JP7055949B2 - Board storage container - Google Patents

Description

The present invention relates to a substrate storage container provided with a valve body that controls the flow of gas to the container body.

The substrate storage container for accommodating the substrate includes a container body, a lid for closing the opening of the container body, and a valve body for controlling the flow of gas to the container body. This valve body has a check valve function, and has a valve body and a metal elastic member that opens and closes the valve body (see, for example, Patent Document 1 and Patent Document 2).

Checking the valve body Since the valve function controls the flow of gas in one direction, the valve body itself is replaced or the valve body and elastic members are rearranged according to the gas flow direction. ..

Japanese Unexamined Patent Publication No. 2008-066330 Japanese Unexamined Patent Publication No. 2004-179449

By the way, in the substrate storage container, gas is supplied from the valve body and discharged through the valve body in order to store the substrate in an airtight state, but residual substances adhering to the substrate when the substrate to be stored is processed. May be discharged with the supplied gas. Therefore, the metal elastic member of the valve body may be corroded by the residual substance.

Therefore, the present invention has been made in view of the above problems, and an object of the present invention is to provide a substrate storage container provided with a valve body capable of controlling the flow of gas without using a metal member.

(1) One aspect of the present invention is a substrate storage including a container body for storing the substrate, a lid for closing the opening of the container body, and a valve body for controlling the flow of gas to the container body. In a container, the valve body covers a tubular elastic body, a first tubular portion formed with a first adhered portion to which one side of the elastic body is adhered, and the other side of the elastic body. It has a second cylinder portion in which a second adhered portion to be attached is formed, and an internal space formed by the first cylinder portion and the second cylinder portion, and the first adhered portion has the said. A first communication hole communicating with the outside of the container body is formed, and in the second cylinder portion, a second communication hole communicating with the inside of the container body is formed on the inner space side outside the elastic body. The first adhered portion or the second adhered portion and the elastic body are separated from each other to control the flow of the gas to the container body.
(2) Another aspect of the present invention includes a container body for accommodating a substrate, a lid for closing the opening of the container body, and a valve body for controlling the flow of gas to the container body. The valve body is a substrate storage container, and the valve body is a tubular elastic body, a first tubular portion formed with a first adhered portion to which one side of the elastic body is adhered, and the other side of the elastic body. The first cylinder portion has a second cylinder portion in which a second adhered portion is formed, and an internal space formed by the first cylinder portion and the second cylinder portion. A first communication hole communicating with the outside of the container body is formed on the inner space side outside the elastic body, and a second communication hole communicating with the inside of the container body is formed in the second adherend portion. The gas flow to the container body is controlled by separating the first adherend portion or the second adherend portion from the elastic body.
(3) Another aspect of the present invention includes a container body for accommodating a substrate, a lid for closing the opening of the container body, and a valve body for controlling the flow of gas to the container body. The valve body is a substrate storage container, and the valve body is a tubular elastic body, a first tubular portion formed with a first adhered portion to which one side of the elastic body is adhered, and the other side of the elastic body. The second cylinder portion in which the second adhered portion to be adhered is formed, the internal space formed by the first cylinder portion and the second cylinder portion, the first adhered portion and the second coated portion. The first adhered portion is formed with a first communication hole that communicates with the outside of the container body, and has a plug portion that is located between the attachment portions and that the elastic body is brought into contact with and detached from. In the two-cylinder portion, a second communication hole communicating with the inside of the container body is formed outside the second adherend portion, and the elastic body is closer to the second adherent portion than the plug portion. The third communication hole is formed, and the plug portion and the elastic body are separated from each other to control the flow of the gas to the container body.
(4) Another aspect of the present invention includes a container body for accommodating a substrate, a lid for closing the opening of the container body, and a valve body for controlling the flow of gas to the container body. The valve body is a substrate storage container, and the valve body includes a tubular elastic body, a first tubular portion on which a first adhered portion to be adhered to one side of the elastic body is formed, and the first tubular portion. It has a second tubular portion that forms an internal space between the two, and a plug portion that is formed in the first tubular portion and adheres to the other side of the elastic body, and the first adhered portion is said to have the same. A first communication hole communicating with the outside of the container body is formed, and a second communication hole communicating with the inside of the container body is formed in the second cylinder portion, and the plug portion and the elastic body are formed. By separating them, the flow of the gas to the container body is controlled.
(5) Another aspect of the present invention includes a container body for accommodating a substrate, a lid for closing the opening of the container body, and a valve body for controlling the flow of gas to the container body. The valve body is a substrate storage container, and the valve body is a tubular elastic body, a first tubular portion formed with a first adhered portion to which one side of the elastic body is adhered, and the other side of the elastic body. The second cylinder portion in which the second adhered portion to be adhered is formed, the internal space formed by the first cylinder portion and the second cylinder portion, the first adhered portion and the second coated portion. The first tubular portion has a plug portion that is located between the attachment portions and that the elastic body comes into contact with and separates from the contact portion, and the first tubular portion has a first communication hole that communicates with the outside of the container body, rather than the elastic body. The second adhered portion is formed on the outer inner space side, the second communicating hole is formed to communicate with the inside of the container body, and the elastic body is closer to the first adhered portion than the plug portion. A third communication hole is formed in the container, and the plug portion and the elastic body are separated from each other to control the flow of the gas to the container body.
(6) Another aspect of the present invention includes a container body for accommodating a substrate, a lid for closing the opening of the container body, and a valve body for controlling the flow of gas to the container body. The valve body is a substrate storage container, and the valve body includes a tubular elastic body, a second tubular portion on which a second adhered portion to be adhered to the other side of the elastic body is formed, and a second tubular portion. It has a first cylinder portion that forms an internal space between them, and a plug portion that is formed in the second cylinder portion and adheres to one side of the elastic body. The first cylinder portion is the container body. A first communication hole communicating with the outside of the container is formed, and a second communication hole communicating with the inside of the container body is formed in the second adherend portion, and the plug portion and the elastic body are separated from each other. By doing so, the flow of the gas to the container body is controlled.
(7) Another aspect of the present invention includes a container body for accommodating a substrate, a lid for closing the opening of the container body, and a valve body for controlling the flow of gas to the container body. The valve body is a substrate storage container, and the valve body includes a tubular elastic body, a first tubular portion in which a first adhered portion for adhering the elastic body to an outer surface is formed, and the first tubular portion. It has a second cylinder portion that forms an internal space between them, and the first adherend portion has a first communication hole that communicates with the outside of the container body, and the first communication hole and the above. A fourth communication hole that communicates with the outer surface is formed, and a second communication hole that communicates with the inside of the container body is formed in the second cylinder portion, and the fourth communication hole and the elastic body are formed. By separating them, the flow of the gas to the container body is controlled.
(8) Another aspect of the present invention includes a container body for accommodating a substrate, a lid for closing the opening of the container body, and a valve body for controlling the flow of gas to the container body. The valve body is a substrate storage container, and the valve body includes a tubular elastic body, a second tubular portion in which a second adhered portion for adhering the elastic body to an outer surface is formed, and the second tubular portion. It has a first cylinder portion that forms an internal space between them, and the second adherent portion has a second communication hole that communicates with the inside of the container body, and the second communication hole and the said. A fourth communication hole communicating with the outer surface is formed, and a first communication hole communicating with the outside of the container body is formed in the first cylinder portion, and the fourth communication hole and the elastic body are formed. By separating them, the flow of the gas to the container body is controlled.

According to the present invention, it is possible to provide a substrate storage container provided with a valve body capable of controlling the flow of gas without using a metal member.

