CN115821029A - Force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system - Google Patents

Force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system Download PDF

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Publication number
CN115821029A
CN115821029A CN202310054565.7A CN202310054565A CN115821029A CN 115821029 A CN115821029 A CN 115821029A CN 202310054565 A CN202310054565 A CN 202310054565A CN 115821029 A CN115821029 A CN 115821029A
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sensor
tool head
modification
sound pressure
rotating mechanism
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CN115821029B (en
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叶林征
啜世达
祝锡晶
李飞
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North University of China
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North University of China
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/30Nuclear fission reactors

Abstract

The invention provides a force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system, which belongs to the technical field of ultrasonic cavitation control systems and comprises a longitudinal lifting mechanism, a rotating mechanism I, a rotating mechanism II, an ultrasonic longitudinal vibration tool head, a laser distance measuring sensor, a liquid container, a modification work lower platform, a modification work upper platform, a three-way force sensor, a rotating lifting arm, a sensor mounting arm, a sound pressure sensor and a computer. The system can detect the stress condition and the maximum negative pressure area of the modified workpiece in the ultrasonic cavitation process, and controls the target distance of the ultrasonic longitudinal vibration tool head and the included angle between the end face of the tool head and the modified workpiece according to the detection value.

Description

Force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system
Technical Field
The invention belongs to the technical field of ultrasonic cavitation control systems, and particularly discloses a force-sound pressure detection type ultrasonic cavitation modification fine-tuning control system.
Background
The ultrasonic cavitation modification is that the ultrasonic is used as an energy source, and the impact wave or the microjet released by collapse of cavitation bubbles generated by acting on a liquid medium continuously impacts the surface of a modified workpiece to trigger the surface of the modified workpiece to generate strong plastic deformation so as to modify the surface of a material.
In the ultrasonic cavitation modification process, the ultrasonic longitudinal vibration tool head vibrates to cause the positive pressure and the negative pressure to be alternated below the end face of the tool head, a large amount of cavitation bubbles appear below the end face of the tool head, the cavitation bubbles in a negative pressure state collapse to release shock waves or micro-jet, and the cavitation bubbles are gathered to obstruct the energy transmission, so that the relative position (namely the target distance) of the end face of the tool head and a modified workpiece has very important influence on the modification result. For example: 20 The amplitude of the ultrasonic longitudinal vibration tool head at kHz is only 3 to 4 mu m, the frequency increase amplitude is continuously reduced, generally speaking, a closer distance leads to stronger cavitation strength, so that the energy of microjet and shock wave is increased, the aims of grain refinement and grain boundary aliasing are easily achieved, so that the residual stress is increased, the excellent mechanical properties such as fatigue resistance, wear resistance and hardness are improved, but the roughness is easily increased, the surface smoothness is reduced, and therefore, the control of the target distance has very important significance. The included angle between the end face of the tool head and the modified workpiece affects the surface modification uniformity of the modified workpiece.
The source of ultrasonic cavitation, i.e. the alternation of positive and negative pressure, the cavitation bubble collapse in negative pressure state releasing shock wave or micro jet, the alternation of positive and negative pressure must consider the influence of wavelength according to the wavelength formulaλ=c/fThe position of the node antinode is judged, the maximum negative pressure area is determined, and meanwhile the influence of cavitation shielding and energy attenuation in a water area is considered, the maximum cavitation intensity position can be determined and can be used as a basis for controlling the target distance and an included angle between the end face of the tool head and a modified workpiece.
However, no related device can detect the stress condition and the maximum negative pressure region of the modified workpiece in the ultrasonic cavitation process so as to control the target distance of the ultrasonic longitudinal vibration tool head and the included angle between the end face of the tool head and the modified workpiece.
Disclosure of Invention
The invention provides a force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system which can detect the stress condition and the maximum negative pressure region of a modified workpiece in the ultrasonic cavitation process and control the target distance of an ultrasonic longitudinal vibration tool head and the included angle between the end face of the tool head and the modified workpiece according to the detection value.
