, an engagement groove 33 for the inner lid cylinder 38 is cut out in the circumferential direction on the opening back surface side of the inner peripheral surface, and a screw that is screwed into the fixed cylinder 44 on the opening back surface side of the outer peripheral surface. A mountain 34 is formed.

  A plurality of position restricting projections 35 extending upward and positioned in the container body are arranged at predetermined intervals in the circumferential direction on the peripheral edge of the surface of the holding cylinder 31, and the plurality of position restricting projections 35 are formed of gold. This is used to prevent rotation when the mold is released from the mold or to prevent reverse rotation when the fixed cylinder 44 is screwed. In addition, a flange 36 protruding radially outward is provided around the peripheral edge of the front surface of the holding cylinder 31, and this flange 36 engages with the peripheral edge of the through hole 2 to prevent the holding cylinder 31 from falling off.

  The filter 37 uses, for example, a porous membrane made of ethylene tetrafluoride, polyester fiber, fluororesin, a molecular filtration filter made of glass fiber, or a chemical filter in which a chemical adsorbent is supported on a filter material such as activated carbon fiber. It is formed in a thin disk shape. The required number of such filters 37 are sandwiched between the holding cylinder 31 and the inner lid cylinder 38, and function to circulate gas and filter particles therein. When a plurality of filters 37 are used, the same type of filter 37 or different types of filters 37 may be used. However, when different types of filters 37 are combined, organic contaminants in the gas are removed. Can also be filtered.

  As shown in FIGS. 4 to 6, the inner lid cylinder 38 is formed in a short cylindrical shape that is press-fitted into the holding cylinder 31 from below, and partition ribs 39 that support the filter 37 are formed in a lattice shape or on the opened surface. By being integrally formed in a radial shape or the like, it is partially opened so that gas can flow therethrough, and a seal member 40 such as an O-ring is interposed between the inner peripheral surface of the holding cylinder 31. The inner lid cylinder 38 is formed with a support groove 41 for the valve body 50 in a ring shape on the back surface of the partition rib 39, and a ring-shaped engagement claw 42 is provided around the end of the outer peripheral surface. The tapered engaging claw 42 engages with the engaging groove 33 of the holding cylinder 31 so that it is fixed to the holding cylinder 31 without dropping off.

  As shown in FIGS. 3 to 6, the fixed cylinder 44 is formed in a bottomed cylindrical shape that is fitted into the holding rib 3 of the through hole 2 from below and is screwed to the back side of the opening of the holding cylinder 31. A round ventilation hole 45 for gas circulation is perforated at the center, and a sealing member 46 such as an O-ring that contacts the valve body 50 is attached to the peripheral edge of the ventilation hole 45. A screw groove 47 is formed on the inner peripheral surface of the fixed tube 44 so as to be detachably screwed with the screw thread 34 of the holding tube 31.

  A plurality of protrusions 48 extending downward are arranged at predetermined intervals in the circumferential direction on the peripheral edge of the back surface facing the outside of the fixed cylinder 44, and the protrusions 48 are separated from the mold when they are released from the mold. It serves as a stopper, functions as a slip stopper when the fixed cylinder 44 is screwed, and is used for positioning with a semiconductor processing device or a gas replacement device. In addition, a flange 49 protruding radially outward is provided around the peripheral edge of the back surface of the fixed cylinder 44, and the flange 49 engages with the peripheral edge of the holding rib 3 so that the positional deviation of the fixed cylinder 44 is slow. Prevent sticking.

  As shown in FIGS. 4 to 6, the valve body 50 is molded into a bottomed cylindrical shape having a substantially square cross section, in other words, a hollow cross section having an approximate abacus shape. The holding cylinder 31 and the fixed cylinder 44 can be expanded and contracted in the screwing direction (vertical direction in FIGS. 4, 5, and 6), and the flat bottom portion 52 is connected to the vent hole 45 of the fixed cylinder 44. It contacts so that contact / separation is possible via 46. As the elastic material of the valve body 50, various rubber materials such as polyethylene, polypropylene, polycarbonate, cyclic olefin resin, polyester-based, polystyrene-based, polyolefin-based thermoplastic elastomer, polyurethane, fluorine, NBR, and EPDM are used.