It is a schematic exploded perspective view which shows the substrate storage container of the embodiment which concerns on this invention. It is (a) sectional perspective view and (b) sectional view which shows the valve body of 1st Embodiment. It is schematic cross-sectional view which shows (a) the state which cut off the gas flow, and (b) the state which enabled the gas flow of the valve body of 1st Embodiment attached to a substrate storage container. It is schematic cross-sectional view which shows (a) the state which cut off the gas flow, and (b) the state which enabled the gas flow of the valve body of the 2nd Embodiment attached to the substrate storage container. It is schematic cross-sectional view which shows (a) the state which cut off the gas flow, and (b) the state which enabled the gas flow of the valve body of the 3rd Embodiment attached to the substrate storage container. It is schematic cross-sectional view which shows (a) the state which cut off the gas flow, and (b) the state which enabled the gas flow of the valve body of 4th Embodiment attached to the substrate storage container. It is (a) sectional perspective view and (b) sectional view which shows the valve body of 5th Embodiment. It is schematic cross-sectional view which shows (a) the state which cut off the gas flow, and (b) the state which enabled the gas flow of the valve body of the 5th Embodiment attached to the substrate storage container. It is schematic cross-sectional view which shows (a) the state which cut off the gas flow, and (b) the state which enabled the gas flow of the valve body of the 6th Embodiment attached to the substrate storage container, respectively. It is schematic cross-sectional view which shows (a) the state which cut off the gas flow, and (b) the state which enabled the gas flow of the valve body of 7th Embodiment attached to the substrate storage container. It is schematic cross-sectional view which shows (a) the state which cut off the gas flow, and (b) the state which enabled the gas flow of the valve body of 8th Embodiment attached to the substrate storage container. It is a schematic cross-sectional view which shows the attachment structure of an elastic body, and is (a) modification 1 and (b) modification 2. It is (a) mounting state, (b) schematic cross-sectional view which shows the valve body of the 9th Embodiment attached to the board storage container.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments of the present specification, the same members are designated by the same reference numerals throughout.

FIG. 1 is a schematic exploded perspective view showing a substrate storage container 1 according to an embodiment of the present invention.
As shown in FIG. 1, the substrate storage container 1 is provided between the container main body 10 for accommodating the substrate W, the lid 20 for closing the opening 11 of the container main body 10, and the container main body 10 and the lid 20. It is provided with an annular packing 30.

The container body 10 is a box-shaped body, and is a front open type having an opening 11 formed in the front surface. The opening 11 is bent and formed with a step so as to spread outward, and the surface of the step portion is formed on the inner peripheral edge of the front surface of the opening 11 as a sealing surface 12 with which the packing 30 contacts. The container body 10 is preferably a front open type because it is easy to insert a substrate W having a diameter of 300 mm or 450 mm, but it may be a bottom open type in which the opening 11 is formed on the lower surface.

Supports 13 are arranged on the left and right sides of the inside of the container body 10. The support 13 has a function of placing and positioning the substrate W. A plurality of grooves are formed in the support 13 in the height direction to form a so-called groove teeth. The substrate W is placed on two groove teeth on the left and right at the same height. The material of the support 13 may be the same as that of the container body 10, but different materials may be used in order to improve the cleanability and slidability.

Further, a rear retainer (not shown) is arranged behind (inside) the inside of the container body 10. When the lid 20 is closed, the rear retainer is paired with the front retainer described later to hold the substrate W. However, the support 13 does not have a rear retainer as in the present embodiment, but has a front retainer and a substrate by having a substrate holding portion having, for example, a “dogleg” shape or a linear shape on the back side of the groove teeth. The substrate W may be held by the holding portion. These supports 13 and rear retainers are provided on the container body 10 by insert molding, fitting, or the like.

The substrate W is supported by the support 13 and stored in the container body 10. An example of the substrate W is a silicon wafer, but the wafer is not particularly limited, and may be, for example, a quartz wafer, a gallium arsenide wafer, or the like.

A robotic flange 14 is detachably provided at the center of the ceiling of the container body 10. The substrate storage container 1 in which the substrate W is airtightly stored in a clean state is grasped by the transfer robot in the factory with the robotic flange 14 and conveyed to the processing apparatus for each process of processing the substrate W.

Further, manual handles 15 held by the operator are detachably attached to the central portions of the outer surfaces of both side portions of the container body 10.

An air supply unit 16 and an exhaust unit 17 are provided on the inner bottom surface of the container body 10, and valve bodies 40 and 50, which will be described later, are attached to the outer bottom surface of the container body 10. These are supplied by supplying an inert gas such as nitrogen gas or dry air from the air supply unit 16 to the inside of the substrate storage container 1 closed by the lid 20, and discharging the dry air from the exhaust unit 17 as needed. By replacing the gas inside the substrate storage container 1, maintaining an airtight state with low humidity, and blowing off impurities on the substrate W, the cleanliness inside the substrate storage container 1 can be maintained. There is. In addition to supplying gas from the air supply unit 16, the exhaust unit 17 may be connected to a negative pressure (vacuum) generator to forcibly discharge the gas from the exhaust unit 17.

Further, by detecting the gas exhausted from the exhaust unit 17, it is possible to confirm whether the inside of the substrate storage container 1 has been replaced with the introduced gas. The air supply unit 16 and the exhaust unit 17 are preferably located outside the position where the substrate W is projected onto the bottom surface, but the quantity and position of the air supply unit 16 and the exhaust unit 17 are limited to those shown in the figure. Instead, it may be located at the four corners of the bottom surface of the container body 10. Further, the air supply unit 16 and the exhaust unit 17 may be attached to the side of the lid body 20.

On the other hand, the lid 20 is a substantially rectangular shape attached to the front of the opening 11 of the container body 10. The lid 20 has a locking mechanism (not shown), and is locked by fitting a locking claw into a locking hole (not shown) formed in the container body 10. Further, the lid 20 is detachably attached or integrally formed with an elastic front retainer (not shown) that horizontally holds the front peripheral edge of the substrate W in the central portion.

Since the front retainer is a portion where the wafer comes into direct contact with the groove teeth of the support 13 and the substrate holding portion, a material having good detergency and slidability is used. The front retainer can also be provided on the lid 20 by insert molding, fitting, or the like.

The lid 20 is formed with a mounting groove 21 for mounting the packing 30. More specifically, on the surface of the lid 20 on the container body 10 side, a convex portion 22 smaller than the step portion of the opening 11 is formed in an annular shape, whereby a mounting groove 21 having a substantially U-shaped cross section is formed in an annular shape. ing. When the lid 20 is attached to the container body 10, the convex portion 22 penetrates deeper than the stepped portion of the opening 11.

Examples of the material of the container body 10 and the lid 20 include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyethersulphon, polyetheretherketone, and liquid crystal polymer. The thermoplastic resin may be further appropriately added with a conductive agent made of conductive carbon, conductive fiber, metal fiber, conductive polymer and the like, various antistatic agents, an ultraviolet absorber and the like.

Next, the packing 30 has an annular shape corresponding to the front shape of the lid 20 (and the shape of the opening 11 of the container body 10), and in the present embodiment, it has a rectangular frame shape. However, the annular packing 30 may have a ring shape before being attached to the lid 20.

The packing 30 is arranged between the sealing surface 12 of the container body 10 and the lid body 20, and when the lid body 20 is attached to the container body 10, the packing 30 is in close contact with the sealing surface 12 and the lid body 20 to be a substrate storage container. The airtightness of No. 1 is ensured, the invasion of dust, moisture and the like from the outside into the substrate storage container 1 is reduced, and the leakage of gas from the inside to the outside is reduced.

As the material of the packing 30, a thermoplastic elastomer composed of a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, a urethane-based elastomer, etc., and an elastic material such as fluororubber, ethylene propylene rubber, and silicone-based rubber are used. Can be used. From the viewpoint of improving adhesion, these materials include fillers made of carbon, glass fiber, mica, talc, silica, calcium carbonate, etc., and resins such as polyethylene, polyamide, polyacetal, fluororesin, and silicone resin. A predetermined amount may be selectively added.

Here, the valve body 40 of the first embodiment will be described. FIG. 2 is a (a) cross-sectional perspective view and (b) cross-sectional view showing the valve body 40 of the first embodiment. FIG. 3 is a schematic cross-sectional view showing (a) a state in which gas flow is blocked and (b) a state in which gas flow is enabled, respectively, of the valve body 40 of the first embodiment attached to the substrate storage container 1. be.

The valve body 40 controls the flow of gas to the container body 10, and when attached to the container body 10, communicates with the air supply unit 16 via a gas flow path (not shown).

The valve body 40 is fixed by being fitted into the through hole 18 (see FIG. 3) formed by the rib 180 of the container body 10 from below through the fixing cylinder 41 and the through hole 18 from above via the seal member 45. It has a holding cylinder 42 that is detachably combined with the cylinder 41 by screwing from above. As a result, an internal space S is formed between the fixed cylinder 41 and the holding cylinder 42.

