JP2007278849A - Optical measuring device and optical measuring method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical measuring device capable of observing an inspection object three-dimensionally by a color image, using a simple structure. <P>SOLUTION: This optical measuring device is equipped with an objective lens system wherein a first inputted light having a first wavelength is condensed onto the inspection object and a first reflected light reflected by the inspection object is outputted, and a second inputted light having a second wavelength is split into the second reference light and a second measuring light, and the second measuring light is condensed onto the inspection object and the second reflected light reflected by the inspection object is outputted, and the second reference light is reflected and the third reflected light interfering with the second reflected light is outputted. A three-dimensional image of the inspection object is generated by using the first reflected light and interference between the second reflected light and the third reflected light. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an optical measurement apparatus and an optical measurement method capable of measuring an object to be inspected in three dimensions, and more specifically, to accurately measure the shape and height of a minute object to be inspected such as a bump electrode of a semiconductor package. The present invention relates to an optical measurement apparatus and an optical measurement method.

  Conventionally, a white light interference type three-dimensional microscope or a confocal type three-dimensional microscope has been used to measure a minute inspection object.

  FIG. 8 shows a typical white light interference type three-dimensional microscope 100 as an example. It includes a first light source 10 such as a halogen lamp, a convex lens 11, a half prism 120, an objective lens 131, a beam splitter 132, and a reference mirror 133. The inspection object 18 is placed on the inspection table 17.

  Light from the first light source 10 is deflected in the direction of the inspection object 18 by the half prism 120 via the convex lens 11. After passing through the objective lens 131, the light is split by the beam splitter 132 into light B 1 that passes through the objective lens 131 and light B 2 that is reflected toward the reference mirror 133.

  When the light B <b> 1 is reflected from the object to be inspected 18, the path is reversed, passes through the half prism 120, is focused by the image lens 15, and reaches the CCD camera 140.

  On the other hand, the light B2 split by the beam splitter 132 is reflected by the reference mirror 133 and follows a reverse path, and is focused by the image lens 15 and reaches the CCD camera 140, similarly to the light B1.

  The objective lens system 130 including the objective lens 131, the beam splitter 132, and the reference mirror 133 can move upward or downward along the optical axis of the light B1. Along with the movement, since the distance between the objective lens 131 and the inspection object 18 changes, the length of the optical axis of the light B1 also changes. On the other hand, the distance between the objective lens 131 and the reference mirror 133 is constant. Therefore, a difference occurs between the length of the optical axis of the light B1 and the length of the optical axis of the light B2, and the difference changes according to the movement of the objective lens system 130.

  Due to the difference in the length of the optical axis, the relative phase difference between the two lights changes. If the relative phase difference is 0, the intensities of those lights are intensified, and if the phase difference is 180 degrees, the intensities cancel each other. In addition, the intensity changes so as to draw a sine curve between these phase differences.

  Therefore, as the objective lens system 130 moves up and down, the light B1 and the light B2 generate interference fringes that represent a change in intensity at a height corresponding to the unevenness of the surface of the inspection object. In the CCD camera 140, the interference fringes are observed.

  As described above, the white light interference type three-dimensional microscope uses white light and uses the difference between the reference path (the optical path reflected by the reference mirror) and the inspection path to the object to be inspected. The height of the inspection object is calculated according to the state.

  In addition, a confocal three-dimensional microscope has been conventionally used to measure a minute inspection object. The confocal three-dimensional microscope includes a configuration in which the objective lens is moved from top to bottom to change the distance from the object to be inspected and a pinhole. When the distance between the objective lens and the object to be inspected is changed, the image of the object to be inspected is gradually focused from the out-of-focus position, and then defocused again. When the light is focused on the pinhole, an image of the focused portion is captured and the image is synthesized.

