JP5652917B2 - Clean room - Google Patents

Description

  The present invention relates to a clean room. In detail, it is related with the clean room which cleans indoor air efficiently.

Conventionally, in order to prevent dust from being mixed into industrial products and pharmaceuticals, a clean room in which the dust in the air is greatly reduced is provided. Specifically, a product manufacturing apparatus is arranged inside a clean room, and the manufacturing apparatus is operated in an environment with little dust.
For example, this clean room has a double floor, a double wall, and a double ceiling, a slit is formed on the floor surface, and an air purifier is provided on the entire ceiling surface. Each air purifier sucks and cleans the air in the space behind the ceiling and blows it out downward. The blown-out air passes through the clean room, flows into the underfloor space of the double floor from the slit, passes through the inside of the double wall, and reaches the ceiling space again.
According to this clean room, the entire room can be maintained at a high cleanliness.

By the way, in the above clean room, in order to maintain high air cleanliness throughout the entire clean room, it is necessary to install many air purifiers on the ceiling surface, which is expensive to install and operate. Become.
Moreover, since a double ceiling, a double wall, and a double floor are constructed, there is a problem that a space other than a clean room is required and the construction cost increases.

  In order to solve the above problems, a clean room of a local cleaning method has been proposed (see Patent Document 1). The local cleaning method is to keep the air cleanliness of the entire clean room at a certain level and to make the air cleanliness high only in a part of the space where the manufacturing apparatus is installed.

Specifically, the clean room is not a double floor, double wall, or double ceiling, and a heat exchange device that draws indoor air, processes the air-conditioning load, and blows it into the room near the ceiling, and this heat exchange device And an air purifier that inhales and purifies the air blown out and blows it out toward the interior of the room.
Here, the heat exchanging device has a structure in which air is sucked from the suction port on the lower surface and blown out from the air outlet on the side surface. The air cleaning device has a structure in which air is sucked in from the suction port on the upper surface and blown out from the air outlet on the lower surface. Therefore, the air purifier is disposed on the side surface and below the heat exchange device.

According to the clean room disclosed in Patent Document 1, when air that has been subjected to a heating / cooling load is blown out to the side by the heat exchange device, the air is sucked into the air cleaning device and subjected to a cleaning process. Is blown out. The blown air hits the floor of the room and the apparatus, and then rises again and is collected by the heat exchange apparatus. Therefore, since a double floor, a double wall, and a double ceiling are not provided, indoor space can be used effectively, and further, the construction cost of a clean room can be reduced.
In addition, by arranging the heat exchange device and the air purifier near the ceiling surface of the space where you want to increase the air cleanliness locally, you can achieve local cleanliness, which increases the installation and operating costs of the air purifier. .

JP 2004-278887 A

However, in the clean room of the above-mentioned patent document 1, since it is necessary to make the height of an air purifier somewhat lower than the height of a heat exchanging device on the structure of a heat exchanger and an air cleaner, it is arranged in the up-and-down direction There are limitations. Moreover, in order to deliver the air blown out from the heat exchange device by the air cleaning device, it is necessary to arrange the heat exchange device and the air cleaning device close to each other to some extent, and the horizontal arrangement is also limited. Therefore, there is a problem that the degree of freedom in layout design is reduced.
As a result, the flow of air could not be formed corresponding to the fine layout of the manufacturing equipment installed in the clean room, and the air flow was interrupted in some places, and the efficiency of cleaning could be reduced. .

  In addition, since the air cleaning device is disposed below the heat exchange device, a certain amount of ceiling space is required to install these devices. Therefore, when the ceiling height is low, the air purifier cannot be installed, so that the installable space is limited.

Moreover, when converting an existing room into a clean room, it is necessary to remove the existing air-conditioning equipment installed on the floor, which increases the construction cost.
In addition, since the heat load is hardly generated, air that has been heat-exchanged by the heat exchange device is supplied to a space that requires only air cleanliness, resulting in unnecessary costs.
In addition, air containing dust that does not pass through the filter also circulates near the ceiling, which causes a problem that dust accumulates in piping near the ceiling.

  An object of the present invention is to provide a clean room that has a high degree of freedom in layout design, can be installed even when the ceiling height is low, and can prevent dust from accumulating near the ceiling and reduce costs. To do.