  The top of the valve body 50 is fitted into and supported by the support groove 41 of the inner lid cylinder 38 from below, and a flat protective layer 53 made of thermoplastic resin or thermosetting resin is worn or deformed on the flat bottom 52. The protective layer 53 is in close contact with the sealing member 46 of the vent hole 45 without a gap. The protective layer 53 is laminated by a technique such as adhesion, heat welding, or coating.

When the gas does not flow, the valve body 50 is extended by the elastic repulsive force of the bent peripheral wall 51 to contact and close the vent 45 of the fixed cylinder 44 to restrict the gas flow (FIG. 4). reference).
On the other hand, when the gas is circulated, the peripheral wall 51 is compressed by the push-up of the supply / exhaust pin 60 penetrating through the vent 45 of the gas replacement device, and is separated from the vent 45 of the fixed cylinder 44. By opening the vent 45, gas is circulated through the filter 37 between the holding cylinder 31 and the fixed cylinder 44 (see FIG. 5).

  In the above, when assembling and mounting the valve mechanism 30 on the container body 1, first, the filter 37 and the inner lid cylinder 38 with the seal member 40 are sequentially fitted into the holding cylinder 31, and the engaging groove of the holding cylinder 31 is inserted. 33 is engaged with the engaging claw 42 of the inner lid cylinder 38, the filter 37 is appropriately sandwiched between the holding cylinder 31 and the partition ribs 32, 39 of the inner lid cylinder 38, and the valve body is inserted into the support groove 41 of the inner lid cylinder 38. 50 tops are inserted and supported.

  When the valve body 50 is fitted and supported in the inner lid cylinder 38 in this way, the holding cylinder 31 is fitted into the through hole 2 of the container body 1 from the inside of the container body 1 through the seal member 4 and fixed in the holding rib 3 of the through hole 2. The cylinder 44 is inserted and the fixed cylinder 44 is screwed to the opening back side of the holding cylinder 31, the flange 36 of the holding cylinder 31 is brought into contact with the peripheral edge of the through hole 2, and the fixed cylinder 44 is connected to the peripheral edge of the holding rib 3. If the flange 49 is brought into contact, the valve mechanism 30 can be assembled and firmly attached to the container body 1.

  Next, when the air in the substrate storage container mounted on the gas replacement device is replaced with an inert gas and the humidity and cleanliness in the substrate storage container are kept constant, the plurality of supply / discharge pins 60 of the gas replacement device are set. Each valve mechanism 30 may be raised and inserted into the air vent 45 of the supply / exhaust valve mechanism 30, and the valve body 50 of each valve mechanism 30 may be pushed up through the protective layer 53 by the supply / exhaust pin 60 and compressed.

  Then, as shown in FIG. 5, the bottom 52 of the valve body 50 is separated from the vent 45 of the air supply valve mechanism 30 to open the vent 45, so that the inert gas of the gas replacement device (see the arrow in FIG. 5). ) Sequentially flows through the vent 45, the inner lid cylinder 38, the filter 37, and the holding cylinder 31 of the fixed cylinder 44, and the inert gas is supplied into the substrate storage container.

  In this way, when the inert gas is supplied into the substrate storage container and is filled to increase the pressure, as shown in FIG. 6, the air in the substrate storage container (see the arrow in FIG. 6) holds the exhaust valve mechanism 30. The cylinder 31, the filter 37, the inner lid cylinder 38, and the vent hole 45 of the fixed cylinder 44 are sequentially circulated, and air is exhausted outside the substrate storage container. By exhausting the air, the air in the substrate storage container is replaced with an inert gas, so that the humidity and cleanliness in the substrate storage container can be kept constant.

  According to the above configuration, the holding cylinder 31, the inner lid cylinder 38, and the fixed cylinder 44 of the valve mechanism 30 are made of resin, and the valve body 50 is formed of an elastic material. Therefore, it is necessary to use a metal spring. Not at all. Therefore, with repeated cleaning of the substrate storage container, there is no possibility that the spring corrodes and contaminates the semiconductor wafer, or the ion component is eluted from the spring and causes contamination of the semiconductor wafer.

