JP2003510529A - 比例圧力又は流れ制御用の呼び出し可能な弁配列 - Google Patents

比例圧力又は流れ制御用の呼び出し可能な弁配列

Info

Publication number
JP2003510529A
JP2003510529A JP2001525099A JP2001525099A JP2003510529A JP 2003510529 A JP2003510529 A JP 2003510529A JP 2001525099 A JP2001525099 A JP 2001525099A JP 2001525099 A JP2001525099 A JP 2001525099A JP 2003510529 A JP2003510529 A JP 2003510529A
Authority
JP
Japan
Prior art keywords
pressure
valve
valves
array
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2001525099A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003510529A5 (enExample
Inventor
オーンスタイン，トーマス・アール
カブズ，ユージーン・エル
Original Assignee
ハネウェル・インコーポレーテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ハネウェル・インコーポレーテッド filed Critical ハネウェル・インコーポレーテッド
Publication of JP2003510529A publication Critical patent/JP2003510529A/ja
Publication of JP2003510529A5 publication Critical patent/JP2003510529A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
    • F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
    • F15B11/04—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed
    • F15B11/042—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed by means in the feed line, i.e. "meter in"
    • F15B11/0426—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed by means in the feed line, i.e. "meter in" by controlling the number of pumps or parallel valves switched on
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0007—Lift valves of cantilever type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0694—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means or flow sources of very small size, e.g. microfluidics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40507—Flow control characterised by the type of flow control means or valve with constant throttles or orifices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40515—Flow control characterised by the type of flow control means or valve with variable throttles or orifices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40576—Assemblies of multiple valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/45—Control of bleed-off flow, e.g. control of bypass flow to the return line
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/455—Control of flow in the feed line, i.e. meter-in control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/87298—Having digital flow controller
    • Y10T137/87306—Having plural branches under common control for separate valve actuators
    • Y10T137/87314—Electromagnetic or electric control [e.g., digital control, bistable electro control, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Fluid Pressure (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Flow Control (AREA)
  • Servomotors (AREA)
  • Paper (AREA)
  • Fluid-Pressure Circuits (AREA)
JP2001525099A 1999-09-23 2000-09-22 比例圧力又は流れ制御用の呼び出し可能な弁配列 Withdrawn JP2003510529A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/404,560 US6240944B1 (en) 1999-09-23 1999-09-23 Addressable valve arrays for proportional pressure or flow control
US09/404,560 1999-09-23
PCT/US2000/026132 WO2001021962A1 (en) 1999-09-23 2000-09-22 Addressable valve arrays for proportional pressure or flow control

Publications (2)

Publication Number Publication Date
JP2003510529A true JP2003510529A (ja) 2003-03-18
JP2003510529A5 JP2003510529A5 (enExample) 2007-10-25

Family

ID=23600100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001525099A Withdrawn JP2003510529A (ja) 1999-09-23 2000-09-22 比例圧力又は流れ制御用の呼び出し可能な弁配列

Country Status (8)

Country Link
US (1) US6240944B1 (enExample)
EP (1) EP1214523B1 (enExample)
JP (1) JP2003510529A (enExample)
AT (1) ATE272798T1 (enExample)
AU (1) AU4018801A (enExample)
CA (1) CA2385855A1 (enExample)
DE (1) DE60012759T2 (enExample)
WO (1) WO2001021962A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005003200A (ja) * 2003-06-11 2005-01-06 Lg Electron Inc マイクロアクチュエータ及びその製造方法並びにマイクロ作動バルブ
JP4824084B2 (ja) * 2005-04-25 2011-11-24 ハネウェル・インターナショナル・インコーポレーテッド カートリッジの流れ制御システム

