JP2003340710A - Ultrasonic machining apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic machining apparatus capable of surely preventing intrusion of abrasion grains between a work and a reference face of a jig by closely bringing the work into contact with the reference face of the jig with high accuracy. <P>SOLUTION: The ultrasonic perforating apparatus 1 creates the shape corresponding to the shape of a tool, on the work 13 by vibrating the tool 9 by ultrasonic wave, and transmitting the abrasive grains existing between the tool and the work 13 by the vibration. The jig 12 for fixing the work 13 of the ultrasonic perforating apparatus 1 is provided with an air flow passage 12c having an opening part 12b on the reference face 12a of the jig 12. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic machining device for machining by ultrasonic vibration.

[0002]

2. Description of the Related Art Conventionally, an ultrasonic machining apparatus having an ultrasonic vibrator and a horn connected to the ultrasonic vibrator to which a tool is attached is generally known. With this configuration, the workpiece is set on the jig of the ultrasonic processing apparatus, and the apparatus is driven while supplying the abrasive grains around the tool. Then, the ultrasonic vibration from the ultrasonic vibrator is transmitted to the tool via the horn. When the vibration of the tool hits the work piece through the abrasive grains, the surface of the work piece is processed into a shape that follows the surface of the tool.

In the above ultrasonic machining apparatus, if the work piece is not placed in close contact with the jig, extra abrasive grains will enter between the work piece and the abrasive grains. If machining is performed in such a state, the reference surface that holds the workpiece gradually becomes rough, and the workpiece cannot be stably mounted on the jig, and the mounting accuracy deteriorates. Resulting in.
As a result, there arises a problem that the workpiece is not properly processed. Therefore, when such a situation is reached, the drive of the device is stopped once and the grinding tool that has entered between the work piece and the jig is stopped so that the work piece can be properly attached to the jig again. Grains are removed, or the jig is removed from the ultrasonic processing device to polish the reference surface.

[0004]

However, when the reference surface of the jig is polished as in the above-described conventional method, it is necessary to remove the jig from the ultrasonic processing apparatus and reattach it after polishing, which is a troublesome work. There is a problem of poor sex.
Further, since the reference surface is polished while the jig is removed from the ultrasonic processing device, the jig reference surface is polished obliquely (biased) with respect to the processing surface of the tool, and In addition, there is a problem in that the direction in which the workpiece is mounted is inclined and the processing accuracy may be reduced. Furthermore, even when processing is performed with the abrasive grains inserted between the work piece and the jig, the wear of the reference surface in one operation is very small, so grasp the progress of progress. It is difficult, and the wear progresses to a considerable extent after many times of machining, and the wear is often noticed only when a defect occurs in the machining, resulting in inefficiency. In addition, the above-mentioned jig reference surface polishing operation is for dealing with a situation (incompatibility between the workpiece and the jig) that occurs due to the inclusion of abrasive grains between the workpiece and the jig. In other words, it can be said that it is a post-treatment.
Therefore, in order to reduce the required number of such polishing operations and reduce the burden of maintenance, it is desired to have a configuration capable of preventing abrasive grains from entering between the workpiece and the jig. Become.

The present invention has been made in view of the above problems, and it is possible to bring a workpiece into close contact with a reference surface of a jig with high accuracy.
An object of the present invention is to provide an ultrasonic processing device that reliably prevents abrasive grains from entering during this period.

[0006]

The problem to be solved by the present invention is as described above, and the means for solving this problem will be described below.

The ultrasonic machining apparatus according to claim 1 vibrates the tool by ultrasonic waves, and transmits the vibration to the abrasive grains interposed between the ultrasonic wave machining tool and the workpiece to form a tool shape on the workpiece. In the ultrasonic processing apparatus for forming a shape following the above, the jig for fixing the workpiece is provided with a ventilation path having an opening on the reference surface of the jig.

According to the above construction, it is possible to send gas between the reference surface of the jig and the workpiece, or conversely, to discharge gas. Therefore, it is possible to prevent the abrasive grains from entering between the reference surface of the jig and the workpiece.

The ultrasonic processing apparatus according to a second aspect is the ultrasonic processing apparatus according to the first aspect, characterized in that the gas is sucked from the opening through the ventilation passage.