The fixed cylinder 41 is formed in a bottomed cylindrical shape with the inner side of the container body 10 open, and a screw groove 412 for mounting for mounting the holding cylinder 42 is screwed on the inner peripheral surface of the fixed cylinder 41. It is formed. Further, a ring-shaped flange 413 extending in the outer radius direction is provided around the outer peripheral surface of the fixed cylinder 41 so as to come into contact with the opening peripheral edge portion of the rib 180.

Further, in the fixed cylinder 41, the first adhered portion 410 rises from the bottom at the center of the bottom and extends toward the holding cylinder 42 to form a columnar shape. Further, inside the first adherend portion 410, a first communication hole 411 communicating with the outside of the container body 10 is formed.

On the other hand, the holding cylinder 42 is formed in a bottomed cylindrical shape with the outer side of the container body 10 open, and a ring-shaped flange 423 extending in the outer radial direction is provided around the outer peripheral surface of the holding cylinder 42. It is in contact with the peripheral edge of the opening of the through hole 18. Further, a screw groove 422 for attaching to the fixed cylinder 41 is spirally formed on the outer peripheral surface of the holding cylinder 42, and the screw groove 422 is screwed with the screw groove 412 of the fixed cylinder 41. However, the fixed cylinder 41 and the holding cylinder 42 may be attached to each other by other methods such as press fitting or locking instead of screwing.

Further, in the holding cylinder 42, partition ribs 424 for partitioning a plurality of vents 421 for gas flow are arranged in a grid pattern or radially on the side communicating with the inside of the container body 10, and the partition ribs 424 are arranged. A storage space for accommodating the filter 46, which will be described later, is formed on the back surface (fixed cylinder 41 side).

A sealing member 45 is mounted on the outer peripheral surface of the holding cylinder 42, and the outside air and cleaning liquid that enter the inside of the container body 10 are blocked from between the holding cylinder 42 and the inner peripheral surface of the through hole 18. In addition, the gas leaking from the inside of the container body 10 can be blocked.

By the way, the valve body 40 also has an inner lid cylinder 43 which is attached to the inner peripheral wall of the holding cylinder 42 via a seal member 47 and holds the filter 46 between the valve body 40 and the holding cylinder 42. That is, an internal space S is formed between the fixed cylinder 41 and the inner lid cylinder 33 attached to the holding cylinder 42.

The inner lid cylinder 43 is formed in a bottomed cylindrical shape with the outer side of the container body 10 open, and the filter 46 is placed on the inner side of the container body 10. Further, a protrusion is formed on the outer peripheral surface of the inner lid cylinder 43, and by engaging with the locking groove formed on the inner peripheral surface side of the holding cylinder 42, the inner lid cylinder 43 becomes the holding cylinder 42. It is connected and attached.

Further, in the inner lid cylinder 43, the second adherend portion 430 is formed in a columnar shape, which descends from the top portion at the center of the top portion and extends toward the fixed cylinder 41. Further, a second communication hole 431 that communicates with the inside of the container body 10 is formed on the outside of the second adhered portion 430 (the side exposed to the internal space S). In the first embodiment, the second adherend portion 430 has a solid columnar shape, but the tip may be formed in a solid truncated cone shape. Further, the fixed cylinder 41 side of the second adherend portion 430 may be recessed (substantially hollow) in a circular concave shape.

The above-mentioned fixed cylinder 41, holding cylinder 42, and inner lid cylinder 43 are molded from, for example, a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, or liquid crystal polymer. Further, for the sealing members 45 and 47, for example, an O-ring made of a material such as fluororubber, NBR rubber, urethane rubber, EPDM rubber, or silicone rubber is used.

Further, the valve body 40 has an elastic body 44 that covers the first adherend portion 410 and the second adherend portion 430. The elastic body 44 has a cylindrical shape having an internal passage having an inner diameter equal to or smaller than the outer diameter of at least the smaller of the first adherend portion 410 or the second adherend portion 430, and has one side end portion of the elastic body 44 and an elastic body 44. The other side end is attached to the first adherend 410 and the second adherence 430, respectively. Since the inner diameter of the elastic body 44 becomes smaller by attaching the elastic body 44 in a stretched state, even if the inner diameter is equal to the outer diameter of the first adherend portion 410 or the second adherent portion 430, the inner diameter thereof is the same. Adhesion to 1 adherent portion 410 or 2 adhered portion 430 is improved.

As the material of the elastic body 44, various rubbers, thermoplastic elastomer resins, and the like can be used. For example, a thermoplastic elastomer composed of a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, a urethane-based elastomer, etc., a fluororubber, an ethylene propylene rubber, a silicone-based rubber, and the like can be used.

The filter 46 filters the gas supplied or discharged, and is a porous film made of ethylene tetrafluoride, polyester fiber, fluororesin, etc., a molecular filtration filter made of glass fiber, etc., and a filter medium such as activated carbon fiber. It is selected from a chemical filter or the like carrying a chemical adsorbent.

One or a plurality of filters 46 are held between the holding cylinder 42 and the inner lid cylinder 43. When using a plurality of filters 46, they may be of the same type, but it is better to combine filters having different properties because it is possible to prevent contamination of organic substances in addition to particles. preferable. For example, the filter 46 also has a function of suppressing the passage of the liquid so that the liquid such as water or the cleaning liquid does not stay when the container body 10 is washed. Therefore, one of the filters 46 is made of a hydrophobic or hydrophilic material. May be used to further suppress the permeation of the liquid.

Finally, a state in which the valve body 40 of the first embodiment controls the flow of gas will be described.
In FIG. 3A, when a positive pressure is not applied to the first communication hole 411 or a positive pressure is applied to the second communication hole 431, the elastic body 44 has the first adhered portion 410 and the second adhered portion 430. It is in close contact with the gas and blocks the flow of gas to either side.

On the contrary, as shown by an arrow in FIG. 3B, when a positive pressure of a predetermined value or more is applied to the first communication hole 411, the elastic body 44 elastically deforms and swells according to the magnitude of the positive pressure. Then, a gap C is formed between the first adherend portion 410 or the second adherent portion 430. Then, the gas from the first communication hole 411 side passes through this gap C, is opened to the internal space S, flows to the second communication hole 431 side, and is supplied to the inside of the container body 10.

As described above, the valve body 40 of the first embodiment can only allow the flow of gas from the outside. At this time, the predetermined value of the pressure at which the gas can flow can be adjusted by changing the material, hardness and thickness of the elastic body 44, and the distance between the first adherend portion 410 and the second adherend portion 430. be. Further, for example, in the first embodiment, the thickness of the elastic body 44 is formed thinner on the second adherend 430 side than on the first adhered portion 410 side, and the elastic body 44 and the second adhered portion 430 are formed. Although the gap C is configured to be formed between the elastic body 44 and the elastic body 44, the gap C may be formed between the elastic body 44 and the first adherend portion 410. Further, when the tip of the first adhered portion 410 or the second adhered portion 430 is formed in a truncated cone shape, the elastic body 44 has an outer peripheral surface and a surface of the first adhered portion 410 or the second adhered portion 430. Since the contact is not a contact but a substantially annular line contact, a gap C can be formed between the elastic body 44 and the first adhered portion or the second adhered portion 430 at a lower pressure.

(Second Embodiment)
Next, the valve body 140 of the second embodiment will be described. FIG. 4 is a schematic cross-sectional view showing (a) a state in which gas flow is blocked and (b) a state in which gas flow is enabled, respectively, of the valve body 140 of the second embodiment attached to the substrate storage container 1. be.

The valve body 140 has a fixed cylinder 41, a holding cylinder 42, and an inner lid cylinder 143, similarly to the valve body 40 of the first embodiment. Since these configurations are basically the same as those of the valve body 40 of the first embodiment, the description of substantially the same parts will be omitted, and the different parts will be described in detail.

In the inner lid cylinder 143, the second adherend portion 430 is formed in a columnar shape, which descends from the top portion to the center of the top portion and extends toward the fixed cylinder 41. Further, a second communication hole 431 that communicates with the inside of the container body 10 is formed on the outside of the second adhered portion 430 (the side facing the internal space S).