The clean room according to claim 1 is a clean room for purifying indoor air, and cleans the air by sucking air in the lower part of the room and blowing it upward in the room, and cleans the air by sucking the air in the upper part of the room. And a downward air cleaning device that blows out downward in the room, cleans the air by sucking air from the suction port, and uses the air cleaning device that blows out from the air outlet on the opposite side of the suction port. The apparatus is such that the air cleaning device is disposed with the air outlet facing upward, and the downward air cleaning device is the air cleaning device that is disposed with the air outlet facing downward, and the upward air The cleaning device and the downward air cleaning device are at substantially the same height near the ceiling, and the downward air cleaning device is provided by the upward air cleaning device. The sprayed and cleaned sucks air flowing along the ceiling surface to Imen, balloon indoors downward by the upward air cleaning apparatus and the downward air cleaning apparatus, the circulating path air chamber circulates vertically It is characterized by forming.

  Note that “upward” means upward from the horizontal direction, and includes a case of blowing obliquely upward. Further, “downward” means downward from the horizontal direction, and includes a case of blowing obliquely downward.

  According to this invention, the upward air cleaner and the downward air cleaner form a circulation path through which air circulates up and down in the room. At this time, since the upward air cleaning device and the downward air cleaning device can be disposed at any position on the air circulation path, the height and horizontal direction of the upward air cleaning device and the downward air cleaning device can be adjusted. Arrangement can be freely set, and the degree of freedom in layout design is increased. Therefore, since the air flow corresponding to the detailed requirements of the apparatus installed in the room can be formed, the efficiency of cleaning can be improved.

  Moreover, when converting an existing room into a clean room, since an existing air conditioner can be used, the construction cost can be reduced.

  In addition, the air cleaning device was arranged with the air outlet facing upward to form an upward air cleaning device, and the air cleaning device was disposed with the air outlet facing downward to form a downward air cleaning device. In other words, an upward air cleaning device and a downward air cleaning device are configured by adjusting the direction of the air cleaning device using a single type of air cleaning device. Therefore, the construction cost can be reduced and the layout can be easily changed.

Further, since the upward air cleaning device and the downward air cleaning device are arranged at substantially the same height, a clean room can be installed even when the ceiling height is low.
Further, since air is blown toward the ceiling surface by the upward air cleaning device, it is possible to prevent dust from accumulating on piping near the ceiling.
In addition, since there is no need to use double ceilings, double walls, and double floors, ceiling finishing materials, wall finishing materials, and floor finishing materials can be omitted, so that the interior space can be used effectively. Can be reduced.

  In order to reliably form an air circulation path, the height of the upward air cleaning device may be set lower than the height of the downward air cleaning device. In this case, it is preferable to install the upward air cleaning device at a height that is within 2 m from the floor and does not interfere with the flow line in the room.

The clean room according to claim 2 further includes a lateral air cleaning device that sucks air from the side and cleans it, and blows it out to the opposite side.

  According to the present invention, since the horizontal air cleaning device is provided, air with high cleanliness can be conveyed in the horizontal direction, so the degree of freedom in layout design is further increased.

The clean room described in claim 3 is characterized in that a heat exchanger for air-conditioning the blown air by heat exchange is incorporated in the air cleaning device.

  According to the present invention, at least one of the upward air cleaner, the downward air cleaner, and the lateral air cleaner is incorporated with a heat exchanger that air-conditions the blown air. Therefore, by appropriately arranging an air cleaning device incorporating this heat exchanger, an air cleaning zone that only cleans the air, a temperature control zone that also adjusts the room temperature in addition to cleaning the air, The exhaust heat of the apparatus can be removed locally and efficiently. Moreover, since air-conditioned air is not supplied to a space that requires only air cleanliness, useless costs can be reduced.

The clean room according to claim 4 is characterized in that the air cleaning device is capable of adjusting a blowout speed of a blowout port.

If the blowout speed of the blowout port is low, there is a case where a short path is generated in which the blown air does not pass through a predetermined flow path and is immediately sucked into an adjacent air cleaning device, or dust may enter the blowout port. .
Therefore, according to the present invention, the blowing speed of the air outlet of the air cleaning device can be adjusted. Accordingly, since the blown air can be surely flowed to the predetermined flow path, a short path of the blown air can be prevented, and dust can be prevented from entering the blowout port.

The clean room according to claim 5 is characterized in that the upward air cleaning device and the downward air cleaning device are separated by a predetermined distance or more in the horizontal direction.