According to the above arrangement, the workpiece is brought into close contact with and fixed to the reference surface of the jig by setting the negative pressure between the reference surface of the jig and the workpiece. Since the work piece can be strongly adhered to the jig in this manner, it is possible to prevent the abrasive grains from entering between the work piece and the jig. Further, even if vibration is applied to the work piece by the tool, the work piece is strongly fixed on the jig without floating, so that the processing accuracy is improved and the processing efficiency is also improved. Further, if the state in which the gas is sucked from the opening is released, the work piece can be easily removed from the jig, so that workability is also improved.

According to a third aspect of the present invention, there is provided the ultrasonic processing apparatus according to the first aspect, wherein gas is blown out from the ventilation passage through the opening.

According to the above arrangement, the jet flow from the opening to the outside is formed in the gap between the reference surface of the jig and the workpiece, so that the workpiece is fixed to the jig. It is possible to prevent the abrasive grains from entering the gap.

An ultrasonic processing apparatus according to a fourth aspect is the ultrasonic processing apparatus according to the second or third aspect, wherein a pressure sensor for detecting the pressure in the ventilation passage is provided.

According to the above construction, the pressure in the ventilation passage is measured by the pressure sensor, and when the pressure changes more than usual, it can be judged that the reference surface of the jig is worn and the flat surface does not appear. Therefore, it can be used as a guide for polishing the reference surface of the jig, replacing the jig, and the like.

An ultrasonic processing apparatus according to a fifth aspect is the ultrasonic processing apparatus according to any one of the second to fourth aspects, in which gas is sucked from the opening through the air passage.
It is characterized in that switching means is provided which can switch between a state in which gas is blown out from the ventilation path through the opening.

According to the above construction, depending on the conditions such as the shape and material of the workpiece and the processing conditions, the state of sucking gas from the opening through the ventilation passage and the state of discharging gas can be switched. The effects described in Item 2 or 3 can be produced depending on the situation. Further, also in the process of fixing the workpiece to the jig, it is possible to switch between the state of sucking the gas from the opening through the ventilation path and the state of discharging the gas.

An ultrasonic processing apparatus according to a sixth aspect is the ultrasonic processing apparatus according to any one of the first to fifth aspects, wherein the jig is provided on a table movable along a plane and a polishing apparatus is provided. Then, by moving the table, the reference surface of the jig can be polished into a flat surface by the polishing device.

According to the above construction, by continuous processing or the like,
Even if the reference surface is worn away by the abrasive particles between the reference surface of the jig and the work piece and the flat surface does not appear, polishing with a polishing device causes the flat surface of the reference surface to come out again and the jig It is possible to restore the state in which the workpiece and the workpiece are brought into close contact with each other. In addition, since the reference surface of the jig can be moved with respect to the polishing apparatus with the accuracy of the movement of the table, the polishing surface of the polishing apparatus can be reliably set, and the reference surface of the jig can be accurately polished.
Further, since the polishing can be performed only by moving the table, the reference surface can be easily polished in a short time. Further, a special configuration for feeding and moving the jig to the polishing apparatus is not required, and the manufacturing cost can be reduced.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Next, embodiments of the present invention will be specifically described with reference to the accompanying drawings.

[Schematic Configuration of Overall Apparatus] An overall side view of an ultrasonic perforation apparatus as an embodiment of the present invention is shown in FIG. 1, and an overall front view thereof is shown in FIG. As shown in FIGS. 1 and 2, this ultrasonic perforation apparatus 1 has a structure in which a column 3 is erected on a base 2 installed on the floor, and the perforation head portion 4 is supported by the column 3. Has become.

A screw shaft 5 is vertically arranged on the column 3 and is rotatably supported. An elevating body 6 is screwed to the screw shaft 5, and the screw shaft 5 and the elevating body 6 constitute a known ball screw mechanism. A motor shaft of a motor 7 installed on the column 3 is connected to the screw shaft 5. By rotating the motor 7 in the forward and reverse directions in this configuration, the vertical position of the lifting body 6 can be changed. A linear guide is further arranged in the vertical direction on the column 3 (not shown), and a connecting body 8 is provided so as to be vertically displaceable along the linear guide. By connecting the elevating body 6 to the connecting body 8, the connecting body 8 (and by extension, the drilling head portion 4 provided in the connecting body 8) is moved in the vertical direction (Z
Direction).

