JP2004093079A - Clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve degree of cleanliness and prevent the occurrence of uneven distribution of temperature by eliminating a region in which air stream remains in the vicinity of a wall member. <P>SOLUTION: In a clean room 10, FFU 16 is arranged on a ceiling face of a room 12, and dust in air in a space 24 under the roof is removed by the FFU 16 to supply air into the room 12. A floor surface of the room 12 is grating 26, and air in the room 12 is exhausted from the grating 26. The wall member 32 in the room 12 is constituted in such a way that its inside is formed into a hollow part and its upper part is opened. A surface on a room 12 side is constituted by a perforated plate 32A. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a clean room, and more particularly, to a clean room used in a semiconductor manufacturing field or a precision machine manufacturing field.
[0002]
[Prior art]
As shown in FIG. 6, in a conventional clean room, a plurality of fan filter units (hereinafter, referred to as FFUs) 2 are disposed on a ceiling surface of a room 1, and air in the space 3 above the ceiling is removed by the FFU 2. Downflow into the room 1. The floor of the room 1 is a grating 4, and the air in the room 1 is sucked into the underfloor space 5 via the grating 4. The air sucked into the underfloor space 5 is returned to the underfloor space 3 through the return space 6, then is again dust-removed by the FFU 2, and is repeatedly supplied to the chamber 1. By such circulation, the cleanliness in the chamber 1 is maintained.
[0003]
[Problems to be solved by the invention]
However, the conventional clean room has a problem that an airflow stagnation area is formed near the wall material 7. When an airflow stagnation area is formed, the degree of cleanliness is reduced in that area. Especially when the wall material 7 is a new building material and emits gaseous chemical contaminants, the cleanliness decreases near the wall material 7. There was a problem.
[0004]
In addition, when an airflow stagnation area is formed, a temperature distribution may be generated inside the chamber 1. For example, when an apparatus that generates heat is installed in the vicinity of the wall member 7, the temperature in the vicinity of the wall member 7 becomes higher than in other regions due to the formation of the airflow stagnation area. In general, a temperature sensor for temperature control is installed on the wall member 7, so that if the temperature distribution occurs as described above, the temperature in the room 1 cannot be controlled accurately.
[0005]
The present invention has been made in view of such circumstances, and by eliminating a stagnation area of an airflow near a wall material, a clean room capable of improving indoor cleanliness and uniforming a temperature distribution in the room. The purpose is to provide.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, the invention according to claim 1 removes air in a space behind the ceiling of a room and supplies the room with air from the ceiling surface, and exhausts the air in the room from the floor surface of the room. In the clean room, the wall material forming the side wall of the chamber is formed in a hollow shape, the upper part is opened and communicates with the space above the ceiling, and the room side surface is formed of a permeable member. I have.
[0007]
According to the first aspect of the present invention, since the room-side surface of the wall material and the space above the ceiling are communicated with each other through the interior of the wall material, air near the room-side surface passes through the inside of the wall material. Flowing into the space above the ceiling. Therefore, it is possible to prevent an airflow stagnation area from being formed near the chamber-side surface of the wall material. Thereby, indoor cleanliness can be improved and the temperature distribution in the room can be made uniform.
[0008]
According to the second aspect of the invention, the air permeability of the air permeable member is set differently depending on the position. For example, the lower the room, the higher the air permeability, and the upper the room, the lower the air permeability, or the higher the air permeability near the device that generates heat. Thereby, the air is uniformly sucked from the entirety of the chamber side surface, so that it is possible to reliably prevent the generation of an airflow stagnation area near the chamber side surface.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of a clean room according to the present invention will be described in detail with reference to the accompanying drawings.
[0010]
FIG. 1 is a side view showing the overall configuration of a clean room 10 according to the present invention.
[0011]
As shown in FIG. 1, the clean room 10 includes a lattice-shaped beam 14 on the ceiling surface of the room 12, and an FFU 16 is arranged on a lattice portion of the beam 14. The FFU 16 does not need to be arranged in the entire lattice portion of the beam 14, and may be arranged by thinning out as necessary. In this case, a closing plate or a gas-permeable member may be provided in the thinned portion.
[0012]
The FFU 16 includes a fan 20 and a filter 22 inside a casing 18. By driving the fan 20, the air in the space 24 above the ceiling is sucked into the casing 18. After the dust is removed by the filter 22, the dust is blown into the chamber 12. Thereby, a downflow of clean air is formed inside the chamber 12.
[0013]
The floor of the chamber 12 is a grating 26. The air in the chamber 12 is sucked into the underfloor chamber 28 through the grating 26 and returned to the under-ceiling space 24 through the return space 30. Then, the dust is removed by the FFU 16 and blown out into the chamber 12 again. By repeating this circulation, the inside of the chamber 12 is maintained at a high degree of cleanliness.
[0014]
A portion of the air returned from the underfloor chamber 28 to the space 24 above the ceiling may be cooled and dried by a sensible heat treatment coil or the like. Alternatively, part of the air in the underfloor chamber 28 may be sent to the air conditioner through a duct, mixed with the outside air, adjusted to a predetermined temperature and humidity, and then returned to the space 24 above the ceiling. Further, part of the air in the underfloor chamber 28 may be exhausted to the outside.
[0015]
By the way, as shown in FIG. 2, the wall material 32 forming the side wall of the chamber 12 is formed in a hollow shape and has an open ceiling surface. The wall material 32 has a chamber 12 side surface formed of a perforated plate 32 </ b> A, and the inside of the wall material 32 communicates with the chamber 12. The perforated plate 32A is configured to prevent dust generation into the chamber 12, and is made of, for example, a steel plate or a stainless steel material whose surface is baked.