If the upward air purifier and the downward air purifier are close to each other in the horizontal direction, there is a risk that a short path may be generated in which the blown air does not flow into the predetermined flow path and is immediately sucked into the adjacent air purifier. There is.
Therefore, according to the present invention, since the upward air cleaning device and the downward air cleaning device are separated from each other by a predetermined distance in the horizontal direction, occurrence of a short path of blown air can be prevented.
For example, when the blowing speed of the upward air cleaning device and the downward air cleaning device is 0.35 m / s, it is preferable to separate the center of the upward air cleaning device from the center of the downward air cleaning device by 1 m or more.

The clean room according to claim 6 is characterized in that the downward air cleaning device is provided with a partition portion for partitioning a space to be supplied with blown air.

As a partition part, a vinyl curtain, an air curtain, a partition plate, etc. are mentioned.
According to this invention, the partition part was provided in the downward air cleaning apparatus, and the space to be cleaned for supplying the blown air was partitioned. As a result, it is possible to prevent ambient air having a lower cleanliness than the blown air from flowing into the target space to be cleaned, and to ensure a high air cleanliness.
Here, when the partition is an air curtain, the wind speed of the air curtain is preferably about 3 m / s to 10 m / s.

The clean room according to claim 7 is characterized in that the upward air cleaning device is provided with a partition portion for partitioning a space into which air is sucked.

Examples of the partition include a vinyl curtain, an air curtain, and a wind collecting plate.
According to this invention, the partition part which partitions off the space used as the air suction object in the upward air cleaning apparatus was provided. Thereby, the short path | pass of clean air is prevented and the air containing the dust of the space used as the air inhalation object, or high temperature air can be efficiently inhaled with the upward air cleaner.

The clean room according to claim 8 is characterized in that some of the air cleaning devices are air blowers.

  According to the present invention, since some of the air cleaning devices are air blowers, the air can be conveyed in the horizontal direction by the air blowers, so that the degree of freedom in layout design is further increased.

  According to the present invention, the upward air cleaner and the downward air cleaner form a circulation path through which air circulates up and down in the room. At this time, since the upward air cleaning device and the downward air cleaning device can be disposed at any position on the air circulation path, the height and horizontal direction of the upward air cleaning device and the downward air cleaning device can be adjusted. Arrangement can be freely set, and the degree of freedom in layout design is increased. Therefore, since the air flow corresponding to the fine demands of the apparatus installed in the room can be formed, the efficiency of the cleaning can be improved. Moreover, when converting an existing room into a clean room, since an existing air conditioner can be used, the construction cost can be reduced. In addition, the air cleaning device was arranged with the air outlet facing upward to form an upward air cleaning device, and the air cleaning device was disposed with the air outlet facing downward to form a downward air cleaning device. In other words, an upward air cleaning device and a downward air cleaning device are configured by adjusting the direction of the air cleaning device using a single type of air cleaning device. Therefore, the construction cost can be reduced and the layout can be easily changed. Further, since the upward air cleaning device and the downward air cleaning device are arranged at substantially the same height, a clean room can be installed even when the ceiling height is low. Further, since air is blown toward the ceiling surface by the upward air cleaning device, it is possible to prevent dust from accumulating on piping near the ceiling. In addition, since there is no need to use double ceilings, double walls, and double floors, ceiling finishing materials, wall finishing materials, and floor finishing materials can be omitted, so that the interior space can be used effectively. Can be reduced.

It is sectional drawing of the clean room which concerns on 1st Embodiment of this invention. It is sectional drawing of the clean room which concerns on 2nd Embodiment of this invention. It is sectional drawing of the clean room which concerns on 3rd Embodiment of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description of the embodiments, the same constituent elements are denoted by the same reference numerals, and the description thereof is omitted or simplified.
[First Embodiment]
FIG. 1 is a cross-sectional view of a clean room 2 according to the first embodiment of the present invention.

  The clean room 2 is a large space having a high ceiling height (for example, a ceiling height of about 6 to 8 m) and a large span (for example, a span length of about 24 m). Let the ceiling surface of this clean room 2 be the ceiling surface 3.

The clean room 2 is provided with an air cleaning system 1 for locally cleaning the air in the clean room 2.
The air cleaning system 1 includes four upward air cleaning devices 11, 12, 13, 14 supported by being suspended from the ceiling surface 3, and four downward air cleaning devices supported by being suspended from the ceiling surface 3. The devices 21, 22, 23, and 24, and two lateral air cleaning devices 31 and 32 that are suspended and supported from the ceiling surface 3 are provided.

  By these upward air cleaners 11 to 14, the downward air cleaners 21 to 24, and the lateral air cleaners 31 and 32, circulation paths A, B, C, and D in which the air circulates up and down in the clean room 2 are provided. , E.

