JP2020098038A - Clean room purification system - Google Patents

Clean room purification system Download PDF

Info

Publication number
JP2020098038A
JP2020098038A JP2018235149A JP2018235149A JP2020098038A JP 2020098038 A JP2020098038 A JP 2020098038A JP 2018235149 A JP2018235149 A JP 2018235149A JP 2018235149 A JP2018235149 A JP 2018235149A JP 2020098038 A JP2020098038 A JP 2020098038A
Authority
JP
Japan
Prior art keywords
clean room
air
air conditioner
porous diffusion
purification system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2018235149A
Other languages
Japanese (ja)
Inventor
恵英 若山
Yoshihide Wakayama
恵英 若山
邦太 信藤
Kunita Shindo
邦太 信藤
良行 八田
Yoshiyuki Hatta
良行 八田
鈴木　真吾
Shingo Suzuki
真吾 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taisei Corp
Original Assignee
Taisei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taisei Corp filed Critical Taisei Corp
Priority to JP2018235149A priority Critical patent/JP2020098038A/en
Priority to TW108145421A priority patent/TW202027838A/en
Priority to CN201911324220.9A priority patent/CN111322692A/en
Publication of JP2020098038A publication Critical patent/JP2020098038A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)

Abstract

To provide a clean room purification system capable of securing high ceiling height and preventing dropping of a ceiling material even in the case of earthquakes.SOLUTION: A clean room purification system 1 purifies a clean room 2 provided in a building. The clean room purification system 1 includes: an air conditioner 10; a porous diffusion membrane 20 provided in the clean room 2; an air supply duct 30 leading from a blowout port 12 of the air conditioner 10 to the porous diffusion membrane 20; and a return air duct 40 leading from a floor surface 3 of the clean room 2 toward a suction port 11 of the air conditioner 10. The air conditioner 10 includes: a casing 13; an air blower 14 provided in the casing 13; a coil 16 provided in the casing 13 and controlling a temperature and humidity; and an intermediate filter 15 and an HEPA filter 17 which are provided in the casing 13. By driving the air conditioner 10, air with high cleanliness is supplied via the air supply duct 30 to the porous diffusion membrane 20.SELECTED DRAWING: Figure 1

Description

本発明は、建物内に設けられたクリーンルームを浄化するクリーンルーム浄化システムに関する。 The present invention relates to a clean room purification system for purifying a clean room provided in a building.

従来より、クリーンルーム内部にアルミ製で格子状の天井（アルミグリッド天井）を設け、この天井に支持させてＦＦＵ（ファンフィルタユニット）を配置することが行われている（特許文献１〜３参照）。 BACKGROUND ART Conventionally, a grid-shaped ceiling made of aluminum (aluminum grid ceiling) is provided inside a clean room, and an FFU (fan filter unit) is arranged to be supported by the ceiling (see Patent Documents 1 to 3). ..

特開２００９−２９３８６４号公報JP, 2009-293864, A 特開２０１２−１４９７８７号公報JP2012-149787A 特開２０１２−２０２５５８号公報JP, 2012-202558, A

従来では、クリーンルーム内部に天井を設ける必要があるため、クリーンルームの天井高が低くなる、という問題があった。また、地震時の揺れにより天井材が落下するおそれがあった。 Conventionally, there is a problem that the ceiling height of the clean room becomes low because it is necessary to provide a ceiling inside the clean room. In addition, there was a risk that the ceiling material would fall due to shaking during the earthquake.

本発明は、天井高を高く確保でき、かつ、地震時であっても天井材の落下を防止できるクリーンルーム浄化システムを提供することを目的とする。 An object of the present invention is to provide a clean room purification system that can secure a high ceiling height and can prevent the ceiling material from dropping even during an earthquake.

請求項１に記載のクリーンルーム浄化システム（例えば、後述のクリーンルーム浄化システム１、１Ｂ）は、建物内に設けられたクリーンルーム（例えば、後述のクリーンルーム２、２Ｂ）を浄化するクリーンルーム浄化システムであって、空気調和装置（例えば、後述の空気調和装置１０）と、前記クリーンルームの内部に設けられた多孔拡散膜（例えば、後述の多孔拡散膜２０、２０Ｂ）と、前記空気調和装置の吹出し口（例えば、後述の吹出し口１２）から前記多孔拡散膜に至る給気ダクト（例えば、後述の給気ダクト３０）と、前記クリーンルームの床面（例えば、後述の床面３）から前記空気調和装置の吸込み口（例えば、後述の吸込み口１１）に至る還気ダクト（例えば、後述の還気ダクト４０、４０Ｂ）と、を備え、前記空気調和装置は、箱体（例えば、後述の箱体１３）と、当該箱体内に設けられた送風機（例えば、後述の送風機１４）と、前記箱体内に設けられて温度および湿度を調整するコイル（例えば、後述のコイル１６）と、前記箱体内に設けられたフィルタ（例えば、後述の中間フィルタ１５、ＨＥＰＡフィルタ１７）と、を備え、前記空気調和装置により、前記フィルタを通した高清浄度空気を、前記給気ダクトを介して前記多孔拡散膜に供給することを特徴とする。 A clean room purification system according to claim 1 (for example, a clean room purification system 1, 1B described later) is a clean room purification system for purifying a clean room (for example, a clean room 2, 2B described later) provided in a building, An air conditioner (for example, an air conditioner 10 described below), a porous diffusion film (for example, a porous diffusion film 20, 20B described below) provided inside the clean room, and an outlet of the air conditioner (for example, An air supply duct (for example, an air supply duct 30 described below) from a blowout port 12) described below to the porous diffusion membrane, and a suction port of the air conditioner from a floor surface of the clean room (for example, a floor surface 3 described below). (For example, a return air duct (for example, return air ducts 40 and 40B described below) that reaches a suction port 11 (described below)), and the air conditioner includes a box body (for example, a box body 13 described below), A blower (for example, blower 14 described later) provided in the box body, a coil (for example, coil 16 described later) provided in the box body for adjusting temperature and humidity, and a filter provided in the box body (For example, an intermediate filter 15 and a HEPA filter 17 described later), and by the air conditioner, supplies the high cleanliness air that has passed through the filter to the porous diffusion membrane through the air supply duct. Characterized by

