JP2004012510A5 - - Google Patents

Download PDF

Info

Publication number
JP2004012510A5
JP2004012510A5 JP2002161617A JP2002161617A JP2004012510A5 JP 2004012510 A5 JP2004012510 A5 JP 2004012510A5 JP 2002161617 A JP2002161617 A JP 2002161617A JP 2002161617 A JP2002161617 A JP 2002161617A JP 2004012510 A5 JP2004012510 A5 JP 2004012510A5
Authority
JP
Japan
Prior art keywords
group
atom
hydrogen atom
bonded
organic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002161617A
Other languages
English (en)
Japanese (ja)
Other versions
JP4073255B2 (ja
JP2004012510A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2002161617A external-priority patent/JP4073255B2/ja
Priority to JP2002161617A priority Critical patent/JP4073255B2/ja
Priority to KR1020030034881A priority patent/KR100955454B1/ko
Priority to US10/448,041 priority patent/US6939662B2/en
Priority to EP10188667.9A priority patent/EP2278399B1/fr
Priority to EP10188665A priority patent/EP2278397A3/fr
Priority to AT03012142T priority patent/ATE525676T1/de
Priority to EP10188668A priority patent/EP2278400A3/fr
Priority to EP03012142A priority patent/EP1367440B1/fr
Priority to EP10188666A priority patent/EP2278398A3/fr
Publication of JP2004012510A publication Critical patent/JP2004012510A/ja
Publication of JP2004012510A5 publication Critical patent/JP2004012510A5/ja
Publication of JP4073255B2 publication Critical patent/JP4073255B2/ja
Application granted granted Critical
Priority to KR1020090108795A priority patent/KR100947853B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002161617A 2002-05-31 2002-06-03 ポジ型レジスト組成物 Expired - Fee Related JP4073255B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2002161617A JP4073255B2 (ja) 2002-06-03 2002-06-03 ポジ型レジスト組成物
KR1020030034881A KR100955454B1 (ko) 2002-05-31 2003-05-30 포지티브 레지스트 조성물
US10/448,041 US6939662B2 (en) 2002-05-31 2003-05-30 Positive-working resist composition
EP10188668A EP2278400A3 (fr) 2002-05-31 2003-06-02 Composition pour réserve de type positif
EP10188665A EP2278397A3 (fr) 2002-05-31 2003-06-02 Composition pour réserve de type positif
AT03012142T ATE525676T1 (de) 2002-05-31 2003-06-02 Positiv arbeitende resistzusammensetzung
EP10188667.9A EP2278399B1 (fr) 2002-05-31 2003-06-02 Composition pour réserve de type positif
EP03012142A EP1367440B1 (fr) 2002-05-31 2003-06-02 Composition pour réserve de type positif
EP10188666A EP2278398A3 (fr) 2002-05-31 2003-06-02 Composition pour réserve de type positif
KR1020090108795A KR100947853B1 (ko) 2002-05-31 2009-11-11 포지티브 레지스트 조성물 및 이를 이용한 패턴형성방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002161617A JP4073255B2 (ja) 2002-06-03 2002-06-03 ポジ型レジスト組成物

Publications (3)

Publication Number Publication Date
JP2004012510A JP2004012510A (ja) 2004-01-15
JP2004012510A5 true JP2004012510A5 (fr) 2005-09-22
JP4073255B2 JP4073255B2 (ja) 2008-04-09

Family

ID=30430639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002161617A Expired - Fee Related JP4073255B2 (ja) 2002-05-31 2002-06-03 ポジ型レジスト組成物

Country Status (1)

Country Link
JP (1) JP4073255B2 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101729792B1 (ko) * 2009-02-23 2017-04-24 제이에스알 가부시끼가이샤 화합물, 불소 원자 함유 중합체, 및 감방사선성 수지 조성물
JP5617810B2 (ja) * 2011-10-04 2014-11-05 信越化学工業株式会社 レジスト保護膜材料及びパターン形成方法
JP5825248B2 (ja) 2012-12-12 2015-12-02 信越化学工業株式会社 ポジ型レジスト材料並びにこれを用いたパターン形成方法
JP5825252B2 (ja) * 2012-12-26 2015-12-02 信越化学工業株式会社 レジスト材料及びこれを用いたパターン形成方法
JP5821862B2 (ja) * 2013-01-29 2015-11-24 信越化学工業株式会社 ネガ型レジスト材料並びにこれを用いたパターン形成方法
JP6065942B2 (ja) * 2015-06-12 2017-01-25 信越化学工業株式会社 高分子化合物
JP7459636B2 (ja) 2019-06-14 2024-04-02 Jsr株式会社 感放射線性樹脂組成物及びレジストパターン形成方法

Similar Documents

Publication Publication Date Title
JP2004117688A5 (fr)
JP2004525420A5 (fr)
JP2000219743A5 (fr)
JP2001330947A5 (fr)
JP2003035948A5 (fr)
JP2004277303A5 (fr)
JP2004101706A5 (fr)
JP2004012510A5 (fr)
JP2002278053A5 (fr)
JP2004004249A5 (fr)
JP2002236358A5 (fr)
JP2001330957A5 (fr)
JP2004233661A5 (fr)
JP2003316007A5 (fr)
JP2000147774A5 (fr)
JP2000352822A5 (fr)
JP2004279471A5 (fr)
JP2001100417A5 (fr)
JP2003121999A5 (fr)
JP2004004227A5 (fr)
JP2004333710A5 (fr)
JP2004078105A5 (fr)
JP2002006495A5 (fr)
JP2001117232A5 (fr)
JP2004077810A5 (fr)