Two large devices 4 and 5 are installed in the clean room 2.
Among these, since the large apparatus 4 is an apparatus that requires high air cleanliness, high-cleanness air is supplied to the large apparatus 4 through the circulation paths A and B. That is, the circulation paths A and B serve as an air purification zone that performs only air purification.
Moreover, since the large sized device 5 has a large calorific value, the high-temperature air including the exhaust heat of the large sized device 5 is air-conditioned by the circulation paths D and E. That is, the circulation paths D and E serve as a temperature adjustment zone that adjusts the room temperature in addition to air purification.

The upward air cleaning apparatuses 11 to 14 suck and clean the air in the lower part of the room, blow it out in the upper part of the room, and blow it onto the ceiling surface 3.
The downward air purifying devices 21 to 24 are air blown on the ceiling surface 3 by the upward air purifying devices 11 to 14, sucking and purging the air above the room flowing along the ceiling surface 3, and blowing the air downward in the room. .

The upward air cleaning devices 11 to 14 and the downward air cleaning devices 21 to 24 described above are configured using an air cleaning device 40.
The air cleaning device 40 sucks and cleans air from the suction port 41 and blows it out from the air outlet 42 on the opposite side of the suction port 41, and removes the dust in the blown air and the fan 43 that creates the air flow. And a filter 44. The air cleaning device 40 can adjust the blowing speed of the air outlet 42 by adjusting the rotational speed of the fan 43.
Specifically, the air purifier 40 with the air outlet 42 facing upward is the upward air purifier 11 to 14, and the air cleaner 40 with the air outlet 42 facing downward is the downward air. It is the cleaning apparatuses 21-24.

  The lateral air cleaning devices 31 and 32 are designed to inhale air from the side, clean it by air conditioning, and blow it out to the opposite side. The lateral air cleaning devices 31 and 32 include a fan 51 that creates an air flow, a heat exchanger 52 that air-conditions the blown air by heat exchange, and a filter 53 that removes dust in the blown air.

The circulation path A is formed as follows.
That is, a downward air cleaning device 21 is installed immediately above the left side surface of the large device 4 in FIG. 1, and an upward air cleaning device 11 is installed on the left side of the downward air cleaning device 21 in FIG. Has been.
Here, the upward air cleaning device 11 and the downward air cleaning device 21 are installed at substantially the same height, and are separated by 1 m or more in the horizontal direction.
Thereby, air flows in the clockwise direction in FIG. 1 in the order of the upward air cleaning device 11 and the downward air cleaning device 21, and highly purified air is supplied to the large-sized device 4.

The circulation path B is formed as follows.
That is, a downward air cleaning device 22 is installed immediately above the right side surface of the large device 4 in FIG. 1, and an upward air cleaning device 12 is installed on the right side of the downward air cleaning device 22 in FIG. 1. Has been.
The upward air cleaning device 12 and the downward air cleaning device 22 are installed at substantially the same height, and are separated by 1 m or more in the horizontal direction.
Thereby, air flows counterclockwise in FIG. 1 in the order of the upward air cleaning device 12 and the downward air cleaning device 22, and the high-quality air is supplied to the large-sized device 4.

The circulation path D is formed as follows.
That is, an upward air cleaning device 13 is installed immediately above the left side surface of the large-sized device 5 in FIG. 1, and air is supplied to the upper left side of the upward air cleaning device 13 in the left direction in FIG. A lateral air cleaning device 31 that blows out is installed, and a downward air cleaning device 23 is installed at the lower left side of the lateral air cleaning device 31 in FIG.
An air curtain blowing device 61 is provided on the left edge of the upward air cleaning device 13 in FIG. The air curtain blowing device 61 draws air from the side and blows air in a direction away from the large device 5 as it goes downward, thereby partitioning the large device 5 that is an air suction target and the surrounding space. The air curtain 611 as a part is formed.

Here, the upward air cleaning device 13 and the downward air cleaning device 23 are installed at substantially the same height, and are separated by 1 m or more in the horizontal direction.
Thereby, air flows counterclockwise in FIG. 1 in the order of the upward air cleaning device 13, the lateral air cleaning device 31, and the downward air cleaning device 23, and high-temperature air including exhaust heat of the large-sized device 5 is generated. Air-conditioned. At this time, since the large device 5 and the surrounding space are partitioned by the air curtain 611, high-temperature air including exhaust heat of the large device 5 is efficiently sucked into the upward air cleaning device 13.