[0016]
A reinforcing plate (rib) 32 </ b> B is attached inside the wall member 32. The reinforcing plate 32 </ b> B is arranged vertically so as not to hinder the airflow rising inside the wall member 32.
[0017]
Next, the operation of the clean room 10 configured as described above will be described.
[0018]
By driving the FFU 16, the air in the space 24 above the ceiling is supplied into the room 12. For this reason, the inside of the chamber 12 is at a relatively positive pressure, and the space 24 above the ceiling is at a relatively negative pressure. Due to this pressure difference, an airflow flowing inside the wall material 32 is naturally generated. That is, a part of the air in the chamber 12 is sucked into the wall material 32 via the perforated plate 32 </ b> A, rises inside the wall material 32, and flows into the space 24 above the ceiling. Accordingly, it is possible to prevent the formation of an airflow stagnation area near the surface of the wall member 32 on the chamber 12 side.
[0019]
As described above, according to the clean room 10 of the present embodiment, the wall member 32 is formed in a hollow shape to open the space 24 behind the ceiling, and the chamber 12 side of the wall member 32 is formed by the perforated plate 32A. The formation of stagnation of the airflow in the vicinity of the wall material 32 can be prevented. Thereby, the inside of the chamber 12 can be maintained at high cleanliness. Therefore, for example, even when the wall material 32 is a new building material and contains gaseous pollutants, the contaminants can be quickly exhausted to the outside of the chamber 12 through the interior of the wall material 32, The inside can always be kept at high cleanliness.
[0020]
Further, according to the clean room 10, since the formation of the airflow stagnation area near the wall material 32 is prevented, the occurrence of temperature distribution in the chamber 12 can be suppressed. For this reason, even when the temperature sensor is provided on the wall member 32, the temperature inside the chamber 12 can be accurately controlled.
[0021]
In the above-described embodiment, the surface of the wall member 32 on the chamber 12 side is formed of the perforated plate 32A. However, the present invention is not limited to this, and a member having air permeability, for example, a plate member with a slit may be used. Further, an air filter may be attached to the inside of the porous plate 32A.
[0022]
The air permeability of the surface of the wall member 32 on the chamber 12 side may have a distribution in the height direction. For example, in the wall material 34 shown in FIG. 3, the aperture ratio of the perforated plate 34A changes in the vertical direction. That is, in the porous plate 34A, the number of holes is smaller and the air permeability is smaller on the upper side, and conversely, the number of holes is larger and the gas permeability is larger on the lower side. Normally, the force of sucking air into the wall material 34 is higher near the upper side of the FFU 16, so that the use of the wall material 34 configured as described above makes it possible to suction air substantially uniformly from the entire surface of the perforated plate 34A. Can be. Therefore, it is possible to reliably prevent the formation of an airflow stagnation area near the perforated plate 34A. When a device that generates heat is arranged along the side wall in the chamber 12, it is preferable to partially increase the air permeability of the air-permeable member near the heat generating device. In this case, the amount of air suctioned from the vicinity of the heat generating device becomes relatively large, and uniformity of temperature distribution and reduction of heat convection can be achieved.
[0023]
In the above-described embodiment, the air in the vicinity of the wall materials 32 and 34 flows naturally into the ceiling space 24 due to the pressure difference between the room 12 and the ceiling space 24. However, the present invention is not limited to this. Instead, for example, as shown in FIG. 4, air may be forced to flow by a fan 36 or the like. In this case, it is preferable that the fan 36 be provided at an opening above the wall member 32.
[0024]
In the above-described embodiment, the form of the wall material 32 that partitions the chamber 12 from the return space 30 has been described. However, the present invention is not limited to this, and for example, as shown in the plan view of FIG. Also, the present invention is applied to the wall material 32C of the side wall portion not in contact with the above. Further, the wall material according to the present invention does not need to be applied to the entire periphery of the room side wall, but only needs to be partially applied as shown in FIG.
[0025]
【The invention's effect】
As described above, according to the clean room of the present invention, since the wall material is formed in a hollow shape and the upper portion is opened, and the chamber-side surface of the wall material is formed of a permeable member, the airflow near the wall material is improved. Formation of a stagnation area can be prevented. This can maintain a high degree of cleanliness in the room and eliminate the temperature distribution in the room.
[Brief description of the drawings]
FIG. 1 is a side view showing an overall configuration of a clean room according to the present invention. FIG. 2 is a perspective view showing an internal configuration of a wall material. FIG. 3 is a perspective view showing a wall material having a configuration different from FIG. FIG. 5 is a side view showing another embodiment of the present invention. FIG. 6 is a side view showing the overall configuration of a conventional clean room. 12 room, 14 beam, 16 FFU, 18 casing, 20 fan, 22 filter, 24 ceiling space, 26 grating, 28 underfloor chamber, 30 return space, 32 wall material, 32A ... perforated plate, 32B ... reinforcing plate, 34 ... wall material, 34A ... perforated plate, 36 ... fan

Claims (2)

In the clean room, which removes air in the space behind the ceiling of the room and supplies air to the room from the ceiling surface and exhausts the room air from the floor surface of the room,
A clean room, wherein a wall material forming a side wall of the chamber is formed in a hollow shape, an upper part thereof is opened and communicates with the space above the ceiling, and a room side surface is formed of a breathable member. The clean room according to claim 1, wherein the gas permeable member is set to have different gas permeability depending on a position.

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