Further, a support column 48 is hung down from the second adhered portion 430, and a disk-shaped plug portion 49 is formed at the tip of the support column 48. However, conversely, the support column 48 may be supported from the side of the first adherend portion 410 by a stay or the like, and may be formed so as to project from the first adherent portion 410 toward the second adherent portion 430.

The disk-shaped plug portion 49 is located between the first adherend portion 410 and the second adherent portion 430, and is located outside at least the smaller of the first adherent portion 410 or the second adherent portion 430. It has a diameter equal to or greater than the outer diameter. In the second embodiment, the outer diameter of the first adhered portion 410, the outer diameter of the second adhered portion 430, and the outer diameter of the disc-shaped plug portion 49 are all formed to have the same diameter.

The elastic body 144 is attached to the first adhered portion 410 and the second adhered portion 430 so as to be in close contact with the disc-shaped plug portion 49. Further, the elastic body 144 is formed with at least one third communication hole 1441 on the side of the second adhered portion 430 with respect to the disc-shaped plug portion 49.

Finally, a state in which the valve body 140 of the second embodiment controls the flow of gas will be described.
In FIG. 4A, when a positive pressure is not applied to the first communication hole 411 or a positive pressure is applied to the second communication hole 431, the elastic body 144 is in close contact with the disc-shaped plug portion 49, and eventually. It also blocks the flow of gas to the side of.

On the contrary, as shown by an arrow in FIG. 4B, when a positive pressure of a predetermined value or more is applied to the first communication hole 411, the elastic body 44 elastically deforms and swells according to the magnitude of the positive pressure. Then, a gap C is formed between the disc-shaped plug portion 49 and the disc-shaped plug portion 49. Then, the gas from the first communication hole 411 side passes through this gap C, is opened to the internal space S, flows to the second communication hole 431 side, and is supplied to the inside of the container body 10.

As described above, the valve body 140 of the second embodiment can only allow the flow of gas from the outside. At this time, the predetermined values of the pressure at which the gas can flow are the material, hardness and thickness of the elastic body 144, the distance between the first adhered portion 410 and the second adhered portion 430, and the disk-shaped plug portion 49. It can be adjusted by changing the position of.

(Third Embodiment)
Next, the valve body 240 of the third embodiment will be described. FIG. 5 is a schematic cross-sectional view showing (a) a state in which gas flow is blocked and (b) a state in which gas flow is enabled, respectively, of the valve body 240 of the third embodiment attached to the substrate storage container 1. be.

The valve body 240 has a fixed cylinder 241, a holding cylinder 42, and an inner lid cylinder 43, similarly to the valve body 40 of the first embodiment. Since these configurations are basically the same as those of the valve body 40 of the first embodiment, the description of substantially the same parts will be omitted, and the different parts will be described in detail.

A support column 48 is supported by a stay or the like on the fixed cylinder 241, and a disk-shaped plug portion 49 is formed at the tip of the support column 48. The disk-shaped plug portion 49 is located between the first adherend portion 410 and the second adherent portion 430, and is located outside at least the smaller of the first adherent portion 410 or the second adherent portion 430. It has a diameter equal to or greater than the outer diameter. In the third embodiment, the outer diameter of the first adherend portion 410 and the outer diameter of the disc-shaped plug portion 49 are formed to have the same diameter.

In the inner lid cylinder 43, the second adherend portion 430 is formed in a columnar shape, which descends from the top portion at the center of the top portion and extends toward the fixed cylinder 241. However, the second adherend portion 430 exists in order to enable the inner lid cylinder 43 to be diverted to other embodiments, and is not necessarily an essential configuration in the present embodiment.

The elastic body 44 is attached only to the first adherend portion 410 and the disc-shaped plug portion 49 so as to be in close contact with the disc-shaped plug portion 49.

Finally, a state in which the valve body 240 of the third embodiment controls the flow of gas will be described.
In FIG. 5A, when a positive pressure is not applied to the first communication hole 411 or a positive pressure is applied to the second communication hole 431, the elastic body 44 comes into close contact with the disc-shaped plug portion 49, and eventually It also blocks the flow of gas to the side of.

On the contrary, as shown by an arrow in FIG. 5B, when a positive pressure of a predetermined value or more is applied to the first communication hole 411, the elastic body 144 elastically deforms and swells according to the magnitude of the positive pressure. Then, a gap C is formed between the disc-shaped plug portion 49 and the disc-shaped plug portion 49. Then, the gas from the first communication hole 411 side passes through this gap C, is opened to the internal space S, flows to the second communication hole 431 side, and is supplied to the inside of the container body 10.

As described above, the valve body 240 of the third embodiment can only allow the flow of gas from the outside. At this time, the predetermined value of the pressure at which the gas can flow can be adjusted by changing the material, hardness and thickness of the elastic body 44, and the distance between the first adherend portion 410 and the disk-shaped stopper portion 49. Is.

(Fourth Embodiment)
Next, the valve body 340 of the fourth embodiment will be described. FIG. 6 is a schematic cross-sectional view showing (a) a state in which gas flow is blocked and (b) a state in which gas flow is enabled, respectively, of the valve body 340 of the fourth embodiment attached to the substrate storage container 1. be.

The valve body 340 has a fixed cylinder 341, a holding cylinder 42, and an inner lid cylinder 43, similarly to the valve body 40 of the first embodiment. Since these configurations are basically the same as those of the valve body 40 of the first embodiment, the description of substantially the same parts will be omitted, and the different parts will be described in detail.

In the fixed cylinder 341, the first adhered portion 410 rises from the bottom at the center of the bottom and extends toward the holding cylinder 42 to form a columnar shape. Further, at least one fourth communication hole 1411 is formed on the outer peripheral surface of the first adhered portion 410, and a disk-shaped plug portion 49 is formed at the tip of the first adhered portion 410. There is. The disk-shaped plug portion 49 has a diameter equal to the outer diameter of the first adherend portion 410.

In the inner lid cylinder 43, the second adherend portion 430 is formed in a columnar shape, which descends from the top portion at the center of the top portion and extends toward the fixed cylinder 341. However, the second adherend portion 430 exists in order to enable the inner lid cylinder 43 to be diverted to other embodiments, and is not necessarily an essential configuration in the present embodiment.

The elastic body 44 is attached to the first adhered portion 410 so as to be in close contact with the outer peripheral surfaces of the first adhered portion 410 and the disc-shaped plug portion 49 and close the fourth communication hole 1411.

Finally, a state in which the valve body 340 of the fourth embodiment controls the flow of gas will be described.
In FIG. 6A, when a positive pressure is not applied to the first communication hole 411 or a positive pressure is applied to the second communication hole 431, the elastic body 44 comes into close contact with the fourth communication hole 1411 on either side. It also blocks the flow of gas.

On the contrary, as shown by an arrow in FIG. 6B, when a positive pressure of a predetermined value or more is applied to the first communication hole 411, the elastic body 44 elastically deforms and swells according to the magnitude of the positive pressure. Then, it is separated from the fourth communication hole 1411 and further forms a gap C between the disc-shaped plug portion 49 and the disc-shaped plug portion 49. Then, the gas from the first communication hole 411 side passes through the fourth communication hole 1411 and the gap C, is opened to the internal space S, flows to the second communication hole 431 side, and enters the inside of the container body 10. Be supplied.

As described above, the valve body 340 of the fourth embodiment can only allow the flow of gas from the outside. At this time, the predetermined value of the pressure at which the gas can flow can be adjusted by changing the material, hardness and thickness of the elastic body 44, and the total opening area of the fourth communication hole 1411.

(Fifth Embodiment)
Next, the valve body 50 of the fifth embodiment will be described. FIG. 7 is a cross-sectional perspective view (a) and a cross-sectional view (b) showing the valve body 50 of the fifth embodiment. FIG. 8 is a schematic cross-sectional view showing, respectively, a state in which the valve body 50 attached to the substrate storage container 1 is blocked from gas flow and a state in which gas flow is enabled.

The valve body 50 controls the flow of gas to the container body 10, and when attached to the container body 10, communicates with the exhaust unit 17 via a gas flow path (not shown).