The circulation path E is formed as follows.
That is, an upward air cleaning device 14 is installed directly above the right side surface of the large-sized device 5 in FIG. 1, and air is directed rightward in FIG. 1 above the right side of the upward air cleaning device 14 in FIG. A lateral air cleaning device 32 to be blown out is installed, and a downward air cleaning device 24 is installed below the right side of FIG.
An air curtain blowing device 62 is provided at the right edge of the upward air cleaning device 14 in FIG. The air curtain blowing device 62 draws air from the side and blows air in a direction away from the large device 5 as it goes downward, thereby partitioning the large device 5 that is the target of air suction and the surrounding space. The air curtain 621 as a part is formed.

Here, the upward air cleaning device 14 and the downward air cleaning device 24 are installed at substantially the same height, and are separated by 1 m or more in the horizontal direction.
As a result, air flows in the clockwise direction in FIG. 1 in the order of the upward air cleaning device 14, the lateral air cleaning device 32, and the downward air cleaning device 24, and the high-temperature air including the exhaust heat of the large device 5 is air-conditioned. Is done. At this time, since the large device 5 and the surrounding space are partitioned by the air curtain 621, high-temperature air including exhaust heat of the large device 5 is efficiently sucked into the upward air cleaning device 13.

The circulation path C is formed as follows.
That is, the above-described downward air cleaning device 23 is located on the right side of the above-described upward air cleaning device 12 in FIG.
Here, the upward air cleaning device 12 and the downward air cleaning device 23 are installed at substantially the same height, and are separated by 1 m or more in the horizontal direction.
Thereby, air flows clockwise in FIG. 1 in the order of the upward air cleaning device 12 and the downward air cleaning device 23.

According to this embodiment, there are the following effects.
(1) The upward air cleaning devices 11 to 14 and the downward air cleaning devices 21 to 24 form circulation paths A to E in which air circulates up and down in the room of the clean room 2. At this time, since the upward air cleaning devices 11 to 14 and the downward air cleaning devices 21 to 24 can be arranged at any positions on the air circulation paths A to E, the upward air cleaning devices 11 to 14 and The arrangement in the height direction and the horizontal direction of the downward air cleaning devices 21 to 24 can be freely set, and the degree of freedom in layout design is increased. Therefore, the flow of the air corresponding to the fine demands of the large devices 4 and 5 installed in the clean room 2 can be formed, and the efficiency of cleaning can be improved.

In addition, the air cleaning device 40 is arranged with the air outlet 42 facing upward to be the upward air cleaning devices 11 to 14, and the air cleaning device 40 is disposed with the air outlet 42 facing downward and the downward air cleaning devices 21 to 24 are disposed. It was. That is, using the single type of air cleaning device 40, the direction of the air cleaning device 40 is adjusted to configure the upward air cleaning devices 11 to 14 and the downward air cleaning devices 21 to 24. Therefore, the construction cost can be reduced and the layout can be easily changed.
Moreover, since air was sprayed on the ceiling surface 3 of the clean room 2 by the upward air cleaning apparatuses 11 to 14, it is possible to prevent dust from accumulating on piping near the ceiling.
In addition, since there is no need to use double ceilings, double walls, and double floors, ceiling finishing materials, wall finishing materials, and floor finishing materials can be omitted, and the interior space can be used effectively. It can be greatly reduced.

  (2) Since the lateral air cleaning devices 31 and 32 are provided, air with high cleanliness can be conveyed in the horizontal direction, so that the degree of freedom in layout design is further increased.

  (3) A heat exchanger 52 for air-conditioning the blown air is incorporated in the lateral air cleaning devices 31 and 32. Therefore, by appropriately arranging the lateral air cleaning devices 31 and 32 incorporating the heat exchanger 52, an air cleaning zone that performs only air cleaning and room temperature adjustment in addition to air cleaning are also performed. A temperature control zone can be provided freely, and the exhaust heat of the large-sized device 5 can be efficiently removed locally. Moreover, since air-conditioned air is not supplied to a space that requires only air cleanliness, useless costs can be reduced.

  (4) The blowing speed of the air outlet 42 of the air cleaning device 40 can be adjusted. Accordingly, since the blown air can be surely flowed to the predetermined flow path, a short path of the blown air can be prevented and the dust can be prevented from entering the blower outlet 42.

  (5) Since the upward air cleaning devices 11 to 14 and the downward air cleaning devices 21 to 24 are separated by 1 m or more in the horizontal direction, it is possible to prevent occurrence of a short path of blown air.