The perforating head portion 4 is supported on the connecting body 8 so as to be vertically slidable. A tool 9 for drilling is attached to the drilling head portion 4, and a mechanism for applying ultrasonic vibration to the tool 9 is provided.

A movable table 10 which can be moved in the horizontal direction (XY direction) is installed on the base 2, and on the movable table 10, as shown in FIG. The three devices 42 are arranged side by side.
A work 13 as a workpiece can be fixed at a position on the upper surface of the elevating table 11 that can face the tool 9.
Although various kinds of work 13 are conceivable, this embodiment shows a case of processing a piezoelectric ceramic material (PZT) used as a piezoelectric actuator in an inkjet head of an inkjet printer or the like.

A cover 43 is installed on the base 2 so as to cover the entire apparatus so that cutting chips generated during the punching operation and an abrasive grain liquid described later do not scatter around.
A double door 44 that can be opened and closed is provided on the front surface of the apparatus (FIG. 1), and the door 44 can be opened to access the inside of the cover 43 when necessary for exchanging the work 13.

[Structure of Drilling Head Part] The structure of the drilling head part 4 is a side view of FIG. 3 and a front view of FIG.
A detailed description will be given mainly with reference to FIG. 5, which is a plan sectional view. The punching head 4 has a structure in which a tool frame 17 for supporting the tool 9 is vertically slidably connected to a base frame 14 supported by the connecting body 8. A support shaft 15 is horizontally installed on the base frame 14, and a center portion of a balance body 16 elongated in the front-rear direction is pivotally supported on the support shaft 15 so as to be swingable. An air cylinder 18 is installed on the base frame 14 (FIGS. 3 and 4), and this cylinder rod 19 extends downward and is connected to one end of the balance body 16. The tool frame 17 is connected to one end of the balance body 16 to which the cylinder rod 19 is connected.
A displacement sensor 20 is provided on the base frame 14 and is configured to detect the relative displacement of the tool frame 17 with respect to the base frame 14.

As shown in FIG. 3, an annular horn support portion 21 is rotatably provided at the lower end of the tool frame 17 via a bearing 22, and a horn 23 is fixed to the horn support portion 21. The horn 23 is formed vertically long and slender,
The ultrasonic transducer 24 is fixed on the upper part of the
A flat tool attachment surface 23a is formed at the lower end of the horn 23, and the tool 9 is detachably attached to the tool attachment surface 23a. A plate-like cover 45 is provided so as to cover the base frame 14 and the tool frame 17, so that the ultrasonic transducer 24 and the like inside can be protected.

As shown in the plan view of FIG. 5, a protrusion 25 is provided on the horn support portion 21 toward the side, and a biasing member 26 is provided on the tool frame 17 on one side of the protrusion 25. ing. The biasing body 26 is configured to constantly push the projection 25 toward one side by the elastic action of the biasing spring 28. On the other hand, an angle fine adjustment screw 27 having a knob is attached to the tool frame 17 at a position facing the urging body 26 with the projection 25 interposed therebetween. In this configuration, when the knob of the angle fine adjustment screw 27 is rotated in one direction, the tip of the knob pushes the projection 25 against the biasing body 26, so that the horn support 21 moves in the counterclockwise direction in FIG. It is turned.
On the other hand, when the knob is rotated in the opposite direction, the tip of the screw 27 retracts and the urging body 26 pushes the protrusion 25, so that the horn support portion 21 is swung clockwise. Therefore, by appropriately rotating the screw 27, the angle of the horn support 21 (that is, the orientation of the tool 9 attached to the horn 23 in the horizontal plane) can be finely adjusted. A fixing screw 36 is provided on the front surface of the head (FIGS. 3 and 4), and after the fine adjustment work described above is completed, the screw 36 is rotated and tightened so that the horn support 21 is not prepared. It can be fixed so as not to turn.

[Structure of Lifting Table] The structure of the lifting table 11 for fixing the work 13 will be described with reference to the side view of FIG. The elevating table 11 includes a base frame 29 that is vertically erected on the moving table 10, and an elevating frame 31 that is vertically movable on the base frame 29 via a linear guide (not shown). There is.

