JP2003519922A5 - - Google Patents

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Publication number
JP2003519922A5
JP2003519922A5 JP2001550802A JP2001550802A JP2003519922A5 JP 2003519922 A5 JP2003519922 A5 JP 2003519922A5 JP 2001550802 A JP2001550802 A JP 2001550802A JP 2001550802 A JP2001550802 A JP 2001550802A JP 2003519922 A5 JP2003519922 A5 JP 2003519922A5
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JP
Japan
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JP2001550802A
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JP2003519922A (ja
JP5063846B2 (ja
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Priority claimed from US09/477,464 external-priority patent/US6470230B1/en
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Publication of JP2003519922A publication Critical patent/JP2003519922A/ja
Publication of JP2003519922A5 publication Critical patent/JP2003519922A5/ja
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Publication of JP5063846B2 publication Critical patent/JP5063846B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001550802A 2000-01-04 2000-12-04 超小型電子機器製造において最適な加工ターゲットを定めるための方法 Expired - Lifetime JP5063846B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/477,464 US6470230B1 (en) 2000-01-04 2000-01-04 Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication
US09/477,464 2000-01-04
PCT/US2000/032948 WO2001050522A1 (en) 2000-01-04 2000-12-04 Method for determining optimal process targets in microelectronic fabrication

Publications (3)

Publication Number Publication Date
JP2003519922A JP2003519922A (ja) 2003-06-24
JP2003519922A5 true JP2003519922A5 (ja) 2008-01-10
JP5063846B2 JP5063846B2 (ja) 2012-10-31

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ID=23896015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001550802A Expired - Lifetime JP5063846B2 (ja) 2000-01-04 2000-12-04 超小型電子機器製造において最適な加工ターゲットを定めるための方法

Country Status (5)

Country Link
US (1) US6470230B1 (ja)
EP (1) EP1245044B1 (ja)
JP (1) JP5063846B2 (ja)
KR (1) KR100727049B1 (ja)
WO (1) WO2001050522A1 (ja)

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US6980873B2 (en) 2004-04-23 2005-12-27 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environment
US7437404B2 (en) 2004-05-20 2008-10-14 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for improving equipment communication in semiconductor manufacturing equipment
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US7558986B2 (en) * 2005-05-26 2009-07-07 United Parcel Service Of America, Inc. Software process monitor
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US7355728B2 (en) * 2005-06-16 2008-04-08 Timbre Technologies, Inc. Optical metrology model optimization for repetitive structures
US20070135956A1 (en) * 2005-12-13 2007-06-14 Taiwan Semiconductor Manufacturing Co., Ltd. Data location systems and methods
US8515567B2 (en) * 2005-12-21 2013-08-20 Globalfoundries Inc. Enhanced state estimation based upon information credibility
US20080140590A1 (en) * 2006-12-12 2008-06-12 Taiwan Semiconductor Manufacturing Co., Ltd. Process control integration systems and methods
US7424331B2 (en) * 2006-12-19 2008-09-09 Intel Corporation System for implementing intelligent and accurate updates to state-based advanced process control (APC) models
US7844927B2 (en) * 2007-01-19 2010-11-30 Globalfoundries Inc. Method for quality assured semiconductor device modeling
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JP5820375B2 (ja) 2009-08-21 2015-11-24 ヴィジレント コーポレイションＶｉｇｉｌｅｎｔ Ｃｏｒｐｏｒａｔｉｏｎ データセンタ冷却ユニットを効率的に調整する方法及び装置
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JP2021508078A (ja) * 2017-12-19 2021-02-25 エーエスエムエル ネザーランズ ビー．ブイ． 計算メトロロジに基づく補正および制御
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