多孔拡散膜は、多孔性の膜であり、内部に供給された空気を、流速を低減しつつ外部にじんわりとにじみ出させて拡散させるものである。
この発明によれば、多孔拡散膜からにじみ出る高清浄度の空気をクリーンルーム内に充満させることで、クリーンルーム内に配置された生産機器の周囲を高清浄度空気で満たすことができる。
また、従来のようにクリーンルーム内部にＦＦＵを設けないので、天井を設ける必要がなく、天井高を高く確保できるうえに、短工期となる。また、天井を設けないので、地震時に天井材が落下することがない。 The porous diffusion film is a porous film and diffuses the air supplied inside while gently exuding to the outside while reducing the flow velocity.
According to the present invention, the clean room is filled with the high cleanliness air that oozes out from the porous diffusion film, so that the surroundings of the production equipment arranged in the clean room can be filled with the high cleanliness air.
Further, since the FFU is not provided inside the clean room as in the conventional case, it is not necessary to provide a ceiling, a high ceiling height can be secured, and a short construction period is required. Moreover, since the ceiling is not provided, the ceiling material does not drop during an earthquake.

請求項２に記載のクリーンルーム浄化システムは、前記クリーンルーム（例えば、後述のクリーンルーム２Ｂ）は、標準エリア（例えば、後述の標準エリア４）と、当該標準エリアよりも空気清浄度が高い高清浄度エリア（例えば、後述の高清浄度エリア５）と、に分かれており、前記多孔拡散膜は、当該高清浄度エリアの天井部分に設けられ、前記標準エリアと前記高清浄度エリアとの境界には、前記標準エリアと前記高清浄度エリアとを連通する連通口（例えば、後述の連通口７）が設けられることを特徴とする。 The clean room purification system according to claim 2, wherein the clean room (for example, a clean room 2B described later) has a standard area (for example, a standard area 4 described later) and a high cleanliness area having a higher air cleanliness than the standard area. (For example, a high cleanliness area 5 to be described later), the porous diffusion film is provided on a ceiling portion of the high cleanliness area, and the boundary between the standard area and the high cleanliness area is provided. A communication port (for example, a communication port 7 described later) that connects the standard area and the high cleanliness area is provided.

高清浄度エリアで使用した空気であっても、標準エリアに必要な空気清浄度を満たしている。そこでこの発明によれば、この高清浄度エリアで使用した空気を標準エリアに流入させて利用することで、クリーンルーム浄化システムを効率良く稼働できる。 Even the air used in the high cleanliness area meets the air cleanliness required for the standard area. Therefore, according to the present invention, the air used in the high cleanliness area is allowed to flow into the standard area for use, whereby the clean room purification system can be efficiently operated.

請求項３に記載のクリーンルーム浄化システム（例えば、後述のクリーンルーム浄化システム１Ａ）は、建物内に設けられたクリーンルーム（例えば、後述のクリーンルーム２）を浄化するクリーンルーム浄化システムであって、空気調和装置（例えば、後述の空気調和装置１０）と、前記クリーンルームの内部に設けられた多孔拡散膜（例えば、後述の多孔拡散膜２０）と、前記空気調和装置の吹出し口（例えば、後述の吹出し口１２）から前記クリーンルームの内部に至る給気ダクト（例えば、後述の給気ダクト３０Ａ）と、前記クリーンルームの内部に設けられて温度を調整するとともに前記多孔拡散膜に空気を送るファン付ドライコイルユニット（例えば、後述のＦＤＣ５０）と、前記クリーンルームの床面（例えば、後述の床面３）から前記ファン付ドライコイルユニットの吸込み口（例えば、後述の吸込み口５１）に至る還気ダクト（例えば、後述の還気ダクト４０Ａ）と、を備え、前記空気調和装置は、箱体（例えば、後述の箱体１３）と、当該箱体内に設けられた送風機（例えば、後述の送風機１４）と、前記箱体内に設けられて温度および湿度を調整するコイル（例えば、後述のコイル１６）と、前記箱体内に設けられたフィルタ（例えば、後述の中間フィルタ１５、ＨＥＰＡフィルタ１７）と、を備え、前記空気調和装置により、前記フィルタを通した高清浄度空気を、前記給気ダクトを介して前記クリーンルームの内部に供給することを特徴とする。 A clean room purification system (for example, a clean room purification system 1A described later) according to claim 3 is a clean room purification system for purifying a clean room (for example, a clean room 2 described later) provided in a building, which is an air conditioner ( For example, an air conditioner 10) described below, a porous diffusion film (for example, a porous diffusion film 20 described below) provided inside the clean room, and an outlet of the air conditioner (for example, an outlet 12 described below). To an inside of the clean room (for example, an air supply duct 30A described later) and a dry coil unit with a fan which is provided inside the clean room to adjust the temperature and sends air to the porous diffusion membrane (for example, , An FDC 50, which will be described later, and a return air duct (for example, which will be described later) which extends from the floor surface of the clean room (for example, the floor surface 3 described later) to the suction port (for example, the suction port 51 described later) of the fan-equipped dry coil unit. Return air duct 40A), and the air conditioner includes a box body (for example, a box body 13 described below), a blower (for example, a blower 14 described below) provided in the box body, and the box body. A coil (for example, a coil 16 described later) that is provided in the box and adjusts temperature and humidity, and a filter (for example, an intermediate filter 15 and a HEPA filter 17 described below) provided in the box body. A device supplies high-purity air that has passed through the filter to the inside of the clean room through the air supply duct.