As shown in FIG. 7, the valve body 50 has a fixed cylinder 541 fitted from below into a through hole 18 (see FIG. 8) formed by a rib 180 of the container body 10, and a seal member 45 is inserted into the through hole 18. It has a holding cylinder 42 that is fitted from above and is detachably combined with the fixed cylinder 541 by screwing from above. As a result, an internal space S is formed between the fixed cylinder 541 and the holding cylinder 42.

The fixed cylinder 541 is formed in a bottomed cylindrical shape with the inner side of the container body 10 open, and a screw groove 412 for mounting for mounting the holding cylinder 42 is screwed on the inner peripheral surface of the fixed cylinder 541. It is formed. Further, a ring-shaped flange 413 extending in the outer radius direction is provided around the outer peripheral surface of the fixed cylinder 41 so as to come into contact with the opening peripheral edge portion of the rib 180.

Further, in the fixed cylinder 541, the first adherend portion 410 rises from the bottom portion at the center of the bottom portion and extends toward the holding cylinder 42 to form a columnar shape. Further, on the outside of the first adherend portion 410 (the side exposed to the internal space S), a first communication hole 411 communicating with the outside of the container body 10 is formed. In the fifth embodiment, the first adherend 410 is a solid columnar shape, but the tip may be formed into a solid truncated cone shape. Further, the holding cylinder 42 side of the first adherend 410 may be recessed (substantially hollow) in a circular concave shape.

On the other hand, the holding cylinder 42 is formed in a bottomed cylindrical shape with the outer side of the container body 10 open, and a ring-shaped flange 423 extending in the outer radial direction is provided around the outer peripheral surface of the holding cylinder 42. It is in contact with the peripheral edge of the opening of the through hole 18. Further, a screw groove 422 for attaching to the fixed cylinder 541 is spirally formed on the outer peripheral surface of the holding cylinder 42, and the screw groove 422 is screwed with the screw groove 412 of the fixed cylinder 541. However, the fixed cylinder 541 and the holding cylinder 42 may be attached to each other by other methods such as press fitting or locking instead of screwing.

Further, in the holding cylinder 42, partition ribs 424 for partitioning a plurality of vents 421 for gas flow are arranged in a grid pattern or radially on the inner side of the container body 10 (bottom surface), and the partition ribs 424 are arranged. A storage space for accommodating the filter 46, which will be described later, is formed on the back surface.

A sealing member 45 is mounted on the outer peripheral surface of the holding cylinder 42, and the outside air and cleaning liquid that enter the inside of the container body 10 are blocked from between the holding cylinder 42 and the inner peripheral surface of the through hole 18. In addition, the gas leaking from the inside of the container body 10 can be blocked.

By the way, the valve body 50 also has an inner lid cylinder 543 that is attached to the inner peripheral wall of the holding cylinder 42 via a seal member 47 and holds the filter 46 between the valve body 50 and the holding cylinder 42.

The inner lid cylinder 543 is formed in a bottomed cylindrical shape with the outer side of the container body 10 open, and the filter 46 is placed on the inner side of the container body 10. Further, a protrusion is formed on the outer peripheral surface of the inner lid cylinder 543, and by engaging with the locking groove formed on the inner peripheral surface side of the holding cylinder 42, the inner lid cylinder 543 becomes the holding cylinder 42. It is connected and attached.

Further, in the inner lid cylinder 543, the second adherend portion 430 is formed in a columnar shape, which descends from the top portion at the center of the top portion and extends toward the fixed cylinder 541. Further, inside the second adherend portion 430, a second communication hole 431 that communicates with the inside of the container body 10 is formed.

Further, the valve body 50 has an elastic body 44 that covers the first adherend portion 410 and the second adherend portion 430. The elastic body 44 has a cylindrical shape having an inner passage having an inner diameter equal to or smaller than the outer diameter of at least the smaller of the first adherend portion 410 or the second adherend portion 430, and has one side end portion and the other side of the elastic body 44. The side ends are attached to the first adherend 410 and the second adherence 430, respectively. Since the inner diameter of the elastic body 44 becomes smaller by attaching the elastic body 44 in a stretched state, even if the inner diameter is equal to the outer diameter of the first adherend portion 410 or the second adherent portion 430, the inner diameter thereof is the same. Adhesion to 1 adherent portion 410 or 2 adhered portion 430 is improved.

Finally, a state in which the valve body 50 of the fifth embodiment controls the flow of gas will be described.
In FIG. 8A, when a positive pressure is not applied to the second communication hole 431 or a positive pressure is applied to the first communication hole 411, the elastic body 44 has the first adhered portion 410 and the second adhered portion 430. It is in close contact with the gas and blocks the flow of gas to either side.

On the contrary, as shown by an arrow in FIG. 8B, when a positive pressure of a predetermined value or more is applied to the second communication hole 431, the elastic body 44 elastically deforms and swells according to the magnitude of the positive pressure. Then, a gap C is formed between the first adherend portion 410 or the second adherent portion 430. Then, the gas from the second communication hole 431 side passes through this gap C, is opened to the internal space S, flows to the first communication hole 411 side, and is exhausted to the outside of the container body 10.

As described above, the valve body 50 of the fifth embodiment can only allow the flow of gas from the inside. At this time, the predetermined value of the pressure at which the gas can flow can be adjusted by changing the material, hardness and thickness of the elastic body 44, and the distance between the first adherend portion 410 and the second adherend portion 430. be. Further, for example, in the present embodiment, the thickness of the elastic body 44 is formed thinner on the second adherend 430 side than on the first adhered portion 410 side, and the elastic body 44 and the second adhered portion 430 are combined with each other. Although the gap C is configured to be formed between the elastic bodies 44, conversely, the gap C may be formed between the elastic body 44 and the first adherend portion 410. Further, when the tip of the first adhered portion 410 or the second adhered portion 430 is formed in a truncated cone shape, the elastic body 44 has an outer peripheral surface and a surface of the first adhered portion 410 or the second adhered portion 430. Since the contact is not a contact but a substantially annular line contact, a gap C can be formed between the elastic body 44 and the first adherend 410 or the second adhered portion 430 at a lower pressure.

(Sixth Embodiment)
Next, the valve body 150 of the sixth embodiment will be described. FIG. 9 is a schematic cross-sectional view showing (a) a state in which gas flow is blocked and (b) a state in which gas flow is enabled, respectively, of the valve body 150 of the sixth embodiment attached to the substrate storage container 1. be.

The valve body 150 has a fixed cylinder 641, a holding cylinder 42, and an inner lid cylinder 543, similarly to the valve body 50 of the fifth embodiment. Since these configurations are basically the same as those of the valve body 50 of the fifth embodiment, the description of substantially the same parts will be omitted, and the different parts will be described in detail.

In the fixed cylinder 641, the support column 48 is supported by a stay or the like, and a disk-shaped plug portion 49 is formed at the tip of the support column 48. The disk-shaped plug portion 49 is located between the first adherend portion 410 and the second adherent portion 430, and is located outside at least the smaller of the first adherent portion 410 or the second adherent portion 430. It has a diameter equal to or greater than the outer diameter. In the sixth embodiment, the outer diameter of the first adhered portion 410, the outer diameter of the second adhered portion 430, and the outer diameter of the disc-shaped plug portion 49 are all formed to have the same diameter.

The elastic body 144 is attached to the first adhered portion 410 and the second adhered portion 430 so as to be in close contact with the disc-shaped plug portion 49. Further, the elastic body 144 is formed with at least one third communication hole 1441 on the side of the first adhered portion 410 with respect to the disc-shaped plug portion 49.

Finally, a state in which the valve body 150 of the sixth embodiment controls the flow of gas will be described.
In FIG. 9A, when a positive pressure is not applied to the second communication hole 431 or a positive pressure is applied to the first communication hole 411, the elastic body 144 is in close contact with the disc-shaped plug portion 49, and eventually. It also blocks the flow of gas to the side of.

On the contrary, as shown by an arrow in FIG. 9B, when a positive pressure of a predetermined value or more is applied to the second communication hole 431, the elastic body 144 elastically deforms and swells according to the magnitude of the positive pressure. Then, a gap C is formed between the disc-shaped plug portion 49 and the disc-shaped plug portion 49. Then, the gas from the second communication hole 431 side passes through this gap C, is opened to the internal space S, flows to the first communication hole 411 side, and is exhausted to the outside of the container body 10.

