JP2004062184A - Method and device for manufacturing filter, and method of manufacturing display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing a filter, which make it easy to maintain an ink jet head and to measure the discharge quantity of ink and make it easy to attach and detach a substrate when discharging the ink from the ink jet head to manufacture the filter. <P>SOLUTION: A filter manufacturing device 10 which manufactures the filter by applying the ink on a substrate 48 is provided with a base 12, a first movement means 14 which is set on the base 12 and holds the substrate 48 and moves it in a first direction to position it, an ink jet head 20 which discharges the ink to the substrate held on the first movement means 14, and a second movement means 16 which is set on the base 12 and moves the ink jet head 20 in a second direction orthogonal to the first direction to position it, and an attachment/detachment position of the substrate 48 on the first movement means 14 on the base 12 is different from a set position of the second movement means 16 on the base 12. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a filter manufacturing apparatus and a filter manufacturing method for manufacturing a filter such as a color filter applied to a display device such as a liquid crystal display device.
[0002]
[Prior art]
With the development of electronic devices such as computers and portable information devices, the use of liquid crystal display devices, especially color liquid crystal display devices, is increasing. This type of liquid crystal display device uses a color filter to color a display image.
[0003]
The color filter has a substrate, and may be formed by landing R (red), G (green), and B (blue) inks on the substrate in a predetermined pattern. As a method of landing ink on such a substrate, an ink jet method is employed.
[0004]
When the ink jet system is adopted, a predetermined amount of ink is ejected from a head of the ink jet to a filter and landed thereon. For example, as disclosed in Japanese Patent Application Laid-Open No. Mounted on stage. The XY stage moves the substrate in the X direction and the Y direction so that the ink from the inkjet head can land on a predetermined position on the substrate.
[0005]
[Problems to be solved by the invention]
By the way, in order to stabilize the ejection operation of the ink jet head, it is necessary to clean the head and measure the ejection amount of the ink during the operation of landing the ink.
[0006]
However, in the case where a conventional XY stage mounted with such a substrate and movable with respect to the orthogonal coordinates in the X and Y directions is used, the head itself cannot be moved and is fixed. For this reason, when cleaning the head or measuring the amount of ink discharge during the ink discharge and landing operations, it is necessary to temporarily stop the discharge of the ink from the head and stop the production of the color filter.
[0007]
In addition, when the ink is landed on the substrate and the substrate is removed and the next substrate is set on the XY stage, if the work of removing and replacing the substrate cannot be performed smoothly, the filter manufacturing efficiency may be increased. Can not.
[0008]
Therefore, while solving the above-described problems of the present invention, while manufacturing a filter by discharging ink by an ink jet head, maintenance of the ink jet head and measurement of the ink discharge amount can be easily performed, and An object of the present invention is to provide a filter manufacturing apparatus and a filter manufacturing method capable of smoothly and easily performing a mounting and removing operation of a substrate.
[0009]
[Means for Solving the Problems]
According to the present invention, there is provided a filter manufacturing method according to the first aspect of the present invention, wherein a filter element on a substrate partitioned by a black matrix is formed by ink ejected from an inkjet head. A filling step of discharging ink on the substrate, a drying step of drying the ink, and a protective film forming step of forming a protective film on the filter element formed by drying the ink; A filter manufacturing method characterized by repeating a filling step and a drying step so that the element has a predetermined film thickness.
[0010]
In the filter manufacturing apparatus according to the second aspect of the present invention, in the drying step, the substrate is heated and dried at about 70 ° C.
[0011]
In the filter manufacturing apparatus according to the third aspect of the present invention, the protective film forming step is a method such as a spin coating method, a roll coating method, or a ripping method.
