JP2004006734A5 - - Google Patents

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Publication number
JP2004006734A5
JP2004006734A5 JP2003079583A JP2003079583A JP2004006734A5 JP 2004006734 A5 JP2004006734 A5 JP 2004006734A5 JP 2003079583 A JP2003079583 A JP 2003079583A JP 2003079583 A JP2003079583 A JP 2003079583A JP 2004006734 A5 JP2004006734 A5 JP 2004006734A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2003079583A
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JP4498685B2 (ja
JP2004006734A (ja
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Priority to JP2003079583A priority Critical patent/JP4498685B2/ja
Priority claimed from JP2003079583A external-priority patent/JP4498685B2/ja
Publication of JP2004006734A publication Critical patent/JP2004006734A/ja
Publication of JP2004006734A5 publication Critical patent/JP2004006734A5/ja
Application granted granted Critical
Publication of JP4498685B2 publication Critical patent/JP4498685B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003079583A 2002-03-22 2003-03-24 半導体記憶素子の作製方法 Expired - Fee Related JP4498685B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003079583A JP4498685B2 (ja) 2002-03-22 2003-03-24 半導体記憶素子の作製方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002080462 2002-03-22
JP2003079583A JP4498685B2 (ja) 2002-03-22 2003-03-24 半導体記憶素子の作製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2003078348A Division JP3949599B2 (ja) 2002-03-22 2003-03-20 半導体記憶装置

Publications (3)

Publication Number Publication Date
JP2004006734A JP2004006734A (ja) 2004-01-08
JP2004006734A5 true JP2004006734A5 (ja) 2006-05-11
JP4498685B2 JP4498685B2 (ja) 2010-07-07

Family

ID=30445775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003079583A Expired - Fee Related JP4498685B2 (ja) 2002-03-22 2003-03-24 半導体記憶素子の作製方法

Country Status (1)

Country Link
JP (1) JP4498685B2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7439594B2 (en) * 2006-03-16 2008-10-21 Micron Technology, Inc. Stacked non-volatile memory with silicon carbide-based amorphous silicon thin film transistors

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1131659A (ja) * 1997-07-10 1999-02-02 Toshiba Corp 半導体装置の製造方法
JP4112686B2 (ja) * 1997-08-20 2008-07-02 株式会社半導体エネルギー研究所 半導体装置
JP4954359B2 (ja) * 1999-02-12 2012-06-13 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP2001015591A (ja) * 1999-06-30 2001-01-19 Toshiba Corp 半導体装置の製造方法・半導体装置
JP4666783B2 (ja) * 2000-02-01 2011-04-06 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4823408B2 (ja) * 2000-06-08 2011-11-24 ルネサスエレクトロニクス株式会社 不揮発性半導体記憶装置
JP2002057309A (ja) * 2000-08-08 2002-02-22 Sony Corp Ｓｏｉ基板の作製方法
JP2001168347A (ja) * 2000-10-02 2001-06-22 Semiconductor Energy Lab Co Ltd 半導体集積回路

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