DE60012759D1 - Adressierbare ventilanordnungen zur proportionalen druck- oder durchflusssteuerung - Google Patents

Adressierbare ventilanordnungen zur proportionalen druck- oder durchflusssteuerung

Info

Publication number
DE60012759D1
DE60012759D1 DE60012759T DE60012759T DE60012759D1 DE 60012759 D1 DE60012759 D1 DE 60012759D1 DE 60012759 T DE60012759 T DE 60012759T DE 60012759 T DE60012759 T DE 60012759T DE 60012759 D1 DE60012759 D1 DE 60012759D1
Authority
DE
Germany
Prior art keywords
pressure
valves
array
exit
addressable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60012759T
Other languages
English (en)
Other versions
DE60012759T2 (de
Inventor
R Ohnstein
L Cabuz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of DE60012759D1 publication Critical patent/DE60012759D1/de
Publication of DE60012759T2 publication Critical patent/DE60012759T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
    • F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
    • F15B11/04—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed
    • F15B11/042—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed by means in the feed line, i.e. "meter in"
    • F15B11/0426—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed by means in the feed line, i.e. "meter in" by controlling the number of pumps or parallel valves switched on
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0007—Lift valves of cantilever type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0694—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means or flow sources of very small size, e.g. microfluidics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40507—Flow control characterised by the type of flow control means or valve with constant throttles or orifices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40515—Flow control characterised by the type of flow control means or valve with variable throttles or orifices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40576—Assemblies of multiple valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/45—Control of bleed-off flow, e.g. control of bypass flow to the return line
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/455—Control of flow in the feed line, i.e. meter-in control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/87298—Having digital flow controller
    • Y10T137/87306—Having plural branches under common control for separate valve actuators
    • Y10T137/87314—Electromagnetic or electric control [e.g., digital control, bistable electro control, etc.]
DE60012759T 1999-09-23 2000-09-22 Adressierbare ventilanordnungen zur proportionalen druck- oder durchflusssteuerung Expired - Fee Related DE60012759T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US404560 1995-03-15
US09/404,560 US6240944B1 (en) 1999-09-23 1999-09-23 Addressable valve arrays for proportional pressure or flow control
PCT/US2000/026132 WO2001021962A1 (en) 1999-09-23 2000-09-22 Addressable valve arrays for proportional pressure or flow control

Publications (2)

Publication Number Publication Date
DE60012759D1 true DE60012759D1 (de) 2004-09-09
DE60012759T2 DE60012759T2 (de) 2005-08-25

Family

ID=23600100

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60012759T Expired - Fee Related DE60012759T2 (de) 1999-09-23 2000-09-22 Adressierbare ventilanordnungen zur proportionalen druck- oder durchflusssteuerung

Country Status (8)

Country Link
US (1) US6240944B1 (de)
EP (1) EP1214523B1 (de)
JP (1) JP2003510529A (de)
AT (1) ATE272798T1 (de)
AU (1) AU4018801A (de)
CA (1) CA2385855A1 (de)
DE (1) DE60012759T2 (de)
WO (1) WO2001021962A1 (de)