[0012]
In the filter manufacturing apparatus according to the fourth aspect of the present invention, in the filter manufacturing apparatus for forming a filter element on a substrate separated by a black matrix by ink ejected from an inkjet head, the filter element may be formed on the substrate separated by a black matrix. An inkjet head device for discharging ink, a drying unit for drying the ink, a protective film forming unit for forming a protective film on the filter element formed by drying the ink, the inkjet head device, and the drying unit. And a moving means for moving the substrate, wherein the substrate is moved between the inkjet head device, the drying means, and the moving means such that the filter element has a predetermined film thickness. manufacturing device.
[0013]
According to a fifth aspect of the present invention, in the method for manufacturing a display device including a filter in which filter elements on a substrate separated by a black matrix are formed by ink ejected from an inkjet head, the filter manufacturing apparatus according to the fifth aspect of the present invention includes: A filling step of discharging ink on the substrate, a drying step of drying ink, and a protective film forming step of forming a protective film on the filter element formed by drying ink. The filling step and the drying step are repeated so that the filter element has a predetermined thickness.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
[0015]
FIG. 1 shows a preferred embodiment of the filter manufacturing apparatus of the present invention, and FIG. 2 shows the filter manufacturing apparatus of FIG. 1 in a simplified manner.
[0016]
As shown in FIG. 1 and FIG. 2, the filter manufacturing apparatus 10 includes a base 12, a first moving unit 14, a second moving unit 16, an electronic balance (weight measuring unit) 18, an inkjet head 20, a capping unit. 22, a cleaning unit (cleaning means) 24, a controller 26 and the like.
[0017]
The base (also referred to as a gantry) 12 includes a safety cover 28 that houses the above-described first moving means 14, second moving means 16, electronic balance 18, capping unit 22, cleaning unit 24, and the like. The door of a predetermined portion of the safety cover 28 can be opened.
[0018]
The controller 26 includes a monitor 30, a keyboard 32, a computer 34, and the like.
[0019]
On the base 12, a first moving means 14, an electronic balance 18, a capping unit 22, a cleaning unit 24, and a second moving means 16 are set. A robot 74 and a substrate accommodation unit 70 are arranged around the base 12.
[0020]
The first moving means 14 is preferably set directly on the base 12, and the first moving means 14 is positioned along the Y-axis direction.
[0021]
On the other hand, the second moving means 16 is mounted upright on the base 12 using the columns 16A, 16A, and the second moving means 16 is mounted on the rear portion 12A of the base 12. The X-axis direction of the second moving unit 16 is a direction orthogonal to the Y-axis direction of the first moving unit 14. The Y axis is an axis along the direction of the front part 12B and the rear part 12A of the base 12. On the other hand, the X-axis is an axis along the left-right direction of the base 12, and each is horizontal.
[0022]
First, the first moving means 14 and the second moving means 16 shown in FIGS. 1 and 2 will be described with reference to FIG.
[0023]
FIG. 3 shows the first moving unit 14, the second moving unit 16, the inkjet head 20, and the like. As described above, the columns 16A, 16A of the second moving means 16 are located on the rear portion 12A side of the base 12.
[0024]
The first moving unit 14 in FIG. 3 has a guide rail 40, and the first moving unit 14 can employ, for example, a linear motor. The slider 42 of the first moving means 14 of the linear motor type can be positioned by moving in the Y-axis direction along the guide rail 40.
[0025]
The slider 42 includes a motor 44 for the θ axis. The motor 44 is, for example, a direct drive motor, and the rotor of the motor 44 is fixed to a table 46. Thus, when the motor 44 is energized, the rotor and the table 46 can rotate along the θ direction to index the rotation of the table 46.
[0026]
The table 46 of FIG. 3 positions and holds the substrate 48. The table 46 has a suction holding unit 50, and by operating the suction holding unit 50, the substrate 48 can be sucked and held on the table 46 through the hole 46 </ b> A of the table 46. The substrate 48 can be accurately positioned on the table 46 by the positioning pins 46B of the table 46.
[0027]
The table 46 has a discard area 52 for the ink jet head 20 to discard or test eject ink. The discard area 52 is provided on the rear end side of the table 46 in parallel with the X-axis direction.
