JP2003524542A - 微細機械加工型の二次元配列液滴エゼクター - Google Patents

微細機械加工型の二次元配列液滴エゼクター

Info

Publication number
JP2003524542A
JP2003524542A JP2001561447A JP2001561447A JP2003524542A JP 2003524542 A JP2003524542 A JP 2003524542A JP 2001561447 A JP2001561447 A JP 2001561447A JP 2001561447 A JP2001561447 A JP 2001561447A JP 2003524542 A JP2003524542 A JP 2003524542A
Authority
JP
Japan
Prior art keywords
bulk
fluid
type
membrane
dimensional array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2001561447A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003524542A5 (enExample
Inventor
ゲカーン ペルシン
ブトゥルス ティー クーリ−ヤクブ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leland Stanford Junior University
Original Assignee
Leland Stanford Junior University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leland Stanford Junior University filed Critical Leland Stanford Junior University
Publication of JP2003524542A publication Critical patent/JP2003524542A/ja
Publication of JP2003524542A5 publication Critical patent/JP2003524542A5/ja
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/15—Moving nozzle or nozzle plate

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Manufacturing Of Micro-Capsules (AREA)
  • Micromachines (AREA)
JP2001561447A 2000-02-24 2001-02-23 微細機械加工型の二次元配列液滴エゼクター Abandoned JP2003524542A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US18469100P 2000-02-24 2000-02-24
US60/184,691 2000-02-24
US09/791,991 US6474786B2 (en) 2000-02-24 2001-02-22 Micromachined two-dimensional array droplet ejectors
US09/791,991 2001-02-22
PCT/US2001/005965 WO2001062394A2 (en) 2000-02-24 2001-02-23 Micromachined two-dimensional array droplet ejectors

Publications (2)

Publication Number Publication Date
JP2003524542A true JP2003524542A (ja) 2003-08-19
JP2003524542A5 JP2003524542A5 (enExample) 2005-12-15

Family

ID=26880385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001561447A Abandoned JP2003524542A (ja) 2000-02-24 2001-02-23 微細機械加工型の二次元配列液滴エゼクター

Country Status (6)

Country Link
US (1) US6474786B2 (enExample)
EP (1) EP1261487A4 (enExample)
JP (1) JP2003524542A (enExample)
AU (1) AU2001239864A1 (enExample)
CA (1) CA2401658A1 (enExample)
WO (1) WO2001062394A2 (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004188416A (ja) * 2002-12-06 2004-07-08 Steag Microparts Gmbh 液体を並行して配量するための装置
JP2011056939A (ja) * 2009-08-12 2011-03-24 Rohm Co Ltd インクジェットプリンタヘッド
JP2014046621A (ja) * 2012-08-31 2014-03-17 Toshiba Tec Corp インクジェットヘッドおよび画像形成装置
JP2015150853A (ja) * 2014-02-18 2015-08-24 セイコーインスツル株式会社 液体吐出装置
JP2015150854A (ja) * 2014-02-18 2015-08-24 セイコーインスツル株式会社 液体吐出装置
JP2017193108A (ja) * 2016-04-20 2017-10-26 東芝テック株式会社 インクジェットヘッド及びインクジェット記録装置