  (6) The air curtain blowing devices 61 and 62 are provided in the upward air cleaning devices 13 and 14 to form the air curtains 611 and 621 that partition the large device 5 that is an air suction target and the surrounding space. Thereby, the high temperature air containing the exhaust heat of the large sized apparatus 5 can be efficiently inhaled by the upward air cleaning apparatuses 13 and 14.

[Second Embodiment]
FIG. 2 is a cross-sectional view of a clean room 2A according to the second embodiment of the present invention.
In the present embodiment, an air cleaning system 1A is provided in an existing chamber.
That is, the clean room 2A is a renovation of an existing room and has a low ceiling height. Let the ceiling surface of this clean room 2A be the ceiling surface 3A.
An existing large air conditioner 6 is installed at the right end in FIG. The large air conditioner 6 sucks in air in the lower layer of the room, cleans it by air conditioning, and blows out upward.

The air cleaning system 1 </ b> A includes two upward air cleaning devices 15, 16, two downward air cleaning devices 25, 26, and an existing large air conditioner 6.
The upward air cleaning devices 15 and 16 have the same configuration as the upward air cleaning devices 11 to 14 of the first embodiment. The downward air cleaning devices 25 and 26 have the same configuration as the downward air cleaning devices 21 to 24 of the first embodiment.

  In the clean room 2A, a large apparatus 7 that requires high air cleanliness is installed. Therefore, the upward air cleaning devices 15 and 16 and the downward air cleaning devices 25 and 26 form the circulation paths F and G, and supply high-clean air to the large-sized device 7.

The circulation path F is formed as follows.
That is, a downward air cleaning device 25 is installed immediately above the left side of the large device 7 in FIG. 2, and an upward air cleaning device 15 is installed on the left side of the downward air cleaning device 25 in FIG. Yes.
The upward air cleaning device 15 and the downward air cleaning device 25 are installed at substantially the same height near the ceiling surface 3 </ b> A, but the upward air cleaning device 15 is slightly lower than the downward air cleaning device 25. In position.
Further, the upward air cleaning device 15 and the downward air cleaning device 25 are separated by 1 m or more in the horizontal direction.
Thereby, air flows in the clockwise direction in FIG. 2 in the order of the upward air cleaning device 15 and the downward air cleaning device 25, and the high-quality air is supplied to the large-sized device 7.

The circulation path G is formed as follows.
That is, a downward air cleaning device 26 is installed immediately above the right side of the large-sized device 7 in FIG. 2, and an upward air cleaning device 16 is installed on the right side of the downward air cleaning device 26 in FIG. Yes.
The upward air cleaning device 16 and the downward air cleaning device 26 are installed at substantially the same height in the vicinity of the ceiling surface 3A, but the upward air cleaning device 16 is slightly lower than the downward air cleaning device 26. In position.
Further, the upward air cleaning device 16 and the downward air cleaning device 26 are separated by 1 m or more in the horizontal direction.
Thereby, air flows counterclockwise in FIG. 1 in the order of the upward air cleaning device 16 and the downward air cleaning device 26, and the high-quality air is supplied to the large-sized device 7.

  Moreover, the air of the indoor lower layer is air-conditioned by the existing large-sized air conditioner 6 and supplied to the indoor upper layer. As a result, the air flowing through the circulation paths F and G is appropriately air-conditioned.

According to the present embodiment, in addition to the above (1), (4), (5), there are the following effects.
(7) Since the upward air cleaning devices 15 and 16 and the downward air cleaning devices 25 and 26 are arranged at substantially the same height, even when the ceiling height is low as in an existing room, the air cleaning system 1A Can be installed.
Here, since the heights of the upward air cleaning devices 15 and 16 are slightly lower than the heights of the downward air cleaning devices 25 and 26, the air circulation paths F and G can be formed more reliably.
Since the existing room is converted into a clean room and used as the clean room 2 in combination with the existing large air conditioner 6 installed on the floor, the air cleaning system 1A is constructed, so that the construction cost can be reduced.

[Third Embodiment]
FIG. 3 is a cross-sectional view of a clean room 2B according to the third embodiment of the present invention.
In the present embodiment, air curtain blowing devices 63, 64, and 65 are provided in the downward air cleaning device.
That is, the clean room 2B is a space with a high ceiling height. Let the ceiling surface of this clean room 2B be the ceiling surface 3B.

  The air purification system 1B includes two upward air cleaners 17 and 18, five downward air cleaners 71, 72, 73, 74, and 75, and three lateral air cleaners 33 and 34. , 35.