A lift cylinder 30 is attached to the base frame 29, a cylinder rod 32 extends upward, and its tip is connected to the elevating frame 31. The lift cylinder 30 is configured as an air cylinder type, and the vertical position of the elevating frame 31 can be changed by supplying / draining compressed air. A displacement sensor 33 is installed on the base frame 29 so that the vertical position of the elevating frame 31 can be measured. A box-shaped cover 46 is provided on the elevating frame 31 in order to protect the lift cylinder 30 and the displacement sensor 33 inside.

The upper part of the elevating frame 31 is constructed horizontally, and the jig 12 for mounting the work 13 is mounted on the upper part.
Is installed. A clamp mechanism 34 is provided on the elevating frame 31 at the side of the jig 12. The clamp mechanism 34 is composed of an air cylinder. When the air cylinder is operated with the work 13 placed on the jig 12, the extending cylinder rod 35 presses the work 13 in the horizontal direction, The guide pin 12e, which will be described later, provided on the pin 12 is fixed to the guide pin 12e.

The ultrasonic perforation apparatus 1 is provided with an abrasive grain liquid reservoir (not shown), and the abrasive grain liquid reservoir contains abrasive grains (for example,
A liquid in which SiC having a particle diameter of about 4 to 6 μm is dispersed is injected. An abrasive grain liquid circulation path formed of a pipe, a flexible hose, a pipe joint, etc. is formed by being connected to the abrasive grain fluid reservoir, and this path is a relay pipe 47 (FIG. 1, FIG. 2 and 6). A supply hole 48 is formed in the relay pipe 47, and a guide rod 49 is provided so as to project downward at a position near the supply hole 48. The guide rod 49 is formed in a curved shape and turns in an oblique direction, and its tip is located immediately above the jig 12 on the elevating table 11. With this configuration, when a pump (not shown) installed in the abrasive grain reservoir is driven, the abrasive grain liquid is sent into the relay pipe 47, and a part thereof leaks to the outside through the supply hole 48. Relay pipe 4
The abrasive liquid that has leaked to the outer surface of 7 travels along the guide rod 49 and then the jig 1
2, and is used for machining with the tool 9.

[Explanation of the state of the punching work] In the above-described configuration, the tool 1 is actually ultrasonically vibrated and the work 1
The operation of drilling in 3 will be described. First, the work 13 is fixed on the jig 12 by the clamp mechanism 34, and then the moving table 10 is moved in the XY directions.
The motor 7 is driven to lower the drilling head portion 4 so that the tool 9 is positioned immediately above the work 13 with a slight clearance as shown by the chain line in FIG. And
While constantly measuring the position of the elevating frame 31 by the displacement sensor 33, compressed air is supplied to the lift cylinder 30 to gradually extend the cylinder rod 32 to elevate the elevating frame 31.
To move the work 13 upward. Then, the position of the elevating frame 31 at the moment when the upper surface of the work 13 comes into contact with the tool 9 is stored as a zero position in an appropriate storage means of the controller that controls the apparatus 1. Then, the ultrasonic transducer 24 of the punching head unit 4 is driven to supply compressed air to the lift cylinder 30 while applying vertical ultrasonic vibration having an amplitude of about several μm to the tool 9 via the horn 23. The work 13 is raised and pressed against the tool 9. Further, the abrasive grain liquid is supplied to the periphery of the tool 9 from the relay pipe 47 via the guide rod 49 by driving the pump of the abrasive grain liquid circulation path. As a result, the work 13 is ground by the abrasive grains between the work 13 and the grooves, holes or the like having a shape imitating the tool 9 is formed on the upper surface of the work 13.

The air cylinder 18 (FIG. 3) of the drilling head portion 4 described above supplies and discharges compressed air as necessary while measuring the displacement of the tool frame 17 with the displacement sensor 20, and the tool frame 17 The power to support is adjusted. This prevents the tool 9 from being pressed against the work 13 with an excessive force during the punching work, and thus the work 1 made of a brittle material such as the piezoelectric ceramic of the present embodiment.
Even when machining No. 3, damage to the work 13 is sufficiently avoided.

