JP2004101831A - 共焦点顕微鏡 - Google Patents

共焦点顕微鏡 Download PDF

Info

Publication number
JP2004101831A
JP2004101831A JP2002263033A JP2002263033A JP2004101831A JP 2004101831 A JP2004101831 A JP 2004101831A JP 2002263033 A JP2002263033 A JP 2002263033A JP 2002263033 A JP2002263033 A JP 2002263033A JP 2004101831 A JP2004101831 A JP 2004101831A
Authority
JP
Japan
Prior art keywords
sample
light
objective lens
confocal
relative position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002263033A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004101831A5 (https=
Inventor
Hirohisa Fujimoto
藤本　洋久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2002263033A priority Critical patent/JP2004101831A/ja
Priority to PCT/JP2003/007750 priority patent/WO2003107064A1/ja
Publication of JP2004101831A publication Critical patent/JP2004101831A/ja
Priority to US11/015,076 priority patent/US20050122577A1/en
Publication of JP2004101831A5 publication Critical patent/JP2004101831A5/ja
Pending legal-status Critical Current

Links

Images

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP2002263033A 2002-06-01 2002-09-09 共焦点顕微鏡 Pending JP2004101831A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2002263033A JP2004101831A (ja) 2002-09-09 2002-09-09 共焦点顕微鏡
PCT/JP2003/007750 WO2003107064A1 (ja) 2002-06-01 2003-06-18 共焦点顕微鏡及び、この共焦点顕微鏡による測定方法
US11/015,076 US20050122577A1 (en) 2002-06-18 2004-12-16 Confocal microscope and measuring method by this confocal microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002263033A JP2004101831A (ja) 2002-09-09 2002-09-09 共焦点顕微鏡

Publications (2)

Publication Number Publication Date
JP2004101831A true JP2004101831A (ja) 2004-04-02
JP2004101831A5 JP2004101831A5 (https=) 2005-10-20

Family

ID=32262904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002263033A Pending JP2004101831A (ja) 2002-06-01 2002-09-09 共焦点顕微鏡

Country Status (1)

Country Link
JP (1) JP2004101831A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008292391A (ja) * 2007-05-28 2008-12-04 Mitsutoyo Corp 共焦点光学装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265317A (ja) * 1993-03-10 1994-09-20 Ishikawajima Harima Heavy Ind Co Ltd 共焦点走査方式レーザ顕微鏡を用いた厚み計測方法
JPH0968413A (ja) * 1995-08-31 1997-03-11 Olympus Optical Co Ltd 高さ測定方法及び共焦点走査型光学顕微鏡
JPH09113235A (ja) * 1995-10-16 1997-05-02 Dainippon Screen Mfg Co Ltd 三次元計測方法および表示方法、ならびに三次元計測装置
JPH1172308A (ja) * 1997-08-28 1999-03-16 Olympus Optical Co Ltd 高さ測定方法及びその装置
JPH11211439A (ja) * 1998-01-22 1999-08-06 Takaoka Electric Mfg Co Ltd 表面形状計測装置
JP2000098240A (ja) * 1998-09-22 2000-04-07 Olympus Optical Co Ltd 落射型顕微鏡
JP2000147383A (ja) * 1998-11-17 2000-05-26 Nikon Corp 顕微鏡装置
WO2002068903A1 (fr) * 2001-02-28 2002-09-06 Olympus Optical Co., Ltd. Microscope confocal, procede de mesure de la hauteur optique et procede de focalisation automatique

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265317A (ja) * 1993-03-10 1994-09-20 Ishikawajima Harima Heavy Ind Co Ltd 共焦点走査方式レーザ顕微鏡を用いた厚み計測方法
JPH0968413A (ja) * 1995-08-31 1997-03-11 Olympus Optical Co Ltd 高さ測定方法及び共焦点走査型光学顕微鏡
JPH09113235A (ja) * 1995-10-16 1997-05-02 Dainippon Screen Mfg Co Ltd 三次元計測方法および表示方法、ならびに三次元計測装置
JPH1172308A (ja) * 1997-08-28 1999-03-16 Olympus Optical Co Ltd 高さ測定方法及びその装置
JPH11211439A (ja) * 1998-01-22 1999-08-06 Takaoka Electric Mfg Co Ltd 表面形状計測装置
JP2000098240A (ja) * 1998-09-22 2000-04-07 Olympus Optical Co Ltd 落射型顕微鏡
JP2000147383A (ja) * 1998-11-17 2000-05-26 Nikon Corp 顕微鏡装置
WO2002068903A1 (fr) * 2001-02-28 2002-09-06 Olympus Optical Co., Ltd. Microscope confocal, procede de mesure de la hauteur optique et procede de focalisation automatique

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008292391A (ja) * 2007-05-28 2008-12-04 Mitsutoyo Corp 共焦点光学装置

Similar Documents

Publication Publication Date Title
JP5341351B2 (ja) 共焦点顕微鏡システムの基本原理に基づく測定装置及び方法
JP2016031535A (ja) オートフォーカスシステム、距離測定システム、オートフォーカス方法及びオートフォーカスシステム較正方法
EP3278164B1 (en) System and method for continuous, asynchronous autofocus of optical instruments
JP2006184303A (ja) 画像検査装置
KR102483659B1 (ko) 주사 프로브 현미경의 프로브와 샘플 사이의 간격을 수평 측면 방향으로 촬영하는 방법
WO2013084557A1 (ja) 形状測定装置
KR20100124757A (ko) 형상 측정 장치 및 방법
JP4603177B2 (ja) 走査型レーザ顕微鏡
CN117110311B (zh) 一种光学检测系统及图像动态对准方法
JP3794670B2 (ja) 顕微鏡のオートフォーカス方法及び装置
JP2015108582A (ja) ３次元計測方法と装置
CN114234835B (zh) 检测设备和检测方法
JP3457047B2 (ja) 共焦点型三次元計測装置
CN217981300U (zh) 一种光学检测系统
JPH11173821A (ja) 光学式検査装置
JP3510359B2 (ja) 光学測定装置
JP2004101831A (ja) 共焦点顕微鏡
JP2008268054A (ja) 焦点位置測定装置
JP7553811B2 (ja) 亀裂検出における検出光の入射角測定方法及び装置並びに亀裂検出方法及び装置
JP2828145B2 (ja) 光切断顕微鏡装置及びその光学手段の位置合わせ方法
JP2013088570A (ja) 顕微鏡装置
JP2911283B2 (ja) 非接触段差測定方法及びその装置
US20240319487A1 (en) Microscope and method for autofocusing
JP7553810B2 (ja) 亀裂検出装置及び方法
JP2003075118A (ja) 走査型レーザ顕微鏡

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050617

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050617

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080708

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20081104