The invention provides a force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system which comprises a longitudinal lifting mechanism, a rotating mechanism I, a rotating mechanism II, an ultrasonic longitudinal vibration tool head, a laser ranging sensor, a liquid container, a modification work lower platform, a modification work upper platform, a three-way force sensor, a rotary lifting arm, a sensor mounting arm, a sound pressure sensor and a computer, wherein the longitudinal lifting mechanism is arranged on the longitudinal lifting mechanism; the rotating mechanism I is connected with the longitudinal lifting mechanism and is driven by the longitudinal lifting mechanism to lift up and down; the rotating mechanism II is connected with the rotating mechanism I and driven by the rotating mechanism I to swing left and right; the ultrasonic longitudinal vibration tool head is connected with the rotating mechanism II, is driven by the rotating mechanism II to swing back and forth, and the bottom end of the ultrasonic longitudinal vibration tool head extends into the liquid container; the laser ranging sensors are arranged on the ultrasonic longitudinal vibration tool head, and the plane where the laser ranging sensors are located is vertical to the central shaft of the ultrasonic longitudinal vibration tool head; the modified working lower platform is arranged in the liquid container; the modified working upper platform is arranged on the modified working lower platform and is positioned below the ultrasonic longitudinal vibration tool head; the three-way force sensor is arranged between the modification work upper platform and the modification work lower platform; the rotary lifting arm is in threaded connection with the modification working upper platform and is vertical to the modification working upper platform; the sensor mounting arm is fixed on the rotary lifting arm, is positioned above the modification work upper platform and is parallel to the modification work upper platform; the sound pressure sensor is arranged on the sensor mounting arm and used for detecting the pressure of a specified position in the liquid medium; and the computer receives the detection values of the laser ranging sensor, the three-way force sensor and the sound pressure sensor and controls the longitudinal lifting mechanism, the rotating mechanism I and the rotating mechanism II.
Further, the force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system further comprises a rotating shaft, a C-shaped fixing block and a tool head ring sleeve; the first end of the rotating shaft is connected with the rotating mechanism II, and the second end of the rotating shaft is provided with a C-shaped mounting plate matched with the C-shaped fixing block; a plurality of C-shaped fixed blocks are arranged outside the tool head ring sleeve at equal intervals, and one C-shaped fixed block is fixedly connected with the C-shaped mounting plate; the laser ranging sensor vertically penetrates through the C-shaped fixing block; the tool head ring is sleeved outside the ultrasonic longitudinal vibration tool head.
Furthermore, a step structure I is arranged outside the ultrasonic longitudinal vibration tool head; the inner side of the tool head ring sleeve is provided with an inner stepped structure, the outer side of the tool head ring sleeve is provided with an outer stepped structure, the tool head ring sleeve is sleeved outside the ultrasonic longitudinal vibration tool head, and the inner stepped structure is meshed with the stepped structure I; a step structure II is arranged on the C-shaped fixing block, the step structure II of the C-shaped fixing block is meshed with the outer step structure and is connected with the outer step structure through a bolt, and a threaded hole is formed in the C-shaped fixing block; and the laser ranging sensor is provided with an external thread matched with the threaded hole.
Further, the laser ranging sensor is provided with an annular limiting table, the laser ranging sensor penetrates through a threaded hole in the C-shaped fixing block from bottom to top, and the annular limiting table is abutted against the lower surface of the C-shaped fixing block.
Further, the top surface of the modified working lower platform and the bottom surface of the modified working upper platform are respectively provided with a sensor lower mounting groove and a sensor upper mounting groove; the three-way force sensor is a wireless sensor and is placed in a mounting groove under the sensor, the modified working upper platform is buckled on the modified working lower platform, and the mounting groove on the sensor is buckled on the three-way force sensor.
Further, a support column is arranged in the liquid container; the platform is installed on the top of support column under the modification work, is provided with the through-hole that runs through top surface and bottom surface.
Furthermore, the longitudinal lifting mechanism is an air cylinder, the rotating mechanism I is a motor I, and the rotating mechanism II is a motor II; the piston end of the cylinder is fixedly connected with an output shaft of the motor I; the force-sound pressure detection type ultrasonic cavitation modification fine-tuning control system also comprises a swing frame I and a swing frame II; the swing frame I is of a right-angle plate-shaped structure, the first side plate is fixedly connected with a shell of the motor I, and the second side plate is fixedly connected with the swing frame II; and a shell of the motor II is fixedly connected with the swing frame II, and an output shaft penetrates through the swing frame II to be connected with the rotating shaft through a connecting sleeve.
Further, the force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system also comprises a base; the cylinder and the liquid container are both fixed on the base.