While the work 13 is being punched by the tool 9, the position of the elevating frame 31 is changed by the displacement sensor 33.
It is constantly measured by (Fig. 6). Then, when the elevating frame 31 rises by a predetermined distance from the zero position, the supply of compressed air to the lift cylinder 30 is stopped, and the work 13 is stopped from rising. As a result, it is possible to accurately form a hole or groove having a depth corresponding to the distance in the work 13.

[Structure of Camera Unit] Next, the camera unit 41 installed for adjusting the orientation of the tool 9 will be described. As shown in FIG. 2, the camera unit 41 includes a lifting table 11
Is provided at a lateral position of. As shown in FIG. 7, the camera unit 41 includes a box-shaped cover 37.
A CCD type video camera 38 is housed inside 7 with its lens portion 39 facing upward. Cover 37
A transparent lid 40 is provided on the upper surface of the so as to be openable and closable at a position corresponding to the lens portion 39.

The operation of adjusting the orientation of the tool 9 in this configuration will be described. The moving table 10 is moved in the XY directions, and the motor 7 is driven to drive the punching head unit 4
Is lowered so that the tool 9 is located immediately above the lens portion 39 of the camera 38 as shown by the chain line in FIG. 7, the direction of the tool 9 can be photographed by the video camera 38. The captured image is displayed in real time on a monitor installed at an appropriate position of the device 1 (for example, a lateral position of the column 3). While watching this image, the operator can finely adjust the turning angle of the horn 23 by turning the angle fine adjustment screw 27, so that the tool 9 can be properly oriented.

[Description of Polishing Device] Further, the horn 23
The polishing device 42 for polishing the tool mounting surface 23a will be described. As shown in FIG. 2, the polishing device 42 is installed on the opposite side of the camera unit 41 with the elevating table 11 interposed therebetween in a front view. A concrete configuration of the polishing device 42 is shown in FIG. As shown in this figure, the polishing device 42
Is provided with a cylindrical frame 50 erected on the moving table 10 (the moving table 10 is not shown in FIG. 8), and a rotary shaft 51 is rotatably provided in the frame 50. It is a supported structure. This rotating shaft 51
A cup-shaped grindstone 52 is fixed to the upper end of the. A motor 53 is installed on the side of the rotary shaft 51, and the motor shaft 54 of the motor 53 is connected to the rotary shaft 51 and the pulley 5.
5, 56 and the belt 57 are connected.

The state of polishing work in this configuration will be described. That is, with the tool 9 removed from the horn 23,
The moving table 10 is moved, and further the motor 7 is driven to lower the punching head portion 4. Then, the motor 53 is driven to rotate the grindstone 52, and the tool mounting surface 23a is moved horizontally while the upper surface of the grindstone 52 is in contact with the tool mounting surface 23a on the lower surface of the horn 23. It can be polished.
A pressure cylinder 58 is installed in the boring head portion 4 (FIGS. 3 and 4), and this cylinder 58 is used to press the tool mounting surface 23a of the horn 23 against the grindstone 52.

The purpose of the polishing device 42 will be described. That is, in this ultrasonic perforation apparatus 1, when the tool 9 is attached to the horn 23 and ultrasonically vibrated to perform the perforation work on the work 13, the abrasive grains supplied around the tool 9 are attached to the lower surface of the horn 23. It is unavoidable that the tool mounting surface 23a enters between the surface 23a and the tool 9 and is gradually worn away by the abrasive grains. When the tool mounting surface 23a is worn away, the tool 9 cannot be mounted while being brought into close contact with the horn 23, and ultrasonic vibrations cannot be efficiently transmitted to the tool 9, resulting in a reduction in work efficiency. . Therefore, in the punching device 1 of the present embodiment, the tool 9 is always kept in the horn 23 by grinding the tool mounting surface 23a of the horn 23 so that the tool mounting surface 23a of the horn 23 is horizontal after performing the grinding by the grinding device 42 every time the drilling work is performed a predetermined number of times. It is designed so that it can be attached in close contact with.