Families Citing this family (77)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8329118B2 (en) * 2004-09-02 2012-12-11 Honeywell International Inc. Method and apparatus for determining one or more operating parameters for a microfluidic circuit
US7641856B2 (en) * 2004-05-14 2010-01-05 Honeywell International Inc. Portable sample analyzer with removable cartridge
US8071051B2 (en) 2004-05-14 2011-12-06 Honeywell International Inc. Portable sample analyzer cartridge
US6700130B2 (en) 2001-06-29 2004-03-02 Honeywell International Inc. Optical detection system for flow cytometry
US7242474B2 (en) * 2004-07-27 2007-07-10 Cox James A Cytometer having fluid core stream position control
US7130046B2 (en) * 2004-09-27 2006-10-31 Honeywell International Inc. Data frame selection for cytometer analysis
US6837476B2 (en) * 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US7016022B2 (en) * 2000-08-02 2006-03-21 Honeywell International Inc. Dual use detectors for flow cytometry
US7630063B2 (en) * 2000-08-02 2009-12-08 Honeywell International Inc. Miniaturized cytometer for detecting multiple species in a sample
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US7978329B2 (en) * 2000-08-02 2011-07-12 Honeywell International Inc. Portable scattering and fluorescence cytometer
US7283223B2 (en) * 2002-08-21 2007-10-16 Honeywell International Inc. Cytometer having telecentric optics
US7262838B2 (en) * 2001-06-29 2007-08-28 Honeywell International Inc. Optical detection system for flow cytometry
US20060263888A1 (en) * 2000-06-02 2006-11-23 Honeywell International Inc. Differential white blood count on a disposable card
US7471394B2 (en) * 2000-08-02 2008-12-30 Honeywell International Inc. Optical detection system with polarizing beamsplitter
US7061595B2 (en) * 2000-08-02 2006-06-13 Honeywell International Inc. Miniaturized flow controller with closed loop regulation
US7277166B2 (en) * 2000-08-02 2007-10-02 Honeywell International Inc. Cytometer analysis cartridge optical configuration
US6490960B1 (en) * 2001-07-11 2002-12-10 Xerox Corporation Muscle-emulating PC board actuator
US6637476B2 (en) 2002-04-01 2003-10-28 Protedyne Corporation Robotically manipulable sample handling tool
US7008193B2 (en) * 2002-05-13 2006-03-07 The Regents Of The University Of Michigan Micropump assembly for a microgas chromatograph and the like
TW590982B (en) * 2002-09-27 2004-06-11 Agnitio Science & Technology I Micro-fluid driving device
US7249529B2 (en) * 2003-03-28 2007-07-31 Protedyne Corporation Robotically manipulable sample handling tool
JP2005003200A (ja) * 2003-06-11 2005-01-06 Lg Electron Inc マイクロアクチュエータ及びその製造方法並びにマイクロ作動バルブ
US7038824B2 (en) * 2003-11-18 2006-05-02 Honeywell International Inc. Dynamic reflector array and method of making the same
US7612871B2 (en) * 2004-09-01 2009-11-03 Honeywell International Inc Frequency-multiplexed detection of multiple wavelength light for flow cytometry
US7630075B2 (en) 2004-09-27 2009-12-08 Honeywell International Inc. Circular polarization illumination based analyzer system
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7168675B2 (en) * 2004-12-21 2007-01-30 Honeywell International Inc. Media isolated electrostatically actuated valve
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
EP1875200A1 (de) * 2005-04-29 2008-01-09 Honeywell International Inc. Zytometerbasiertes verfahren zur zellzählung und grössenmessung
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
EP1902298B1 (de) 2005-07-01 2012-01-18 Honeywell International Inc. Geformte kassette mit dreidimensionaler hydrodynamischer fokussierung
US8034296B2 (en) 2005-07-01 2011-10-11 Honeywell International Inc. Microfluidic card for RBC analysis
WO2007005974A2 (en) 2005-07-01 2007-01-11 Honeywell International, Inc. A flow metered analyzer
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US7843563B2 (en) * 2005-08-16 2010-11-30 Honeywell International Inc. Light scattering and imaging optical system
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
JP2009521684A (ja) 2005-12-22 2009-06-04 ハネウェル・インターナショナル・インコーポレーテッド 携帯用サンプル分析装置のカートリッジ
WO2007075920A2 (en) * 2005-12-22 2007-07-05 Honeywell International Inc. Hematological analyzer system with removable cartridge
WO2007075919A2 (en) 2005-12-22 2007-07-05 Honeywell International Inc. Portable sample analyzer system
WO2007076549A2 (en) 2005-12-29 2007-07-05 Honeywell International Inc. Assay implementation in a microfluidic format
US8007704B2 (en) * 2006-07-20 2011-08-30 Honeywell International Inc. Insert molded actuator components
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
JP2009083382A (ja) * 2007-10-01 2009-04-23 Brother Ind Ltd 画像形成装置および画像処理プログラム
US20100034704A1 (en) * 2008-08-06 2010-02-11 Honeywell International Inc. Microfluidic cartridge channel with reduced bubble formation
US8037354B2 (en) 2008-09-18 2011-10-11 Honeywell International Inc. Apparatus and method for operating a computing platform without a battery pack
JP5646956B2 (ja) * 2010-11-04 2014-12-24 東京エレクトロン株式会社 液体流量制御装置、液体流量制御方法および記憶媒体
US8973613B2 (en) * 2011-04-27 2015-03-10 Google Inc. Electrorheological valve
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8741233B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
US8741235B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Two step sample loading of a fluid analysis cartridge
US8741234B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
US8663583B2 (en) 2011-12-27 2014-03-04 Honeywell International Inc. Disposable cartridge for fluid analysis
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US11067187B2 (en) 2016-01-27 2021-07-20 Regents Of The University Of Minnesota Fluidic control valve with small displacement actuators
US10330212B2 (en) 2016-01-27 2019-06-25 Regents Of The University Of Minnesota Fluidic control valve with small displacement actuators
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3726296A (en) * 1971-08-09 1973-04-10 Process Systems Fluidic control system and method for calibrating same
US3827457A (en) * 1973-06-22 1974-08-06 Westinghouse Air Brake Co Fluid pressure system for converting digital signals to analog signals
US5180623A (en) 1989-12-27 1993-01-19 Honeywell Inc. Electronic microvalve apparatus and fabrication
US5244537A (en) 1989-12-27 1993-09-14 Honeywell, Inc. Fabrication of an electronic microvalve apparatus
US5082242A (en) 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
US5176358A (en) 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
US5441597A (en) 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
US5368704A (en) 1993-08-06 1994-11-29 Teknekron Corporation Micro-electrochemical valves and method
US5897097A (en) 1996-09-06 1999-04-27 Xerox Corporation Passively addressable fluid valves having S-shaped blocking films
US5927325A (en) * 1996-10-25 1999-07-27 Inpod, Inc. Microelectromechanical machined array valve
DE19724447A1 (de) * 1997-06-10 1998-12-17 Buerkert Werke Gmbh & Co Verfahren zum Herstellen eines digitalen Proportionalventils und Proportionalventil
US5901939A (en) * 1997-10-09 1999-05-11 Honeywell Inc. Buckled actuator with enhanced restoring force
US5822170A (en) 1997-10-09 1998-10-13 Honeywell Inc. Hydrophobic coating for reducing humidity effect in electrostatic actuators

Also Published As

Publication number Publication date
JP2003510529A (ja) 2003-03-18
CA2385855A1 (en) 2001-03-29
US6240944B1 (en) 2001-06-05
AU4018801A (en) 2001-04-24
ATE272798T1 (de) 2004-08-15
DE60012759T2 (de) 2005-08-25
EP1214523B1 (de) 2004-08-04
EP1214523A1 (de) 2002-06-19
WO2001021962A1 (en) 2001-03-29

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