As described above, since the confocal three-dimensional microscope captures an image of a focused portion, the synthesized image can reproduce the color of the inspection object.
Japanese Patent Application Laid-Open No. 2001-201325 discloses a three-dimensional shape observation apparatus having an imaging camera that images an object to be observed through an objective lens and a two-dimensional interferometer that measures the unevenness of the object to be observed. The apparatus uses two types of light sources as a two-dimensional interferometer, and switches illumination between the illumination lamp for observing the object to be observed and the two types of light sources of the two-dimensional interferometer. A shutter or the like is used.

  The white light interference type three-dimensional microscope has a high resolution with respect to the “height”, but has a problem that the obtained image cannot reproduce the color tone and brightness.

  The confocal 3D microscope can obtain images with natural color tone and brightness, but the resolution to “height” is low, especially at low magnification, the depth of field increases and accurate “height” accuracy It is difficult to obtain.

  Further, the apparatus of Patent Document 1 is for switching between irradiation of two types of light sources having different wavelengths, an illumination lamp for observing an object to be observed, and two types of light sources of the two-dimensional interferometer. A shutter or the like is required, and the structure is complicated.

  The optical measuring apparatus according to the present invention focuses the input first light having the first wavelength on the inspection object, outputs the first reflected light reflected from the inspection object, and inputs the second light having the second wavelength to be input. The two lights are divided into a second reference light and a second measurement light, the second measurement light is focused on the inspection object, and a second reflected light reflected from the inspection object is output, and the second reference is performed. An objective lens system is provided that outputs a third reflected light that reflects light and interferes with the second reflected light, and is inspected using the first reflected light and the interference between the second reflected light and the third reflected light. Generate a three-dimensional image of an object.

  The first light may be visible light and the second light may be ultraviolet light.

  The objective lens system can include a reflecting means for reflecting the reference light of the measurement light having the second wavelength.

  The optical measurement apparatus according to the present invention may further include a moving unit that moves the objective lens system or the inspection object to change the distance between the inspection object and the objective lens system.

  The reflecting means can reflect only the second reference light by absorbing or transmitting the first light.

  Moreover, the optical measuring device which can measure the three-dimensional shape of the test object according to the present invention includes a first light source that outputs first light, a second light source that outputs second light, and second light. An objective lens system comprising: a splitting means for splitting the measurement light and the reference light; and a reflecting means for reflecting the reference light; and a focusing means for focusing the measurement light and the first light on the inspection object. An objective lens system for outputting the measurement light reflected from the object to be inspected and the first light and the reference light reflected by the reflecting means, and the first light reflected from the object to be inspected that is output from the objective lens system. First imaging means for receiving light, second imaging means for receiving measurement light reflected from the object to be inspected and reference light reflected from the reflecting means, which are output from the objective lens system, and first and second Generates a three-dimensional image of the inspection object from the light received by the light receiving means And a image generating unit.

  The first light may be visible light and the second light may be ultraviolet light.

  The reflecting means can reflect only the reference light by absorbing or transmitting the first light.

  Furthermore, a moving means for moving the objective lens system or the inspection object and changing the distance between the inspection object and the objective lens system may be provided.

  Further, between the objective lens system and the first or second imaging means, the reflected light of the first light from the inspection object, the reflected light of the measurement light from the inspection object, and the reference light reflected from the reflection means Separation means for separating them may be provided.

  It is desirable to generate an interference intensity pattern when the reflected light of the measurement light from the inspection object and the reference light reflected from the reflecting means are detected by the second imaging means.

  Furthermore, an optical measurement method for measuring a three-dimensional shape of an object to be inspected according to the present invention includes a step of obtaining a color image of the object to be inspected with first light and a predetermined height of the object to be inspected with second light. Corresponding to interference fringe data from the color image of the inspection object, the process of obtaining the interference fringe data, the process of generating the interference fringes in the second light by changing the height of the inspection object relatively stepwise Extracting the image data to be processed, and combining the image data extracted for each interference fringe data to generate an image representing the three-dimensional shape of the inspection object.