多孔拡散膜は、多孔性の膜を円筒形状にしたものであり、内部に供給された空気を、流速を低減しつつ外部にじんわりとにじみ出させて拡散させるものである。
この発明によれば、多孔拡散膜からにじみ出る高清浄度の空気をクリーンルーム内に充満させることで、クリーンルーム内に配置された生産機器の周囲を高清浄度空気で満たすことができる。
また、従来のようにクリーンルーム内部にＦＦＵを設けないので、天井を設ける必要がなく、天井高を高く確保できるうえに、短工期となる。また、天井を設けないので、地震時に天井材が落下することがない。 The porous diffusion film is formed by forming a porous film into a cylindrical shape, and diffuses the air supplied inside while gently exuding to the outside while reducing the flow velocity.
According to the present invention, the clean room is filled with the high cleanliness air that oozes out from the porous diffusion film, so that the surroundings of the production equipment arranged in the clean room can be filled with the high cleanliness air.
Further, since the FFU is not provided inside the clean room as in the conventional case, it is not necessary to provide a ceiling, a high ceiling height can be secured, and a short construction period is required. Moreover, since the ceiling is not provided, the ceiling material does not drop during an earthquake.

請求項４に記載のクリーンルーム浄化システムは、前記多孔拡散膜から吹き出される空気の流速（例えば、後述の流速ｖ１）は、前記クリーンルームの床面に吸い込まれる空気の流速（例えば、後述の流速ｖ２）よりも小さいことを特徴とする。 In the clean room purification system according to claim 4, a flow velocity of air blown out from the porous diffusion membrane (for example, a flow velocity v1 described later) is a flow velocity of air sucked into a floor surface of the clean room (for example, a flow velocity v2 described later). ) Is smaller than.

この発明によれば、多孔拡散膜から吹き出す空気の流速を、クリーンルームの床面が吸い込む空気の流速よりも小さくしたので、円滑な層流を形成できる。 According to the present invention, the flow velocity of the air blown out from the porous diffusion film is made smaller than the flow velocity of the air sucked by the floor surface of the clean room, so that a smooth laminar flow can be formed.

本発明によれば、天井高を高く確保でき、かつ、地震時でも天井材の落下を防止できるクリーンルーム浄化システムを提供できる。 According to the present invention, it is possible to provide a clean room purification system that can secure a high ceiling height and can prevent the ceiling material from dropping even during an earthquake.

本発明の第１実施形態に係るクリーンルーム浄化システムの模式的な縦断面図である。It is a typical longitudinal section of a clean room purification system concerning a 1st embodiment of the present invention. 本発明の第２実施形態に係るクリーンルーム浄化システムの模式的な縦断面図である。It is a typical longitudinal section of a clean room purification system concerning a 2nd embodiment of the present invention. 本発明の第３実施形態に係るクリーンルーム浄化システムの模式的な縦断面図である。It is a typical longitudinal section of a clean room purification system concerning a 3rd embodiment of the present invention.

以下、本発明の実施形態を図面に基づいて説明する。なお、以下の実施形態の説明にあたって、同一構成要件については同一符号を付し、その説明を省略もしくは簡略化する。
〔第１実施形態〕
図１は、本発明の第１実施形態に係るクリーンルーム浄化システム１の模式的な縦断面図である。
クリーンルーム浄化システム１は、建物内に設けられたクリーンルーム２を浄化するものである。
クリーンルーム２の内部には、図示しない生産機器が設置されている。
クリーンルーム浄化システム１は、空気調和装置１０と、クリーンルーム２内部の天井部分に設けられた多孔拡散膜２０と、空気調和装置１０の吹出し口１２から多孔拡散膜２０に至る給気ダクト３０と、クリーンルーム２から空気調和装置１０の吸込み口１１に至る還気ダクト４０と、を備える。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description of the embodiments, the same components will be denoted by the same reference symbols, and the description thereof will be omitted or simplified.
[First Embodiment]
FIG. 1 is a schematic vertical sectional view of a clean room purification system 1 according to the first embodiment of the present invention.
The clean room purification system 1 purifies a clean room 2 provided in a building.
Inside the clean room 2, production equipment (not shown) is installed.
The clean room purification system 1 includes an air conditioner 10, a porous diffusion film 20 provided on a ceiling portion inside the clean room 2, an air supply duct 30 extending from an outlet 12 of the air conditioner 10 to the porous diffusion film 20, and a clean room. 2 to the return air duct 40 extending from the air conditioner 10 to the suction port 11 of the air conditioner 10.

