JP2003531359A - 振動型マイクロジャイロスコープ - Google Patents

振動型マイクロジャイロスコープ

Info

Publication number
JP2003531359A
JP2003531359A JP2001555769A JP2001555769A JP2003531359A JP 2003531359 A JP2003531359 A JP 2003531359A JP 2001555769 A JP2001555769 A JP 2001555769A JP 2001555769 A JP2001555769 A JP 2001555769A JP 2003531359 A JP2003531359 A JP 2003531359A
Authority
JP
Japan
Prior art keywords
gimbal
detection
drive
electrode
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001555769A
Other languages
English (en)
Japanese (ja)
Inventor
キム，ヨン−クウォン
リム，ヒュン−テク
リム，ジェーウォーク
Original Assignee
エイジェンシー フォー ディフェンス ディベロプメント
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エイジェンシー フォー ディフェンス ディベロプメント filed Critical エイジェンシー フォー ディフェンス ディベロプメント
Publication of JP2003531359A publication Critical patent/JP2003531359A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2001555769A 2000-01-27 2001-01-22 振動型マイクロジャイロスコープ Pending JP2003531359A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
KR2000/4090 2000-01-27
KR20000004090 2000-01-27
KR2000/33928 2000-06-20
KR10-2000-0033928A KR100373484B1 (ko) 2000-01-27 2000-06-20 진동형 마이크로자이로스코프
PCT/KR2001/000109 WO2001055674A2 (en) 2000-01-27 2001-01-22 Vibration-type micro-gyroscope

Publications (1)

Publication Number Publication Date
JP2003531359A true JP2003531359A (ja) 2003-10-21

Family

ID=26636884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001555769A Pending JP2003531359A (ja) 2000-01-27 2001-01-22 振動型マイクロジャイロスコープ

Country Status (6)

Country Link
US (1) US20030084722A1 (US20030084722A1-20030508-M00007.png)
JP (1) JP2003531359A (US20030084722A1-20030508-M00007.png)
KR (1) KR100373484B1 (US20030084722A1-20030508-M00007.png)
AU (1) AU3062401A (US20030084722A1-20030508-M00007.png)
DE (1) DE10195200B4 (US20030084722A1-20030508-M00007.png)
WO (1) WO2001055674A2 (US20030084722A1-20030508-M00007.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013029522A (ja) * 2012-10-02 2013-02-07 Hitachi Ltd 角速度検出装置
CN103090858A (zh) * 2011-11-04 2013-05-08 精工爱普生株式会社 陀螺传感器、电子设备以及陀螺传感器的制造方法
US8616058B2 (en) 2007-06-22 2013-12-31 Hitachi, Ltd. Angular velocity detecting device

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JP3627665B2 (ja) * 2001-04-11 2005-03-09 株式会社デンソー 角速度センサ
KR100846481B1 (ko) * 2001-10-24 2008-07-17 삼성전기주식회사 진동형 자이로스코프의 저잡음 신호 처리 장치 및 방법
US6915215B2 (en) * 2002-06-25 2005-07-05 The Boeing Company Integrated low power digital gyro control electronics
JP2005265795A (ja) * 2004-03-22 2005-09-29 Denso Corp 半導体力学量センサ
US7036373B2 (en) 2004-06-29 2006-05-02 Honeywell International, Inc. MEMS gyroscope with horizontally oriented drive electrodes
CN100449265C (zh) * 2005-02-28 2009-01-07 北京大学 一种水平轴微机械陀螺及其制备方法
US7231824B2 (en) * 2005-03-22 2007-06-19 Honeywell International Inc. Use of electrodes to cancel lift effects in inertial sensors
US7213458B2 (en) * 2005-03-22 2007-05-08 Honeywell International Inc. Quadrature reduction in MEMS gyro devices using quad steering voltages
US7443257B2 (en) * 2005-04-26 2008-10-28 Honeywell International Inc. Mechanical oscillator control electronics
US8184389B2 (en) * 2006-04-14 2012-05-22 Seagate Technology Llc Sensor resonant frequency identification and filter tuning
US7444868B2 (en) 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing for MEMS inertial sensors using time-varying voltages
US7714277B2 (en) * 2006-07-20 2010-05-11 Owlstone Nanotech, Inc. Smart FAIMS sensor
CN102353370B (zh) * 2011-07-22 2013-07-17 上海交通大学 压电驱动电容检测微固体模态陀螺
US9310202B2 (en) * 2012-07-09 2016-04-12 Freescale Semiconductor, Inc. Angular rate sensor with quadrature error compensation
US9837935B2 (en) 2013-10-29 2017-12-05 Honeywell International Inc. All-silicon electrode capacitive transducer on a glass substrate
CN107636473B (zh) 2015-05-20 2020-09-01 卢米达因科技公司 从非线性的周期性信号中提取惯性信息
US10234477B2 (en) * 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer

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US4695488A (en) * 1985-03-12 1987-09-22 Daikin Industries, Ltd. Soil release composition and use thereof
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5794392A (en) * 1993-05-18 1998-08-18 Steelcase Inc. Utility distribution system for open office plans and the like
US5465620A (en) * 1993-06-14 1995-11-14 Rensselaer Polytechnic Institute Micromechanical vibratory gyroscope sensor array
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
DE4442033C2 (de) * 1994-11-25 1997-12-18 Bosch Gmbh Robert Drehratensensor
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
KR100363246B1 (ko) * 1995-10-27 2003-02-14 삼성전자 주식회사 진동구조물및진동구조물의고유진동수제어방법
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6044707A (en) * 1997-06-20 2000-04-04 Aisin Seiki Kabushiki Kaisha Angular rate sensor
US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
JP3489487B2 (ja) * 1998-10-23 2004-01-19 トヨタ自動車株式会社 角速度検出装置
US6189381B1 (en) * 1999-04-26 2001-02-20 Sitek, Inc. Angular rate sensor made from a structural wafer of single crystal silicon
KR100363786B1 (ko) * 1999-05-13 2002-12-11 삼성전기주식회사 마이크로 자이로스코프
KR100363785B1 (ko) * 1999-06-04 2002-12-11 삼성전기주식회사 마이크로 자이로스코프

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8616058B2 (en) 2007-06-22 2013-12-31 Hitachi, Ltd. Angular velocity detecting device
US9366687B2 (en) 2007-06-22 2016-06-14 Hitachi, Ltd. Angular velocity detecting device
CN103090858A (zh) * 2011-11-04 2013-05-08 精工爱普生株式会社 陀螺传感器、电子设备以及陀螺传感器的制造方法
JP2013096952A (ja) * 2011-11-04 2013-05-20 Seiko Epson Corp ジャイロセンサー、電子機器、およびジャイロセンサーの製造方法
JP2013029522A (ja) * 2012-10-02 2013-02-07 Hitachi Ltd 角速度検出装置

Also Published As

Publication number Publication date
DE10195200B4 (de) 2007-04-05
KR100373484B1 (ko) 2003-02-25
WO2001055674A2 (en) 2001-08-02
US20030084722A1 (en) 2003-05-08
AU3062401A (en) 2001-08-07
WO2001055674A3 (en) 2002-02-14
KR20010077832A (ko) 2001-08-20
DE10195200T1 (de) 2003-06-18

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