  According to the present invention, by using ultraviolet light, accuracy (resolution) can be improved as compared with a conventional white light interference microscope using white light, and imaging is performed by using visible light together. Can be obtained as a color image (an image having color tone and brightness).

  In addition, it is possible to obtain higher accuracy (resolution) in the height direction even with an image having a wider field of view than the confocal microscope.

  Furthermore, the inspection object can be observed three-dimensionally with a simple structure.

Hereinafter, preferred embodiments of an optical measuring device according to the present invention will be described with reference to the accompanying drawings. In addition, in the figure, the same code | symbol is attached | subjected to the same element and the overlapping description is abbreviate | omitted.
[Configuration of optical measuring device]
FIG. 1 shows an optical measuring apparatus 1 according to an embodiment of the present invention.

  The apparatus 1 includes a first light source 10, a second light source 20, a convex lens 11, a first half mirror 22, a second half mirror 24, a third half mirror 26, an objective lens system 25, The imaging unit 28, the second imaging unit 29, the control unit 23, and the mounting table 17 are provided.

  The first light source 10 is a light source that emits light for extracting color information from the inspection object 18.

  For this reason, the light from the first light source 10 needs to be a color that can be seen by humans, and uses visible light. As the light from the first light source 10, for example, white light having a wavelength of about 500 nm to 700 nm can be used.

  The first light source 10 may be a halogen lamp that outputs such light.

  The second light source 20 is a light source that can output light having a wavelength different from that of the first light source 10. As will be described in detail later, the second light source 20 outputs a wavelength different from the light of the first light source 10, but interference is caused by the light from the second light source 20, and the height information of the inspection object 18 is obtained. Make it possible to get.

  As the light output from the second light source 20, ultraviolet light having a wavelength of about 350 nm can be used. As described above, the light from the second light source 20 is not particularly limited as long as it has a wavelength different from that of the light from the first light source 10, but since the inspection object 18 is fine, ultraviolet light having a wavelength shorter than that of infrared light. Is used. In addition, it is preferable to use a laser irradiation apparatus for this 2nd light source 20 also in order to output the stable ultraviolet-ray.

  The convex lens 11 is used to make light emitted from the first light source 10 into parallel light.

  The first half mirror 22 transmits the first light output from the first light source 10 and reflects the second light from the second light source 20 toward the second half mirror 24. By using the first half mirror 22, the first light from the first light source 10 and the second light from the second light source 20 can be synthesized.

  The second half mirror 24 guides the synthesized first light and second light to an objective lens system 25 described later.

  The second half mirror 24 transmits reflected light from an objective lens system 25 described later.

  The objective lens system 25 irradiates the inspection object 18 with the first light and the second light to generate reflected light and to generate interference light for measuring “height” from the second light. The objective lens system 25 separates the combined first light and second light into first light for obtaining “color” information and second light for obtaining “height” information. The objective lens system 25 further separates and interferes with the separated second light.

  In other words, the objective lens system 25 separates the first light and the second light from the combined light of the first light and the second light that are incident, and the first light is guided to the inspection object 18 and at the same time. The second light is further separated, one light is guided to the inspection object 18 and the other light is used as interference light. Further, these three lights are reflected as light reflected by the inspection object or the reference mirror. Output.

  The objective lens system 25 irradiates the inspection object 18 with the separated first light and guides the imaging light reflected from the inspection object 18 to a third half mirror 26 described later. Further, the objective lens system 25 irradiates the inspection object 18 with the separated second light, and the measurement light reflected from the inspection object 18 and the reference light for causing interference with the measurement light. The interference light by the measurement light and the reference light is guided to the third half mirror 26.

  The objective lens system 25 includes an objective lens 251, a fourth half mirror 252, and a reference mirror 253.

  The objective lens 251 is used to focus the first light and the second light incident on the objective lens system 25 on the inspection object 18.

  The fourth half mirror 252 guides the first light to the inspection object 18 and converts the light C1 that passes the second light toward the inspection object 18 and the light C2 that is reflected toward the reference mirror 253. To separate.

