JP2004132537A - 磁気軸受制御装置 - Google Patents

磁気軸受制御装置 Download PDF

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Publication number
JP2004132537A
JP2004132537A JP2003099494A JP2003099494A JP2004132537A JP 2004132537 A JP2004132537 A JP 2004132537A JP 2003099494 A JP2003099494 A JP 2003099494A JP 2003099494 A JP2003099494 A JP 2003099494A JP 2004132537 A JP2004132537 A JP 2004132537A
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JP
Japan
Prior art keywords
current
control
rotating body
electromagnets
magnetic bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003099494A
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English (en)
Japanese (ja)
Other versions
JP2004132537A5 (enExample
Inventor
Atsushi Oyama
大山　敦
Toshiharu Nakazawa
中澤　敏治
Toshiya Yoshida
吉田　俊哉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Ebara Densan Ltd
Tokyo Denki University
Original Assignee
Ebara Corp
Ebara Densan Ltd
Tokyo Denki University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Ebara Densan Ltd, Tokyo Denki University filed Critical Ebara Corp
Priority to JP2003099494A priority Critical patent/JP2004132537A/ja
Publication of JP2004132537A publication Critical patent/JP2004132537A/ja
Publication of JP2004132537A5 publication Critical patent/JP2004132537A5/ja
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0457—Details of the power supply to the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
    • F16C32/0448—Determination of the actual position of the moving member, e.g. details of sensors by using the electromagnet itself as sensor, e.g. sensorless magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP2003099494A 2002-08-13 2003-04-02 磁気軸受制御装置 Pending JP2004132537A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003099494A JP2004132537A (ja) 2002-08-13 2003-04-02 磁気軸受制御装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002236061 2002-08-13
JP2003099494A JP2004132537A (ja) 2002-08-13 2003-04-02 磁気軸受制御装置

Publications (2)

Publication Number Publication Date
JP2004132537A true JP2004132537A (ja) 2004-04-30
JP2004132537A5 JP2004132537A5 (enExample) 2006-02-23

Family

ID=32301036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003099494A Pending JP2004132537A (ja) 2002-08-13 2003-04-02 磁気軸受制御装置

Country Status (1)

Country Link
JP (1) JP2004132537A (enExample)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007004656A1 (ja) * 2005-07-05 2007-01-11 Ebara Corporation 磁気軸受装置および磁気軸受方法
JP2009174646A (ja) * 2008-01-24 2009-08-06 Ebara Corp 磁気軸受装置
JP2009270595A (ja) * 2008-05-01 2009-11-19 Meidensha Corp 磁気軸受装置
JP2009275740A (ja) * 2008-05-13 2009-11-26 Meidensha Corp 磁気軸受装置
JP2014532868A (ja) * 2011-11-04 2014-12-08 エー・テー・ハー・チューリッヒＥｔｈ Ｚｕｅｒｉｃｈ 回転電機および回転電機の回転子の変位を測定する方法
JP2016161132A (ja) * 2015-03-02 2016-09-05 プファイファー・ヴァキューム・ゲーエムベーハー 本体部分を非接触式に保持する磁気軸受及び方法と本体部分の位置変位を検出する装置
WO2019102835A1 (ja) * 2017-11-22 2019-05-31 エドワーズ株式会社 磁気軸受制御装置及び真空ポンプ
JP2019209399A (ja) * 2018-05-31 2019-12-12 国立大学法人 鹿児島大学 工作機械の主軸システム
JP2021188726A (ja) * 2020-06-04 2021-12-13 国立大学法人 鹿児島大学 磁気軸受けユニット及び制御パラメータ決定方法
CN114810825A (zh) * 2022-03-30 2022-07-29 清华大学 磁轴承、控制方法及装置
EP4112957A1 (en) * 2021-06-28 2023-01-04 Université catholique de Louvain Electric machine with an electromagnetic bearing

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007004656A1 (ja) * 2005-07-05 2007-01-11 Ebara Corporation 磁気軸受装置および磁気軸受方法
US7830056B2 (en) 2005-07-05 2010-11-09 Ebara Corporation Magnetic bearing device and method
US7977839B2 (en) 2005-07-05 2011-07-12 Ebara Corporation Magnetic bearing device and method
JP4746619B2 (ja) * 2005-07-05 2011-08-10 株式会社荏原製作所 磁気軸受装置および磁気軸受方法
JP2009174646A (ja) * 2008-01-24 2009-08-06 Ebara Corp 磁気軸受装置
US7944104B2 (en) 2008-01-24 2011-05-17 Ebara Corporation Magnetic bearing apparatus
EP2083183A3 (en) * 2008-01-24 2013-05-01 Ebara Corporation Sensorless magnetic bearing apparatus
JP2009270595A (ja) * 2008-05-01 2009-11-19 Meidensha Corp 磁気軸受装置
JP2009275740A (ja) * 2008-05-13 2009-11-26 Meidensha Corp 磁気軸受装置
JP2014532868A (ja) * 2011-11-04 2014-12-08 エー・テー・ハー・チューリッヒＥｔｈ Ｚｕｅｒｉｃｈ 回転電機および回転電機の回転子の変位を測定する方法
JP2016161132A (ja) * 2015-03-02 2016-09-05 プファイファー・ヴァキューム・ゲーエムベーハー 本体部分を非接触式に保持する磁気軸受及び方法と本体部分の位置変位を検出する装置
EP3064791A1 (de) * 2015-03-02 2016-09-07 Pfeiffer Vacuum Gmbh Magnetlager und verfahren zum kontaktlosen halten eines körpers
WO2019102835A1 (ja) * 2017-11-22 2019-05-31 エドワーズ株式会社 磁気軸受制御装置及び真空ポンプ
JP2019094985A (ja) * 2017-11-22 2019-06-20 エドワーズ株式会社 磁気軸受制御装置及び真空ポンプ
US11767851B2 (en) 2017-11-22 2023-09-26 Edwards Japan Limited Magnetic bearing control apparatus and vacuum pump
JP2019209399A (ja) * 2018-05-31 2019-12-12 国立大学法人 鹿児島大学 工作機械の主軸システム
JP2021188726A (ja) * 2020-06-04 2021-12-13 国立大学法人 鹿児島大学 磁気軸受けユニット及び制御パラメータ決定方法
JP7500052B2 (ja) 2020-06-04 2024-06-17 国立大学法人 鹿児島大学 制御パラメータ決定方法
EP4112957A1 (en) * 2021-06-28 2023-01-04 Université catholique de Louvain Electric machine with an electromagnetic bearing
WO2023275096A1 (en) * 2021-06-28 2023-01-05 Université Catholique de Louvain Electric machine with an electromagnetic bearing
CN114810825A (zh) * 2022-03-30 2022-07-29 清华大学 磁轴承、控制方法及装置
CN114810825B (zh) * 2022-03-30 2023-05-30 清华大学 磁轴承、控制方法及装置

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