[0028]
Next, the second moving means 16 in FIG. 3 has a column 16B fixed to the columns 16A, 16A, and the column 16B has a second moving means 16 of a linear motor type. The slider 60 can be positioned by moving in the X-axis direction along the guide rail 62A, and the slider 60 includes the inkjet head 20 as an ink discharge unit.
[0029]
The ink jet head 20 has motors 62, 64, 66, 68 as swing positioning means. By operating the motor 62, the ink jet head 20 can be moved up and down along the Z axis to be positioned. The Z axis is a direction (vertical direction) orthogonal to the X axis and the Y axis.
[0030]
When the motor 64 is actuated, the ink jet head 20 can swing and position along the β direction. When the motor 66 is operated, the ink-jet head 20 can be positioned by swinging in the γ direction. When the motor 68 is operated, the ink-jet head 20 can be positioned by swinging in the α direction.
[0031]
As described above, the ink jet head 20 shown in FIG. 3 can be positioned by linearly moving in the Z-axis direction and can be positioned by swinging along α, β, and γ in the slider 60. The position or orientation of the ejection surface 20P can be accurately controlled with respect to the substrate 48 on the table 46 side.
[0032]
Next, with reference to the plan views of FIGS. 2 and 4, a substrate loading / unloading operation (load and load) operation between the substrate loading / unloading operation position P of the first moving unit 14 and the substrate accommodating unit 70 accommodating the substrate. Will be described.
[0033]
The substrate 74 is loaded and loaded (also referred to as a supply / discharge operation) by a robot 74 serving as a substrate supply / discharge unit. This robot 74 is located, for example, in front of the base 12 and in front of the substrate housing means 70, as shown in FIGS.
[0034]
The substrate accommodating means 70 accommodates a plurality of substrates 48 as shown in FIG. 2, and exchanges the substrate 48 between the substrate attaching / detaching operation position P of the first moving means 14 and the substrate accommodating means 70. I have.
[0035]
The substrate attaching / detaching operation position P is located ahead of the second moving means 16 with respect to the base, and the attaching / detaching operation of the substrate 48 at the substrate attaching / detaching operation position P is not hindered by the presence of the second moving means 16 and the ink jet head. In addition, the robot 74 can perform the operation freely and efficiently. That is, the second moving unit 16 and the inkjet head 20 are located above the first moving unit 14, and more preferably, the second moving unit 16 is located at the rear portion 12A of the base 12, and This is because the substrate mounting / dismounting operation position P is near the table 46 of the first moving means 14, and is more preferably located at the front portion 12B of the base 12.
[0036]
In this manner, the substrate attaching / detaching operation position P and the second moving unit 16 can be separated from each other.
[0037]
The structure of the robot 74 includes, for example, as shown in FIG. 2, a base 74A, a central shaft portion CL, a first arm 74B, a second arm 74C, and the second arm 74C has, for example, a vacuum suction pad 74D. ing. The substrate 48 is sucked by the vacuum suction pad 74D of the robot 74, the first arm 74B and the second arm 74C are rotated along the center axis CL, and the center axis CL is moved up and down in the Z-axis direction. Thus, the exchange of the substrate 48 between the substrate accommodating means 70 and the substrate attaching / detaching operation position P can be smoothly, efficiently, and easily performed.
[0038]
FIG. 5 shows an example of electrical connection between the computer 34 shown in FIG. 2, the control panel 80 on the base 12 side, various motors, and the like.
[0039]
5, the computer 34 is connected to a control panel 80 on the base 12 side. The control panel 80 is arranged in the base 12, and the first moving means 14 (linear motor), the second moving means 16 (linear motor), and the θ-axis motor 44 are connected to the control panel 80. Have been. Further, motors 62, 64, 66, 68 shown in FIG. 3 related to the ink jet head 20 are connected to the control panel 80. The first moving means 14 and the θ-axis motor 44 operate in response to a command from the control panel 80 to move the table 46 on which the substrate 48 for manufacturing a color filter is mounted in the Y-axis direction and index in the θ-direction. .