  The light C1 is reflected by the inspection object 18 and becomes measurement light, and the light C2 is reflected from a reference mirror 253 described later and becomes reference light.

  The reference mirror 253 is a mirror that reflects the second light.

  As described above, the fourth half mirror 252 separates the second light into two, but simultaneously separates the first light into two. Therefore, the reference mirror 253 transmits the first light and transmits the first light. A mirror that reflects only two lights is used.

  As another method, a filter that absorbs the first light and transmits only the second light can be disposed on the optical path between the reference mirror 253 and the fourth half mirror 252. In this case, As the reference mirror, a mirror that reflects the first light and the second light can be used.

  Such a reference mirror and filter constitute a reflecting means that reflects only the second reference light by absorbing or transmitting the first light.

  The third half mirror 26 is the first light imaging light of the inspection object that has passed through the second half mirror 24, the second light measurement light reflected from the inspection object 18, and the reference light reflected from the reference mirror 253. It is a mirror for separating light.

  Therefore, the third half mirror 26 passes the first light of the inspection object that has passed through the second half mirror 24 to reach the first image pickup means 28, and the third half mirror 26 The measurement light of the second light reflected from the inspection object 18 and the reference light reflected from the reference mirror 253 are reflected and guided to the second imaging device 29.

  In addition, the optical measuring device 1 forms a lens 15 that focuses the first light that has passed through the third half mirror 26, a first imaging device 28 that forms an image from the first light, and an image from ultraviolet light. And a second imaging device 29. As the third half mirror 26, a dichroic mirror that selects and reflects or transmits different wavelengths such as the first light and the second light can be used.

  The objective lens 251, the fourth half mirror 252, and the reference mirror 253 constitute an objective lens system 25. The objective lens system 25 can move up and down along the optical axes of the first light D1 and the ultraviolet measurement light C1. The objective lens system 25 can be moved by, for example, a piezo element (not shown). The scanning range of the measurement target portion of the inspection object 18 by the movement is, for example, a range obtained by adding several tens of μm to the height of the measurement target portion. For example, when the height from the bottom to the top of the measurement target portion is 60 μm, the scanning range is about 70 μm. As described above, the scanning range can be changed by changing the setting of the driving range of a driving device (not shown) that moves the objective lens system 25 according to the height of the measurement target portion.

  The resolution of reading height data by the scanning is about 0.1 nm, and the repetition accuracy is about 10 nm. Since the scanning is performed while changing only a distance smaller than the depth of field of the objective lens 251, the number of movements is determined according to the height of the measurement target portion of the inspection object 18. For each movement, the first imaging device 28 and the second imaging device 29 obtain images of the first light and the second light.

The first and second imaging devices 28 and 29 are connected to the control device 23 and store the data every time an image is obtained. Moreover, the control apparatus 23 produces | generates the three-dimensional image of the measurement object part of the to-be-inspected object 18 based on those data.
[Generation of interference fringes by ultraviolet light]
FIG. 2 is a diagram illustrating the relationship between the distance between the objective lens 251 and the reference mirror 253 and the distance between the objective lens 251 and the inspection object 18. In FIG. 2, the distance from the objective lens 251 to the reflection surface of the beam splitter 252 is common between the objective lens 251 and the reference mirror 253 and between the objective lens 251 and the inspection object 18. The distance from the reflecting surface of the beam splitter 252 to the inspection object 18 is represented as L1, and the distance from the reflecting surface of the beam splitter 252 to the reference mirror 253 is represented as L2.

  The distance between the objective lens 251 and the reference mirror 253 is fixed. That is, the distance L2 from the reflection surface of the beam splitter 252 to the reference mirror 253 is constant. On the other hand, since the objective lens system 25 including them moves up and down along the optical axes of the first light D1 and the ultraviolet measurement light C1, the distance between the objective lens 251 and the inspection object 18, that is, The distance L 1 from the passing position of the beam splitter 252 to the inspection object 18 varies according to the movement of the objective lens system 25. As a result, the optical path length determined by L1 is different from the optical path length determined by L2.