Families Citing this family (77)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7978329B2 (en) * 2000-08-02 2011-07-12 Honeywell International Inc. Portable scattering and fluorescence cytometer
US7262838B2 (en) * 2001-06-29 2007-08-28 Honeywell International Inc. Optical detection system for flow cytometry
US6700130B2 (en) 2001-06-29 2004-03-02 Honeywell International Inc. Optical detection system for flow cytometry
US20060263888A1 (en) * 2000-06-02 2006-11-23 Honeywell International Inc. Differential white blood count on a disposable card
US7283223B2 (en) * 2002-08-21 2007-10-16 Honeywell International Inc. Cytometer having telecentric optics
US7016022B2 (en) * 2000-08-02 2006-03-21 Honeywell International Inc. Dual use detectors for flow cytometry
US8071051B2 (en) * 2004-05-14 2011-12-06 Honeywell International Inc. Portable sample analyzer cartridge
US7630063B2 (en) * 2000-08-02 2009-12-08 Honeywell International Inc. Miniaturized cytometer for detecting multiple species in a sample
US7471394B2 (en) * 2000-08-02 2008-12-30 Honeywell International Inc. Optical detection system with polarizing beamsplitter
US7242474B2 (en) * 2004-07-27 2007-07-10 Cox James A Cytometer having fluid core stream position control
US8329118B2 (en) * 2004-09-02 2012-12-11 Honeywell International Inc. Method and apparatus for determining one or more operating parameters for a microfluidic circuit
US8383043B2 (en) * 2004-05-14 2013-02-26 Honeywell International Inc. Analyzer system
US6837476B2 (en) * 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US7641856B2 (en) * 2004-05-14 2010-01-05 Honeywell International Inc. Portable sample analyzer with removable cartridge
US7130046B2 (en) * 2004-09-27 2006-10-31 Honeywell International Inc. Data frame selection for cytometer analysis
US7277166B2 (en) * 2000-08-02 2007-10-02 Honeywell International Inc. Cytometer analysis cartridge optical configuration
US7061595B2 (en) * 2000-08-02 2006-06-13 Honeywell International Inc. Miniaturized flow controller with closed loop regulation
US6490960B1 (en) * 2001-07-11 2002-12-10 Xerox Corporation Muscle-emulating PC board actuator
US6637476B2 (en) 2002-04-01 2003-10-28 Protedyne Corporation Robotically manipulable sample handling tool
US7008193B2 (en) * 2002-05-13 2006-03-07 The Regents Of The University Of Michigan Micropump assembly for a microgas chromatograph and the like
TW590982B (en) * 2002-09-27 2004-06-11 Agnitio Science & Technology I Micro-fluid driving device
US7249529B2 (en) * 2003-03-28 2007-07-31 Protedyne Corporation Robotically manipulable sample handling tool
US7038824B2 (en) * 2003-11-18 2006-05-02 Honeywell International Inc. Dynamic reflector array and method of making the same
US7612871B2 (en) * 2004-09-01 2009-11-03 Honeywell International Inc Frequency-multiplexed detection of multiple wavelength light for flow cytometry
US7630075B2 (en) 2004-09-27 2009-12-08 Honeywell International Inc. Circular polarization illumination based analyzer system
US7168675B2 (en) * 2004-12-21 2007-01-30 Honeywell International Inc. Media isolated electrostatically actuated valve
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
US7688427B2 (en) * 2005-04-29 2010-03-30 Honeywell International Inc. Particle parameter determination system
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
US8034296B2 (en) 2005-07-01 2011-10-11 Honeywell International Inc. Microfluidic card for RBC analysis
WO2007005907A1 (en) 2005-07-01 2007-01-11 Honeywell International, Inc. A molded cartridge with 3-d hydrodynamic focusing
US8361410B2 (en) 2005-07-01 2013-01-29 Honeywell International Inc. Flow metered analyzer
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US7843563B2 (en) * 2005-08-16 2010-11-30 Honeywell International Inc. Light scattering and imaging optical system
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
US7624755B2 (en) 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
EP1963819A2 (en) 2005-12-22 2008-09-03 Honeywell International, Inc. Portable sample analyzer system
WO2007075922A2 (en) 2005-12-22 2007-07-05 Honeywell International Inc. Portable sample analyzer cartridge
EP1966588B1 (en) 2005-12-29 2018-12-12 Honeywell International Inc. Assay implementation in a microfluidic format
US7523762B2 (en) 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
US8007704B2 (en) * 2006-07-20 2011-08-30 Honeywell International Inc. Insert molded actuator components
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
JP2009083382A (ja) * 2007-10-01 2009-04-23 Brother Ind Ltd 画像形成装置および画像処理プログラム
US20100034704A1 (en) * 2008-08-06 2010-02-11 Honeywell International Inc. Microfluidic cartridge channel with reduced bubble formation
US8037354B2 (en) 2008-09-18 2011-10-11 Honeywell International Inc. Apparatus and method for operating a computing platform without a battery pack
JP5646956B2 (ja) * 2010-11-04 2014-12-24 東京エレクトロン株式会社 液体流量制御装置、液体流量制御方法および記憶媒体
US8973613B2 (en) * 2011-04-27 2015-03-10 Google Inc. Electrorheological valve
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US8741233B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
US8663583B2 (en) 2011-12-27 2014-03-04 Honeywell International Inc. Disposable cartridge for fluid analysis
US8741234B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
US8741235B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Two step sample loading of a fluid analysis cartridge
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
EP2868970B1 (en) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regulating device
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10330212B2 (en) 2016-01-27 2019-06-25 Regents Of The University Of Minnesota Fluidic control valve with small displacement actuators
US11067187B2 (en) 2016-01-27 2021-07-20 Regents Of The University Of Minnesota Fluidic control valve with small displacement actuators
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3726296A (en) * 1971-08-09 1973-04-10 Process Systems Fluidic control system and method for calibrating same
US3827457A (en) * 1973-06-22 1974-08-06 Westinghouse Air Brake Co Fluid pressure system for converting digital signals to analog signals
US5244537A (en) 1989-12-27 1993-09-14 Honeywell, Inc. Fabrication of an electronic microvalve apparatus
US5082242A (en) 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
US5180623A (en) 1989-12-27 1993-01-19 Honeywell Inc. Electronic microvalve apparatus and fabrication
US5176358A (en) 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
US5441597A (en) 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
US5368704A (en) 1993-08-06 1994-11-29 Teknekron Corporation Micro-electrochemical valves and method
US5897097A (en) 1996-09-06 1999-04-27 Xerox Corporation Passively addressable fluid valves having S-shaped blocking films
US5927325A (en) * 1996-10-25 1999-07-27 Inpod, Inc. Microelectromechanical machined array valve
DE19724447A1 (de) * 1997-06-10 1998-12-17 Buerkert Werke Gmbh & Co Verfahren zum Herstellen eines digitalen Proportionalventils und Proportionalventil
US5901939A (en) * 1997-10-09 1999-05-11 Honeywell Inc. Buckled actuator with enhanced restoring force
US5822170A (en) 1997-10-09 1998-10-13 Honeywell Inc. Hydrophobic coating for reducing humidity effect in electrostatic actuators