[0040]
The four motors 62, 64, 66, 68 of the second moving means 16 operate according to a command from the control panel 80 to control the attitude of the inkjet head 20 with respect to the substrate 48 on the table 46. I have.
[0041]
The operation of the robot 74 as the substrate discharging means shown in FIG. 4 can be controlled by a command from the computer 34 as shown in FIG. 5, for example.
[0042]
Next, an example of the structure of the inkjet head 20 will be described with reference to FIGS.
[0043]
The inkjet head 20 is, for example, a head using a piezo element (piezoelectric element), and a plurality of nozzles 91 are formed on an ink ejection surface 20P of the main body 90 as shown in FIG. A piezo element 92 is provided for each of the nozzles 91.
[0044]
As shown in FIG. 6B, the piezo elements 92 are arranged corresponding to the nozzles 91 and the ink chambers 93. Then, by applying an applied voltage Vh to the piezo element 92 as shown in FIG. 6C, the piezo element 92 is pointed by an arrow as shown in FIGS. 6D, 6F and 6E. By expanding and contracting in the Q direction, the ink is pressurized and a predetermined amount of ink droplet 99 is ejected from the nozzle 91.
[0045]
The ink jet head 20 in FIG. 5 is connected to an ink supply unit 97, and ink is supplied from the ink supply unit 97 to the ink chamber 93 in FIG. A thermometer 96 and a viscometer 95 are connected to the ink supply unit 97. The thermometer 96 and the viscometer 95 measure the temperature and viscosity of the ink contained in the ink supply unit 97, and supply them to the ink management controller 98 as feedback signals S1 and S2 of the state of the ink.
[0046]
The ink management controller 98 gives the temperature and viscosity of the ink to the computer 34 as control information based on the feedback signals S1 and S2 of the ink state. The computer 34 sends a piezo element drive signal S3 to the piezo element drive circuit 101 through the control panel 80. The piezo element driving circuit 101 supplies the piezo element 92 of FIG. 6 with an applied voltage Vh having a magnitude corresponding to the temperature and viscosity of the ink at that time based on the piezo element driving signal S3, thereby obtaining the ink. A predetermined amount of ink droplet 99 can be ejected according to the temperature and the viscosity.
[0047]
Next, an example of manufacturing a color filter by supplying ink to a substrate will be described with reference to FIGS.
[0048]
The substrate 48 shown in FIG. 7 is a transparent substrate that has high mechanical transparency and high light transmittance. As the substrate 48, for example, a transparent glass substrate, acrylic glass, a plastic substrate, a plastic film, and a surface-treated product thereof can be used.
[0049]
For example, as shown in FIG. 8, a plurality of color filter regions 105 are formed in a matrix on a rectangular substrate 48 from the viewpoint of increasing productivity. These color filter regions 105 can be used as color filters suitable for a liquid crystal display device by cutting the glass 48 later.
[0050]
In the color filter region 105, for example, as shown in FIG. 8, R ink, G ink and B ink are formed and arranged in a predetermined pattern. As the formation pattern, as shown in FIG. 6, there are a mosaic type, a delta type, a square type and the like, in addition to a conventionally known stripe type.
[0051]
FIG. 7 shows an example of a process for forming the color filter region 105 of FIG.
[0052]
In FIG. 7A, a black matrix 110 is formed on one surface of a transparent substrate 48. A resin having no light transmission property (preferably black) is applied to a predetermined thickness (for example, about 2 μm) on a substrate 48 serving as a base of the color filter by a method such as spin coating, and then subjected to photolithography. The black matrix 110 is provided in the form of a matrix by the method described above. The smallest display element surrounded by the lattice of the black matrix 110 is called a filter element, and is, for example, a window having a width of about 30 μm in the X-axis direction and a length of about 100 μm in the Y-axis direction.