  Therefore, a difference occurs in the phase of light passing through two different optical path lengths L1 and L2. If the phase difference is 0, the intensity of the light is increased, and if the phase difference is 180 degrees, the intensity is canceled. In addition, between the phase differences, the combined intensity changes so as to draw a sine curve.

  That is, when the objective lens system 25 moves upward or downward, a difference occurs in the optical path lengths (L1 and L2) of the two light portions C1 and C2 of the second light, and their relative phases differ. For this reason, the change in intensity at a height corresponding to the unevenness of the surface of the inspection object 18 is caused by the reference light C2 of the second light reflected from the reference mirror 253 and the measurement light C1 reflected from the inspection object 18. Interference fringes are generated. The CCD camera 29 can observe the interference fringes.

The control device 23 obtains high-level data from the interference fringes observed by the CCD camera 29. For example, when one wavelength is 350 nm, about 1/1000 of the resolution can be obtained.
[Operation of optical measuring device]
FIG. 3 is a flowchart of an operation for obtaining an image of the inspection object in the optical measurement apparatus of FIG.

  First, in step S31, the inspection object 18 is placed on the inspection table 17.

  In step S32, it is determined which area of the inspection object 18 is to be measured, and a predetermined position is focused.

  In step S33, the first light source 10 and the second light source 20 are activated to output the first light and the second light, respectively.

  When the first light is output from the first light source 10, the first light is converted into parallel light by the convex lens 11, passes through the first half mirror 22, and reaches the second half mirror 24. In the second half mirror 24, the first light is deflected toward the inspection object 18. The first light is further focused toward the inspection object 18 by the objective lens 251. When the first light that has passed through the objective lens 251 passes through the fourth half mirror 252, a part of the first light D2 is deflected toward the reference mirror 253. The first light D2 that reaches the reference mirror 253 is absorbed there and is not reflected.

  The first light D1 that has passed through the fourth half mirror 252 irradiates the inspection object 18, is reflected therefrom, and returns to the original path. That is, the first light D <b> 1 reflected from the inspection object 18 passes through the fourth half mirror 252, the objective lens 251, and the second half mirror 24.

  The first light that has passed through the second half mirror 24 further passes through the third half mirror 26 and is focused toward the first imaging device 28 by the objective lens 15.

  On the other hand, the second light output from the second light source 20 is reflected by the first half mirror 22 toward the second half mirror 24 and further deflected by the second half mirror 24 toward the inspection object 18. . The deflected second light is focused toward the inspection object 18 by the objective lens 251. Thereafter, the second light is separated by the fourth half mirror 252 into reference light C2 reflected toward the reference mirror 253 and measurement light C1 passing therethrough.

  The reference light C <b> 2 that has reached the reference mirror 253 returns to its original path when reflected there. That is, the reference light C <b> 2 that has reached the fourth half mirror 252 is reflected by the fourth half mirror 252 toward the objective lens 251.

  The measurement light C1 of the second light that has passed through the fourth half mirror 252 irradiates the inspection object 18, is reflected therefrom, and returns to the original path. That is, the measurement light C <b> 1 is reflected from the inspection object 18 and passes through the fourth half mirror 252.

  The reference light C2 of the second light deflected by the fourth half mirror 252 and the measurement light C1 of the second light that has passed through the fourth half mirror 252 pass through the objective lens 251, and further, the second half mirror 24. Pass through.

  The second measurement light C1 and the reference light C2 that have passed through the second half mirror 24 are deflected toward the second imaging device 29 by the third half mirror 26.

  In step S <b> 34, the first imaging device 28 captures a color image of the measurement area of the inspection object 18 by the first light reflected from the inspection object 18. Further, the second imaging device 29 detects interference fringes generated according to the difference in path between the measurement light C1 and the reference light C2. Data of the first and second imaging devices 28 and 29 is stored in a storage device (not shown) of the control device 23.

