CN106556354A - 3D profile on-line measurement instrument - Google Patents
3D profile on-line measurement instrument Download PDFInfo
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- CN106556354A CN106556354A CN201510613231.4A CN201510613231A CN106556354A CN 106556354 A CN106556354 A CN 106556354A CN 201510613231 A CN201510613231 A CN 201510613231A CN 106556354 A CN106556354 A CN 106556354A
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- confocal displacement
- measuring head
- displacement measuring
- measurement
- profiles
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Abstract
The invention discloses a kind of 3D profiles on-line measurement instrument, including confocal displacement measuring head and piezoelectric linear actuator, confocal displacement measuring head is arranged on into piezoelectric linear and is driven on platform.Confocal displacement measuring head is arranged on above the detection station of manufacturing and processing equipment by connecting plate, when sample is moved to below confocal displacement measuring head, to confocal displacement meter controller measurement signal, piezoelectric linear drives platform to drive confocal displacement measuring head to move back and forth scanning 2D profiles, final to draw 3D profiles.The 3D profile on-line measurement instrument that the present invention is provided, using non-contact measurement, is not affected by sample surfaces soft or hard quality, any scuffing will not be caused to sample.There are more excellent angular characteristicses than interferometric method measurement height change value, measurement specular surface can reach ± 25 ° Dao ± 45 ° or so, measure the scope that diffuse-reflectance surface can reach 87 ° of highest.
Description
Technical field
The present invention relates to a kind of measuring instrument, more particularly to it is a kind of for the row such as electronics, automobile, quasiconductor
The 3D profile on-line measurement instrument of the online 3D size detections of industry precision parts.
Background technology
In prior art, extracting contour method has：
First, Mechanical stylus method.
For the small spacing of measurement surface and peak valley, need using superfine needle point, needle type radius one
As be several microns.Generally hard rock is inlaid with gold in needle point to improve needle point hardness, reduce abrasion.In measurement
During, stylus tip in the presence of mechanism's self gravitation, external mechanical force or electromagnetic force with it is tested
Surface is brought into close contact, and the sensor for being directly connected to contact pilotage or being connected by mechanical lever detects measurement point
Height value.In the case where scanning object stage drives, contact pilotage is moved relative to sample and to measured surface
Point by point scanning, stylus tip streak measured surface so as to get the contour curve of measured surface.
Mechanical stylus method is summed up and has the advantage that：(1) with larger horizontal survey scope,
Measurement range depends on the movement travel of scanning object stage, typically has tens millimeters；(2) with compared with
Big vertical survey scope and higher longitudinal resolution, general vertical survey scope are arrived up to several millimeters
More than ten millimeters, longitudinal resolution is up to nanometer scale；
2nd, microscopic interferometry.
Microscopic interferometry is that a kind of noncontact for carrying out measuring surface form using principle of optical interference is surveyed
Amount method.Microscopy is interfered to include scanning white light interferometric method, phase-shifting interferometry, heterodyne interferometry, complete
Breath interferometric method etc..Scanning white light interferometric method be it is a kind of on a large scale, high accuracy, phase place it is unambiguous micro-
Interferometric method [15].The characteristics of scanning white light interferometric method utilizes white light coherence length short, using zero order fringe
Positioning.Under the driving of scanning system, interference microscope records each to measured surface high accuracy scanning
Scanning shift value of sample point when zero optical path difference position, so as to take the three-dimensional appearance of measured surface.
Phase-shifting interferometry and heterodyne interferometry are typical position interference measuring methods, by detection by tested table
Phase information in the micro-interference image of face pattern modulation is obtaining the three-dimensional appearance of measured surface.Entirely
Breath interferometric method is the light intensity and phase place that measured surface is obtained using the interference of light, and optical with numerical simulation
Diffraction process, reproduces the three-dimensional appearance of measured surface.