[0053]
After the formation of the black matrix 110, the resin on the substrate 48 is baked by, for example, applying heat with a heater.
[0054]
As shown in FIG. 7B, the ink droplet 99 lands on the filter element 112. The amount of the ink droplet 99 is a sufficient amount in consideration of a decrease in the volume of the ink in the heating step.
[0055]
In the heating step in FIG. 7C, when all the filter elements 112 on the color filter are filled with the ink droplets 99, a heating process is performed using a heater. The substrate 48 is heated to a predetermined temperature (for example, about 70 ° C.). As the solvent in the ink evaporates, the volume of the ink decreases. In the case where the volume decrease is remarkable, the ink discharging step and the heating step are repeated until a sufficient ink film thickness as a color filter is obtained. By this processing, the solvent of the ink evaporates, and finally, only the solid content of the ink remains to form a film.
[0056]
In the protective film forming step of FIG. 7D, heating is performed at a predetermined temperature for a predetermined time in order to completely dry the ink droplet 99. When the drying is completed, a protective film 120 is formed to protect the substrate 48 of the color filter on which the ink film is formed and to flatten the filter surface. For forming the protective film 120, for example, a method such as a spin coating method, a roll coating method, and a ripping method can be adopted.
[0057]
In the transparent electrode forming step of FIG. 7E, the transparent electrode 130 is formed over the entire surface of the protective film 120 using a recipe such as a sputtering method or a vacuum suction method.
[0058]
In the patterning step of FIG. 7F, the transparent electrode 130 is further patterned into a pixel electrode corresponding to the opening of the filter element 112.
[0059]
This patterning is unnecessary when a TFT (Thin Film Transistor) or the like is used for driving the liquid crystal display panel.
[0060]
Next, returning to FIG. 2, the electronic balance 18, the cleaning unit 24, the capping 22, and the alignment camera 23 will be briefly described.
[0061]
The electronic balance 18 measures, for example, the weight of one droplet of the ink droplet 99 (see FIG. 6) discharged from the nozzle of the ink jet head 20. Drop 99 is received. The electronic balance 18 can accurately measure the weight of one ink drop 99 by dividing the weight of the 2000 ink drops 99 by the number of 2000. Based on the measured amount of the ink droplet 99, the amount of the ink droplet 99 ejected from the inkjet head 20 is optimally controlled.
[0062]
The cleaning unit 24 can clean the nozzles 91 and the like of the inkjet head 20 shown in FIG. The capping 22 covers the ink discharge surface 20P of the ink jet head 20 in FIG. 3 during standby for manufacturing no filter in order to prevent the ink discharge surface 20P from drying.
[0063]
The inkjet head 20 can be selectively positioned above the electronic balance 18, the cleaning unit 24 or the capping unit 22 by moving the inkjet head 20 in the X-axis direction by the second moving means 16. That is, even during the filter manufacturing operation, the weight of the ink droplet can be measured by moving the inkjet head 20 to, for example, the electronic balance 18 side. If the inkjet head 20 is moved onto the cleaning unit 24, the inkjet head 20 can be cleaned. If the inkjet head 20 is moved above the capping unit 22, a cap is attached to the ink ejection surface 20P of the inkjet head 20 to prevent drying.
[0064]
The alignment camera 23 detects the position of the substrate 48 by detecting an alignment mark formed on the substrate 48 in advance.
[0065]
Next, an operation example of the illustrated filter manufacturing apparatus will be described with reference to FIG.
[0066]
In step ST1 of FIG. 9, the vacuum suction pad 74D of the robot 74 of FIG. That is, the substrate 48 is supplied onto the table 46 of the first moving unit 14. The board 48 is positioned with respect to the table 46 by being abutted against the positioning pins 46B of FIG. In addition, the motor 44 is operated to set the end faces of the substrate 48 so as to be parallel to the Y-axis direction. The above is the positioning of the substrate and the alignment of the substrate in steps ST2 and ST3 in FIG.