[Explanation of Jig] As described above, the ultrasonic perforation apparatus (ultrasonic machining apparatus) 1 of the present embodiment vibrates the tool 9 by ultrasonic waves, and this vibration is applied to the work (workpiece). ) 13 is transmitted to the abrasive grains, which forms a shape on the work 13 following the tool shape. Here, the work 13 is fixed to the jig 12, but the work 13
The work piece 1 without any abrasive grains entering between the jig 12 and the jig 12.
It is desired that 3 is installed in close contact with the reference surface 12a of the jig 12 with high accuracy.

In this respect, in this practical embodiment, as shown in FIGS. 9 and 10, the jig 12 for fixing the work 13 is used.
Further, a ventilation path 12c having an opening is provided in the reference surface 12a of the jig 12.

The jig 12 will be described in detail below. As shown in FIGS. 9 and 10, the reference surface 12a of the jig 12 is provided with openings 12b at four positions.
An air passage 12c is formed so as to communicate with 2b. The ventilation passage 12c has four openings 12 facing the reference surface 12a.
In addition to b, another opening is provided on the side surface of the jig 12,
A pump, a valve and the like (not shown) are connected to the opening through the joint 61 and the tube 60. Further, the jig 12 is provided with two guide pins 12d and 12e arranged side by side in the Y direction with the reference surface 12a interposed therebetween.

The ventilation passage 12c is formed as described below. First, use a drill from one side surface of the jig 12 main body so as not to penetrate the jig, and
Three holes are formed in the direction. Then, a hole is drilled from one side in the Y direction to connect the end portions of the three holes. Female screws are formed in the openings formed in the side surfaces of the jig 12 by the holes. Then, one of these openings is connected by screwing the joint 61 into which the tube 60 is fitted, while the remaining openings are
A lid 62 having a male screw cut on the outer periphery is screwed and closed.
Further, four holes (vertical holes) in the Z direction are punched from the reference surface 12a toward appropriate positions of the above-mentioned lateral holes, and the above-mentioned opening 12b is formed in the reference surface 12a, and this opening is formed. 12b is connected to the aforementioned lateral hole. In this way, the ventilation path 12c is formed.

As shown in the plan view of FIG. 11, the work 13 is formed with holes and notches for attaching it to the work base 12 on both sides thereof. With this configuration, the hole is formed in one of the guide pins 12e, and the cutout 12d is formed in the other 12 of the guide pins.
The work 13 can be fixed on the reference surface 12a by placing the work 13 on the reference surface 12a in a state of being fitted to each of e and driving the clamp mechanism 34 to press the work 13 in the Y direction. .

In this state, the ventilation path 12c is communicated with the lower surface of the work 13 through the opening 12b, and by driving the pump connected to the tube 60, the reference surface 12a of the jig 12 and the work 12 are connected. It is possible to send a gas to and from 13, or vice versa. The gas is usually air, but the gas is not limited to this and other gas may be used.

In this embodiment, the gas is sucked from the opening 12b through the ventilation path 12c. As a result, the reference surface 12a of the jig 12 and the work 1
By setting a negative pressure between the workpiece 3 and the workpiece 3,
The second reference surface 12a can be firmly attached and fixed. Therefore, even if the work 13 is vibrated by the tool 9, the work 13 is strongly fixed on the jig 12 without floating, so that the processing accuracy is improved and the processing efficiency is also improved. Further, since the work 13 and the jig 12 are closely attached to each other, it is possible to prevent the abrasive grains from entering between them and prevent the reference surface 12a from being worn and hindering the attachment of the work 13. . Further, if the state of sucking gas from the opening 12b is released, the work 1
Since 3 can be easily removed from the jig 12, workability is also improved.

However, conversely, from the ventilation passage 12c to the opening 1
The gas may be blown out via 2b. As a result, the reference surface 12a of the jig 12 and the work 13
A jet flow from the opening portion 12b toward the outside can be formed in the gap between and, and as a result, with the work 13 fixed to the jig 12, the abrasive grains that have entered this gap can be blown off and removed. Therefore, even with this, the work 1
It is possible to prevent abrasive grains from entering between the jig 3 and the jig 12, and prevent the reference surface 12a from being worn and hindering the attachment of the work 13.