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005003200A (ja) * 2003-06-11 2005-01-06 Lg Electron Inc マイクロアクチュエータ及びその製造方法並びにマイクロ作動バルブ
JP4824084B2 (ja) * 2005-04-25 2011-11-24 ハネウェル・インターナショナル・インコーポレーテッド カートリッジの流れ制御システム

Also Published As

Publication number Publication date
WO2001021962A1 (en) 2001-03-29
ATE272798T1 (de) 2004-08-15
EP1214523A1 (en) 2002-06-19
DE60012759T2 (de) 2005-08-25
DE60012759D1 (de) 2004-09-09
CA2385855A1 (en) 2001-03-29
AU4018801A (en) 2001-04-24
EP1214523B1 (en) 2004-08-04
US6240944B1 (en) 2001-06-05

Similar Documents

Publication Publication Date Title
JP2003510529A (ja) 比例圧力又は流れ制御用の呼び出し可能な弁配列
DE60033410T2 (de) Doppelmembranpumpe
CN101668973B (zh) 先导式滑阀
US6382588B1 (en) Microvalve
JPH06323457A (ja) 圧電形圧力制御弁
CA2453367A1 (en) Choke valve assembly for downhole flow control
US5772114A (en) Individually controlled nozzle valve system for application of liquid fertilizer/chemicals
WO1990015933A1 (de) Mikroventil
CN100526659C (zh) 双级伺服阀
JP2002349383A (ja) 燃料噴射弁
JP3764608B2 (ja) ロケットエンジンの燃焼ガス制御装置
JPH11265216A (ja) 圧力式流量制御装置
EP0656997A1 (de) Mikrominiaturisierbares ventil
KR100837531B1 (ko) 챔버 도어 구동 시스템
JPH0624276U (ja) リリーフバルブ
JPH0562675B2 (enExample)
JPH0842504A (ja) 流体増幅器
JP2003347225A (ja) 半導体製造装置における排気流体の制御装置
JPH05620Y2 (enExample)
JPS6144004Y2 (enExample)
JPH0374609A (ja) 流量制御回路
JPS63318301A (ja) 流体制御装置
JP2002081565A (ja) 電動制御弁駆動装置
JPS5919802Y2 (ja) エンジンの排気ガス浄化装置
JPH07108885A (ja) 作業用車両

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070905

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070905

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20081020