[0067]
Then, the computer 34 calculates the start position of the operation of discharging ink in step ST4 in FIG. 8 based on information from the alignment camera 23 and information from the observation camera 27 in FIG.
[0068]
On the other hand, in step ST5 of FIG. 9, the inkjet head 20 moves along the X-axis direction and is positioned above the electronic balance 18. Then, as shown in steps ST6, ST7, and ST8 in FIG. 9, the parameters are loaded, the designated nozzle is selected, and the counter of the electronic balance 18 is cleared. Then, in step ST9, the designated number of drops (the number of designated ink drops) is ejected. Thus, the electronic balance 18 of FIG. 2 measures the weight of, for example, 2,000 ink drops, and calculates the weight per ink drop. When such weight calculation of one ink droplet is completed for all nozzles of the inkjet head 20 to be measured through steps ST10, ST11, and ST12 in FIG. 9, the drawing start position in FIG. Is moved along the X-axis direction, the substrate 48 is appropriately moved and positioned in the Y-axis direction by the first moving means 14, and the inkjet head 20 is moved by the second moving means 16. It is moved and positioned appropriately in the axial direction.
[0069]
Thus, in steps ST14 and ST15, a plurality of color filter regions 105 are formed, for example, in a stripe pattern on the substrate as shown in FIG.
[0070]
In the filter manufacturing apparatus 10 shown in FIGS. 1 to 3, the ink jet head 20 preferably discharges one of R (red), G (green), and B (blue). In a state where the substrate 48 is moved in the constant speed region, the inkjet head 20 continuously discharges, for example, R (red) ink onto the substrate 48 above the discharge target position.
[0071]
After forming, for example, R (red) ink in all the color filter areas 105 as shown in FIG. 6, the robot 74 of FIG. Move and fit. The accommodated substrate 48 is transferred to the next filter manufacturing apparatus to form G (green) and B (blue) in the color filter region.
[0072]
As described above, the inkjet head 20 can be independently moved and positioned in the X-axis direction by the second moving means 16, so that the inkjet head 20 can be cleaned and maintained by the cleaning unit 24 in FIG. The operation of attaching a cap by the capping unit 22 and measuring the weight of ink droplets by the electronic balance 18 can be appropriately performed during the operation of forming a color filter. That is, the inkjet head 20 can be independently sent in the X-axis direction above the cleaning unit 24, the capping unit 22, or the electronic balance 18 side. Thus, maintenance of the ink jet head 20, measurement of the weight of ink droplets, and the like can be easily, smoothly, and efficiently performed without stopping the operation of manufacturing the color filter. Further, since the substrate attaching / detaching operation position P is located on the front side of the inkjet head 20 and the second moving unit 16 and the second moving unit 16 is located above and separated from the first moving unit 14, the attaching / detaching of the substrate 48 is performed. The work can be easily performed without being disturbed by the second moving means 16 and the inkjet head 20. Therefore, the replacement of the substrate 48 can be performed smoothly, easily, and efficiently without being restricted by the position of the inkjet head 20 or the like.
[0073]
The present invention is not limited to the above embodiment, and various changes can be made without departing from the scope of the claims.
[0074]
The filter manufacturing apparatus of the present invention is not limited to manufacturing a color filter for a liquid crystal display device, for example, and can be applied to, for example, an EL (electroluminescence) display element. An EL display element has a configuration in which a thin film containing a fluorescent inorganic or organic compound is sandwiched between a cathode and an anode, and electrons and holes are injected into the thin film and recombined to form excitons. (Exciton), and emits light by utilizing light emission (fluorescence / phosphorescence) when the exciton is deactivated. Of the fluorescent materials used in such EL display elements, a material that emits red, green, and blue luminescent colors is inkjet-patterned onto an element substrate such as a TFT using the manufacturing apparatus of the present invention, so that self-luminous full-color light is emitted. An EL display element can be manufactured. The range of the filter in the present invention includes the substrate of such an EL display element.