The invention has the following beneficial effects:
the invention provides a force-sound pressure detection type ultrasonic cavitation modification fine-tuning control system, which can adjust parameters including ultrasonic longitudinal vibration frequency (realized by replacing an ultrasonic longitudinal vibration tool head), the angle between the end surface of the tool head and the surface of a modified workpiece (realized by driving the ultrasonic longitudinal vibration tool head to swing back and forth and left and right through a rotating mechanism I and a rotating mechanism II), and target distance (realized through a lifting mechanism). After the test is finished, the residual stress, the wear resistance, the grain refinement degree, the grain boundary stacking degree, the surface roughness and the surface microhardness of the modified workpiece are analyzed to obtain the optimal process parameters, and large-scale test and application are carried out, so that a research basis and a test tool are provided for further application of the ultrasonic cavitation modification technology.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural diagram of a force-sound pressure detection type ultrasonic cavitation modification fine-tuning control system;
FIG. 2 is a view from another direction of FIG. 1;
FIG. 3 is an enlarged view of portion A of FIG. 1;
fig. 4 is a matching view of the laser distance measuring sensor, the C-shaped fixing block and the tool head ring sleeve.
In the figure: 1-ultrasonic longitudinal vibration tool head; 2-laser ranging sensor; 2.1-annular limit table; 3-a liquid container; 4-modifying the working lower platform; 5-modifying the working upper platform; 6-a three-way force sensor; 7-rotating the lifting arm; 8-a sensor mounting arm; 9-a sound pressure sensor; 10-a rotating shaft; 11-C type fixed block; 12-tool head ring sleeve; 13-a support column; 14-a cylinder; 15-motor I; 16-motor II; 17-a swing frame I; 18-swing frame ii; 19-connecting sleeves; 20-a base.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment provides a force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system which comprises a longitudinal lifting mechanism, a rotating mechanism I, a rotating mechanism II, an ultrasonic longitudinal vibration tool head 1, a laser ranging sensor 2, a liquid container 3 for storing a liquid medium, a modification work lower platform 4, a modification work upper platform 5, a three-way force sensor 6, a rotary lifting arm 7, a sensor mounting arm 8, a sound pressure sensor 9 and a computer, wherein the longitudinal lifting mechanism is arranged on the longitudinal lifting mechanism; the rotating mechanism I is connected with the longitudinal lifting mechanism and driven by the longitudinal lifting mechanism to lift up and down; the rotating mechanism II is connected with the rotating mechanism I and driven by the rotating mechanism I to swing left and right; the ultrasonic longitudinal vibration tool head 1 is connected with the rotating mechanism II, is driven by the rotating mechanism II to swing back and forth, and the bottom end of the ultrasonic longitudinal vibration tool head extends into the liquid container 3; the laser ranging sensors 2 are arranged on the ultrasonic longitudinal vibration tool head 1, the planes of the laser ranging sensors 2 are vertical to the central shaft of the ultrasonic longitudinal vibration tool head 1, and three laser ranging sensors 2 are arranged in the embodiment; the lower modifying platform 4 is arranged in the liquid container 3; the modified working upper platform 5 is arranged on the modified working lower platform 4 and is positioned below the ultrasonic longitudinal vibration tool head 1, and threaded holes are circumferentially distributed on the modified working upper platform 5 and are used for fixing a modified workpiece or a clamp; the three-way force sensor 6 is arranged between the modification work upper platform 4 and the modification work lower platform 5; the rotary lifting arm 7 is in threaded connection with the modification working upper platform 4 and is vertical to the modification working upper platform 5; the sensor mounting arm 8 is fixed on the rotary lifting arm 7, is positioned above the modification working upper platform 5 and is parallel to the modification working upper platform 5; the sound pressure sensor 9 is arranged on the sensor mounting arm 8 and can be used for detecting the pressure of a specified position in the liquid medium by rotating the lifting arm 7; and the computer receives the detection values of the laser ranging sensor 2, the three-way force sensor 6 and the sound pressure sensor 9 and controls the longitudinal lifting mechanism, the rotating mechanism I and the rotating mechanism II.
The modified workpiece is placed on the modification working upper platform 5, the ultrasonic longitudinal vibration tool head 1 is aligned to the modified workpiece, the generated vibration causes the alternate change of positive and negative pressure, cavitation bubbles are caused to generate-growth-vibration-crushing in a very short time, the surface of the modified workpiece is subjected to continuous alternate impact action, the three-way force sensor 6 detects impact force, the sound pressure sensor 9 detects the positive and negative pressure change condition of a specified position in a liquid medium, signals are transmitted to a computer to be processed, time-force images are output, the stress condition and the maximum negative pressure area of the modified workpiece in the ultrasonic cavitation process can be detected, and the method has practical significance for reverse engineering and optimal technological parameter combination. Based on this, realize the regulation of ultrasonic longitudinal vibration tool bit 1 target distance through control vertical elevating system, realize the regulation of the contained angle between tool bit terminal surface and the work piece that is modified through control rotary mechanism I, rotary mechanism II. The included angle between the end face of the tool head and the modified workpiece is detected through the laser ranging sensor 2, the included angle is 0 degree, namely, the included angle is relatively horizontal, so that uniform modification can be realized, and if high-strength treatment is needed on a local position, the high-strength treatment can be realized through the inclination angle.