  Further, since the valve mechanism 30 is not composed of a large number of parts, but is composed of the holding cylinder 31, the filter 37, the inner lid cylinder 38, the fixed cylinder 44, and the valve body 50, the number of parts is reduced and the configuration is simplified. As a result, the assembly of the valve mechanism 30 can be made smooth, quick, easy, and the like. Further, since the same valve mechanism 30 can be used for air supply and exhaust, assembly work and component management are facilitated, and the air supply through-hole 2 is also connected to the exhaust through-hole 2. In addition, the valve mechanism 30 can be reliably mounted without error.

  Furthermore, since the supply / discharge pin 60 is not brought into direct contact with the valve body 50 of the valve mechanism 30 but is brought into contact with the protective layer 53 of the bottom portion 52, the bottom portion 52 of the valve body 50 is effectively protected from an impact caused by direct contact. Therefore, deformation and damage prevention of the bottom 52 of the valve body 50 can be greatly expected.

  Next, FIGS. 7 to 9 show a second embodiment of the present invention. In this case, it extends in the direction of the holding cylinder 31 at the peripheral edge of the vent 45 in the fixed cylinder 44 of the valve mechanism 30. A cylindrical tubular rib 54 is erected and its tip is formed as an inclined surface 55, and the bottom 52 of the valve body 50 is formed in a tapered conical shape contacting the inclined surface 55 of the tubular rib 54.

  The valve mechanism 30 can be used for air supply or exhaust as in the above embodiment, but when used for exhaust, it is mounted upside down in the through hole 2 of the container body 1. Is done. That is, when the valve mechanism 30 is used as an exhaust valve mechanism, the fixed cylinder 44 is inserted into the through hole 2 of the container body 1, and the holding cylinder 31 is inserted into the holding rib 3 of the through hole 2 from below. The Rukoto.

  The tip of the cylindrical rib 54 is formed in a substantially funnel shape in cross section to form an inclined surface 55. The inclined surface 55 is at an angle that makes contact with the conical bottom portion 52 of the valve body 50 without a gap. An elastic layer 56 is formed and made of a thermoplastic elastomer or rubber composition. The elastic layer 56 is laminated by, for example, sticking, insert molding, application and drying of a thermoplastic elastomer or a rubber composition, and is elastically in close contact with the bottom 52 of the valve body 50 so that the bottom 52 is effectively protected from damage. Functions to protect.

  The valve body 50 is formed in a bottomed cylindrical shape, and is bent into a continuous bellows 57 that can extend and contract on the holding cylinder 31 side of the peripheral wall 51. A recess 58 is cut out in the circumferential direction at the top of the inner peripheral surface of the valve body 50, and the recess 58 is fitted and supported by the support claw 59 on the rib back surface of the inner lid cylinder 38.

  In the above, when the air in the substrate storage container mounted on the gas replacement device is replaced with an inert gas, and the humidity and the cleanliness in the substrate storage container are kept constant, the gas replacement device supplies an inert gas (see FIG. 8). (See arrow) may be pumped to the vent 45 of the valve mechanism 30 for supplying air. Then, as shown in the figure, the bottom 52 of the valve body 50 is naturally separated from the cylindrical rib 54 of the fixed cylinder 44 by the compression of the bellows 57, and the vent 45 and the cylindrical rib 54 are opened. The inert gas sequentially flows through the vent 45, the cylindrical rib 54, the inner lid cylinder 38, the filter 37, and the holding cylinder 31 of the fixed cylinder 44, and the inert gas is supplied into the substrate storage container.

  When the inert gas is supplied into the substrate storage container in this manner and the pressure is increased by filling the substrate storage container, the bottom 52 of the valve body 50 is connected to the bellows 57 from the cylindrical rib 54 of the exhaust valve mechanism 30 as shown in FIG. Since the air vent 45 and the cylindrical rib 54 are released naturally by the compression, the air in the substrate storage container (see the arrow in FIG. 9) causes the air vent 45, the cylindrical rib 54, and the inner lid cylinder 38 of the fixed cylinder 44. The filter 37 and the holding cylinder 31 are sequentially circulated, and air is exhausted to the outside of the substrate storage container.

