JP2004146420A5 - - Google Patents
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- JP2004146420A5 JP2004146420A5 JP2002306631A JP2002306631A JP2004146420A5 JP 2004146420 A5 JP2004146420 A5 JP 2004146420A5 JP 2002306631 A JP2002306631 A JP 2002306631A JP 2002306631 A JP2002306631 A JP 2002306631A JP 2004146420 A5 JP2004146420 A5 JP 2004146420A5
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002306631A JP4282305B2 (ja) | 2002-10-22 | 2002-10-22 | 窒化物半導体レーザ素子、その製造方法及びそれを備えた半導体光学装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002306631A JP4282305B2 (ja) | 2002-10-22 | 2002-10-22 | 窒化物半導体レーザ素子、その製造方法及びそれを備えた半導体光学装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2004146420A JP2004146420A (ja) | 2004-05-20 |
JP2004146420A5 true JP2004146420A5 (ja) | 2005-12-08 |
JP4282305B2 JP4282305B2 (ja) | 2009-06-17 |
Family
ID=32453332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002306631A Expired - Fee Related JP4282305B2 (ja) | 2002-10-22 | 2002-10-22 | 窒化物半導体レーザ素子、その製造方法及びそれを備えた半導体光学装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4282305B2 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4322187B2 (ja) | 2004-08-19 | 2009-08-26 | シャープ株式会社 | 窒化物半導体発光素子 |
JP3816942B2 (ja) | 2004-10-27 | 2006-08-30 | 三菱電機株式会社 | 半導体素子の製造方法 |
JP2006186025A (ja) * | 2004-12-27 | 2006-07-13 | Nichia Chem Ind Ltd | 窒化物半導体レーザ素子 |
JP2007281387A (ja) * | 2006-04-12 | 2007-10-25 | Mitsubishi Electric Corp | 半導体発光素子及びその製造方法 |
JP4899740B2 (ja) * | 2006-09-19 | 2012-03-21 | パナソニック株式会社 | 半導体発光素子、半導体発光装置および製造方法 |
EP3525301B1 (en) * | 2007-12-28 | 2021-11-03 | Avago Technologies International Sales Pte. Limited | Device having delta doped active region |
JP7296845B2 (ja) | 2019-08-19 | 2023-06-23 | 日本ルメンタム株式会社 | 変調ドープ半導体レーザ及びその製造方法 |
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2002
- 2002-10-22 JP JP2002306631A patent/JP4282305B2/ja not_active Expired - Fee Related