クリーンルーム２の床面３には、複数の開口が形成されており、還気ダクト４０は、この床面３の床下空間から空気調和装置１０の吸込み口１１まで延びている。
多孔拡散膜２０は、多孔性の膜を円筒形状にしたものであり、内部に供給された空気を、流速を低減しつつ外部にじんわりとにじみ出させて拡散させるものである。多孔拡散膜２０を構成する素材は、汚染物質を発生しないものとする。汚染物質とは、塵埃、有機物、イオンなどである。また、この多孔拡散膜２０の孔径や除塵性能は、通気風量やクリーンルームに要求される清浄度に応じて適宜選定されてよい。 A plurality of openings are formed on the floor surface 3 of the clean room 2, and the return air duct 40 extends from the underfloor space of the floor surface 3 to the suction port 11 of the air conditioner 10.
The porous diffusion film 20 is formed by forming a porous film into a cylindrical shape, and diffuses the air supplied inside while gently exuding to the outside while reducing the flow velocity. The material forming the porous diffusion film 20 does not generate pollutants. Pollutants include dust, organic matter, ions and the like. Further, the pore diameter and the dust removing performance of the porous diffusion film 20 may be appropriately selected according to the air flow rate and the cleanliness required for the clean room.

空気調和装置１０は、吸込み口１１から取り入れた空気から塵埃を除去するとともに、温度および湿度を調整して、吹出し口１２から吹き出すものである。この空気調和装置１０は、吸込み口１１および吹出し口１２が設けられた箱体１３と、箱体１３内の図示しない防振装置上に設けられた送風機１４と、箱体１３内の送風機１４の吹出し口１２側に設けられた中間フィルタ１５と、中間フィルタ１５の吹出し口１２側に設けられて温度および湿度を調整するコイル１６と、箱体１３内のコイル１６の吹出し口１２側に設けられたＨＥＰＡフィルタ１７と、を備える。 The air conditioner 10 removes dust from the air taken in through the suction port 11, adjusts the temperature and humidity, and blows it out through the blowout port 12. This air conditioner 10 includes a box 13 provided with a suction port 11 and a blowout port 12, a blower 14 provided on a vibration isolator (not shown) in the box 13, and a blower 14 in the box 13. The intermediate filter 15 provided on the outlet 12 side, the coil 16 provided on the outlet 12 side of the intermediate filter 15 for adjusting temperature and humidity, and the coil 16 inside the box 13 provided on the outlet 12 side. The HEPA filter 17 is provided.

クリーンルーム浄化システム１は、以下のように動作する。すなわち、空気調和装置１０の送風機１４により、還気ダクト４０から回収された空気（ＲＡ）や外気（ＯＡ）を吸込み口１１から吸い込んで吹出し口１２に向かって送る。この空気は、中間フィルタ１５により塵埃が除去され、コイル１６により温度および湿度が調整され、その後、ＨＥＰＡフィルタ１７によりさらに細かい塵埃が除去されて、吹出し口１２を通って給気ダクト３０に供給される。給気ダクト３０を通った空気（ＳＡ）は、多孔拡散膜２０からじんわりとクリーンルーム２内に流れ出す。また、クリーンルーム２内の空気は、クリーンルーム２の床面３の開口を通って還気ダクト４０に到達し、還気ダクト４０を通って空気調和装置１０の吸込み口１１に戻る。 The clean room purification system 1 operates as follows. That is, the blower 14 of the air conditioner 10 sucks the air (RA) and the outside air (OA) collected from the return air duct 40 through the suction port 11 and sends the air (RA) and the discharge air 12 toward the discharge port 12. Dust is removed from the air by the intermediate filter 15, temperature and humidity are adjusted by the coil 16, and then finer dust is removed by the HEPA filter 17, and the air is supplied to the air supply duct 30 through the outlet 12. It The air (SA) that has passed through the air supply duct 30 gently flows out from the porous diffusion film 20 into the clean room 2. Further, the air in the clean room 2 reaches the return air duct 40 through the opening of the floor surface 3 of the clean room 2, and returns to the suction port 11 of the air conditioner 10 through the return air duct 40.

ここで、多孔拡散膜２０からクリーンルーム２に吹き出される空気の流速（ｖ１）は、クリーンルーム２の床面３に吸い込まれる空気の流速（ｖ２）よりも小さくなっている。
具体的には、床面３に設けられた開口の総面積を変化させることで、クリーンルーム２の床面３に吸い込まれる空気の流速（ｖ２）を調整する。例えば、床面３の開口の総面積を小さくすれば、空気の流速ｖ２は速くなり、床面３の開口の総面積を大きくすれば、空気の流速ｖ２は遅くなる。 Here, the flow velocity (v1) of the air blown from the porous diffusion film 20 into the clean room 2 is smaller than the flow velocity (v2) of the air sucked into the floor surface 3 of the clean room 2.
Specifically, the flow velocity (v2) of the air sucked into the floor surface 3 of the clean room 2 is adjusted by changing the total area of the openings provided on the floor surface 3. For example, if the total area of the openings on the floor 3 is reduced, the flow velocity v2 of air becomes faster, and if the total area of the openings of the floor 3 is increased, the flow velocity v2 of air becomes slower.