Further, the force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system further comprises a rotating shaft 10, a C-shaped fixed block 11 and a tool head ring sleeve 12; the first end of the rotating shaft 10 is connected with the rotating mechanism II, and the second end of the rotating shaft is provided with a C-shaped mounting plate matched with the C-shaped fixing block 11; a plurality of C-shaped fixing blocks 11 are arranged outside the tool head ring sleeve 12 at equal intervals, wherein one C-shaped fixing block 11 is fixedly connected with the C-shaped mounting plate; the laser ranging sensor 2 vertically penetrates through the C-shaped fixing block 11; the tool head ring sleeve 12 is sleeved outside the ultrasonic longitudinal vibration tool head 1.
Further, a step structure I is arranged outside the ultrasonic longitudinal vibration tool head 1; the inner side of the tool head ring sleeve 12 is provided with an inner stepped structure, the outer side of the tool head ring sleeve 12 is provided with an outer stepped structure, the tool head ring sleeve 12 is sleeved outside the ultrasonic longitudinal vibration tool head 1, and the inner stepped structure is meshed with the stepped structure I, so that the stability of the ultrasonic longitudinal vibration tool head 1 in the machining process is facilitated; a step structure II is arranged on the C-shaped fixing block 11, the step structure II of the C-shaped fixing block 11 is meshed with the outer step structure and is connected with the outer step structure through a bolt, and a threaded hole is formed in the C-shaped fixing block 11; and the laser ranging sensor 2 is provided with an external thread matched with the threaded hole.
Further, laser rangefinder sensor 2 is provided with the spacing platform of annular 2.1, and laser rangefinder sensor 2 passes the screw hole on the C type fixed block 11 from bottom to top, and the spacing platform of annular 2.1 supports and leans on the lower surface at C type fixed block 11, guarantees that a plurality of laser rangefinder sensors 2 are at same horizontal plane.
Further, the top surface of the modified working lower platform 4 and the bottom surface of the modified working upper platform 5 are respectively provided with a sensor lower mounting groove and a sensor upper mounting groove; the three-way force sensor 6 is a wireless sensor and is placed in a mounting groove under the sensor, the modified working upper platform 5 is buckled on the modified working lower platform 4, and the mounting groove on the sensor is buckled on the three-way force sensor 6.
Further, a support column 13 is installed in the liquid container 3; platform 4 is installed on the top of support column 13 under the work of modifying, is provided with the through-hole that runs through top surface and bottom surface, prevents that platform 4 and the last platform 5 of the work of modifying form the pressure chamber under the work of modifying in the assembling process, and the assembly is unfavorable, influences three-dimensional force sensor 6's work precision simultaneously.
Further, the longitudinal lifting mechanism is an air cylinder 14, the rotating mechanism I is a motor I15, and the rotating mechanism II is a motor II 16; the piston end of the air cylinder 14 is fixedly connected with an output shaft of the motor I15; the force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system also comprises a swing frame I17 and a swing frame II 18; the swing frame I17 is of a right-angle plate-shaped structure, the first side plate is fixedly connected with the shell of the motor I15 through bolts, and the second side plate is fixedly connected with the swing frame II 18 through bolts; the shell of the motor II 16 is fixedly connected with the swing frame II 18 through a bolt, and the output shaft penetrates through the swing frame II 18 to be connected with the rotating shaft 10 through a connecting sleeve 19.
Further, the force-sound pressure detection type ultrasonic cavitation modification fine-tuning control system further comprises a base 20; the cylinder 14 and the liquid container 3 are fixed to the base 20.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (8)

1. A force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system is characterized by comprising a longitudinal lifting mechanism, a rotating mechanism I, a rotating mechanism II, an ultrasonic longitudinal vibration tool head, a laser distance measuring sensor, a liquid container, a modification work lower platform, a modification work upper platform, a three-way force sensor, a rotary lifting arm, a sensor mounting arm, a sound pressure sensor and a computer;
the rotating mechanism I is connected with the longitudinal lifting mechanism and driven by the longitudinal lifting mechanism to lift up and down;
the rotating mechanism II is connected with the rotating mechanism I and driven by the rotating mechanism I to swing left and right;
the ultrasonic longitudinal vibration tool head is connected with the rotating mechanism II, is driven by the rotating mechanism II to swing back and forth, and the bottom end of the ultrasonic longitudinal vibration tool head extends into the liquid container;
the laser ranging sensors are arranged on the ultrasonic longitudinal vibration tool head, and the plane where the laser ranging sensors are located is vertical to the central shaft of the ultrasonic longitudinal vibration tool head;
the modified working lower platform is arranged in the liquid container;
the modified working upper platform is arranged on the modified working lower platform and is positioned below the ultrasonic longitudinal vibration tool head;
the three-way force sensor is arranged between the modification work upper platform and the modification work lower platform;
the rotary lifting arm is in threaded connection with the upper modification working platform and is perpendicular to the upper modification working platform;
the sensor mounting arm is fixed on the rotary lifting arm, is positioned above the modification working upper platform and is parallel to the modification working upper platform;
the sound pressure sensor is arranged on the sensor mounting arm and used for detecting the pressure of a specified position in the liquid medium;
and the computer receives detection values of the laser ranging sensor, the three-way force sensor and the sound pressure sensor and controls the longitudinal lifting mechanism, the rotating mechanism I and the rotating mechanism II.
