GB2437894B - Automated Throughput Control System And Method Of Operating The Same - Google Patents

Automated Throughput Control System And Method Of Operating The Same

Info

Publication number
GB2437894B
GB2437894B GB0716639A GB0716639A GB2437894B GB 2437894 B GB2437894 B GB 2437894B GB 0716639 A GB0716639 A GB 0716639A GB 0716639 A GB0716639 A GB 0716639A GB 2437894 B GB2437894 B GB 2437894B
Authority
GB
United Kingdom
Prior art keywords
operating
control system
same
throughput control
automated throughput
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB0716639A
Other versions
GB0716639D0 (en
GB2437894A (en
Inventor
Gunnar Flach
Thomas Quarg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102005009022A external-priority patent/DE102005009022A1/en
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of GB0716639D0 publication Critical patent/GB0716639D0/en
Publication of GB2437894A publication Critical patent/GB2437894A/en
Application granted granted Critical
Publication of GB2437894B publication Critical patent/GB2437894B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31336—Store machines performance; use it to control future machining
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32184—Compare time, quality, state of operators with threshold value
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32191—Real time statistical process monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32201—Build statistical model of past normal proces, compare with actual process
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)
  • Electrotherapy Devices (AREA)
GB0716639A 2005-02-28 2006-01-27 Automated Throughput Control System And Method Of Operating The Same Active GB2437894B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005009022A DE102005009022A1 (en) 2005-02-28 2005-02-28 Automatic throughput control system and method of operating the same
US11/247,373 US20060195212A1 (en) 2005-02-28 2005-10-11 Automated throughput control system and method of operating the same
PCT/US2006/003191 WO2006093604A2 (en) 2005-02-28 2006-01-27 Automated throughput control system and method of operating the same

Publications (3)

Publication Number Publication Date
GB0716639D0 GB0716639D0 (en) 2007-10-03
GB2437894A GB2437894A (en) 2007-11-07
GB2437894B true GB2437894B (en) 2011-04-13

Family

ID=36716798

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0716639A Active GB2437894B (en) 2005-02-28 2006-01-27 Automated Throughput Control System And Method Of Operating The Same

Country Status (3)

Country Link
KR (1) KR101365226B1 (en)
GB (1) GB2437894B (en)
WO (1) WO2006093604A2 (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001050522A1 (en) * 2000-01-04 2001-07-12 Advanced Micro Devices, Inc. Method for determining optimal process targets in microelectronic fabrication
EP1132792A2 (en) * 2000-03-10 2001-09-12 Applied Materials, Inc. Method and apparatus for managing scheduling a multiple cluster tool
US20020199082A1 (en) * 2001-06-19 2002-12-26 Applied Materials, Inc. Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities
WO2003023538A2 (en) * 2001-09-13 2003-03-20 Advanced Micro Devices, Inc. State estimation and scheduling for a manufacturing system
US6650955B1 (en) * 2001-12-18 2003-11-18 Advanced Micro Devices, Inc. Method and apparatus for determining a sampling plan based on process and equipment fingerprinting
US20030236585A1 (en) * 2002-06-19 2003-12-25 Taiwan Semiconductor Manufacturing Co., Ltd. Method of identifying bottlenecks and improving throughput in wafer processing equipment
US20060149404A1 (en) * 2005-01-05 2006-07-06 International Business Machines Corporation A method for autonomic control of a manufacturing system
US20080208372A1 (en) * 2003-11-10 2008-08-28 Pannese Patrick D Scheduling with neural networks and state machines

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2001249724A1 (en) * 2000-04-03 2001-10-15 Speed-Fam-Ipec Corporation System and method for predicting software models using material-centric process instrumentation
US6646660B1 (en) * 2000-09-29 2003-11-11 Advanced Micro Devices Inc. Method and apparatus for presenting process control performance data
US6662066B1 (en) * 2002-04-23 2003-12-09 Taiwan Semiconductor Manufacturing Company Dynamic adjustment and auto generation of water per hour (WPH) in capacity check system (CCS) by tool performance tracking platform (TP2)

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001050522A1 (en) * 2000-01-04 2001-07-12 Advanced Micro Devices, Inc. Method for determining optimal process targets in microelectronic fabrication
EP1132792A2 (en) * 2000-03-10 2001-09-12 Applied Materials, Inc. Method and apparatus for managing scheduling a multiple cluster tool
US20020199082A1 (en) * 2001-06-19 2002-12-26 Applied Materials, Inc. Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities
WO2003023538A2 (en) * 2001-09-13 2003-03-20 Advanced Micro Devices, Inc. State estimation and scheduling for a manufacturing system
US6650955B1 (en) * 2001-12-18 2003-11-18 Advanced Micro Devices, Inc. Method and apparatus for determining a sampling plan based on process and equipment fingerprinting
US20030236585A1 (en) * 2002-06-19 2003-12-25 Taiwan Semiconductor Manufacturing Co., Ltd. Method of identifying bottlenecks and improving throughput in wafer processing equipment
US20080208372A1 (en) * 2003-11-10 2008-08-28 Pannese Patrick D Scheduling with neural networks and state machines
US20060149404A1 (en) * 2005-01-05 2006-07-06 International Business Machines Corporation A method for autonomic control of a manufacturing system

Also Published As

Publication number Publication date
GB0716639D0 (en) 2007-10-03
WO2006093604A2 (en) 2006-09-08
WO2006093604A8 (en) 2006-11-02
KR101365226B1 (en) 2014-02-18
GB2437894A (en) 2007-11-07
KR20070106797A (en) 2007-11-05

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