JP2003519444A5 - - Google Patents
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- Publication number
- JP2003519444A5 JP2003519444A5 JP2001550501A JP2001550501A JP2003519444A5 JP 2003519444 A5 JP2003519444 A5 JP 2003519444A5 JP 2001550501 A JP2001550501 A JP 2001550501A JP 2001550501 A JP2001550501 A JP 2001550501A JP 2003519444 A5 JP2003519444 A5 JP 2003519444A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/476,892 | 2000-01-03 | ||
| US09/476,892 US6684122B1 (en) | 2000-01-03 | 2000-01-03 | Control mechanism for matching process parameters in a multi-chamber process tool |
| PCT/US2000/025723 WO2001050206A1 (en) | 2000-01-03 | 2000-09-20 | Wafer manufacturing control |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003519444A JP2003519444A (ja) | 2003-06-17 |
| JP2003519444A5 true JP2003519444A5 (enExample) | 2007-11-08 |
Family
ID=23893672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001550501A Pending JP2003519444A (ja) | 2000-01-03 | 2000-09-20 | ウェハ製造制御 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6684122B1 (enExample) |
| EP (1) | EP1254401B1 (enExample) |
| JP (1) | JP2003519444A (enExample) |
| KR (1) | KR100747126B1 (enExample) |
| DE (1) | DE60011143T2 (enExample) |
| WO (1) | WO2001050206A1 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9785140B2 (en) * | 2000-02-01 | 2017-10-10 | Peer Intellectual Property Inc. | Multi-protocol multi-client equipment server |
| JP4348412B2 (ja) * | 2001-04-26 | 2009-10-21 | 東京エレクトロン株式会社 | 計測システムクラスター |
| US7089075B2 (en) * | 2001-05-04 | 2006-08-08 | Tokyo Electron Limited | Systems and methods for metrology recipe and model generation |
| US6657716B1 (en) * | 2001-05-23 | 2003-12-02 | Advanced Micro Devices Inc. | Method and apparatus for detecting necking over field/active transitions |
| US7047099B2 (en) | 2001-06-19 | 2006-05-16 | Applied Materials Inc. | Integrating tool, module, and fab level control |
| US7082345B2 (en) | 2001-06-19 | 2006-07-25 | Applied Materials, Inc. | Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities |
| DE10151259A1 (de) * | 2001-10-17 | 2003-04-30 | Aixtron Ag | Verfahren und Vorrichtung zur Gewinnung von Korrelations-Werten aus Prozessparametern und Schichteigenschaften in einem CVD-Prozess |
| DE10240115B4 (de) | 2002-08-30 | 2004-10-28 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren und System zum Handhaben von Substraten in einer Produktionslinie mit einer Cluster-Anlage und einer Messanlage |
| US6957119B2 (en) * | 2002-09-09 | 2005-10-18 | Macronix International Co., Ltd. | Method for monitoring matched machine overlay |
| US7376472B2 (en) * | 2002-09-11 | 2008-05-20 | Fisher-Rosemount Systems, Inc. | Integrated model predictive control and optimization within a process control system |
| US7369913B2 (en) * | 2004-04-02 | 2008-05-06 | Siemens Medical Solutions Usa, Inc. | Recipe editor and controller |
| US6980873B2 (en) | 2004-04-23 | 2005-12-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environment |
| US7437404B2 (en) * | 2004-05-20 | 2008-10-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for improving equipment communication in semiconductor manufacturing equipment |
| US7206532B2 (en) * | 2004-08-13 | 2007-04-17 | Xerox Corporation | Multiple object sources controlled and/or selected based on a common sensor |
| US20060079983A1 (en) * | 2004-10-13 | 2006-04-13 | Tokyo Electron Limited | R2R controller to automate the data collection during a DOE |
| US7620516B2 (en) | 2005-05-02 | 2009-11-17 | Mks Instruments, Inc. | Versatile semiconductor manufacturing controller with statistically repeatable response times |
| JP2007123643A (ja) | 2005-10-31 | 2007-05-17 | Matsushita Electric Ind Co Ltd | 成膜装置、成膜方法、成膜装置のモニタリングプログラムおよびその記録媒体 |