2. The force-sound pressure detection type ultrasonic cavitation modification fine-tuning control system according to claim 1, further comprising a rotating shaft, a C-shaped fixing block and a tool head ring sleeve;
the first end of the rotating shaft is connected with the rotating mechanism II, and the second end of the rotating shaft is provided with a C-shaped mounting plate matched with the C-shaped fixing block;
a plurality of C-shaped fixed blocks are arranged outside the tool head ring sleeve at equal intervals, and one C-shaped fixed block is fixedly connected with the C-shaped mounting plate;
the laser ranging sensor vertically penetrates through the C-shaped fixing block;
the tool head ring sleeve is sleeved outside the ultrasonic longitudinal vibration tool head.
3. The force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system as claimed in claim 2, wherein a stepped structure I is arranged outside the ultrasonic longitudinal vibration tool head;
the inner side of the tool head ring sleeve is provided with an inner stepped structure, the outer side of the tool head ring sleeve is provided with an outer stepped structure, the tool head ring sleeve is sleeved outside the ultrasonic longitudinal vibration tool head, and the inner stepped structure is meshed with the stepped structure I;
the C-shaped fixing block is provided with a stepped structure II, the stepped structure II of the C-shaped fixing block is meshed with the outer stepped structure and is connected with the outer stepped structure through a bolt, and the C-shaped fixing block is provided with a threaded hole;
and the laser ranging sensor is provided with an external thread matched with the threaded hole.
4. The force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system as claimed in claim 3, wherein the laser distance measurement sensor is provided with an annular limiting table, the laser distance measurement sensor penetrates through a threaded hole in the C-shaped fixing block from bottom to top, and the annular limiting table abuts against the lower surface of the C-shaped fixing block.
5. The force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system as claimed in claim 4, wherein the top surface of the modification working lower platform and the bottom surface of the modification working upper platform are respectively provided with a sensor lower mounting groove and a sensor upper mounting groove;
the three-way force sensor is a wireless sensor and is placed in the mounting groove under the sensor, the modified working upper platform is buckled on the modified working lower platform, and the mounting groove on the sensor is buckled on the three-way force sensor.
6. The force-sound pressure detection type ultrasonic cavitation modification fine-tuning control system according to claim 5, characterized in that a support column is installed in the liquid container;
the platform is installed on the top of support column under the modification work, is provided with the through-hole that runs through top surface and bottom surface.
7. The force-sound pressure detection type ultrasonic cavitation modification fine-tuning control system as claimed in any one of claims 1 to 6, wherein the longitudinal lifting mechanism is a cylinder, the rotating mechanism I is a motor I, and the rotating mechanism II is a motor II;
the piston end of the cylinder is fixedly connected with an output shaft of the motor I;
the force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system also comprises a swing frame I and a swing frame II;
the swing frame I is of a right-angle plate-shaped structure, a first side plate is fixedly connected with a shell of the motor I, and a second side plate is fixedly connected with the swing frame II;
and a shell of the motor II is fixedly connected with the swing frame II, and an output shaft penetrates through the swing frame II to be connected with the rotating shaft through a connecting sleeve.
8. The force-sound pressure detection type ultrasonic cavitation modification fine-tuning control system according to claim 7, further comprising a base;
the cylinder and the liquid container are both fixed on the base.
CN202310054565.7A 2023-02-03 2023-02-03 Force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system Active CN115821029B (en)

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JP2002307266A (en) * 2001-04-12 2002-10-23 Matsushita Electric Ind Co Ltd Ultrasonic processing method and device
JP2003340710A (en) * 2002-05-30 2003-12-02 Brother Ind Ltd Ultrasonic machining apparatus
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