  By exhausting the air, the air in the substrate storage container is replaced with an inert gas, so that the humidity and cleanliness in the substrate storage container can be kept constant. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In the present embodiment, the same effect as that of the above embodiment can be expected, and the configuration of the valve mechanism 30 can be diversified. Obviously, since the valve body 50 does not need to be compressed, a significant simplification of the configuration of the gas displacement device can be expected.

  In the above embodiment, the container main body 1 for storing 25 semiconductor wafers arranged in the vertical direction is shown. However, the present invention is not limited to this. For example, it may be a container body 1 that stores two or three semiconductor wafers side by side, or may be a container body 1 that stores 25 semiconductor wafers side by side in a horizontal direction via a cassette.

  Further, in the above embodiment, the valve mechanisms 30 are respectively fitted to the pair of through holes 2 so that the valve mechanism 30 of one through hole 2 functions as an air supply valve, and the valve mechanisms 30 of the other through holes 2 are Although it was made to function as an exhaust valve, it is not limited to this. For example, the valve mechanisms 30 are respectively fitted to a plurality of (for example, four or six) through-holes 2 so that the valve mechanisms 30 of some of the through-holes 2 function as air supply, and the remaining through-holes 2 The valve mechanism 30 may function for exhaust.

  Moreover, in the said embodiment, although the valve mechanism 30 was fitted to the through-hole 2 of the container main body 1 via the sealing member 4, the opposing through-hole 2 was pierced in the container main body 1 and the bottom plate 5, respectively, The valve mechanism 30 may be fitted into the through hole 2 via the seal member 4. Alternatively, the through-hole 2 may be drilled in the lid 20, and the valve mechanism 30 may be fitted into the through-hole 2 via the seal member 4.

  Further, the seal members 4, 40, and 46 can be formed using a material such as fluorine rubber, NBR rubber, urethane rubber, EPDM rubber, or silicone rubber. Moreover, it can also form by coating the surface of the core member made of these materials with fluorosilicone. It is also possible to attach a separate ring or the like to the tip of the cylindrical rib 54 and form the inclined surface 55 on this ring. Further, the bottom portion 52 of the valve body 50 may be formed in a tapered truncated cone shape, or may be formed in a tapered shape having a curved bulging portion.

  In the first embodiment, the protective layer 53 of the valve body 50 is brought into close contact with the seal member 46 of the vent hole 45. However, the present invention is not limited to this. The bottom 52 of the valve body 50 can be directly brought into close contact with the sealing member 46 of the port 45 for sealing. Further, the seal member 46 may be attached to the bottom 52 of the valve body 50. Furthermore, in the second embodiment, the elastic layer 56 is laminated on the inclined surface 55 of the cylindrical rib 54, but the present invention is not limited to this, and the elastic layer 56 is provided on the inclined surface of the bottom 52 of the valve body 50. It may be provided.

It is a whole perspective explanatory view showing typically the embodiment of the valve mechanism and substrate storage container concerning the present invention. It is bottom explanatory drawing which shows typically embodiment of the valve mechanism which concerns on this invention, and a substrate storage container. It is a perspective explanatory view showing typically the embodiment of the valve mechanism concerning the present invention. It is a section explanatory view showing typically an embodiment of a valve mechanism and a substrate storage container concerning the present invention. It is a section explanatory view showing typically the state where the valve mechanism in the embodiment of the valve mechanism and substrate storage container concerning the present invention is used as a valve mechanism for air supply. It is a section explanatory view showing typically the state where the valve mechanism in the embodiment of the valve mechanism and substrate storage container concerning the present invention is used as a valve mechanism for exhaust. It is a section explanatory view showing typically the 2nd embodiment of the valve mechanism and substrate storage container concerning the present invention. It is a section explanatory view showing typically the state where the valve mechanism in a 2nd embodiment of the valve mechanism and substrate storage container concerning the present invention is used as a valve mechanism for supply of air. It is a section explanatory view showing typically the state where a valve mechanism in a 2nd embodiment of a valve mechanism and a substrate storage container concerning the present invention is used as a valve mechanism for exhaust.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container body 2 Through-hole 3 Holding rib 4 Seal member 20 Lid body 30 Valve mechanism 31 Holding cylinder 32 Partition rib 33 Engaging groove (concave part)
34 Screw thread 35 Position restriction protrusion (protrusion)
36 Flange 37 Filter 38 Inner lid tube 39 Partition rib 40 Seal member 41 Support groove 42 Engaging claw (convex portion)
44 Fixed cylinder 45 Vent 46 Seal member 47 Screw groove 48 Projection 49 Flange 50 Valve body 51 Peripheral wall 52 Bottom 53 Protective layer 54 Cylindrical rib 55 Inclined surface 56 Elastic layer 57 Bellows 59 Support claw 60 Supply / exhaust pin