本実施形態によれば、以下のような効果がある。
（１）多孔拡散膜２０からにじみ出る高清浄度の空気をクリーンルーム２内に充満させることで、クリーンルーム２内に配置された生産機器の周囲を高清浄度空気で満たすことができる。
また、従来のようにクリーンルーム内部にＦＦＵを設けないので、天井を設ける必要がなく、天井高を高く確保できるうえに、短工期となる。また、天井を設けないので、地震時に天井材が落下することがない。 According to this embodiment, there are the following effects.
(1) By filling the clean room 2 with high cleanliness air that oozes out from the porous diffusion film 20, the periphery of the production equipment arranged in the clean room 2 can be filled with high cleanliness air.
Further, since the FFU is not provided inside the clean room as in the conventional case, it is not necessary to provide a ceiling, a high ceiling height can be secured, and a short construction period is required. Moreover, since the ceiling is not provided, the ceiling material does not drop during an earthquake.

（２）多孔拡散膜２０から吹き出す空気の流速ｖ１を、クリーンルーム２の床面３が吸い込む空気の流速ｖ２よりも小さくしたので、円滑な層流を形成できる。 (2) Since the flow velocity v1 of the air blown out from the porous diffusion film 20 is made smaller than the flow velocity v2 of the air sucked by the floor surface 3 of the clean room 2, a smooth laminar flow can be formed.

〔第２実施形態〕
図２は、本発明の第２実施形態に係るクリーンルーム浄化システム１Ａの模式的な縦断面図である。
クリーンルーム浄化システム１Ａは、空気調和装置１０と、クリーンルーム２内部の天井部分に設けられた多孔拡散膜２０と、空気調和装置１０の吹出し口１２からクリーンルーム２の内部に至る給気ダクト３０Ａと、クリーンルーム２の内部に設けられて多孔拡散膜２０に空気を送るＦＤＣ５０と、クリーンルーム２の床面３の床下空間からＦＤＣ５０の吸込み口５１に至る還気ダクト４０Ａと、を備える。 [Second Embodiment]
FIG. 2 is a schematic vertical sectional view of a clean room purification system 1A according to the second embodiment of the present invention.
The clean room purification system 1A includes an air conditioner 10, a porous diffusion film 20 provided on a ceiling portion inside the clean room 2, an air supply duct 30A extending from an outlet 12 of the air conditioner 10 to the inside of the clean room 2, and a clean room. 2, an FDC 50 that sends air to the porous diffusion membrane 20 and a return air duct 40A that extends from the underfloor space of the floor surface 3 of the clean room 2 to the suction port 51 of the FDC 50.

本実施形態の多孔拡散膜２０は、第１実施形態の多孔拡散膜２０と同様の構成であり、除塵機能を有している。この多孔拡散膜２０の孔径や除塵性能は、通気風量やクリーンルームに要求される清浄度に応じて適宜選定される。
ＦＤＣ５０は、クリーンルーム内の生産設備から発生する熱を冷却するドライコイルユニットと送風機とを備えるファン付ドライコイルユニットである。ＦＤＣ５０は、吸込み口５１から吸い込んだ空気を冷却して吹出し口５２から吹き出し、多孔拡散膜２０に供給する。
本実施形態においても、第１実施形態と同様に、多孔拡散膜２０からクリーンルーム２に吹き出される空気の流速（ｖ１）は、クリーンルーム２の床面３に吸い込まれる空気の流速（ｖ２）よりも小さくなっている。 The porous diffusion film 20 of the present embodiment has the same configuration as the porous diffusion film 20 of the first embodiment and has a dust removing function. The pore diameter and the dust removing performance of the porous diffusion film 20 are appropriately selected according to the air flow rate and the cleanliness required for the clean room.
The FDC 50 is a fan-equipped dry coil unit that includes a dry coil unit that cools heat generated from production equipment in a clean room and a blower. The FDC 50 cools the air sucked from the suction port 51, blows it out from the blowout port 52, and supplies it to the porous diffusion film 20.
Also in the present embodiment, as in the first embodiment, the flow velocity (v1) of the air blown from the porous diffusion film 20 into the clean room 2 is higher than the flow velocity (v2) of the air sucked into the floor surface 3 of the clean room 2. It is getting smaller.