Microscopic interferometry has been summed up following characteristics：(1) measured or planar survey using multi-point sampling,
Measurement efficiency is higher than Mechanical stylus method；(2) with higher longitudinal resolution, nanoscale can be reached
Above resolution；Shortcoming：1. probe is bigger than machinery probe, receives space in some online occasions
Limitation is unfavorable for installing；2. surface is difficult to produce interference effect after inclining more than 5-10 °, is only suitable for
The relatively flat surface of measurement.
Mechanical stylus method has the drawback that：
(1) bad dynamic performance and point-to-point measurement determine that such apparatus measures speed is slow, and this can also draw
Enter the interference of environmental factorss, affect measurement result；(2) stylus tip acts on measured surface, connects
Touch is about that several milli ox are to tens milli ox and very big with height change, and it is special that this can scratch measured surface
It is not soft surface, so tracer method is not suitable for the measurement on soft material surface；(3) due to pin
The restriction of sharp radius, it is impossible to measure the HFS that ultra-precision surface is measured in profile of concern,
Thus Mechanical stylus method is not suitable for the measurement of ultra-precision surface roughness, surface roughness is normally only used for
On sub-micrometer scale and bigger surface.
Microscopic interferometry has the drawback that：
(1) vertical survey scope is little, and phase comparator is limited by wavelength, and scanning white light is interfered general
Only tens microns；(2) limited by diffraction limit and microcobjective numerical aperture, laterally differentiated
Rate is difficult to break through sub-micrometer scale, thus is not suitable for the measurement of ultra-precision surface roughness.
In sum, for drawbacks described above present in prior art, the present invention proposes a kind of 3D
Profile on-line measurement instrument.
The content of the invention
The technical scheme that the present invention is adopted to solve above-mentioned technical problem is to provide a kind of 3D profiles and exists
Line measuring instrument, wherein, including confocal displacement measuring head and piezoelectric linear actuator, by confocal displacement meter
Gauge head is arranged on piezoelectric linear and drives on platform.
Above-mentioned 3D profile on-line measurement instrument, wherein, confocal displacement measuring head is installed by connecting plate
On the detection station of manufacturing and processing equipment, voice coil motor drives gauge head to do and moves back and forth at a high speed, when
When sample is moved to below confocal displacement measuring head, software trigger start recording measurement data is given, works as sample
Product terminate data record after leaving gauge head measurement range.Object dimensional shape is drawn by data processing software
Looks.
Above-mentioned 3D profile on-line measurement instrument, wherein, piezoelectric actuator is fed back at any time by grating scale
Position signalling obtains while a piezoelectricity can be gathered to confocal displacement meter, confocal displacement meter in collection height value
The positional value of Linear actuator feedback.And whether the sample detection means on board then can monitor sample
In measurement range, decide whether record data so as to feed back to confocal displacement meter.Above-mentioned 3D wheels
The measuring method of wide on-line measurement instrument, specially：
Platform is driven to drive confocal displacement measuring head to carry out high speed shuttle-scanning using piezoelectric linear, while note
The height value that the positional value and displacement meter of record encoder feedback is measured.
On secondary meter, oscillation cycle scan data is depicted as into a rule using data algorithm straight
Line, adds the corresponding y-coordinate value of line according to sample translational speed, using a rule line and its correspondence y
Coordinate figure secondary meter draws out sample surface tri-dimensional profile, can be obtained using secondary meter instrument
The surface parameter that must be needed；
The present invention is had the advantages that relative to prior art：
1st, confocal displacement measuring head adopts non-contact measurement, is not affected by sample surfaces soft or hard quality,
Any scuffing will not be caused to sample.
2nd, confocal displacement meter measurement has more excellent angular characteristicses than interferometric method measurement height change value,
Measurement specular surface can reach ± 25 ° Dao ± 45 ° or so, and measurement diffuse-reflectance surface can reach most
High 87 ° of scope.
3rd, package unit is very compact, long 122mm, wide 100mm, high 180-240mm, gauge head position
Put diameter only 27mm, in that context it may be convenient to be integrated in various processing producing lines and realize high-precision online 3D
Profile measurement.
4th, piezoelectric linear drives platform more more stable than traditional leading screw or line slideway, can reduce scanning
Impact of the device to measurement data.