As described above, the valve body 150 of the sixth embodiment can only allow the flow of gas from the inside. At this time, the predetermined values of the pressure at which the gas can flow are the material, hardness and thickness of the elastic body 144, the distance between the first adhered portion 410 and the second adhered portion 430, and the disk-shaped plug portion 49. It can be adjusted by changing the position of.

(7th Embodiment)
Next, the valve body 250 of the seventh embodiment will be described. FIG. 10 is a schematic cross-sectional view showing (a) a state in which gas flow is blocked and (b) a state in which gas flow is enabled, respectively, of the valve body 250 of the seventh embodiment attached to the substrate storage container 1. be.

The valve body 250 has a fixed cylinder 541, a holding cylinder 42, and an inner lid cylinder 643, similarly to the valve body 50 of the fifth embodiment. Since these configurations are basically the same as those of the valve body 50 of the fifth embodiment, the description of substantially the same parts will be omitted, and the different parts will be described in detail.

In the fixed cylinder 541, the first adhered portion 410 rises from the bottom at the center of the bottom and extends toward the holding cylinder 42 to form a columnar shape. However, the first adherend portion 410 exists in order to enable the fixed cylinder 541 to be diverted to other embodiments, and is not necessarily an essential configuration in the present embodiment.

In the inner lid cylinder 643, the support column 48 is supported by a stay or the like, and a disk-shaped plug portion 49 is formed at the tip of the support column 48. The disk-shaped plug portion 49 is located between the first adherend portion 410 and the second adhered portion 430, separated from the second adhered portion 430, and is located outside the second adhered portion 430. It has a diameter equal to or greater than the outer diameter. In the seventh embodiment, the outer diameter of the first adherend portion 410 and the outer diameter of the disc-shaped plug portion 49 are all formed to have the same diameter.

The elastic body 44 is attached only to the second adhered portion 430 and the disc-shaped plug portion 49 so as to be in close contact with the disc-shaped plug portion 49.

Finally, a state in which the valve body 250 of the seventh embodiment controls the flow of gas will be described.
In FIG. 10A, when a positive pressure is not applied to the second communication hole 431 or a positive pressure is applied to the first communication hole 411, the elastic body 44 comes into close contact with the disc-shaped plug portion 49, and eventually It also blocks the flow of gas to the side of.

On the contrary, as shown by an arrow in FIG. 10B, when a positive pressure of a predetermined value or more is applied to the second communication hole 431, the elastic body 44 elastically deforms and swells according to the magnitude of the positive pressure. Then, a gap C is formed between the disc-shaped plug portion 49 and the disc-shaped plug portion 49. Then, the gas from the second communication hole 431 side passes through this gap C, is opened to the internal space S, flows to the first communication hole 411 side, and is exhausted to the outside of the container body 10.

As described above, the valve body 250 of the seventh embodiment can only allow the flow of gas from the inside. At this time, the predetermined value of the pressure at which the gas can flow can be adjusted by changing the material, hardness and thickness of the elastic body 44, and the distance between the second adherend portion 430 and the disc-shaped plug portion 49. Is.

(8th Embodiment)
Next, the valve body 350 of the eighth embodiment will be described. FIG. 11 is a schematic cross-sectional view showing (a) a state in which gas flow is blocked and (b) a state in which gas flow is enabled, respectively, of the valve body 350 of the eighth embodiment attached to the substrate storage container 1. be.

The valve body 350 has a fixed cylinder 541, a holding cylinder 42, and an inner lid cylinder 743, similarly to the valve body 50 of the fifth embodiment. Since these configurations are basically the same as those of the valve body 50 of the fifth embodiment, the description of substantially the same parts will be omitted, and the different parts will be described in detail.

In the fixed cylinder 541, the first adhered portion 410 rises from the bottom at the center of the bottom and extends toward the holding cylinder 42 to form a columnar shape. However, the first adherend portion 410 exists in order to enable the fixed cylinder 541 to be diverted to other embodiments, and is not necessarily an essential configuration in the present embodiment.

In the inner lid cylinder 743, the second adherend portion 430 is formed in a columnar shape, descending from the top portion at the center of the top portion and extending toward the fixed cylinder 541. Further, at least one fourth communication hole 1431 is formed on the outer peripheral surface of the second adhered portion 430, and a disk-shaped plug portion 49 is formed at the tip of the second adhered portion 430. There is. The disk-shaped plug portion 49 has a diameter equal to the outer diameter of the second adherend portion 430.

The elastic body 44 is attached to the third adhered portion 430 so as to be in close contact with the outer peripheral surfaces of the second adhered portion 430 and the disc-shaped plug portion 49 and close the fourth communication hole 1431.

Finally, a state in which the valve body 350 of the eighth embodiment controls the flow of gas will be described.
In FIG. 11A, when a positive pressure is not applied to the second communication hole 431 or a positive pressure is applied to the first communication hole 411, the elastic body 44 comes into close contact with the fourth communication hole 1431 and which side It also blocks the flow of gas.

On the contrary, as shown by an arrow in FIG. 11B, when a positive pressure of a predetermined value or more is applied to the second communication hole 431, the elastic body 44 elastically deforms and swells according to the magnitude of the positive pressure. Then, it is separated from the fourth communication hole 1431 and further forms a gap C between the disc-shaped plug portion 49 and the disc-shaped plug portion 49. Then, the gas from the second communication hole 431 side passes through the fourth communication hole 1431 and the gap C, is opened to the internal space S, flows to the first communication hole 411 side, and flows to the outside of the container body 10. It is exhausted.

As described above, the valve body 350 of the eighth embodiment can only allow the flow of gas from the inside. At this time, the predetermined value of the pressure at which the gas can flow can be adjusted by changing the material, hardness and thickness of the elastic body 44, and the total opening area of the fourth communication hole 1431.

As described above, the substrate storage container 1 of the first to eighth embodiments according to the present invention has the valve body 40, 140, 240, 340, 50, 150, 250, 350 as the first adherend 410. It has elastic bodies 44, 144 that form or adhere to a gap C between the second adherend portion 430 or the disc-shaped plug portion 49, and controls the flow of gas to the container body 10. It is a thing.

As a result, gas is introduced from one side of the valve bodies 40, 140, 240, 340, 50, 150, 250, 350 (becomes positive pressure), and when a predetermined pressure value is reached, the elastic body 44 swells and the first In order to form a gap C between the adhered portion 410, the second adhered portion 430, or the disc-shaped plug portion 49, the introduced gas passes through the internal space S and the valve bodies 40, 140, 240. , 340, 50, 150, 250, 350 will be distributed to the other side.

Further, since the substrate storage container 1 includes valve bodies 40, 140, 240, 340, 50, 150, 250, 350 that do not use metal members, metal corrosive residual substances are contained in the substrate W to be stored. Even if there is, it is unlikely that the problem of metal corrosion does not occur and the valve bodies 40, 140, 240, 340, 50, 150, 250, 350 do not operate.

In addition, a humidity retention test was conducted using the substrate storage container 1 of each embodiment, but the decrease in humidity with the passage of time did not show any significant difference from the conventional one.

Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and variations are made within the scope of the gist of the present invention described in the claims. It can be changed.

(Modification example)
In the first embodiment and the fifth embodiment, the valve bodies 40 and 50 are rings formed as separate parts for preventing water accumulation in the internal space S formed between the fixed cylinders 41 and 541 and the holding cylinder 42. It may have a member 60 (see FIG. 2B). However, the ring member 60 should have a shape that does not block the deformation of the elastic body 44, the first communication hole 411, and the second communication hole 431, and fill the internal space S as much as possible. Further, the ring member 60 may be applied to the second to fourth embodiments and the sixth to eighth embodiments. Also in this case, the internal space S is formed as much as possible so as not to block the deformation of the elastic body 44, the first communication hole 411, the second communication hole 431, the third communication hole 1441, and the fourth communication hole 1411, 1431. What to fill is good.

Further, in the first embodiment and the fifth embodiment, the elastic body 44 is attached so as to cover the first adherend portion 410 and the second adherend portion 430, but the attachment structure of the elastic body 44 is attached to this. Not exclusively.
FIG. 12 is a schematic cross-sectional view showing the mounting structure of the elastic body 44, and is (a) modified example 1 and (b) modified example 2.

