JP2003057553A5 - - Google Patents

Claims (8)

An objective lens for condensing the light from the light source at a predetermined position;
A scanning mechanism for relatively scanning the light beam collected by the objective lens along the surface of the sample;
A moving mechanism for relatively moving the focusing position of the light beam and the sample along the optical axis of the objective lens;
A micro-aperture arranged at a position conjugate with the condensing position, and a photodetector for detecting the intensity of light passing through the micro-aperture,
A first storage device for storing signals from the light detector as the image data, an arithmetic unit and a second storage device to which a signal from the optical detector to store height information of the moving mechanism which maximizes ,
A field curvature correction data storage unit for storing field curvature correction data of the objective lens,
The arithmetic device reads correction data stored in the field curvature correction data storage unit, calculates calculation correction data based on the field curvature correction data, and calculates the correction data according to the calculation correction data. A confocal scanning microscope, comprising: a step of correcting height information stored in the second storage device. The field curvature correction data is obtained in the maximum scanning range of the scanning range determined by the scanning mechanism , and the calculation correction data is the type of the objective lens and the scanning range determined by the scanning mechanism. 2. The confocal scanning microscope according to claim 1, wherein the confocal scanning microscope is calculated based on the calculation . The confocal scanning microscope according to claim 2, wherein the field curvature correction data includes field curvature correction data for each of a plurality of objective lenses. The confocal scanning microscope according to claim 1, wherein the field curvature correction data includes field curvature correction data for each wavelength of the light source. The confocal scanning microscope according to claim 1, wherein the field curvature correction data is obtained by performing a simulation on an optical system from the sample to the minute aperture. The calculation correction data is calculated using any one of linear interpolation from field curvature correction, polynomial interpolation, interpolation by a plane method, and interpolation by a mathematical formula obtained from optical design information. The confocal scanning microscope according to 1 or 2. A data correction method used in a confocal scanning microscope,
Based on a predetermined scanning condition, the light from the light source is two-dimensionally scanned on the sample and the sample and the objective lens are relatively moved to increase the position in the optical axis direction where the output of the photodetector is maximized. A first process to obtain information,
A second step of acquiring the scanning condition from the confocal scanning microscope;
A third step of reading out field curvature correction data corresponding to the scanning condition based on the scanning condition from a storage device in which a plurality of field curvature correction data acquired in advance is stored;
A fourth step of creating correction data for calculation from the field curvature correction data read out in the third step based on the scanning condition;
A fifth step of subtracting the calculation data obtained in the fourth step from the height information obtained in the first step;
A data correction method for a confocal microscope, comprising: The scanning condition includes the unique information of the objective lens, a scanning range when light from the light source is two-dimensionally scanned on the sample, a moving range when the sample and the objective lens are relatively moved, and movement within the moving range. 8. The confocal scanning microscope data correction method according to claim 7, wherein at least one of the step amounts is included.