JP2003057553A5 - - Google Patents

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Publication number
JP2003057553A5
JP2003057553A5 JP2001241946A JP2001241946A JP2003057553A5 JP 2003057553 A5 JP2003057553 A5 JP 2003057553A5 JP 2001241946 A JP2001241946 A JP 2001241946A JP 2001241946 A JP2001241946 A JP 2001241946A JP 2003057553 A5 JP2003057553 A5 JP 2003057553A5
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JP
Japan
Prior art keywords
correction data
field curvature
scanning
curvature correction
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001241946A
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English (en)
Japanese (ja)
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JP2003057553A (ja
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Publication date
Application filed filed Critical
Priority to JP2001241946A priority Critical patent/JP2003057553A/ja
Priority claimed from JP2001241946A external-priority patent/JP2003057553A/ja
Publication of JP2003057553A publication Critical patent/JP2003057553A/ja
Publication of JP2003057553A5 publication Critical patent/JP2003057553A5/ja
Pending legal-status Critical Current

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JP2001241946A 2001-08-09 2001-08-09 共焦点走査型顕微鏡 Pending JP2003057553A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001241946A JP2003057553A (ja) 2001-08-09 2001-08-09 共焦点走査型顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001241946A JP2003057553A (ja) 2001-08-09 2001-08-09 共焦点走査型顕微鏡

Publications (2)

Publication Number Publication Date
JP2003057553A JP2003057553A (ja) 2003-02-26
JP2003057553A5 true JP2003057553A5 (https=) 2005-09-22

Family

ID=19072301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001241946A Pending JP2003057553A (ja) 2001-08-09 2001-08-09 共焦点走査型顕微鏡

Country Status (1)

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JP (1) JP2003057553A (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100585449C (zh) * 2005-01-27 2010-01-27 伦斯勒理工学院 可适应性扫描光学显微镜
CN104661704B (zh) * 2012-07-18 2017-04-12 普林斯顿大学托管委员会 多量级光谱纳米显微镜
CN106556360A (zh) * 2015-09-24 2017-04-05 上海思信科学仪器有限公司 一种台阶段差在线测量方法
CN106556344A (zh) * 2015-09-24 2017-04-05 上海思信科学仪器有限公司 一种共焦划痕在线检测方法
CN106556354A (zh) * 2015-09-24 2017-04-05 上海思信科学仪器有限公司 3d轮廓在线测量仪
CN106556371A (zh) * 2015-09-24 2017-04-05 上海思信科学仪器有限公司 表面波纹度、粗糙度在线测量仪
US11523046B2 (en) * 2019-06-03 2022-12-06 Molecular Devices, Llc System and method to correct for variation of in-focus plane across a field of view of a microscope objective

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