5th, piezoelectric linear drives platform reach the superelevation linear velocity of 100-200mm/s.Piezoelectric linear
Drive platform sweep limitss to be 5mm, according to 100mm/s speed, 20 contour lines can be realized each second
Scanning；According to 200mm/s speed, each second can realize the scanning of 40 contour lines.At this
Under the scanning mode of kind of high speed, it is to be scanned that detected sample need not be stopped etc., and detected sample can
, under the translational speed of 10mm-50mm, to be detected 3D contour curves.
Description of the drawings
Fig. 1 is the structural representation of confocal displacement meter.
The structural representation of the 3D profile on-line measurement instrument that Fig. 2 is provided for the present invention.
1 confocal 2 piezoelectric linear actuator of displacement measuring head, 3 connecting plate
4 confocal displacement meter controller, 5 secondary meter, 6 confocal displacement meter optical fiber
Specific embodiment
The invention will be further described with reference to the accompanying drawings and examples.
First relevant technical terms in the present invention are explained：
Confocal displacement meter：Confocal displacement meter is that a kind of new superhigh precision and the non-of ultrastability connect
Tactile optical detector for displacement measuring device, projects the polychromatic light (white) of a beam of broad spectrum by light source, passes through
There is spectral dispersion in dispersion camera lens, form a series of monochromatic light of different wave lengths on an axis, often
One wavelength all corresponds to a distance value to testee.Irradiation light is reflected by body surface,
Filtered by copolymerization Jiao's aperture, only meet the monochromatic light of confocal condition, can be by aperture by spectrum
Instrument is sensed.By calculating the wavelength being sensed, conversion obtains distance value.
Piezoelectric linear actuator：It utilizes the function such as piezoelectric ceramics substrate or thin film, electrostriction material
Part is realized driving, and is mainly characterized by providing larger horizontal power output, meanwhile, and may realize
Superhigh precision and thin tail sheep --- the precision of millimetre-sized displacement stroke and atom level.It is general fast with zero load
Degree, maximum propulsive force, efficiency and some other parameter are characterizing piezoelectric linear motor.Piezoelectric linear drives
Dynamic utensil has that speed-raising degree in short distance is fast, and movement velocity is fast, the characteristics of compact, in many precisions
Used on instrument or equipment.
On-line measurement：Exactly by being mounted directly equipment on a production line, using soft-measuring technique reality
When detection, Real-time Feedback, so as to preferably Instructing manufacture, reduce unnecessary waste.
The 3D profile on-line measurement instrument that the present invention is provided, structure is：Including confocal displacement measuring head 1
With piezoelectric linear actuator 2, piezoelectric linear actuator 2 can adopt voice coil motor, by confocal displacement meter
Gauge head 1 is arranged on piezoelectric linear and drives on platform.Platform is driven to drive confocal displacement meter to move back and forth.It is confocal
Displacement measuring head 1 is arranged on above the detection station of manufacturing and processing equipment by connecting plate 3, works as sample
When moving to below confocal displacement measuring head 1, open to 5 measurement signal of secondary meter of confocal displacement meter
Beginning record data stops after leaving.Can be near as confocal displacement meter high speed acquisition data need not be triggered
Seemingly regard a scan line as, just can synthesize object three-dimensional contour outline using a rule scan line.
The measuring method of 3D profile on-line measurement instrument that the present invention is provided is：
Platform 2 is driven to drive confocal displacement measuring head 1 to carry out short transverse data scanning using piezoelectric linear
Measurement, confocal displacement meter controller 4 is obtained in high speed acquisition height value while recording piezoelectric linear drives platform
The position coordinateses of 2 feedbacks, so as to generate a series of reciprocating linears, can be true according to the flat translational speed of sample
The y directions position of fixed every line；
On secondary meter 5, line corresponding y directions position out just may be used by Software on Drawing
Obtain the three-dimensional surface profile of sample；
Point and the confocal displacement meter measurement value difference between putting are differences in height, the plane coordinates difference of point and point be away from
Deviation, arranges the level and longitudinal axis data result for calculating needs by secondary meter 5.
