WO2006093604A8 - Automated throughput control system and method of operating the same - Google Patents

Automated throughput control system and method of operating the same

Info

Publication number
WO2006093604A8
WO2006093604A8 PCT/US2006/003191 US2006003191W WO2006093604A8 WO 2006093604 A8 WO2006093604 A8 WO 2006093604A8 US 2006003191 W US2006003191 W US 2006003191W WO 2006093604 A8 WO2006093604 A8 WO 2006093604A8
Authority
WO
WIPO (PCT)
Prior art keywords
operating
control system
same
throughput control
automated throughput
Prior art date
Application number
PCT/US2006/003191
Other languages
French (fr)
Other versions
WO2006093604A2 (en
Inventor
Gunnar Flach
Thomas Quarg
Original Assignee
Advanced Micro Devices Inc
Gunnar Flach
Thomas Quarg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102005009022A external-priority patent/DE102005009022A1/en
Application filed by Advanced Micro Devices Inc, Gunnar Flach, Thomas Quarg filed Critical Advanced Micro Devices Inc
Priority to KR1020077022334A priority Critical patent/KR101365226B1/en
Priority to JP2007558013A priority patent/JP5384009B2/en
Priority to GB0716639A priority patent/GB2437894B/en
Priority to CN2006800063447A priority patent/CN101128786B/en
Publication of WO2006093604A2 publication Critical patent/WO2006093604A2/en
Publication of WO2006093604A8 publication Critical patent/WO2006093604A8/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31336—Store machines performance; use it to control future machining
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32184—Compare time, quality, state of operators with threshold value
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32191—Real time statistical process monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32201—Build statistical model of past normal proces, compare with actual process
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)
  • Electrotherapy Devices (AREA)
PCT/US2006/003191 2005-02-28 2006-01-27 Automated throughput control system and method of operating the same WO2006093604A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020077022334A KR101365226B1 (en) 2005-02-28 2006-01-27 Automated throughput control system and method of operating the same
JP2007558013A JP5384009B2 (en) 2005-02-28 2006-01-27 Automatic throughput control system and operation method thereof
GB0716639A GB2437894B (en) 2005-02-28 2006-01-27 Automated Throughput Control System And Method Of Operating The Same
CN2006800063447A CN101128786B (en) 2005-02-28 2006-01-27 Automated throughput control system and method of operating the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005009022A DE102005009022A1 (en) 2005-02-28 2005-02-28 Automatic throughput control system and method of operating the same
US11/247,373 US20060195212A1 (en) 2005-02-28 2005-10-11 Automated throughput control system and method of operating the same

Publications (2)

Publication Number Publication Date
WO2006093604A2 WO2006093604A2 (en) 2006-09-08
WO2006093604A8 true WO2006093604A8 (en) 2006-11-02

Family

ID=36716798

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/003191 WO2006093604A2 (en) 2005-02-28 2006-01-27 Automated throughput control system and method of operating the same

Country Status (3)

Country Link
KR (1) KR101365226B1 (en)
GB (1) GB2437894B (en)
WO (1) WO2006093604A2 (en)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6470230B1 (en) * 2000-01-04 2002-10-22 Advanced Micro Devices, Inc. Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication
US6519498B1 (en) * 2000-03-10 2003-02-11 Applied Materials, Inc. Method and apparatus for managing scheduling in a multiple cluster tool
WO2001075534A2 (en) * 2000-04-03 2001-10-11 Speedfam-Ipec Corporation System and method for predicting software models using material-centric process instrumentation
US6646660B1 (en) * 2000-09-29 2003-11-11 Advanced Micro Devices Inc. Method and apparatus for presenting process control performance data
US7082345B2 (en) * 2001-06-19 2006-07-25 Applied Materials, Inc. Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities
US6738682B1 (en) * 2001-09-13 2004-05-18 Advances Micro Devices, Inc. Method and apparatus for scheduling based on state estimation uncertainties
US6650955B1 (en) * 2001-12-18 2003-11-18 Advanced Micro Devices, Inc. Method and apparatus for determining a sampling plan based on process and equipment fingerprinting
US6662066B1 (en) * 2002-04-23 2003-12-09 Taiwan Semiconductor Manufacturing Company Dynamic adjustment and auto generation of water per hour (WPH) in capacity check system (CCS) by tool performance tracking platform (TP2)
US6856847B2 (en) * 2002-06-19 2005-02-15 Taiwan Semiconductor Manufacturing Co., Ltd Method of identifying bottlenecks and improving throughput in wafer processing equipment
US20080208372A1 (en) * 2003-11-10 2008-08-28 Pannese Patrick D Scheduling with neural networks and state machines
US7151972B2 (en) * 2005-01-05 2006-12-19 International Business Machines Corporation Method for autonomic control of a manufacturing system

Also Published As

Publication number Publication date
WO2006093604A2 (en) 2006-09-08
GB2437894B (en) 2011-04-13
KR20070106797A (en) 2007-11-05
KR101365226B1 (en) 2014-02-18
GB0716639D0 (en) 2007-10-03
GB2437894A (en) 2007-11-07

Similar Documents

Publication Publication Date Title
GB2462753B (en) Automated shade control method and system
EP1777132B8 (en) Brake control system and brake control method
EP1851750A4 (en) System and method for genture based control system
EP1902548A4 (en) System and method for operation control functionality
AU2006295149A1 (en) Power control system and method
EP1952207A4 (en) Methods and systems for adaptive control
EP1853791A4 (en) System and method for well intervention
EP2001124A4 (en) Motor-driven control system and its control method
EP1912437A4 (en) Remote control system, remote controller, and remote control method
EP1968062A4 (en) Audiovisual system and control method thereof
EP1957363A4 (en) Rotorcraft control system and method of using
EP1893978A4 (en) Method and system for affinity analysis
EP1867594A4 (en) Elevator system and operation control method thereof
EP1947539A4 (en) Control method, and control system
EP1944209A4 (en) Wiper control method and wiper control system
EP1855208A4 (en) Service control system, service control method, and service control program
EP1851736A4 (en) System and method for registration control
EP1949001A4 (en) Air-conditioner and method for controlling the same
WO2006093604A8 (en) Automated throughput control system and method of operating the same
AU2005907189A0 (en) Multiple networked process control systems and method
AU2005905366A0 (en) Control apparatus and method
AU2005906569A0 (en) Vehicle movement control system and method
AU2005902576A0 (en) Method and Apparatus for Temperature Control
AU2005905936A0 (en) Location system and method
AU2005905961A0 (en) Location system and method

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200680006344.7

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2007558013

Country of ref document: JP

ENP Entry into the national phase

Ref document number: 0716639

Country of ref document: GB

Kind code of ref document: A

Free format text: PCT FILING DATE = 20060127

WWE Wipo information: entry into national phase

Ref document number: 0716639.0

Country of ref document: GB

WWE Wipo information: entry into national phase

Ref document number: 1020077022334

Country of ref document: KR

122 Ep: pct application non-entry in european phase

Ref document number: 06734041

Country of ref document: EP

Kind code of ref document: A1