Although not shown, it is desirable that a pressure sensor for detecting the pressure in the ventilation passage 12c is provided at an appropriate place. Then, it is possible to easily determine whether or not the reference surface 12a is worn by this pressure sensor. Specifically, when the gas is sucked from the opening 12b through the ventilation path 12c, the inside of the ventilation path 12c cannot be made sufficiently negative pressure, and the detected value of the pressure sensor is higher than usual. If it is high, it is considered that air is leaking from between the work 13 and the reference surface 12a, and it is suspected that the reference surface 12a is worn and a gap is formed between the work 13 and the reference surface 12a. On the other hand, the air passage 12c
Even if the gas is blown out from the opening 12b through the opening 12b, if the pressure in the ventilation passage 12c cannot be made sufficiently high and the detection value of the pressure sensor is lower than usual, the reference value is set as described above. It is suspected that the surface 12a is worn or that the work 13 is not sufficiently fixed to the reference surface 12a. Therefore, with the detection value of the pressure sensor, it is determined whether the polishing work of the reference surface 12a of the jig 12 is necessary,
It can be used as a guide for exchanging 2 and so on.

Further, in this embodiment, the opening 12b is formed.
It is also possible to provide a switching means (for example, a valve) capable of switching between a state in which gas is sucked from the air passage 12c through the air passage 12c and a state in which gas is blown out from the air passage 12c through the opening 12b. Then, depending on the conditions such as the shape and material of the work piece 13 and the processing conditions, the state in which the gas is sucked from the opening 12b through the ventilation path 12c and the state in which the gas is discharged are switched, and the opening 12b as described above is changed. The effect shown in the state of suction / blowing of gas from the can be produced depending on the situation. Further, even in the process of fixing the work piece 13 to the jig 12, the ventilation passage 12c is opened from the opening 12b.
It is possible to switch between a state of sucking the gas and a state of discharging the gas via the. That is, first, the work 13 is fixed to the reference surface 12
Gas is discharged from the opening 12b in a state of being brought close to a to blow away the abrasive grains remaining on the reference surface 12a, and thereafter,
By switching to the state of sucking gas from the opening 12b and fixing the work 13 to the reference surface 12a, the work 13 can be brought into close contact with the reference surface 12a without surely catching the abrasive grains.

A polishing device may be provided on the side of the column 3 so that the reference surface 12a of the jig 12 can be polished. Although not shown, this polishing apparatus has a structure in which the polishing apparatus for polishing the tool mounting surface 23a shown in FIG. 8 is turned upside down, for example, and the whetstone facing downward is rotated and the movable table 10 is moved in the XY directions. By that,
Reference surface 12 of jig 12 provided on moving table 10.
It is conceivable to bring a into contact with a grindstone so that it can be polished into a flat surface. Then, a large number of workpieces 13 are processed, and even if the reference surface 12a is worn away and a flat surface does not come out due to abrasive grains entering between the reference surface 12a of the jig 12 and the workpiece 13 during this work, By polishing with this polishing apparatus, the flat surface of the reference surface 12a can be brought out again and the jig 12 and the work 13 can be brought into close contact with each other. Further, since the reference surface 12a of the jig 12 can be moved with the movement accuracy of the moving table 10 with respect to the polishing apparatus, the polishing surface of the polishing apparatus can be reliably set and the reference surface 1 of the jig 12 can be set.
2a can be polished accurately. Further, since the polishing can be performed only by moving the moving table 10, the reference surface 12a can be easily polished in a short time. Further, a special configuration for feeding and moving the jig 12 to the polishing apparatus is not required, and the manufacturing cost can be reduced.

[0051]

According to the first aspect of the invention, it is possible to send gas between the reference surface of the jig and the workpiece, or conversely, to discharge the gas in the space between the two. Become. Therefore, it is possible to prevent the abrasive grains from entering between the reference surface of the jig and the workpiece.

According to the second aspect of the present invention, by placing a negative pressure between the reference surface of the jig and the workpiece, the workpiece can be brought into close contact with and fixed to the reference surface of the jig. it can. Since the work piece can be strongly adhered to the jig in this manner, it is possible to prevent the abrasive grains from entering between the work piece and the jig.
Further, even when vibration is applied to the work piece by the tool, the work piece is strongly fixed on the jig without floating, so that the working accuracy is improved and the working efficiency is also improved. Furthermore, if the state in which the gas is sucked from the opening is released, the work piece can be easily removed from the jig, so that workability is also improved.