In the first modification, the elastic body 44 is attached so as to be fitted inside either the first adherend portion 410 or the second adherend portion 430. At this time, the elastic body 44 may be formed with a stepped portion so that the elastic body 44 can be locked at a position corresponding to the end faces of the first adherend portion 410 and the second adherend portion 430.

In the second modification, a ring-shaped groove 410a is formed at the tip of the first adherend portion 410, and even if the elastic body 44 is attached by fitting the end portion of the elastic body 44 into the ring-shaped groove 410a. good. The first adhered portion 410 and the second adhered portion 430 may be different so that the modified example 1 is applied to the first adhered portion 410 and the modified example 2 is applied to the second adhered portion 430. Then, these mounting structures may be applied to the first adherend 410 or the second adhered portion 430 of each of the above embodiments.

Further, in the above embodiment, the outer diameter of the first adhered portion 410, the outer diameter of the second adhered portion 430, and / or the outer diameter of the disc-shaped plug portion 49 are all formed to have the same diameter. However, if the outer diameter of the disc-shaped plug portion 49 is larger than at least one of the outer diameter of the first adhered portion 410 and the outer diameter of the second adhered portion 430, different diameters may be formed. Further, the first adherend portion 410, the second adherend portion 430, and the elastic bodies 44, 144 are not limited to the cylindrical shape, but the disc-shaped plug portion 49 and the elastic body 44 are in close contact with each other, so that the container body 10 is in close contact. Any shape may be used as long as the flow of gas to the elastic body can be controlled. For example, in the case of a polygon, the corresponding inner diameter corresponding to the circular diameter of the elastic body 44 is considerably different from that of the disk-shaped plug portion 49. It should be equal to or smaller than the diameter.

Further, in each of the above embodiments, the holding cylinder 42 is combined inside the fixed cylinder 41 fitted in the through hole 18, but conversely, the fixed cylinder 41 is fitted in the through hole 18 of the holding cylinder 42. It may be combined inside. Further, although the valve bodies 40 and 50 have the inner lid cylinders 43 and 543, the inner lid cylinders 43 and 543 may not be provided, and the second adhered portion 430 may be directly formed on the holding cylinder 42. In this case, the disc-shaped plug portion 49 may be provided from the fixed cylinder 41 or the holding cylinder 42 via the support column 48, and the filter 46 may be directly adhered or welded to the holding cylinder 42.

In addition, in each of the above embodiments, the filter 46 may be arranged in the gas flow path from the gas supply source to the gas discharge port inside the container body 10, separately from the valves 40 and 50.

By the way, in the first to fourth embodiments and the fifth to eighth embodiments, the valve bodies 40 and 50 are attached to the through holes 18 formed in at least one of the container body 10 and the lid 20. However, it is configured to be installed in the middle of a gas flow path (piping) provided in a container body 10 or the like, for example, a gas flow path communicating with at least one of an air supply unit 16 or an exhaust unit 17. May be good.

(9th Embodiment)
FIG. 13 is a schematic cross-sectional view of (a) an attached state and (b) showing a valve body 840 of the ninth embodiment attached to the substrate storage container 1.
For example, the air supply valve body 840 of the ninth embodiment corresponds to the valve body 340 of the fourth embodiment attached in the middle of the gas flow path, and has a substantially double pipe-like structure. ..

The first cylinder portion 341 has substantially the same configuration as the fixed cylinder 341 of the fourth embodiment, and the second cylinder portion 743 has substantially the same configuration as the inner lid cylinder 743 of the eighth embodiment, and has an internal space of each other. They are combined to form an S. The elastic body 44 is attached so as to close the fourth communication hole 1411 of the first adherend portion 410 and open the fourth communication hole 1431 of the second adherence portion 430. When the valve body 840 is rearranged for exhaust, the elastic body 44 may be attached to the second adherend 430 side.

Further, one end of the pipe communicating with the gas introduction part 70 is connected to the first cylinder part 341, and one end of the pipe communicating with the air supply part 16 or the exhaust part 17 is connected to the second cylinder part 743. There is. Each pipe may be a highly rigid resin pipe or a flexible tube. Further, the piping from the gas introduction section 70 to the valve body 840, preferably the air supply section 16 or the exhaust section 17, may be provided so as to be lower on the gas introduction section 70 side.

Then, in the valve body 840 of the ninth embodiment, as in the first embodiment, when a positive pressure of a predetermined value or more is applied to the first communication hole 411, the elastic body 44 is elastic according to the magnitude of the positive pressure. By deforming and swelling, it separates from the fourth communication hole 1411 and further forms a gap C between the disc-shaped plug portion 49 and the disc-shaped plug portion 49. Then, the gas from the first communication hole 411 side passes through the fourth communication hole 1411 and the gap C, is opened to the internal space S, and flows to the second communication hole 431 side through the fourth communication hole 1431. Then, it is supplied to the inside of the container body 10.

Even in the substrate storage container 1 of the ninth embodiment, since the valve body 840 that does not use a metallic member is provided, even if the substrate W to be stored has a metal corrosive residual substance, the metal corrosion is caused. It is unlikely that the problem will not occur and the valve body 840 will not operate.

Further, since the distance from the gas introduction portion 70 to the valve body 840 is long and the internal passage of the gas introduction portion 70 and the pipe are bent in substantially perpendicular directions, even when the container body 10 is washed with a liquid. , It becomes difficult for the liquid to reach the valve body 840, and it is possible to prevent water remaining after the container body 10 is dried. Then, the liquid does not reach the air supply unit 16 and the exhaust unit 17 on the back side of the valve body 840 (elastic body 44).

1 Board storage container 10 Container body, 11 Opening, 12 Sealing surface, 13 Support, 14 Robotic flange, 15 Manual handle, 16 Air supply part, 17 Exhaust part, 18 Through hole, 180 rib 20 lid, 21 Mounting groove , 22 Convex 30 Packing 40, 140, 240, 340, 840 Valve body (for air supply)
41,241,341,541,641 Fixed cylinder (1st cylinder part), 410 1st attachment part, 411 1st communication hole, 412 screw groove, 413 flange, 1411 4th communication hole 42 holding cylinder (2nd cylinder) Part), 421 Ventilation port, 422 Screw groove, 423 flange, 424 partition rib 43,143,543,643,743 Inner lid cylinder (second cylinder part), 430 Second attachment part, 431 Second communication hole, 1431 4th communication hole 44,144 elastic body, 1441 3rd communication hole 45 seal member, 46 filter, 47 seal member, 48 columns, 49 plug 50, 150, 250, 350 valve body (for exhaust)
60 Ring member 70 Gas introduction part W Board C Gap S Internal space

Claims (19)