クリーンルーム浄化システム１Ａは、以下のように動作する。すなわち、空気調和装置１０の送風機１４により、外気（ＯＡ）を吸込み口１１から吸い込んで吹出し口１２に向かって送る。この空気は、中間フィルタ１５により塵埃が除去され、コイル１６により温度および湿度が調整され、その後、ＨＥＰＡフィルタ１７によりさらに細かい塵埃が除去されて、吹出し口１２を通って給気ダクト３０Ａに供給される。給気ダクト３０Ａを通った空気（ＳＡ）は、クリーンルーム２内に供給される。
また、ＦＤＣ５０のファンにより、還気ダクト４０Ａから回収された空気（ＲＡ）を吸込み口５１から吸い込んで吹出し口５２に向かって送る。この空気は、ドライコイルにより冷却されて、吹出し口５２を通って除塵機能を有する多孔拡散膜２０に供給され、多孔拡散膜２０からじんわりとクリーンルーム２内に流れ出す。また、クリーンルーム２内の空気は、クリーンルーム２の床面３の開口を通って還気ダクト４０に到達し、還気ダクト４０を通ってＦＤＣ５０の吸込み口５１に戻る。このように、除塵機能を有する多孔拡散膜２０を通して空気を循環させることで、クリーンルーム２内で発生した塵埃を除去するとともに、高い清浄度と一定の温湿度環境を確保できる。 The clean room purification system 1A operates as follows. That is, the blower 14 of the air conditioner 10 sucks the outside air (OA) from the suction port 11 and sends it to the discharge port 12. Dust is removed from the air by the intermediate filter 15, temperature and humidity are adjusted by the coil 16, and then finer dust is removed by the HEPA filter 17, and the air is supplied to the air supply duct 30A through the outlet 12. It The air (SA) that has passed through the air supply duct 30A is supplied into the clean room 2.
Further, the fan of the FDC 50 sucks the air (RA) collected from the return air duct 40A from the suction port 51 and sends it to the discharge port 52. This air is cooled by the dry coil, supplied to the porous diffusion film 20 having a dust removing function through the outlet 52, and slowly flows out from the porous diffusion film 20 into the clean room 2. Further, the air in the clean room 2 reaches the return air duct 40 through the opening of the floor surface 3 of the clean room 2, and returns to the suction port 51 of the FDC 50 through the return air duct 40. As described above, by circulating the air through the porous diffusion film 20 having a dust removing function, the dust generated in the clean room 2 can be removed, and high cleanliness and a constant temperature and humidity environment can be secured.

本実施形態によれば、上述の（１）、（２）と同様の効果がある。 According to this embodiment, there are the same effects as the above (1) and (2).

〔第３実施形態〕
図３は、本発明の第３実施形態に係るクリーンルーム浄化システム１Ｂの模式的な縦断面図である。
クリーンルーム２Ｂは、標準エリア４と、この標準エリア４よりも空気清浄度が高い高清浄度エリア５と、に分かれている。標準エリア４および高清浄度エリア５には、それぞれ、生産機器６が設置されている。また、標準エリア４と高清浄度エリア５との境界には、標準エリア４と高清浄度エリア５とを連通する連通口７が形成された仕切壁８が設けられている。
クリーンルーム浄化システム１Ｂは、空気調和装置１０と、クリーンルーム２の高清浄度エリア５の天井部分に設けられた多孔拡散膜２０Ｂと、多孔拡散膜２０Ｂから下方に延びて生産機器６を囲んで配置されたソックダクト２１と、空気調和装置１０の吹出し口１２から多孔拡散膜２０Ｂに至る給気ダクト３０と、クリーンルーム２から空気調和装置１０の吸込み口１１に至る還気ダクト４０Ｂと、クリーンルーム２の標準エリア４の天井部分に設けられた多孔拡散膜２０Ｃと、標準エリア４に設けられて多孔拡散膜２０Ｃに空気を送るＦＤＣ５０と、クリーンルーム２の床面３の床下空間からＦＤＣ５０の吸込み口５１に至る還気ダクト４０Ｃと、を備える。 [Third Embodiment]
FIG. 3 is a schematic vertical sectional view of a clean room purification system 1B according to a third embodiment of the present invention.
The clean room 2B is divided into a standard area 4 and a high cleanliness area 5 having a higher air cleanliness than the standard area 4. Production equipment 6 is installed in each of the standard area 4 and the high cleanliness area 5. Further, at the boundary between the standard area 4 and the high cleanliness area 5, there is provided a partition wall 8 in which a communication port 7 that connects the standard area 4 and the high cleanliness area 5 is formed.
The clean room purification system 1B is arranged so as to surround the air conditioner 10, the porous diffusion film 20B provided on the ceiling portion of the high cleanliness area 5 of the clean room 2, and the production equipment 6 extending downward from the porous diffusion film 20B. Sock duct 21, air supply duct 30 from outlet 12 of air conditioner 10 to porous diffusion membrane 20B, return air duct 40B from clean room 2 to intake 11 of air conditioner 10, and standard area of clean room 2. 4, a porous diffusion film 20C provided on the ceiling part, an FDC 50 provided in the standard area 4 for sending air to the porous diffusion film 20C, and a return from the underfloor space of the floor surface 3 of the clean room 2 to the suction port 51 of the FDC 50. And an air duct 40C.

