JP2004046247A5 - - Google Patents

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Publication number
JP2004046247A5
JP2004046247A5 JP2003350797A JP2003350797A JP2004046247A5 JP 2004046247 A5 JP2004046247 A5 JP 2004046247A5 JP 2003350797 A JP2003350797 A JP 2003350797A JP 2003350797 A JP2003350797 A JP 2003350797A JP 2004046247 A5 JP2004046247 A5 JP 2004046247A5
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JP
Japan
Prior art keywords
substrate
rubbing
rubbing roller
suction port
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003350797A
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English (en)
Japanese (ja)
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JP3966266B2 (ja
JP2004046247A (ja
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Publication date
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Priority to JP2003350797A priority Critical patent/JP3966266B2/ja
Priority claimed from JP2003350797A external-priority patent/JP3966266B2/ja
Publication of JP2004046247A publication Critical patent/JP2004046247A/ja
Publication of JP2004046247A5 publication Critical patent/JP2004046247A5/ja
Application granted granted Critical
Publication of JP3966266B2 publication Critical patent/JP3966266B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003350797A 1997-01-08 2003-10-09 基板のラビング方法及びラビング装置 Expired - Fee Related JP3966266B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003350797A JP3966266B2 (ja) 1997-01-08 2003-10-09 基板のラビング方法及びラビング装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP157797 1997-01-08
JP2003350797A JP3966266B2 (ja) 1997-01-08 2003-10-09 基板のラビング方法及びラビング装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP189498A Division JP3792384B2 (ja) 1997-01-08 1998-01-07 基板のラビング方法、液晶電気光学素子の製造方法及び基板のラビング装置

Publications (3)

Publication Number Publication Date
JP2004046247A JP2004046247A (ja) 2004-02-12
JP2004046247A5 true JP2004046247A5 (enExample) 2005-07-07
JP3966266B2 JP3966266B2 (ja) 2007-08-29

Family

ID=31716992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003350797A Expired - Fee Related JP3966266B2 (ja) 1997-01-08 2003-10-09 基板のラビング方法及びラビング装置

Country Status (1)

Country Link
JP (1) JP3966266B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107953403A (zh) * 2017-11-27 2018-04-24 西北工业大学（张家港）智能装备技术产业化研究院有限公司 基板的上切割治具

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