The upward air cleaning devices 17 and 18 have the same configuration as the upward air cleaning devices 11 to 14 of the first embodiment. The downward air cleaning apparatuses 71 to 75 have the same configuration as the downward air cleaning apparatuses 21 to 24 of the first embodiment. The lateral air cleaning device 33 has the same configuration as the lateral air cleaning devices 31 and 32 of the first embodiment.
Further, the lateral air cleaning devices 34 and 35 are configured using an air cleaning device 40. That is, the air cleaners 34 and 35 are the ones in which the air cleaner 40 is disposed sideways.

  Two large devices 8 and 9 are installed in the clean room 2. These large devices 8 and 9 are devices that require high air cleanliness. Of these, the entire large device 8 and the left portion of the large device 7 in FIG. Therefore, high-cleanness air is supplied to the large apparatuses 8 and 9 by the circulation paths H, I, J, and K.

The circulation path H is formed as follows.
That is, the downward air cleaning devices 71 to 73 are installed in the horizontal direction directly above the large-sized device 8, and air curtain blowing devices 63 and 64 are provided at both ends of the downward air cleaning devices 71 to 73. Is provided. The air curtain blowing devices 63 and 64 draw in air from the side and blow out the air downward, so that the air curtain blowing devices 63 and 64 serve as a partition that separates the large device 8 to be supplied with blowing air from the surrounding space. Curtains 631 and 641 are formed.

  Thereby, the air blown out from the downward air cleaning apparatuses 71 to 73 passes between the air curtain 631 and the large apparatus 8 and reaches the vicinity of the floor surface, and then rises again to decrease the downward air cleaning apparatuses 71 to 73. Sucked into. In this way, air flows clockwise in FIG. 3, and highly purified air is supplied to the large device 7. At this time, since the large apparatus 8 and the surrounding space are partitioned by the air curtain 631, air with high cleanliness is efficiently supplied to the large apparatus 8.

The circulation path I is formed as follows.
Above the right side in FIG. 3 of the above-described downward air cleaning devices 71 to 73, a lateral air cleaning device 33 for blowing air leftward in FIG. 3 is installed, and this lateral air cleaning device 33 is below the right side in FIG. Is provided with an upward air cleaning device 17.
The upward air cleaning device 17 and the downward air cleaning devices 71 to 73 are installed at substantially the same height, and are separated by 1 m or more in the horizontal direction.

  Thereby, the air blown out from the downward air cleaning devices 71 to 73 reaches between the air curtain 641 and the large device 8 and reaches the vicinity of the floor surface, and then rises and is sucked into the upward air cleaning device 17. . Then, air flows in the counterclockwise direction in FIG. 3 in the order of the upward air cleaning device 17, the lateral air cleaning device 33, and the downward air cleaning devices 71 to 73, and high-quality air is supplied to the large-sized device 8. Is done. At this time, since the large apparatus 8 and the surrounding space are partitioned by the air curtain 641, air with high cleanliness is efficiently supplied to the large apparatus 8.

The circulation path J is formed as follows.
A downside air purifier 74 is installed on the left side of the large apparatus 9 in FIG. 3, and a lateral air purifier that blows air rightward in FIG. 3 above the left side of FIG. The above-described upward air cleaning device 17 is located at the lower left side of the lateral air cleaning device 34 in FIG. 3.
An air curtain blowing device 65 is provided at the left edge of the downward air cleaning device 74 in FIG. The air curtain blowing device 65 draws air from the side and blows the air downward to partition the left side portion of the large-sized device 9 to be supplied with blowing air and the surrounding space in FIG. An air curtain 651 as a partition is formed.
The upward air cleaning device 17 and the downward air cleaning device 74 are installed at substantially the same height, and are separated by 1 m or more in the horizontal direction.

  As a result, the air blown out from the downward air cleaning device 74 passes between the air curtain 651 and the large device 9 and reaches the vicinity of the floor surface, and then rises and is sucked into the upward air cleaning device 17. Then, air flows in the clockwise direction in FIG. 3 in the order of the upward air cleaning device 17, the lateral air cleaning device 34, and the downward air cleaning device 74, and the high-quality air is supplied to the large-sized device 9. At this time, since the air curtain 651 separates the left portion of the large apparatus 9 in FIG. 3 and the surrounding space, highly clean air is efficiently supplied.

