JP2004046247A5 - - Google Patents
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- Publication number
- JP2004046247A5 JP2004046247A5 JP2003350797A JP2003350797A JP2004046247A5 JP 2004046247 A5 JP2004046247 A5 JP 2004046247A5 JP 2003350797 A JP2003350797 A JP 2003350797A JP 2003350797 A JP2003350797 A JP 2003350797A JP 2004046247 A5 JP2004046247 A5 JP 2004046247A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- rubbing
- rubbing roller
- suction port
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Claims (3)
前記基板と前記ラビングローラとの接触部に向かって開口した第１吸引口と、前記ラビングローラの周面部に沿って設けられてなる第２吸引口と、を有する吸引手段を用いて、前記基板と前記ラビングローラの少なくとも一方から発生する粉塵を吸引しながらラビング処理を行う工程を有することを特徴とする基板のラビング方法。 In the method for rubbing a substrate, the substrate used for the liquid crystal electro-optical element is rubbed by a rubbing roller that rotates with respect to the substrate.
Using the suction means having a first suction port opened toward the contact portion between the substrate and the rubbing roller, and a second suction port provided along the peripheral surface portion of the rubbing roller, the substrate And a rubbing process while sucking dust generated from at least one of the rubbing rollers.
前記基板と前記ラビングローラとを相対的に動作させて前記基板を前記ラビングローラによって擦るように駆動する駆動手段と、
前記基板と前記ラビング処理部材との少なくとも一方から発生する粉塵を吸引する吸引手段と、を備え、
前記吸引手段は、前記基板と前記ラビングローラとの接触部に向かって開口した第１吸引口と、前記ラビングローラの周面部に沿って形成された第２吸引口とを備えていることを特徴とする基板のラビング装置。 A rubbing roller that rotates relative to the substrate used for the liquid crystal electro-optic element and rubs the substrate;
Driving means for relatively moving the substrate and the rubbing roller to drive the substrate to be rubbed by the rubbing roller;
A suction means for sucking dust generated from at least one of the substrate and the rubbing member,
The suction means includes a first suction port that opens toward a contact portion between the substrate and the rubbing roller, and a second suction port that is formed along a peripheral surface portion of the rubbing roller. A substrate rubbing apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003350797A JP3966266B2 (en) | 1997-01-08 | 2003-10-09 | Substrate rubbing method and rubbing apparatus |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP157797 | 1997-01-08 | ||
| JP2003350797A JP3966266B2 (en) | 1997-01-08 | 2003-10-09 | Substrate rubbing method and rubbing apparatus |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP189498A Division JP3792384B2 (en) | 1997-01-08 | 1998-01-07 | Substrate rubbing method, liquid crystal electro-optic element manufacturing method, and substrate rubbing apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004046247A JP2004046247A (en) | 2004-02-12 |
| JP2004046247A5 true JP2004046247A5 (en) | 2005-07-07 |
| JP3966266B2 JP3966266B2 (en) | 2007-08-29 |
Family
ID=31716992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003350797A Expired - Fee Related JP3966266B2 (en) | 1997-01-08 | 2003-10-09 | Substrate rubbing method and rubbing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3966266B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107953403A (en) * | 2017-11-27 | 2018-04-24 | 西北工业大学（张家港）智能装备技术产业化研究院有限公司 | The upper cutting gauge of substrate |
-
2003
- 2003-10-09 JP JP2003350797A patent/JP3966266B2/en not_active Expired - Fee Related
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