The container body that stores the board and
A lid that closes the opening of the container body and
A substrate storage container including a valve body that controls the flow of gas to the container body.
The valve body is
Cylindrical elastic body and
A first tubular portion on which a first adherent portion to be adhered to one side of the elastic body is formed, and a first cylinder portion.
A second tubular portion on which a second adherent portion to be adhered to the other side of the elastic body is formed, and a second tubular portion.
It has an internal space formed by the first cylinder portion and the second cylinder portion.
The first contact portion is formed with a first communication hole that communicates with the outside of the container body.
In the second cylinder portion, a second communication hole communicating with the inside of the container body is formed on the inner space side outside the elastic body.
A substrate storage container characterized in that the flow of the gas to the container body is controlled by separating the elastic body from the first adherent portion or the second adherend portion. When a positive pressure is applied to the first communication hole, the elastic body expands to form a gap between the first adherend portion or the second adherend portion, and the gas with respect to the container body. When a positive pressure is applied to the second communication hole or when a positive pressure is not applied to the first communication hole, the gas is in close contact with the first contact portion and the second adhered portion. The substrate storage container according to claim 1, wherein the gas flow to the container body is blocked. The container body that stores the board and
A lid that closes the opening of the container body and
A substrate storage container including a valve body that controls the flow of gas to the container body.
The valve body is
Cylindrical elastic body and
A first tubular portion on which a first adherent portion to be adhered to one side of the elastic body is formed, and a first cylinder portion.
A second tubular portion on which a second adherent portion to be adhered to the other side of the elastic body is formed, and a second tubular portion.
The internal space formed by the first cylinder portion and the second cylinder portion,
It has a ring member formed as a separate component for preventing water pooling in the internal space, and has.
In the first cylinder portion, a first communication hole communicating with the outside of the container body is formed on the inner space side outside the elastic body.
The second adherent portion is formed with a second communication hole that communicates with the inside of the container body.
A substrate storage container characterized in that the flow of the gas to the container body is controlled by separating the elastic body from the first adherent portion or the second adherend portion. When a positive pressure is applied to the second communication hole, the elastic body expands to form a gap between the first adherend portion or the second adherend portion, and the gas with respect to the container body. When a positive pressure is applied to the first communication hole or when a positive pressure is not applied to the second communication hole, the gas is in close contact with the first contact portion and the second adhered portion. The substrate storage container according to claim 3, wherein the gas flow to the container body is blocked. The container body that stores the board and
A lid that closes the opening of the container body and
A substrate storage container including a valve body that controls the flow of gas to the container body.
The valve body is
Cylindrical elastic body and
A first tubular portion on which a first adherent portion to be adhered to one side of the elastic body is formed, and a first cylinder portion.
A second tubular portion on which a second adherent portion to be adhered to the other side of the elastic body is formed, and a second tubular portion.
The internal space formed by the first cylinder portion and the second cylinder portion,
It has a plug portion that is located between the first adherend portion and the second adherent portion and that the elastic body comes into contact with and separates from the elastic body.
The first contact portion is formed with a first communication hole that communicates with the outside of the container body.
In the second cylinder portion, a second communication hole communicating with the inside of the container body is formed outside the second adherend portion.
The elastic body has a third communication hole formed on the second adherend side of the plug portion.
A substrate storage container characterized in that the flow of the gas to the container body is controlled by separating the plug portion from the elastic body. The container body that stores the board and
A lid that closes the opening of the container body and
A substrate storage container including a valve body that controls the flow of gas to the container body.
The valve body is
Cylindrical elastic body and
A first tubular portion on which a first adherent portion to be adhered to one side of the elastic body is formed, and a first cylinder portion.
A second cylinder portion that forms an internal space between the first cylinder portion and the
A plug portion formed on the first tubular portion and adhered to the other side of the elastic body, and a plug portion.
It has a ring member formed as a separate component for preventing water pooling in the internal space, and has.
The first contact portion is formed with a first communication hole that communicates with the outside of the container body.
The second cylinder portion is formed with a second communication hole that communicates with the inside of the container body.
A substrate storage container characterized in that the flow of the gas to the container body is controlled by separating the plug portion from the elastic body. When a positive pressure is applied to the first communication hole, the elastic body expands to form a gap between the elastic body and the plug portion, thereby enabling the flow of the gas to the container body and the first. The claim is characterized in that when a positive pressure is applied to the two communication holes or when a positive pressure is not applied to the first communication hole, the gas is brought into close contact with the plug portion to block the flow of the gas to the container body. The substrate storage container according to 5 or 6. The container body that stores the board and
A lid that closes the opening of the container body and
A substrate storage container including a valve body that controls the flow of gas to the container body.
The valve body is
Cylindrical elastic body and
A first tubular portion on which a first adherent portion to be adhered to one side of the elastic body is formed, and a first cylinder portion.
A second tubular portion on which a second adherent portion to be adhered to the other side of the elastic body is formed, and a second tubular portion.
The internal space formed by the first cylinder portion and the second cylinder portion,
It has a plug portion that is located between the first adherend portion and the second adherent portion and that the elastic body comes into contact with and separates from the elastic body.
In the first cylinder portion, a first communication hole communicating with the outside of the container body is formed on the inner space side outside the elastic body.
The second adherent portion is formed with a second communication hole that communicates with the inside of the container body.
The elastic body has a third communication hole formed on the first contact portion side of the plug portion.
A substrate storage container characterized in that the flow of the gas to the container body is controlled by separating the plug portion from the elastic body. The container body that stores the board and
A lid that closes the opening of the container body and
A substrate storage container including a valve body that controls the flow of gas to the container body.
The valve body is
Cylindrical elastic body and
A second tubular portion on which a second adherent portion to be adhered to the other side of the elastic body is formed, and a second tubular portion.
The first cylinder part that forms an internal space between the second cylinder part and
It has a plug portion that is formed in the second tubular portion and adheres to one side of the elastic body.
The first cylinder portion is formed with a first communication hole that communicates with the outside of the container body.
The second adherent portion is formed with a second communication hole that communicates with the inside of the container body.
A substrate storage container characterized in that the flow of the gas to the container body is controlled by separating the plug portion from the elastic body. When a positive pressure is applied to the second communication hole, the elastic body expands to form a gap between the elastic body and the plug portion, thereby enabling the flow of the gas to the container body and the first. The claim is characterized in that when a positive pressure is applied to the first communication hole or no positive pressure is applied to the second communication hole, the gas is brought into close contact with the plug portion to block the flow of the gas to the container body. The substrate storage container according to 8 or 9. The container body that stores the board and
A lid that closes the opening of the container body and
A substrate storage container including a valve body that controls the flow of gas to the container body.
The valve body is
Cylindrical elastic body and
A first cylinder portion in which a first adhered portion for adhering the elastic body to the outer surface is formed, and a first cylinder portion.
It has a second cylinder portion that forms an internal space between the first cylinder portion and the first cylinder portion.
In the first adherend portion, a first communication hole communicating with the outside of the container body is formed, and a fourth communication hole communicating with the first communication hole and the outer surface is formed.
The second cylinder portion is formed with a second communication hole that communicates with the inside of the container body.
A substrate storage container characterized in that the flow of the gas to the container body is controlled by separating the fourth communication hole and the elastic body. When a positive pressure is applied to the first communication hole, the elastic body expands to form a gap between the elastic body and the first adhered portion, opens the fourth communication hole, and opens the fourth communication hole with respect to the container body. In addition to enabling the flow of the gas, when a positive pressure is applied to the second communication hole or when a positive pressure is not applied to the first communication hole, the fourth communication hole is brought into close contact with the first adherent portion. The substrate storage container according to claim 11, wherein the communication hole is closed to block the flow of the gas to the container body. The container body that stores the board and
A lid that closes the opening of the container body and
A substrate storage container including a valve body that controls the flow of gas to the container body.
The valve body is
Cylindrical elastic body and
A second tubular portion on which a second adherent portion for adhering the elastic body to the outer surface is formed, and a second tubular portion.
It has a first cylinder portion that forms an internal space between the second cylinder portion and the second cylinder portion.
In the second adherend portion, a second communication hole communicating with the inside of the container body is formed, and the second communication hole is formed.
A fourth communication hole that communicates the second communication hole with the outer surface is formed.
The first cylinder portion is formed with a first communication hole that communicates with the outside of the container body.
A substrate storage container characterized in that the flow of the gas to the container body is controlled by separating the fourth communication hole and the elastic body. When a positive pressure is applied to the second communication hole, the elastic body expands to form a gap between the elastic body and the second contact portion, opens the fourth communication hole, and forms a gap with respect to the container body. In addition to enabling the flow of the gas, when a positive pressure is applied to the first communication hole or when a positive pressure is not applied to the second communication hole, the fourth communication hole is brought into close contact with the second adhered portion. The substrate storage container according to claim 13, wherein the communication hole is closed to block the flow of the gas to the container body. The substrate according to any one of claims 1-2, 5, 8-14 , wherein the valve body has a ring member formed as a separate component for preventing water pooling in the internal space. Storage container. The first cylinder portion is a fixed cylinder that is fitted into a through hole formed in the container body.
The substrate storage container according to any one of claims 1 to 15, wherein the second cylinder portion is a holding cylinder combined with the fixed cylinder. The first cylinder portion is a fixed cylinder that is fitted into a through hole formed in the container body.
The substrate storage container according to any one of claims 1 to 15, wherein the second cylinder portion is an inner lid cylinder connected to a holding cylinder combined with the fixed cylinder. The substrate storage container according to any one of claims 1 to 17, wherein the valve body has a filter for filtering the gas. The substrate storage container according to any one of claims 1 to 15, wherein the valve body is attached in the middle of a gas flow path provided in the container body.

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