  Subsequently, in step S35, the control device 23 determines whether all measurement target areas of the inspection object have been measured (whether an image has been acquired). In S36, the objective lens system 25 is moved upward or downward by a predetermined distance, and a predetermined portion of the inspection object is imaged by the first light and the second light in the same manner as described above. The imaging is repeated a predetermined number of times, and each data is stored in the storage device of the control device 23 for each imaging.

When all the measurement target portions have been observed, the measurement operation ends, and next, using the data stored in the control device 23, a three-dimensional image of the measurement target portion of the inspection object is generated.
[Generation of 3D image of inspection object]
FIG. 4A to FIG. 4E show examples of images when one measurement target portion of the inspection object 18 is observed in order along the height direction by the optical measurement device 1 shown in FIG. .

  As described above, the interference fringes are generated when the second light is measured. On the other hand, an enlarged color image of the inspection object 18 can be obtained from the first light. However, the color image includes a clear image within the range of the depth of field and an image that is out of focus and out of focus.

  The height of the inspection object in which the interference fringes are generated by the second light is also a position where the first light is focused on the position of the inspection object. Therefore, it is necessary to extract only the part corresponding to the interference fringes in the color image obtained by the first light. That is the image shown in FIGS. 4 (a) to 4 (e).

  FIG. 4A to FIG. 4E show five measurement regions captured by the first imaging device 28 and the second imaging device 29 by moving the objective lens system 2 by a predetermined distance. The moving distance is a distance shallower than the depth of field of the objective lens 251. For each distance, the object 18 is photographed along the height direction while moving the objective lens system 25.

  FIG. 4A is an image of the portion 40a at the highest position of the inspection object where the interference fringes are generated. FIG. 4E is an image of the portion 40e at the lowest position of the inspection object where the interference fringes are generated. 4B, 4C, and 4D, the objective lens system 2 is moved by a predetermined distance between the portion 40a shown in FIG. 4A and the portion 40e shown in FIG. It is the image of the part 40b, 40c, 40d where the interference fringe obtained when moving and image | photographed.

  When the images shown in FIGS. 4A to 4E are combined in the height direction, an image as shown in FIG. 5 is obtained. In addition, since measurement is performed in the height direction for each distance shorter than the depth of field, a color image exists between two interference fringe generation positions having different heights, but in FIG. Only the position where the color image is extracted from the interference fringes is represented by a line, and the image in the height direction is omitted. FIG. 6 three-dimensionally represents the measurement target portion 40 of the inspection object 18.

These processes are performed in the control device 23. That is, first, height data of the measurement portion of the inspection object is obtained from the interference fringe data of the second light obtained by the second imaging device 29. Next, image data of a portion corresponding to the interference fringe is extracted from the color image data of the measurement portion of the inspection object by the first light corresponding to the height data. The extracted image data is combined in the height direction to generate a three-dimensional image of the inspection object.
[Alternative examples]
The optical measurement apparatus according to the present invention has been described above, but the present invention is not limited to these embodiments. It should be understood that additions, deletions, modifications, and the like that can be easily made by those skilled in the art are included in the present invention. The technical scope of the present invention is defined by the description of the appended claims.

  For example, in this embodiment, the example in which the objective lens system 25 is moved up and down has been described. However, the objective lens system 25 is not moved, and the inspection table 17 on which the inspection object 18 is placed is moved up and down along the optical axis. It may be moved to.

  In the present embodiment, the objective lens 251 is disposed on the incident side to the fourth half mirror 252, but may be disposed on the side facing the object 18 to be measured on the emission side of the fourth half mirror 252.

  Further, a half prism may be used instead of the half mirror.