Spectrum peak change, scanned object apparent height in confocal displacement meter real-time monitoring range ability
Change can make confocal displacement sensing to the change of spectrum peak, and confocal displacement meter is by calculating spectrum peak
Changing value calculates the change of actual object apparent height.
3D profile on-line measurement instrument its operation principle that the present invention is provided is：Piezoelectric linear drives platform to drive
Confocal displacement measuring head 1 carries out surface profile reciprocal linear scanning, and piezoelectric linear actuator 2 can lead to
Grating scale feedback real time position value is crossed, confocal displacement meter controller 4 can be collected by encoder mouth
The positional value of the feedback of piezoelectric linear actuator 2 records height value at that time simultaneously.Thus confocal displacement meter
Each height value of measurement can be one by one with each positional value in piezoelectric linear driving platform scanning process
Correspondence, one-to-one two columns value can be depicted as scanned sample surfaces two-dimensional silhouette curve, profit
Object three-dimensional contour outline is just obtained with reference to corresponding y directions position with a rule two-dimensional silhouette curve.Its
Rationale and correlation computations parameter are as follows：
The program realizes line mode using high accuracy, the characteristic of high speed of copolymerization Jiao's displacement transducer
The defect characteristic of scanning body surface.Piezoelectric linear drives platform to drive gauge head to move back and forth scanning, tested
Part is positioned on the sample stage for moving horizontally, while platform drives sample levels to move, piezoelectric wire
Property drive platform drive gauge head move back and forth produce a series of scan lines just can approximately depict object
Surface defect size, is processed by calculating and actual value is just obtained.According to scanning accuracy and single sample
Demand, can arrange suitable piezoelectric linear and drive platform speed and sample frequency, demand essence sweep time
The degree higher time, shorter required piezoelectric linear driving platform speed was bigger, and sensor sample frequency is higher.
In certain accuracy rating, what we can be approximate regards series of points as on one line, and gauge head is past
Multiple motion is once equivalent to produce two scan lines, compares traditional common focus point formula scanning method, by
Only need to gather piezoelectric linear actuator encoder values and scan values in triggering, line scanning can be with
Scanning is more rapidly completed, on-line measurement demand is met.Scanning out data according to certain algorithm process
Just the physical parameter of defect is obtained.It is as follows which implements principle：
Under preferable experimental state, define piezoelectric linear actuator and speed is at the uniform velocity moved back and forth for v1, water
Square to table translational speeds be v2, tested gap developed width is k, and measured value is L, then reason
By upper measurement error Δ and speed v1、v2And k has following functional relationship, i.e.,：
There is following functional relationship in developed width k and measured value L, i.e.,：
Can be scanned down online through calculating according to appeal relation and measure gap developed width.
Appeal formula is deduced and is obtained：
Following speed is corresponding to be made that by calculating analysis with error to different size of gap in following table
Table, according to calculating and function expression, can select according to available accuracy demand and time of measuring demand
Suitable speed.There was only few examples parameter in table, it is only for reference.
1st, assume to cause error delta<1um, relevant parameter such as following table：
| Δ | v1(mm/s) | k(um) | v2(mm/s) | k(um) | v2(mm/s) | k(um) | v2(mm/s) |
| Δ<1um | 40 | 50 | 7.88 | 100 | 5.61 | 500 | 2.53 |
| Δ<1um | 50 | 50 | 9.85 | 100 | 7.02 | 500 | 3.16 |
| Δ<1um | 60 | 50 | 11.82 | 100 | 8.42 | 500 | 3.79 |
| Δ<1um | 70 | 50 | 13.79 | 100 | 9.82 | 500 | 4.42 |
| Δ<1um | 80 | 50 | 15.76 | 100 | 11.22 | 500 | 5.05 |
2nd, assume to cause error delta<10um, relevant parameter such as following table：
Although the present invention is disclosed as above with preferred embodiment, so which is not limited to the present invention, appoints
What those skilled in the art, without departing from the spirit and scope of the present invention, when a little modification can be made
With it is perfect, therefore protection scope of the present invention is when by being defined that claims are defined.
