JP2003500854A5 - - Google Patents

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Publication number
JP2003500854A5
JP2003500854A5 JP2000620661A JP2000620661A JP2003500854A5 JP 2003500854 A5 JP2003500854 A5 JP 2003500854A5 JP 2000620661 A JP2000620661 A JP 2000620661A JP 2000620661 A JP2000620661 A JP 2000620661A JP 2003500854 A5 JP2003500854 A5 JP 2003500854A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000620661A
Other versions
JP4931280B2 (ja
JP2003500854A (ja
Filing date
Publication date
Priority claimed from US09/316,677 external-priority patent/US6202482B1/en
Application filed filed Critical
Publication of JP2003500854A publication Critical patent/JP2003500854A/ja
Publication of JP2003500854A5 publication Critical patent/JP2003500854A5/ja
Application granted granted Critical
Publication of JP4931280B2 publication Critical patent/JP4931280B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000620661A 1999-05-21 2000-05-19 シート状材料の試験方法および装置 Expired - Fee Related JP4931280B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/316,677 US6202482B1 (en) 1998-03-23 1999-05-21 Method and apparatus for testing of sheet material
US09/316,677 1999-05-21
PCT/US2000/013926 WO2000072361A2 (en) 1999-05-21 2000-05-19 Apparatus and method for testing of sheet material

Publications (3)

Publication Number Publication Date
JP2003500854A JP2003500854A (ja) 2003-01-07
JP2003500854A5 true JP2003500854A5 (ja) 2007-07-05
JP4931280B2 JP4931280B2 (ja) 2012-05-16

Family

ID=23230155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000620661A Expired - Fee Related JP4931280B2 (ja) 1999-05-21 2000-05-19 シート状材料の試験方法および装置

Country Status (6)

Country Link
US (4) US6202482B1 (ja)
EP (1) EP1194764A2 (ja)
JP (1) JP4931280B2 (ja)
KR (1) KR100718029B1 (ja)
AU (1) AU5149700A (ja)
WO (1) WO2000072361A2 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6631935B1 (en) 2000-08-04 2003-10-14 Tru-Si Technologies, Inc. Detection and handling of semiconductor wafer and wafer-like objects
US6615113B2 (en) * 2001-07-13 2003-09-02 Tru-Si Technologies, Inc. Articles holders with sensors detecting a type of article held by the holder
US6935830B2 (en) * 2001-07-13 2005-08-30 Tru-Si Technologies, Inc. Alignment of semiconductor wafers and other articles
US6638004B2 (en) 2001-07-13 2003-10-28 Tru-Si Technologies, Inc. Article holders and article positioning methods
US8207748B2 (en) * 2004-08-11 2012-06-26 Lehighton Electronics, Inc. Device and handling system for measurement of mobility and sheet charge density
JP5795139B2 (ja) 2005-11-14 2015-10-14 リハイトン エレクトロニクス シート伝導度／シート抵抗測定システム
JP5696135B2 (ja) * 2009-03-30 2015-04-08 エーティーエス オートメーション ツーリング システムズ インコーポレイテッドＡｔｓ Ａｕｔｏｍａｔｉｏｎ Ｔｏｏｌｉｎｇ Ｓｙｓｔｅｍｓ Ｉｎｃ． ウエハーハンドリングシステムおよびその方法
US20150316386A1 (en) 2014-04-30 2015-11-05 Toyota Motor Engineering & Manufacturing North America, Inc. Detailed map format for autonomous driving
US20150316387A1 (en) 2014-04-30 2015-11-05 Toyota Motor Engineering & Manufacturing North America, Inc. Detailed map format for autonomous driving
US10867824B2 (en) * 2018-05-29 2020-12-15 Taiwan Semiconductor Manufacturing Co., Ltd. Substrate detecting system in a substrate storage container

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JP3131750B2 (ja) 1992-10-20 2001-02-05 東京エレクトロン株式会社 被処理体検出装置及び方法
US5479108A (en) 1992-11-25 1995-12-26 David Cheng Method and apparatus for handling wafers
KR100291110B1 (ko) * 1993-06-19 2001-06-01 히가시 데쓰로 프로우브장치 및 그것을 사용한 피검사체의 검사방법
US5488292A (en) 1993-10-04 1996-01-30 Tokyo Seimitsu Co., Ltd. Wafer inspecting system
US5466945A (en) 1994-03-23 1995-11-14 Eaton Corporation Apparatus for detecting proper positioning of objects in a holder
JPH08250558A (ja) * 1995-03-10 1996-09-27 Tokyo Seimitsu Co Ltd ウェーハプローバ
US5609333A (en) 1995-10-05 1997-03-11 Xerox Corporation Sheet stack height control system
KR100193807B1 (ko) * 1995-10-20 1999-06-15 윤종용 용지감지에 따른 전사전압 자동변경장치 및 그 방법
JPH09306970A (ja) * 1996-05-10 1997-11-28 Komatsu Ltd ウエハカセット設置装置及びウエハ検査装置
US5738014A (en) * 1996-07-31 1998-04-14 Agfa Division, Bayer Corporation Method and apparatus for making lithographic printing plates in an automated computer to plate imaging system
US5961226A (en) * 1996-08-16 1999-10-05 Ricoh Company, Ltd. Printing apparatus
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US6421139B1 (en) * 1997-02-28 2002-07-16 Canon Kabushiki Kaisha Image forming apparatus for forming image on free-size sheet having arbitrary size
JPH10261676A (ja) * 1997-03-17 1998-09-29 Sharp Corp 半導体のウエハテスト方法
DE19728478C2 (de) * 1997-07-03 2003-08-21 Brooks Pri Automation Germany Verfahren zur optoelektronischen Erkennung von scheibenförmigen Objekten unter Nutzung derer Stirnseiten
JPH1138083A (ja) * 1997-07-14 1999-02-12 Advantest Corp Ｉｃテストハンドラ
JPH11121577A (ja) * 1997-10-08 1999-04-30 Mecs Corp 半導体ウェハの検査システム
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WO1999049502A1 (en) * 1998-03-23 1999-09-30 Lehighton Electronics, Inc. Method and apparatus for testing of sheet material
DE19814046C1 (de) * 1998-03-30 1999-11-18 Jenoptik Jena Gmbh Anordnung zur Detektion von scheibenförmigen Objekten in einer Kassette
US6280103B1 (en) * 1999-09-22 2001-08-28 Concord Camera Corp. APS camera for ensuring the cassett indicator is in the parked position

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