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US7234477B2 (en) 2000-06-30 2007-06-26 Lam Research Corporation Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces
US6474785B1 (en) 2000-09-05 2002-11-05 Hewlett-Packard Company Flextensional transducer and method for fabrication of a flextensional transducer
US6749283B2 (en) * 2001-03-15 2004-06-15 Fuji Photo Film Co., Ltd. Liquid ejecting device and ink jet printer
US6540339B2 (en) 2001-03-21 2003-04-01 Hewlett-Packard Company Flextensional transducer assembly including array of flextensional transducers
US6474787B2 (en) 2001-03-21 2002-11-05 Hewlett-Packard Company Flextensional transducer
TW548198B (en) * 2001-03-30 2003-08-21 Philoph Morris Products Inc Piezoelectrically driven printhead array
US6962715B2 (en) * 2001-10-24 2005-11-08 Hewlett-Packard Development Company, L.P. Method and dosage form for dispensing a bioactive substance
US6702894B2 (en) * 2001-10-24 2004-03-09 Hewlett-Packard Development Company, L.P. Fluid ejection cartridge and system for dispensing a bioactive substance
US6428140B1 (en) 2001-09-28 2002-08-06 Hewlett-Packard Company Restriction within fluid cavity of fluid drop ejector
US6685302B2 (en) 2001-10-31 2004-02-03 Hewlett-Packard Development Company, L.P. Flextensional transducer and method of forming a flextensional transducer
US7041355B2 (en) 2001-11-29 2006-05-09 Dow Global Technologies Inc. Structural reinforcement parts for automotive assembly
US7614411B2 (en) 2002-09-30 2009-11-10 Lam Research Corporation Controls of ambient environment during wafer drying using proximity head
US7997288B2 (en) * 2002-09-30 2011-08-16 Lam Research Corporation Single phase proximity head having a controlled meniscus for treating a substrate
US7293571B2 (en) * 2002-09-30 2007-11-13 Lam Research Corporation Substrate proximity processing housing and insert for generating a fluid meniscus
US7153400B2 (en) * 2002-09-30 2006-12-26 Lam Research Corporation Apparatus and method for depositing and planarizing thin films of semiconductor wafers
US7513262B2 (en) 2002-09-30 2009-04-07 Lam Research Corporation Substrate meniscus interface and methods for operation
US7389783B2 (en) * 2002-09-30 2008-06-24 Lam Research Corporation Proximity meniscus manifold
US7632376B1 (en) 2002-09-30 2009-12-15 Lam Research Corporation Method and apparatus for atomic layer deposition (ALD) in a proximity system
US7383843B2 (en) * 2002-09-30 2008-06-10 Lam Research Corporation Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer
US8236382B2 (en) * 2002-09-30 2012-08-07 Lam Research Corporation Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same
US7198055B2 (en) * 2002-09-30 2007-04-03 Lam Research Corporation Meniscus, vacuum, IPA vapor, drying manifold
KR100452849B1 (ko) * 2002-10-17 2004-10-14 삼성전자주식회사 마이크로 분사기를 이용한 프린터 헤드
US7312440B2 (en) * 2003-01-14 2007-12-25 Georgia Tech Research Corporation Integrated micro fuel processor and flow delivery infrastructure
US7442180B2 (en) * 2003-06-10 2008-10-28 Hewlett-Packard Development Company, L.P. Apparatus and methods for administering bioactive compositions
US7819847B2 (en) * 2003-06-10 2010-10-26 Hewlett-Packard Development Company, L.P. System and methods for administering bioactive compositions
US7675000B2 (en) * 2003-06-24 2010-03-09 Lam Research Corporation System method and apparatus for dry-in, dry-out, low defect laser dicing using proximity technology
WO2005011561A2 (en) * 2003-08-04 2005-02-10 Labcoat, Ltd. Stent coating apparatus and method
US7030536B2 (en) * 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure
US7578951B2 (en) * 2004-01-27 2009-08-25 Hewlett-Packard Development Company, L.P. Method of making microcapsules utilizing a fluid ejector
US7334871B2 (en) 2004-03-26 2008-02-26 Hewlett-Packard Development Company, L.P. Fluid-ejection device and methods of forming same
US8062471B2 (en) * 2004-03-31 2011-11-22 Lam Research Corporation Proximity head heating method and apparatus
US7637592B2 (en) 2006-05-26 2009-12-29 Fujifilm Dimatix, Inc. System and methods for fluid drop ejection
US7484836B2 (en) * 2004-09-20 2009-02-03 Fujifilm Dimatix, Inc. System and methods for fluid drop ejection
FI118829B (fi) * 2005-07-08 2008-03-31 Valtion Teknillinen Mikromekaaninen sensori, sensoriryhmä ja menetelmä sekä pitkittäisten akustisten aaltojen uusi käyttö
US7395698B2 (en) 2005-10-25 2008-07-08 Georgia Institute Of Technology Three-dimensional nanoscale metrology using FIRAT probe
US20070154641A1 (en) * 2005-12-30 2007-07-05 Brother Kogyo Kabushiki Kaisha Thin-film forming method and mask used therefor
US7928366B2 (en) * 2006-10-06 2011-04-19 Lam Research Corporation Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access
US8813764B2 (en) 2009-05-29 2014-08-26 Lam Research Corporation Method and apparatus for physical confinement of a liquid meniscus over a semiconductor wafer
WO2008147458A1 (en) * 2006-11-28 2008-12-04 Georgia Tech Research Corporation Droplet impingement chemical reactors and methods of processing fuel
US8146902B2 (en) 2006-12-21 2012-04-03 Lam Research Corporation Hybrid composite wafer carrier for wet clean equipment
US7975708B2 (en) * 2007-03-30 2011-07-12 Lam Research Corporation Proximity head with angled vacuum conduit system, apparatus and method
US8464736B1 (en) 2007-03-30 2013-06-18 Lam Research Corporation Reclaim chemistry
US8042916B2 (en) * 2007-03-31 2011-10-25 Micropoint Biosciences, Inc. Micromachined fluid ejector array
US20080257713A1 (en) * 2007-04-17 2008-10-23 Robert Woodhull Grant Catalytic reactors with active boundary layer control
US8141566B2 (en) * 2007-06-19 2012-03-27 Lam Research Corporation System, method and apparatus for maintaining separation of liquids in a controlled meniscus
US8418523B2 (en) 2008-03-03 2013-04-16 Keith Lueck Calibration and accuracy check system for a breath tester
US8556373B2 (en) 2009-06-19 2013-10-15 Burkhard Buestgens Multichannel-printhead or dosing head
DE102009029946A1 (de) * 2009-06-19 2010-12-30 Epainters GbR (vertretungsberechtigte Gesellschafter Burkhard Büstgens, 79194 Gundelfingen und Suheel Roland Georges, 79102 Freiburg) Druckkopf oder Dosierkopf
JP5659198B2 (ja) * 2011-09-15 2015-01-28 東芝テック株式会社 インクジェットヘッドおよびインクジェット記録装置
CN110913998A (zh) * 2017-07-12 2020-03-24 迈康尼股份公司 具有能量输出装置的喷射装置及其控制方法
CN110914063B (zh) * 2017-07-12 2022-02-25 迈康尼股份公司 具有声换能器的喷射装置及其控制方法
WO2021151973A1 (en) * 2020-01-28 2021-08-05 Mycronic AB Jetting devices with supply conduit actuator
CN116422391A (zh) * 2023-05-12 2023-07-14 苏州矽劼微电子有限公司 一种微液滴生成装置及应用
US20250289019A1 (en) * 2024-03-18 2025-09-18 Ricoh Company, Ltd. Liquid droplet forming apparatus and method of manufacturing gel particles