[0075]
The filter manufacturing apparatus of the present invention includes a step of performing a surface treatment such as plasma, UV treatment, and coupling on the surface of a resin resist, a pixel electrode, and a layer serving as a lower layer so that an EL material is easily attached. There may be.
[0076]
The EL display element manufactured using the color filter manufacturing apparatus of the present invention can be applied to a low-information field such as a segment display and a simultaneous image emission still image display, for example, a picture, a character, and a label, or a dot, line, or line. It can also be used as a light source having a planar shape. Further, by using an active element such as a TFT for driving, such as a passively driven display element, a full-color display element having high luminance and excellent responsiveness can be obtained.
[0077]
Furthermore, if a metal material or an insulating material is provided to the inkjet patterning technology of the present apparatus, direct fine patterning of a metal wiring, an insulating film, and the like can be performed, and the device can be applied to the production of a novel high-performance device.
[0078]
The ink jet head 20 of the illustrated filter manufacturing apparatus has a R.D. G. FIG. B can discharge one type of ink, but it is of course possible to discharge two or three types of ink at the same time.
[0079]
Further, the first moving means 14 and the second moving means 16 of the filter manufacturing apparatus 10 use linear motors, but the present invention is not limited to this, and other types of motors and actuators can be used.
[Brief description of the drawings]
FIG. 1 is a diagram showing in detail a preferred embodiment of a filter manufacturing apparatus of the present invention.
FIG. 2 is a diagram showing the filter manufacturing apparatus of FIG. 1 more clearly.
FIG. 3 is a perspective view showing a first moving unit and a second moving unit, an inkjet head, a substrate, and the like of the filter manufacturing apparatus of FIG. 2;
FIG. 4 is a plan view showing a first moving unit, a second moving unit, a robot, a substrate housing unit, and the like.
FIG. 5 is a diagram showing a computer, a control panel, various control objects, and the like.
FIG. 6 is a diagram illustrating a structure of an inkjet head.
FIG. 7 illustrates an example of manufacturing a color filter using a substrate.
FIG. 8 is a diagram showing a substrate and a part of a color filter region on the substrate.
FIG. 9 is a diagram showing an operation example of the filter manufacturing apparatus.
[Explanation of symbols]
14 First moving means 16 Second moving means 20 Ink jet head 46 Table 48 Substrate 74 Robot (substrate feeding / discharging means)

Claims (5)

In a filter manufacturing method for forming a filter element on a substrate separated by a black matrix by ink ejected from an inkjet head,
A filling step of discharging ink on the substrate separated by the black matrix,
A drying step of drying the ink,
A protective film forming step of forming a protective film on the filter element formed by drying the ink,
A filter manufacturing method, wherein the filling step and the drying step are repeated so that the filter element has a predetermined film thickness. In the drying step, the substrate is dried by heating at about 70 ° C. The method for producing a filter, wherein the protective film forming step is a method such as a spin coating method, a roll coating method, or a ripping method. In a filter manufacturing apparatus that forms a filter element on a substrate separated by a black matrix by ink ejected from an inkjet head,
An inkjet head device for discharging ink onto the substrate separated by the black matrix,
Drying means for drying the ink,
Protective film forming means for forming a protective film on the filter element formed by drying the ink,
The inkjet head device, the drying unit, and a moving unit that moves the substrate, the inkjet head device, the drying unit, and the moving unit so that the filter element has a predetermined thickness. An apparatus for producing a filter, wherein the apparatus is moved between means. In a method of manufacturing a display device including a filter that forms a filter element on a substrate separated by a black matrix by ink ejected from an inkjet head,
A filling step of discharging ink onto the substrate separated by the black matrix,
A drying step of drying the ink,
A protective film forming step of forming a protective film on the filter element formed by drying the ink,
A method of manufacturing a display device comprising a filter, wherein the filling step and the drying step are repeated so that the filter element has a predetermined thickness.

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