According to the third aspect of the invention, the workpiece is fixed to the jig by forming the jet flow from the opening to the outside in the gap between the reference surface of the jig and the workpiece. so,
It is possible to prevent the abrasive grains from entering the gap.

According to the invention of claim 4, the pressure in the ventilation passage is measured by the pressure sensor, and when the pressure changes from the normal pressure, it is judged that the reference surface of the jig is worn and the flat surface is not formed. it can. Therefore, polishing the reference surface of the jig,
It can be used as a guide for jig replacement.

According to the invention of claim 5, the state of sucking gas from the opening through the ventilation passage and the state of discharging gas can be switched according to the conditions such as the shape and material of the workpiece and the working conditions. The effects shown in claim 2 or claim 3 can be produced depending on the situation. Further, also in the process of fixing the workpiece to the jig, it is possible to switch between the state of sucking the gas from the opening through the ventilation path and the state of discharging the gas.

According to the invention of claim 6, even if the reference surface is abraded and the flat surface does not come out due to the abrasive grains entering between the reference surface of the jig and the workpiece due to continuous processing, etc., the polishing apparatus By polishing with, the flat surface of the reference surface can be brought out again and the jig and the workpiece can be brought into close contact with each other. Also,
Since the reference surface of the jig can be moved with respect to the polishing apparatus with the accuracy of the movement of the table, the polishing surface of the polishing apparatus can be reliably set and the reference surface of the jig can be polished with high accuracy. Further, since the polishing can be performed only by moving the table, the reference surface can be easily polished in a short time. Further, a special configuration for feeding and moving the jig to the polishing apparatus is not required, and the manufacturing cost can be reduced.

[Brief description of drawings]

FIG. 1 is a side view showing the overall configuration of an ultrasonic punching device according to an embodiment of the present invention.

FIG. 2 is a front view of the same.

FIG. 3 is a side view partial cross-sectional view of a punching head portion.

FIG. 4 is a front view of the same.

FIG. 5 is a plan sectional view of the same.

FIG. 6 is a side sectional view of a lifting table.

FIG. 7 is a side sectional view of a camera unit.

FIG. 8 is a front sectional view of a polishing apparatus.

FIG. 9 is an enlarged cross-sectional view of the vicinity of a jig.

FIG. 10 is an enlarged plan view of the vicinity of a jig.

FIG. 11 is a plan view of a work.

[Explanation of symbols]

1 Ultrasonic drilling device (ultrasonic processing device) 9 tools 12 jigs 12a Reference plane 12b opening 12c air passage 13 Work (workpiece)

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Manabu Kato             15-1 Naedai-cho, Mizuho-ku, Nagoya-shi, Aichi Prefecture             Within Lazer Industry Co., Ltd. F-term (reference) 3C034 AA19 BB51 BB94 CB20 DD18                 3C049 AA07 AA17 AC04 BA05 CA05                       CB01                 3C058 AA07 AA16 AC02 CB03 CB06                 5D107 BB01 CC01 FF03

Claims (6)

[Claims] 1. An ultrasonic machining method for vibrating a tool by ultrasonic waves and transmitting the vibration to abrasive grains interposed between the tool and the workpiece, thereby forming a shape on the workpiece according to the tool shape. In the apparatus, the jig for fixing the workpiece is provided with an air passage having an opening on a reference surface of the jig, the ultrasonic processing apparatus. 2. The gas is sucked from the opening through the air passage.
The ultrasonic processing device described in. 3. The ultrasonic processing apparatus according to claim 1, wherein gas is blown out from the ventilation path through the opening. 4. A pressure sensor for detecting the pressure in the ventilation passage is provided.
The ultrasonic processing device described in. 5. A switching means is provided which is switchable between a state in which gas is sucked from the opening through the ventilation passage and a state in which gas is blown out from the ventilation passage through the opening. The ultrasonic processing device according to any one of claims 2 to 4, characterized in that. 6. The jig is provided on a table movable along a plane, and a polishing device is provided to move the table to polish the reference surface of the jig into a flat surface by the polishing device. The ultrasonic processing apparatus according to any one of claims 1 to 5, wherein the ultrasonic processing apparatus is configured so that it can be performed.