FIG. 1 is a schematic side view of an optical measuring apparatus according to an embodiment of the present invention. FIG. 2 is a partial schematic side view for explaining the principle of generation of interference fringes due to the difference in the light path length in the optical measurement apparatus according to FIG. FIG. 3 is a flowchart for observing an inspection object using the optical measurement apparatus according to FIG. FIG. 4A to FIG. 4E are diagrams for explaining an example of obtaining an image when observing an inspection object using the optical measurement apparatus according to FIG. FIG. 5 is a combination of the drawings of FIGS. 4 (a) to 4 (e). FIG. 6 is a three-dimensional representation of the image of FIG. FIG. 7 is a schematic side view of a conventional white light interference type three-dimensional microscope.

Explanation of symbols

10: first light source 11, 15: convex lens 17: inspection table 18: inspection object 20: second light source 22, 24, 26: half mirror 23: control device 25: objective lens system 28, 29: CCD camera (first And second imaging device)
251: Objective lens 253: Reference mirror

Claims (12)

The first light having the first wavelength input is focused on the inspection object, the first reflected light reflected from the inspection object is output, and the second light having the second wavelength input is the second reference light. The second measurement light is divided into the second measurement light, the second measurement light is focused on the inspection object, the second reflected light reflected from the inspection object is output, and the second reference light is reflected to reflect the second measurement light. An objective lens system that outputs third reflected light that interferes with the two reflected light;
An optical measurement device that generates a three-dimensional image of the inspection object using the first reflected light and the interference between the second reflected light and the third reflected light.   The optical measurement apparatus according to claim 1, wherein the first light is visible light and the second light is ultraviolet light.   The optical measurement apparatus according to claim 1, wherein the objective lens system includes a reflection unit configured to reflect the reference light of the measurement light having the second wavelength.   The optical measurement apparatus according to claim 1, further comprising moving means for moving the objective lens system or the inspection object to change a distance between the inspection object and the objective lens system.   The optical measurement apparatus according to claim 3, wherein the reflection unit reflects only the second reference light by absorbing or transmitting the first light. An optical measuring device capable of measuring a three-dimensional shape of an inspection object,
A first light source that outputs first light;
A second light source that outputs second light;
Splitting means for splitting the second light into measurement light and reference light;
An objective lens system comprising a reflecting means for reflecting the reference light, and a focusing means for focusing the measurement light and the first light on the inspection object, the measurement light reflected from the inspection object and the An objective lens system for outputting the first light and the reference light reflected by the reflecting means;
First imaging means for receiving the first light reflected from the object to be inspected and output from the objective lens system;
Second imaging means for receiving the measurement light reflected from the object to be inspected and the reference light reflected from the reflecting means, which is output from the objective lens system;
An optical measurement apparatus comprising: an image generating unit configured to generate a three-dimensional image of the inspection object from the light received by the first and second light receiving units.   The optical measurement apparatus according to claim 6, wherein the first light is visible light and the second light is ultraviolet light.   The optical measurement apparatus according to claim 6, wherein the reflection unit reflects only the reference light by absorbing or transmitting the first light.   The optical measurement apparatus according to claim 6, further comprising moving means for moving the objective lens system or the inspection object to change a distance between the inspection object and the objective lens system.   Further, between the objective lens system and the first or second imaging means, the reflected light of the first light from the inspection object, the reflected light of the measurement light from the inspection object, and the reflection The optical measurement apparatus according to claim 6, further comprising a separating unit that separates the reference light reflected from the unit.   The optical measurement apparatus according to claim 6, wherein an interference intensity pattern is generated when the reflected light of the measurement light from the inspection object and the reference light reflected from the reflection means are detected by the second imaging means. . An optical measurement method for measuring a three-dimensional shape of an inspection object,
Obtaining a color image of the inspection object with first light;
Obtaining interference fringe data of a predetermined height of the object to be inspected by second light;
Changing the height of the inspection object in a relatively stepwise manner to generate interference fringes in the second light; and
Extracting image data corresponding to the interference fringe data from the color image of the inspection object;
Combining the image data extracted for each interference fringe data to generate an image representing the three-dimensional shape of the object to be inspected.

Images