JP2004071470A - 大気圧プラズマイオン化源質量分析装置 - Google Patents

大気圧プラズマイオン化源質量分析装置 Download PDF

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Publication number
JP2004071470A
JP2004071470A JP2002231887A JP2002231887A JP2004071470A JP 2004071470 A JP2004071470 A JP 2004071470A JP 2002231887 A JP2002231887 A JP 2002231887A JP 2002231887 A JP2002231887 A JP 2002231887A JP 2004071470 A JP2004071470 A JP 2004071470A
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Japan
Prior art keywords
side plate
electrode
ion
shaped electrode
lens system
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JP2002231887A
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JP2004071470A5 (enExample
Inventor
Naoki Sugiyama
杉山　尚樹
Atsushi Kitamoto
北本　淳
Kenichi Sakata
阪田　健一
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Yokogawa Analytical Systems Inc
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Yokogawa Analytical Systems Inc
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Publication of JP2004071470A5 publication Critical patent/JP2004071470A5/ja
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JP2002231887A 2002-08-08 2002-08-08 大気圧プラズマイオン化源質量分析装置 Pending JP2004071470A (ja)

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7143058B2 (en) * 2001-07-30 2006-11-28 Fujitsu Limited Notifying program and detailed statement display method
JP2009266656A (ja) * 2008-04-25 2009-11-12 Agilent Technol Inc プラズマイオン源質量分析装置
US20120223244A1 (en) * 2011-03-04 2012-09-06 Perkinelmer Health Sciences, Inc. Electrostatic lenses and systems including the same
WO2012170170A1 (en) * 2011-06-08 2012-12-13 Mks Instruments, Inc. Mass spectrometry for gas analysis in which both a charged particle source and a charged particle analyzer are offset from an axis of a deflector lens, resulting in reduced baseline signal offsets
US20120312984A1 (en) * 2011-06-08 2012-12-13 Mks Instruments, Inc. Mass Spectrometry for Gas Analysis with a One-Stage Charged Particle Deflector Lens Between a Charged Particle Source and a Charged Particle Analyzer Both Offset from a Central Axis of the Deflector Lens
US20120313004A1 (en) * 2011-06-08 2012-12-13 Mks Instruments, Inc. Mass Spectrometry for a Gas Analysis with a Two-Stage Charged Particle Deflector Lens Between a Charged Particle Source and a Charged Particle Analyzer both Offset from a Central Axis of the Deflector Lens
WO2013027551A1 (ja) * 2011-08-25 2013-02-28 株式会社日立製作所 自動クリーニング機能付き質量分析装置
CN104882351A (zh) * 2015-05-23 2015-09-02 浙江大学 基于常压等离子体的多模式离子源工作装置及应用
JPWO2014038194A1 (ja) * 2012-09-04 2016-08-08 アトナープ株式会社 膜交換ユニットおよび膜交換ユニットを有するシステム
JP2017156318A (ja) * 2016-03-04 2017-09-07 株式会社日立ハイテクノロジーズ イオン移動度分離部を備える分析装置
CN108152358A (zh) * 2017-12-30 2018-06-12 杭州谱育科技发展有限公司 等离子体-质谱分析系统及其工作方法
CN113078041A (zh) * 2021-04-22 2021-07-06 北京衡昇仪器有限公司 双90度偏转四级杆等离子体质谱仪
CN114944322A (zh) * 2022-06-21 2022-08-26 广州禾信仪器股份有限公司 离子透镜装置和质谱仪
WO2023101485A1 (ko) * 2021-12-02 2023-06-08 영인에이스 주식회사 질량 분석기
CN117147670A (zh) * 2023-10-26 2023-12-01 广州源古纪科技有限公司 一种VOCs检测方法、系统及设备

