JP2001274068A5 - - Google Patents
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- Publication number
- JP2001274068A5 JP2001274068A5 JP2000086867A JP2000086867A JP2001274068A5 JP 2001274068 A5 JP2001274068 A5 JP 2001274068A5 JP 2000086867 A JP2000086867 A JP 2000086867A JP 2000086867 A JP2000086867 A JP 2000086867A JP 2001274068 A5 JP2001274068 A5 JP 2001274068A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000086867A JP2001274068A (ja) | 2000-03-27 | 2000-03-27 | 位置合せ方法、デバイス製造方法、位置合せ装置、および露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000086867A JP2001274068A (ja) | 2000-03-27 | 2000-03-27 | 位置合せ方法、デバイス製造方法、位置合せ装置、および露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001274068A JP2001274068A (ja) | 2001-10-05 |
| JP2001274068A5 true JP2001274068A5 (ja) | 2007-05-17 |
Family
ID=18602967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000086867A Withdrawn JP2001274068A (ja) | 2000-03-27 | 2000-03-27 | 位置合せ方法、デバイス製造方法、位置合せ装置、および露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001274068A (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100809955B1 (ko) * | 2001-11-27 | 2008-03-06 | 삼성전자주식회사 | 포토리소그래피 공정의 얼라인 계측방법 |
| JP2003324055A (ja) | 2002-04-30 | 2003-11-14 | Canon Inc | 管理システム及び装置及び方法並びに露光装置及びその制御方法 |
| JP4018438B2 (ja) | 2002-04-30 | 2007-12-05 | キヤノン株式会社 | 半導体露光装置を管理する管理システム |
| JP2007306024A (ja) * | 2007-07-17 | 2007-11-22 | Canon Inc | 位置決め方法 |
| CN114089606A (zh) * | 2021-11-24 | 2022-02-25 | 深圳市尊绅投资有限公司 | 通过监控掩膜版补偿制程偏移量的方法和装置 |
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2000
- 2000-03-27 JP JP2000086867A patent/JP2001274068A/ja not_active Withdrawn