クリーンルーム浄化システム１Ｂは、以下のように動作する。すなわち、空気調和装置１０により、還気ダクト４０Ｂから回収された空気（ＲＡ）や外気（ＯＡ）を吸い込んで、この空気中の塵埃を除去するとともに温度および湿度を調整して、給気ダクト３０に供給する。この給気ダクト３０を通った空気（ＳＡ）は、多孔拡散膜２０Ｂからじんわりとクリーンルーム２の高清浄度エリア５内に流れ出す。この高清浄度エリア５内の空気は、床面３の開口を通って還気ダクト４０Ｂに到達し、還気ダクト４０Ｂを通って空気調和装置１０に戻る。
一方、高清浄度エリア５内の一部の空気は、連通口７を通って標準エリア４内に流れ出す。標準エリア４では、ＦＤＣ５０により、還気ダクト４０Ｃから回収された空気（ＲＡ）を冷却して、多孔拡散膜２０Ｃに供給する。この空気は、多孔拡散膜２０Ｃからじんわりとクリーンルーム２の標準エリア４内に流れ出す。また、標準エリア４内の空気は、床面３の開口を通って還気ダクト４０Ｃに到達し、この還気ダクト４０Ｃを通ってＦＤＣ５０に戻る。 The clean room purification system 1B operates as follows. That is, the air conditioner 10 draws in the air (RA) and the outside air (OA) collected from the return air duct 40B, removes dust in the air, adjusts the temperature and humidity, and supplies the air supply duct 30. Supply to. The air (SA) that has passed through the air supply duct 30 gently flows out from the porous diffusion film 20B into the high cleanliness area 5 of the clean room 2. The air in the high cleanliness area 5 reaches the return air duct 40B through the opening of the floor surface 3 and returns to the air conditioner 10 through the return air duct 40B.
On the other hand, a part of the air in the high cleanliness area 5 flows out into the standard area 4 through the communication port 7. In the standard area 4, the air (RA) recovered from the return air duct 40C is cooled by the FDC 50 and supplied to the porous diffusion film 20C. This air slowly flows out from the porous diffusion film 20C into the standard area 4 of the clean room 2. Further, the air in the standard area 4 reaches the return air duct 40C through the opening of the floor surface 3 and returns to the FDC 50 through the return air duct 40C.

本実施形態によれば、上述の（１）、（２）の効果に加えて、以下のような効果がある。
（３）高清浄度エリア５で使用した空気を標準エリア４に流入させて利用することで、クリーンルーム浄化システム１Ｂを効率良く稼働できる。 According to this embodiment, in addition to the effects (1) and (2) described above, the following effects are obtained.
(3) By injecting the air used in the high cleanliness area 5 into the standard area 4 for use, the clean room purification system 1B can be operated efficiently.

なお、本発明は前記実施形態に限定されるものではなく、本発明の目的を達成できる範囲での変形、改良等は本発明に含まれるものである。
上述の各実施形態では、多孔拡散膜の形状を筒状としたが、これに限らず、例えば、多孔拡散膜を袋状としてもよいし、チャンバーの一部を多孔拡散膜としてもよい。 It should be noted that the present invention is not limited to the above-described embodiment, and modifications, improvements, etc. within the scope of achieving the object of the present invention are included in the present invention.
In each of the above-described embodiments, the shape of the porous diffusion film is cylindrical, but the shape is not limited to this, and the porous diffusion film may be, for example, a bag, or a part of the chamber may be a porous diffusion film.

１、１Ａ、１Ｂ…クリーンルーム浄化システム ２、２Ｂ…クリーンルーム ３…床面
４…標準エリア ５…高清浄度エリア ６…生産機器 ７…連通口 ８…仕切壁
１０…空気調和装置 １１…吸込み口 １２…吹出し口 １３…箱体 １４…送風機
１５…中間フィルタ １６…コイル １７…ＨＥＰＡフィルタ
２０、２０Ｂ、２０Ｃ…多孔拡散膜 ２１…ソックダクト
３０、３０Ａ…給気ダクト ４０、４０Ａ、４０Ｂ、４０Ｃ…還気ダクト
５０…ＦＤＣ（ファン付ドライコイルユニット） ５１…吸込み口 ５２…吹出し口 1, 1A, 1B...Clean room purification system 2, 2B...Clean room 3...Floor surface 4...Standard area 5...High cleanliness area 6...Production equipment 7...Communication port 8...Partition wall 10...Air conditioner 11...Suction port 12 ...Blowout port 13...Box 14...Blower 15...Intermediate filter 16...Coil 17...HEPA filter 20, 20B, 20C...Perforated diffusion film 21...Sock duct 30, 30A...Air supply duct 40,40A, 40B, 40C...Return air Duct 50...FDC (dry coil unit with fan) 51...Suction port 52...Blowout port

Claims (4)