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US3958255A (en) * 1974-12-31 1976-05-18 International Business Machines Corporation Ink jet nozzle structure
US4032929A (en) 1975-10-28 1977-06-28 Xerox Corporation High density linear array ink jet assembly
CA1082283A (en) 1976-01-15 1980-07-22 Kenneth H. Fischbeck Separable liquid droplet instrument and piezoelectric drivers therefor
JPS5973963A (ja) * 1982-10-22 1984-04-26 Fuji Xerox Co Ltd インクジエツトのドロツプジエネレ−タ
WO1993001404A1 (en) * 1991-07-08 1993-01-21 Yehuda Ivri Ultrasonic fluid ejector
EP0692383B1 (en) 1994-07-11 2005-06-15 Kabushiki Kaisha Toshiba Ink jet recording device
AUPN229295A0 (en) * 1995-04-12 1995-05-04 Eastman Kodak Company A notebook computer with integrated lift color printing system
US5828394A (en) 1995-09-20 1998-10-27 The Board Of Trustees Of The Leland Stanford Junior University Fluid drop ejector and method
US5821958A (en) 1995-11-13 1998-10-13 Xerox Corporation Acoustic ink printhead with variable size droplet ejection openings
JP2861980B2 (ja) 1997-01-30 1999-02-24 日本電気株式会社 インク滴噴射装置
AUPP398798A0 (en) * 1998-06-09 1998-07-02 Silverbrook Research Pty Ltd Image creation method and apparatus (ij43)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004188416A (ja) * 2002-12-06 2004-07-08 Steag Microparts Gmbh 液体を並行して配量するための装置
JP2011056939A (ja) * 2009-08-12 2011-03-24 Rohm Co Ltd インクジェットプリンタヘッド
US8807712B2 (en) 2009-08-12 2014-08-19 Rohm Co., Ltd. Inkjet printer head
JP2014046621A (ja) * 2012-08-31 2014-03-17 Toshiba Tec Corp インクジェットヘッドおよび画像形成装置
US8967775B2 (en) 2012-08-31 2015-03-03 Toshiba Tec Kabushiki Kaisha Ink jet head and image forming apparatus
JP2015150853A (ja) * 2014-02-18 2015-08-24 セイコーインスツル株式会社 液体吐出装置
JP2015150854A (ja) * 2014-02-18 2015-08-24 セイコーインスツル株式会社 液体吐出装置
JP2017193108A (ja) * 2016-04-20 2017-10-26 東芝テック株式会社 インクジェットヘッド及びインクジェット記録装置

Also Published As

Publication number Publication date
US6474786B2 (en) 2002-11-05
EP1261487A2 (en) 2002-12-04
WO2001062394A2 (en) 2001-08-30
US20010038402A1 (en) 2001-11-08
CA2401658A1 (en) 2001-08-30
WO2001062394A3 (en) 2002-04-18
EP1261487A4 (en) 2003-04-09
AU2001239864A1 (en) 2001-09-03

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Legal Events

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A762 Written abandonment of application

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Effective date: 20040203

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