Claims (4)
1. a kind of 3D profiles on-line measurement instrument, it is characterised in that：Including confocal displacement measuring head and pressure
Confocal displacement measuring head is arranged on piezoelectric linear and is driven on platform by linear driver.
2. 3D profiles on-line measurement instrument as claimed in claim 1, it is characterised in that：
Confocal displacement measuring head is arranged on above the detection station of manufacturing and processing equipment by connecting plate, when
When sample is moved to below confocal displacement measuring head, to confocal displacement meter controller measurement signal, piezoelectricity
Linear Driving platform drives confocal displacement measuring head shuttle-scanning 2D profiles so as to draw 3D rendering.
3. 3D profiles on-line measurement instrument as claimed in claim 2, it is characterised in that：Piezoelectric linear
Driver feedback position value, confocal displacement meter collection height value gather positional value, sample monitoring dress simultaneously
Put feedback to decide whether to record measurement data.
4. a kind of measuring method of 3D profiles on-line measurement instrument as claimed in claim 3, its feature
It is：
Drive platform to drive confocal displacement measuring head to carry out reciprocal short transverse data using piezoelectric linear to sweep
Measurement is retouched, the positional value at the height for collecting and correspondence moment is drawn into two-dimensional silhouette；
On secondary meter, line drawing after two-dimensional silhouette is processed, is drawn out；
Point and the confocal displacement meter measurement value difference between putting are differences in height, the plane coordinates difference of point and point be away from
Deviation, is arranged by secondary meter and calculates final result.
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| CN201510613231.4A CN106556354A (en) | 2015-09-24 | 2015-09-24 | 3D profile on-line measurement instrument |
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| CN201510613231.4A CN106556354A (en) | 2015-09-24 | 2015-09-24 | 3D profile on-line measurement instrument |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110186391A (en) * | 2019-05-22 | 2019-08-30 | 浙江大学 | A kind of threedimensional model gradient scan method |
| CN113316704A (en) * | 2019-01-11 | 2021-08-27 | 新加坡科技研究局 | Apparatus and method for evaluating surface roughness |
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| JP2003057553A (en) * | 2001-08-09 | 2003-02-26 | Olympus Optical Co Ltd | Confocal scanning type microscope |
| CN102538687A (en) * | 2010-12-30 | 2012-07-04 | 财团法人工业技术研究院 | Method and device for measuring morphology of moving sample |
| CN102749027A (en) * | 2011-04-18 | 2012-10-24 | 陈亮嘉 | Linear color confocal microscope system |
| CN202885804U (en) * | 2012-11-15 | 2013-04-17 | 东华大学 | Analog measuring platform for texture touch evaluation procedure |
-
2015
- 2015-09-24 CN CN201510613231.4A patent/CN106556354A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003057553A (en) * | 2001-08-09 | 2003-02-26 | Olympus Optical Co Ltd | Confocal scanning type microscope |
| CN102538687A (en) * | 2010-12-30 | 2012-07-04 | 财团法人工业技术研究院 | Method and device for measuring morphology of moving sample |
| CN102749027A (en) * | 2011-04-18 | 2012-10-24 | 陈亮嘉 | Linear color confocal microscope system |
| CN202885804U (en) * | 2012-11-15 | 2013-04-17 | 东华大学 | Analog measuring platform for texture touch evaluation procedure |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113316704A (en) * | 2019-01-11 | 2021-08-27 | 新加坡科技研究局 | Apparatus and method for evaluating surface roughness |
| CN113316704B (en) * | 2019-01-11 | 2023-12-01 | 新加坡科技研究局 | Apparatus and method for evaluating surface roughness |
| CN110186391A (en) * | 2019-05-22 | 2019-08-30 | 浙江大学 | A kind of threedimensional model gradient scan method |
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Application publication date: 20170405 |
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