建物内に設けられたクリーンルームを浄化するクリーンルーム浄化システムであって、
空気調和装置と、
前記クリーンルームの内部に設けられた多孔拡散膜と、
前記空気調和装置の吹出し口から前記多孔拡散膜に至る給気ダクトと、
前記クリーンルームの床面から前記空気調和装置の吸込み口に至る還気ダクトと、を備え、
前記空気調和装置は、箱体と、当該箱体内に設けられた送風機と、前記箱体内に設けられて温度および湿度を調整するコイルと、前記箱体内に設けられたフィルタと、を備え、
前記空気調和装置により、前記フィルタを通した高清浄度空気を、前記給気ダクトを介して前記多孔拡散膜に供給することを特徴とするクリーンルーム浄化システム。 A clean room purification system for purifying a clean room in a building,
An air conditioner,
A porous diffusion film provided inside the clean room,
An air supply duct from the outlet of the air conditioner to the porous diffusion film,
A return air duct from the floor of the clean room to the suction port of the air conditioner;
The air conditioner includes a box, a blower provided in the box, a coil provided in the box to adjust temperature and humidity, and a filter provided in the box,
A clean room purification system characterized in that, by the air conditioner, high-purity air that has passed through the filter is supplied to the porous diffusion membrane through the air supply duct. 前記クリーンルームは、標準エリアと、当該標準エリアよりも空気清浄度が高い高清浄度エリアと、に分かれており、
前記多孔拡散膜は、当該高清浄度エリアの天井部分に設けられ、
前記標準エリアと前記高清浄度エリアとの境界には、前記標準エリアと前記高清浄度エリアとを連通する連通口が設けられることを特徴とする請求項１に記載のクリーンルーム浄化システム。 The clean room is divided into a standard area and a high cleanliness area where the air cleanliness is higher than the standard area,
The porous diffusion film is provided in the ceiling portion of the high cleanliness area,
The clean room purification system according to claim 1, wherein a communication port that connects the standard area and the high cleanliness area is provided at a boundary between the standard area and the high cleanliness area. 建物内に設けられたクリーンルームを浄化するクリーンルーム浄化システムであって、
空気調和装置と、
前記クリーンルームの内部に設けられた多孔拡散膜と、
前記空気調和装置の吹出し口から前記クリーンルームの内部に至る給気ダクトと、
前記クリーンルームの内部に設けられて温度を調整するとともに前記多孔拡散膜に空気を送るファン付ドライコイルユニットと、
前記クリーンルームの床面から前記ファン付ドライコイルユニットの吸込み口に至る還気ダクトと、を備え、
前記空気調和装置は、箱体と、当該箱体内に設けられた送風機と、前記箱体内に設けられて温度および湿度を調整するコイルと、前記箱体内に設けられたフィルタと、を備え、
前記空気調和装置により、前記フィルタを通した高清浄度空気を、前記給気ダクトを介して前記クリーンルームの内部に供給することを特徴とするクリーンルーム浄化システム。 A clean room purification system for purifying a clean room in a building,
An air conditioner,
A porous diffusion film provided inside the clean room,
An air supply duct from the outlet of the air conditioner to the inside of the clean room,
A dry coil unit with a fan that is provided inside the clean room to adjust the temperature and sends air to the porous diffusion film,
A return air duct from the floor of the clean room to the suction port of the fan-equipped dry coil unit;
The air conditioner includes a box, a blower provided in the box, a coil provided in the box to adjust temperature and humidity, and a filter provided in the box,
A clean room purification system, characterized in that the air conditioner supplies high-purity air that has passed through the filter to the inside of the clean room via the air supply duct. 前記多孔拡散膜から吹き出される空気の流速は、前記クリーンルームの床面に吸い込まれる空気の流速よりも小さいことを特徴とする請求項１から３のいずれかに記載のクリーンルーム浄化システム。 The clean room purification system according to any one of claims 1 to 3, wherein a flow velocity of air blown out from the porous diffusion film is smaller than a flow velocity of air sucked into the floor surface of the clean room.
JP2018235149A 2018-12-17 2018-12-17 Clean room purification system Pending JP2020098038A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018235149A JP2020098038A (en) 2018-12-17 2018-12-17 Clean room purification system
TW108145421A TW202027838A (en) 2018-12-17 2019-12-12 Clean room purification system comprising an air-conditioning device, a porous diffusion membrane, an air supply duct, and an air returning duct
CN201911324220.9A CN111322692A (en) 2018-12-17 2019-12-17 Clean room clean system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018235149A JP2020098038A (en) 2018-12-17 2018-12-17 Clean room purification system

Publications (1)

Publication Number Publication Date
JP2020098038A true JP2020098038A (en) 2020-06-25

Family

ID=71106894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018235149A Pending JP2020098038A (en) 2018-12-17 2018-12-17 Clean room purification system

Country Status (3)

Country Link
JP (1) JP2020098038A (en)
CN (1) CN111322692A (en)
TW (1) TW202027838A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023191463A1 (en) * 2022-03-28 2023-10-05 주식회사 퀀텀캣 Air-conditioning filter system for removing harmful substances

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023191463A1 (en) * 2022-03-28 2023-10-05 주식회사 퀀텀캣 Air-conditioning filter system for removing harmful substances

Also Published As

Publication number Publication date
TW202027838A (en) 2020-08-01
CN111322692A (en) 2020-06-23

Similar Documents

Publication Publication Date Title
US7048625B2 (en) Clean bench for cleaning atmosphere of partitioned space
KR20100088386A (en) The air circulating and cleanning instrument for an elevator
US6471582B1 (en) Adapter for coupling air duct to fan-driven vent
US10677491B2 (en) Air distribution device
JP2020098038A (en) Clean room purification system
JP2010279679A (en) Deodorization system for pathological examination room
JP6767616B2 (en) Blower
JP7065264B2 (en) Heat exchange type ventilator
JP6734769B2 (en) Simple clean booth
JP2016033437A (en) Clean booth
JP6410291B2 (en) Evaporative cooling system for buildings
JP6074593B2 (en) Humidifier and air purifier with humidification function
JPH11211164A (en) Blower unit for air cleaning
JP6986508B2 (en) Air conditioning system accommodation structure
WO2021257945A1 (en) Apparatus, system, and method for preventing spread of air-borne contaminants
JP6412084B2 (en) Air purification type high-rise building
JPS62182541A (en) Clean room
KR20200068438A (en) Window-type heat exchanger air purification system that exhausts indoor lower air
JP5652917B2 (en) Clean room
JPH11253732A (en) Clean room
JPH07286744A (en) Air cleaner with air curtain
JP3420722B2 (en) Local air purifier
JP3229774U (en) Ventilation system
JP3080970U (en) Breeding equipment
JP2005340435A (en) Clean sheet