Claims (10)

A substantially cylindrical holding cylinder, a filter that covers a partially opened surface of the holding cylinder, a bottomed cylindrical fixed cylinder that is fitted to the opening back side of the holding cylinder, and a holding cylinder and a fixed cylinder A valve mechanism including a valve body interposed therebetween to control the flow of gas,
The holding cylinder and the fixed cylinder are each made of a resin-containing molding material, a gas flow vent is provided at the bottom of the fixed cylinder, and the valve body is formed of an elastic material, and the holding cylinder and the fixed cylinder are fitted. The holding cylinder can be expanded and contracted in the mating direction, and the bottom of the valve body is brought into contact with and separated from the vent of the fixed cylinder, and the valve body is compressed to separate the bottom from the vent of the fixed cylinder. A valve mechanism characterized in that gas is circulated through a filter between the pipe and the fixed cylinder.   The holding cylinder incorporates a resin inner lid cylinder that sandwiches the valve element between the holding cylinder and the sealing cylinder via a sealing member, and partially opens the surface of the inner lid cylinder, so that the holding cylinder and the inner lid cylinder partially The valve mechanism according to claim 1, wherein a filter is interposed between the surfaces opened to the surface.   A concave portion is formed on one of the inner peripheral surface of the holding tube and the outer peripheral surface of the inner lid tube, and a convex portion is formed on the other, so that the concave portion and the convex portion interfere with each other. The valve mechanism according to claim 2, wherein the top of the valve body is supported.   The valve mechanism according to claim 1, 2, or 3, wherein a protrusion is provided on at least one of the holding cylinder and the fixed cylinder.   The valve mechanism according to any one of claims 1 to 4, wherein a seal member that contacts a bottom portion of the valve body is attached to a peripheral portion of a vent of the fixed cylinder.   The valve mechanism according to any one of claims 1 to 5, wherein the valve body is formed in a bottomed cylindrical shape, a peripheral wall thereof is bent into a substantially rectangular shape, and a protective layer made of resin is laminated on the bottom of the valve body.   A cylindrical rib that extends in the direction of the holding cylinder is provided at the peripheral edge of the vent of the fixed cylinder, the tip of the rib is an inclined surface, the valve body is formed into a bottomed cylinder, and the holding cylinder side of the peripheral wall is a bellows. The valve mechanism according to any one of claims 1 to 4, wherein a bottom portion of the body is formed to be tapered so as to come into contact with an inclined surface of the cylindrical rib.   The valve mechanism according to claim 7, wherein an elastic layer made of a thermoplastic elastomer or a rubber composition is laminated on the inclined surface of the cylindrical rib. A substrate storage container comprising a container main body for storing a substrate and a detachable lid for opening and closing the opening of the container main body,
A substrate storage container, wherein a through hole is provided in at least one of the container main body and the lid, and the valve mechanism according to claim 1 is fitted into the through hole.   The substrate storage container according to claim 9, wherein a sealing member is interposed between the through hole and the valve mechanism, and a flange that is hooked to a peripheral portion of the through hole is provided in a holding cylinder or a fixed cylinder of the valve mechanism.

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