JP2004106172A - 流体用導管、流体用導管を形成する方法、マイクロアレイシステム、dpnシステム、流体回路、及びマイクロアレイの製造方法 - Google Patents
流体用導管、流体用導管を形成する方法、マイクロアレイシステム、dpnシステム、流体回路、及びマイクロアレイの製造方法 Download PDFInfo
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Abstract
【解決手段】 流体用導管は、基板440に取り付けられた固定部453と、基板440から離れる曲がりを有するカンチレバー部454とを有するばねビーム460を含む。このばねビーム460は、該ばねビーム460のカンチレバー部454に沿って流体を運ぶための、カンチレバー部454の曲がりに対して略平行に延びる第1のチャネル452を定める。
【選択図】 図12
Description
330A 分配システム
350A チャネルばねプローブ
300B つけペン式ナノリソグラフィ(DPN)システム
330B マイクロペンアセンブリ
350B チャネルばねプローブ
380B コンピュータ/ワークステーション
300C 流体回路
320C(1) 流体素子
320C(2) 流体素子
350C(1) チャネルばねプローブ
350C(2) チャネルばねプローブ
Claims (6)
- 基板に取り付けられた固定部と、前記基板から離れる曲がりを有するカンチレバー部とを有するばねビームを含む、流体用導管であって、前記ばねビームが、該ばねビームの前記カンチレバー部に沿って流体を運ぶための、前記カンチレバー部の前記曲がりに対して略平行に延びる第1のチャネルを定める、流体用導管。
- 剥離材料層の上に、該剥離材料層に対して垂直な方向の内部応力勾配を有するばね材料膜を形成する工程と、
ばね材料アイランドを形成するために、前記ばね材料膜をエッチングする工程と、
前記ばね材料アイランドのカンチレバー部に、前記内部応力勾配に起因する前記剥離層の第2の部分から離れる曲がりを帯びさせるために、前記剥離材料層の第1の部分を前記ばね材料アイランドの前記カンチレバー部の下から除去する工程と、
前記ばねビームの前記カンチレバー部に沿って流体を運ぶための、前記カンチレバー部の前記曲がりに対して略平行に延びる第1のチャネルを定める工程と、
を含む、流体用導管を形成する方法。 - 複数の流体サンプルを同時に分析するマイクロアレイシステムであって、
第1のパターンに配列された複数の試験位置を含む分析用集積回路(IC)と、
基板に取り付けられた固定端部と、自由端部の曲がりに対して平行に延びる第1のチャネルと、前記基板から離れる曲がりを有すると共に前記第1のチャネルから液体を分配するための分配先端部で終端する前記自由端部と、を各々が有する複数のチャネルばねプローブを含む分配アセンブリであって、前記複数のチャネルばねプローブの前記分配先端部が、前記第1のパターンと略一致する第2のパターンに配列された、分配アセンブリと、
前記複数のチャネルばねプローブの各々の前記分配先端部を、前記分析用IC上の前記複数の試験位置の1つと接触するよう配置するための配置システムと、
前記配置システムを制御すると共に前記分析用ICによって供給されるデータを処理するためのコンピュータ/ワークステーションと、
を含むマイクロアレイシステム。 - 基板をパターニングするためのつけペン式ナノリソグラフィ(DPN)システムであって、
基板を支持及び配置するための台と、
基板に取り付けられた固定端部と、自由端部の曲がりに対して平行に延びるチャネルと、前記基板から離れる曲がりを有すると共に前記チャネルから前記基板の上に液体を分配するための分配先端部で終端する前記自由端部と、を有する第1のチャネルばねプローブを含むマイクロペンアセンブリと、
前記第1のチャネルばねプローブの前記分配先端部を、前記基板と接触するよう配置すると共に、前記基板の上に所望のパターンをプリントするための配置システムと、
前記配置システムを制御するためのコンピュータ/ワークステーションと、
を有するDPNシステム。 - 第1の面を有する第1の流体素子と、
前記第1の面に取り付けられた固定部と、前記第1の面から離れる曲がりを有する自由部と、前記チャネルばねプローブの自由部に沿って流体を運ぶためのチャネルとを有するチャネルばねプローブと、
を有する流体回路。 - 複数のプリント用先端部を有するマイクロアレイの製造方法であって、
剥離材料層の上に、該剥離材料層に対して垂直な方向の内部応力勾配を有するばね材料膜を形成する工程と、
複数のばね材料アイランドをアレイパターンに形成するために、前記ばね材料膜をエッチングする工程と、
前記剥離材料層の第2の部分から離れる曲がりを各々が有する複数のばねビームであって、前記複数のプリント用先端部の1つを各々が構成する複数のばねビームを形成するために、前記剥離材料層の第1の部分を各前記ばね材料アイランドの前記カンチレバー部の下から除去する工程と、
を含む、マイクロアレイの製造方法。
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US10/213,059 US7241420B2 (en) | 2002-08-05 | 2002-08-05 | Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal |
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EP (2) | EP1388369B1 (ja) |
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JP2007535681A (ja) * | 2004-04-30 | 2007-12-06 | バイオフォース・ナノサイエンシィズ・インコーポレーテッド | 物質を表面上に堆積させるための方法と装置 |
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JP2010527441A (ja) * | 2007-05-09 | 2010-08-12 | ナノインク インコーポレーティッド | 小型ナノファブリケーション装置 |
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WO2014188649A1 (ja) * | 2013-05-23 | 2014-11-27 | パナソニックIpマネジメント株式会社 | 発電装置 |
JP2015056663A (ja) * | 2013-09-10 | 2015-03-23 | パロ・アルト・リサーチ・センター・インコーポレーテッドPalo Alto Research Center Incorporated | 太陽電池のテクスチャリング |
JP7449876B2 (ja) | 2018-11-16 | 2024-03-14 | イルミナ インコーポレイテッド | 流体カートリッジ用積層流体回路 |
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US7241420B2 (en) | 2007-07-10 |
EP1388369A2 (en) | 2004-02-11 |
EP2311567A1 (en) | 2011-04-20 |
US20090233815A1 (en) | 2009-09-17 |
EP2311567B1 (en) | 2013-05-08 |
US20040022681A1 (en) | 2004-02-05 |
US7749448B2 (en) | 2010-07-06 |
EP1388369A3 (en) | 2004-12-29 |
US8287744B2 (en) | 2012-10-16 |
US20060057031A1 (en) | 2006-03-16 |
US20100213161A1 (en) | 2010-08-26 |
EP1388369B1 (en) | 2015-04-29 |
US8241509B2 (en) | 2012-08-14 |
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