The circulation path K is formed as follows.
That is, a downward air cleaning device 75 is installed on the right side of the large device 9 in FIG. 3, and a lateral air cleaning device that blows air leftward in FIG. 3 above the right side of the downward air cleaning device 75 in FIG. 3. The air purification device 35 is installed, and the upward air purification device 18 is installed below the right side of the lateral air purification device 35 in FIG.
Here, the upward air cleaning device 18 and the downward air cleaning device 75 are installed at substantially the same height, and are separated by 1 m or more in the horizontal direction.
As a result, air flows in the counterclockwise direction in FIG. 3 in the order of the upward air cleaning device 18, the lateral air cleaning device 35, and the downward air cleaning device 75, and high-quality air is supplied to the large-sized device 4. The

According to this embodiment, in addition to the above (1) to (5), there are the following effects.
(8) Air curtain blowing devices 63 to 65 are provided in the downward air cleaning devices 71, 73, 74, and an air curtain that partitions a part of the large device 8 or the large device 9 to be cleaned to supply the blown air. 631, 641, 651 were formed. Accordingly, it is possible to prevent the ambient air having a lower cleanness than the blown air from flowing into the target space for the local cleaning, and to ensure a high air cleanliness.

Note that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope in which the object of the present invention can be achieved are included in the present invention.
For example, in each of the above-described embodiments, the heat exchanger 52 is incorporated only in the lateral air cleaning apparatuses 31 to 33. However, the heat exchanger is not limited to this, and the upward air cleaning apparatuses 11 to 18 and the downward air cleaning are not limited thereto. May be incorporated into the air purification devices 21-26, 71-75, and the lateral air cleaning devices 34, 35.
Moreover, in each above-mentioned embodiment, although the horizontal air cleaning apparatuses 31-35 were provided, it is not restricted to this, You may provide the booster fan as an air blower suitably instead of the horizontal air cleaning apparatuses 31-35. Good. If a booster fan is used, although air cannot be purified like the horizontal air cleaning apparatuses 31-35, air can be conveyed in a horizontal direction.

DESCRIPTION OF SYMBOLS 1, 1A, 1B ... Air purification system 2, 2A, 2B ... Clean room 3, 3A, 3B ... Ceiling surface 4, 5, 7, 8, 9 ... Large-scale apparatus 6 ... Existing large-sized air conditioners 11-18 ... Upward air Cleaning device 21-26, 71-75 ... Downward air cleaning device 31-35 ... Lateral air cleaning device 40 ... Air cleaning device 41 ... Suction port 42 ... Outlet 43 ... Fan 44 ... Filter 51 ... Fan 52 ... Heat exchanger 53 ... Filter 61 to 65 ... Air curtain blowing device 611, 621, 631, 641, 651 ... Air curtain (partition part)
A to K circuit

Claims (8)

A clean room for purifying indoor air,
An upward air cleaning device that sucks and cleans the air below the room, and blows it upward in the room;
A downward air cleaning device that sucks and cleans the air above the room and blows it down the room;
Using an air cleaning device that sucks air from the suction port and cleans it, and blows it out from the outlet on the opposite side of the suction port.
The upward air cleaning device is a device in which the air cleaning device is disposed with the air outlet facing upward,
The downward air cleaning device is a device in which the air cleaning device is arranged with the outlet facing downward,
The upward air cleaning device and the downward air cleaning device are substantially at the same height near the ceiling,
The downward air purifying device sucks and cleans the air that is blown to the ceiling surface by the upward air cleaning device and flows along the ceiling surface, and blows out downward in the room,
A clean room characterized by forming a circulation path in which air is circulated up and down in the room by the upward air cleaning device and the downward air cleaning device. The clean room according to claim 1 , further comprising a lateral air cleaning device that sucks and cleans air from the side and blows it out from the opposite side. The clean room according to claim 1 or 2 , wherein a heat exchanger for air-conditioning the blown air by heat exchange is incorporated in the air cleaning device. The clean room according to any one of claims 1 to 3 , wherein the air cleaning device is capable of adjusting a blow-out speed of a blow-out port. The clean room according to any one of claims 1 to 4 , wherein the upward air cleaning device and the downward air cleaning device are separated by a predetermined distance or more in the horizontal direction. The clean room according to any one of claims 1 to 5 , wherein the downward air cleaning device is provided with a partition portion that partitions a space to be supplied with blown air. The clean room according to any one of claims 1 to 6 , wherein the upward air cleaning device is provided with a partition portion that partitions a space that is a target of air suction. The clean room according to any one of claims 1 to 7 , wherein some of the air cleaning devices are air blowers.

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