Cited By (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7143058B2 (en) * 2001-07-30 2006-11-28 Fujitsu Limited Notifying program and detailed statement display method
JP2009266656A (ja) * 2008-04-25 2009-11-12 Agilent Technol Inc プラズマイオン源質量分析装置
US7977649B2 (en) 2008-04-25 2011-07-12 Agilent Technologies, Inc. Plasma ion source mass spectrometer
CN103858201A (zh) * 2011-03-04 2014-06-11 珀金埃尔默健康科学股份有限公司 静电透镜及包括该静电透镜的系统
US20120223244A1 (en) * 2011-03-04 2012-09-06 Perkinelmer Health Sciences, Inc. Electrostatic lenses and systems including the same
WO2012122036A2 (en) 2011-03-04 2012-09-13 Perkinelmer Health Sciences, Inc. Electrostatic lenses and systems including the same
EP2681755A4 (en) * 2011-03-04 2015-04-29 Perkinelmer Health Sci Inc ELECTROSTATIC LENSES AND SYSTEMS FOR THIS
US8921803B2 (en) * 2011-03-04 2014-12-30 Perkinelmer Health Sciences, Inc. Electrostatic lenses and systems including the same
WO2012170168A3 (en) * 2011-06-08 2013-03-28 Mks Instruments, Inc. Mass spectrometry for gas analysis with a one-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens
JP2014516200A (ja) * 2011-06-08 2014-07-07 エムケイエス インストゥルメンツ， インコーポレイテッド 偏向レンズの中心軸から両方ともオフセットされた荷電粒子源及び荷電粒子分析器間に２ステージ荷電粒子偏向レンズを備えたガス分析用の質量分析
KR101887169B1 (ko) * 2011-06-08 2018-09-10 엠케이에스 인스트루먼츠, 인코포레이티드 편향기 렌즈의 중심 축으로부터 둘 모두 오프셋된 하전 입자 소스와 하전 입자 분석기 사이의 2-단 하전 입자 편향기 렌즈에 의한 가스 분석을 위한 질량 분석법
WO2012170169A3 (en) * 2011-06-08 2013-03-28 Mks Instruments, Inc. Mass spectrometry for a gas analysis with a two-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens
US8450681B2 (en) 2011-06-08 2013-05-28 Mks Instruments, Inc. Mass spectrometry for gas analysis in which both a charged particle source and a charged particle analyzer are offset from an axis of a deflector lens, resulting in reduced baseline signal offsets
KR20140051217A (ko) * 2011-06-08 2014-04-30 엠케이에스 인스트루먼츠, 인코포레이티드 편향기 렌즈의 중심 축으로부터 둘 모두 오프셋된 하전 입자 소스와 하전 입자 분석기 사이의 2-단 하전 입자 편향기 렌즈에 의한 가스 분석을 위한 질량 분석법
WO2012170170A1 (en) * 2011-06-08 2012-12-13 Mks Instruments, Inc. Mass spectrometry for gas analysis in which both a charged particle source and a charged particle analyzer are offset from an axis of a deflector lens, resulting in reduced baseline signal offsets
US20120312984A1 (en) * 2011-06-08 2012-12-13 Mks Instruments, Inc. Mass Spectrometry for Gas Analysis with a One-Stage Charged Particle Deflector Lens Between a Charged Particle Source and a Charged Particle Analyzer Both Offset from a Central Axis of the Deflector Lens
US8796638B2 (en) 2011-06-08 2014-08-05 Mks Instruments, Inc. Mass spectrometry for a gas analysis with a two-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens
US8796620B2 (en) 2011-06-08 2014-08-05 Mks Instruments, Inc. Mass spectrometry for gas analysis with a one-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens
US20120313004A1 (en) * 2011-06-08 2012-12-13 Mks Instruments, Inc. Mass Spectrometry for a Gas Analysis with a Two-Stage Charged Particle Deflector Lens Between a Charged Particle Source and a Charged Particle Analyzer both Offset from a Central Axis of the Deflector Lens
JP2013045719A (ja) * 2011-08-25 2013-03-04 Hitachi Ltd 自動クリーニング機能付き質量分析装置
WO2013027551A1 (ja) * 2011-08-25 2013-02-28 株式会社日立製作所 自動クリーニング機能付き質量分析装置
JPWO2014038194A1 (ja) * 2012-09-04 2016-08-08 アトナープ株式会社 膜交換ユニットおよび膜交換ユニットを有するシステム
CN104882351A (zh) * 2015-05-23 2015-09-02 浙江大学 基于常压等离子体的多模式离子源工作装置及应用
GB2562934B (en) * 2016-03-04 2021-09-15 Hitachi High Tech Corp Analysis device provided with ion mobility separation part
JP2017156318A (ja) * 2016-03-04 2017-09-07 株式会社日立ハイテクノロジーズ イオン移動度分離部を備える分析装置
CN108603860A (zh) * 2016-03-04 2018-09-28 株式会社日立高新技术 具备离子迁移率分离部的分析装置
GB2562934A (en) * 2016-03-04 2018-11-28 Hitachi High Tech Corp Analysis device provided with ion mobility separation part
US10684256B2 (en) 2016-03-04 2020-06-16 Hitachi High-Tech Corporation Analysis device provided with ion mobility separation part
CN108603860B (zh) * 2016-03-04 2020-12-15 株式会社日立高新技术 具备离子迁移率分离部的分析装置
WO2017150505A1 (ja) * 2016-03-04 2017-09-08 株式会社日立ハイテクノロジーズ イオン移動度分離部を備える分析装置
CN108152358B (zh) * 2017-12-30 2024-02-02 杭州谱育科技发展有限公司 等离子体-质谱分析系统及其工作方法
CN108152358A (zh) * 2017-12-30 2018-06-12 杭州谱育科技发展有限公司 等离子体-质谱分析系统及其工作方法
CN113078041A (zh) * 2021-04-22 2021-07-06 北京衡昇仪器有限公司 双90度偏转四级杆等离子体质谱仪
WO2023101485A1 (ko) * 2021-12-02 2023-06-08 영인에이스 주식회사 질량 분석기
KR20230083018A (ko) * 2021-12-02 2023-06-09 영인에이스 주식회사 질량 분석기
KR102614315B1 (ko) * 2021-12-02 2023-12-19 영인에이스 주식회사 질량 분석기
JP2024544370A (ja) * 2021-12-02 2024-11-29 ヨンインエース カンパニー リミテッド 質量分析器
EP4443153A4 (en) * 2021-12-02 2025-10-15 Young In Ace Co Ltd MASS SPECTROMETER
CN114944322A (zh) * 2022-06-21 2022-08-26 广州禾信仪器股份有限公司 离子透镜装置和质谱仪
CN117147670A (zh) * 2023-10-26 2023-12-01 广州源古纪科技有限公司 一种VOCs检测方法、系统及设备
CN117147670B (zh) * 2023-10-26 2023-12-29 广州源古纪科技有限公司 一种VOCs检测方法、系统及设备

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