| JP4925650B2 (ja) * | 2005-11-28 | 2012-05-09 | 東京エレクトロン株式会社 | 基板処理装置 |
| US8180594B2 (en) * | 2007-09-06 | 2012-05-15 | Asm International, N.V. | System and method for automated customizable error diagnostics |
| US20100063610A1 (en) * | 2008-09-08 | 2010-03-11 | David Angell | Method of process modules performance matching |
| US9177219B2 (en) * | 2010-07-09 | 2015-11-03 | Asml Netherlands B.V. | Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product |
| US9606519B2 (en) | 2013-10-14 | 2017-03-28 | Applied Materials, Inc. | Matching process controllers for improved matching of process |
| JP6211960B2 (ja) * | 2014-03-13 | 2017-10-11 | 東京エレクトロン株式会社 | 制御装置、基板処理装置及び基板処理システム |
| KR102238648B1 (ko) * | 2014-06-03 | 2021-04-09 | 삼성전자주식회사 | 반도체 공정 관리 시스템, 이를 포함하는 반도체 제조 시스템 및 반도체 제조 방법 |
| TWI797187B (zh) | 2017-11-03 | 2023-04-01 | 日商東京威力科創股份有限公司 | 功能微電子元件之良率提高 |
| US11244873B2 (en) | 2018-10-31 | 2022-02-08 | Tokyo Electron Limited | Systems and methods for manufacturing microelectronic devices |
| JP7529363B2 (ja) * | 2020-08-31 | 2024-08-06 | 東京エレクトロン株式会社 | 半導体製造システム、制御装置、制御方法及びプログラム |
| US11868119B2 (en) | 2021-09-24 | 2024-01-09 | Tokyo Electron Limited | Method and process using fingerprint based semiconductor manufacturing process fault detection |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5126028A (en) | 1989-04-17 | 1992-06-30 | Materials Research Corporation | Sputter coating process control method and apparatus |
| US5270222A (en) | 1990-12-31 | 1993-12-14 | Texas Instruments Incorporated | Method and apparatus for semiconductor device fabrication diagnosis and prognosis |
| JP2742170B2 (ja) * | 1992-02-17 | 1998-04-22 | 山形日本電気株式会社 | 半導体装置の製造システム |
| US5812261A (en) * | 1992-07-08 | 1998-09-22 | Active Impulse Systems, Inc. | Method and device for measuring the thickness of opaque and transparent films |
| US5555177A (en) | 1994-05-27 | 1996-09-10 | Ontrak Systems, Inc. | Method and apparatus for resetting individual processes in a control system |
| US5614247A (en) * | 1994-09-30 | 1997-03-25 | International Business Machines Corporation | Apparatus for chemical vapor deposition of aluminum oxide |
| US5715361A (en) * | 1995-04-13 | 1998-02-03 | Cvc Products, Inc. | Rapid thermal processing high-performance multizone illuminator for wafer backside heating |
| US5665214A (en) | 1995-05-03 | 1997-09-09 | Sony Corporation | Automatic film deposition control method and system |
| US5536317A (en) * | 1995-10-27 | 1996-07-16 | Specialty Coating Systems, Inc. | Parylene deposition apparatus including a quartz crystal thickness/rate controller |
| JP2965002B2 (ja) | 1997-06-20 | 1999-10-18 | 日本電気株式会社 | 半導体記憶装置 |
| JPH1116973A (ja) * | 1997-06-26 | 1999-01-22 | Hitachi Ltd | 半導体装置製造方法及びその半導体装置製造方法で製造された半導体装置 |
| EP0932194A1 (en) * | 1997-12-30 | 1999-07-28 | International Business Machines Corporation | Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision |
| JP4271745B2 (ja) * | 1998-05-15 | 2009-06-03 | 浜松ホトニクス株式会社 | 半導体製造装置制御システム |
| US6303395B1 (en) * | 1999-06-01 | 2001-10-16 | Applied Materials, Inc. | Semiconductor processing techniques |
| FR2808098B1 (fr) * | 2000-04-20 | 2002-07-19 | Cit Alcatel | Procede et dispositif de conditionnement de l'atmosphere dans une chambre de procedes |
-
2000
- 2000-01-03 US US09/476,892 patent/US6684122B1/en not_active Expired - Lifetime
- 2000-09-20 EP EP00961970A patent/EP1254401B1/en not_active Expired - Lifetime
- 2000-09-20 WO PCT/US2000/025723 patent/WO2001050206A1/en not_active Ceased
- 2000-09-20 DE DE60011143T patent/DE60011143T2/de not_active Expired - Lifetime
- 2000-09-20 JP JP2001550501A patent/JP2003519444A/ja active Pending
- 2000-09-20 KR KR1020027008329A patent/KR100747126B1/ko not_active Expired - Fee Related