JP2004101831A5 - - Google Patents
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- Publication number
- JP2004101831A5 JP2004101831A5 JP2002263033A JP2002263033A JP2004101831A5 JP 2004101831 A5 JP2004101831 A5 JP 2004101831A5 JP 2002263033 A JP2002263033 A JP 2002263033A JP 2002263033 A JP2002263033 A JP 2002263033A JP 2004101831 A5 JP2004101831 A5 JP 2004101831A5
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- light
- sample
- light intensity
- confocal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002263033A JP2004101831A (ja) | 2002-09-09 | 2002-09-09 | 共焦点顕微鏡 |
| PCT/JP2003/007750 WO2003107064A1 (ja) | 2002-06-01 | 2003-06-18 | 共焦点顕微鏡及び、この共焦点顕微鏡による測定方法 |
| US11/015,076 US20050122577A1 (en) | 2002-06-18 | 2004-12-16 | Confocal microscope and measuring method by this confocal microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002263033A JP2004101831A (ja) | 2002-09-09 | 2002-09-09 | 共焦点顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004101831A JP2004101831A (ja) | 2004-04-02 |
| JP2004101831A5 true JP2004101831A5 (https=) | 2005-10-20 |
Family
ID=32262904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002263033A Pending JP2004101831A (ja) | 2002-06-01 | 2002-09-09 | 共焦点顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004101831A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008292391A (ja) * | 2007-05-28 | 2008-12-04 | Mitsutoyo Corp | 共焦点光学装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06265317A (ja) * | 1993-03-10 | 1994-09-20 | Ishikawajima Harima Heavy Ind Co Ltd | 共焦点走査方式レーザ顕微鏡を用いた厚み計測方法 |
| JPH0968413A (ja) * | 1995-08-31 | 1997-03-11 | Olympus Optical Co Ltd | 高さ測定方法及び共焦点走査型光学顕微鏡 |
| JPH09113235A (ja) * | 1995-10-16 | 1997-05-02 | Dainippon Screen Mfg Co Ltd | 三次元計測方法および表示方法、ならびに三次元計測装置 |
| JP3847422B2 (ja) * | 1997-08-28 | 2006-11-22 | オリンパス株式会社 | 高さ測定方法及びその装置 |
| JPH11211439A (ja) * | 1998-01-22 | 1999-08-06 | Takaoka Electric Mfg Co Ltd | 表面形状計測装置 |
| JP2000098240A (ja) * | 1998-09-22 | 2000-04-07 | Olympus Optical Co Ltd | 落射型顕微鏡 |
| JP2000147383A (ja) * | 1998-11-17 | 2000-05-26 | Nikon Corp | 顕微鏡装置 |
| TW555954B (en) * | 2001-02-28 | 2003-10-01 | Olympus Optical Co | Confocal microscope, optical height-measurement method, automatic focusing method |
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2002
- 2002-09-09 JP JP2002263033A patent/JP2004101831A/ja active Pending
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