CN115821029B - Force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system - Google Patents

Force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system Download PDF

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CN115821029B
CN115821029B CN202310054565.7A CN202310054565A CN115821029B CN 115821029 B CN115821029 B CN 115821029B CN 202310054565 A CN202310054565 A CN 202310054565A CN 115821029 B CN115821029 B CN 115821029B
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tool head
sensor
modification
rotating mechanism
force
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CN115821029A (en
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叶林征
啜世达
祝锡晶
李飞
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North University of China
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North University of China
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    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/30Nuclear fission reactors

Abstract

The invention provides a force-sound pressure detection type ultrasonic cavitation modification fine tuning control system, which belongs to the technical field of ultrasonic cavitation control systems and comprises a longitudinal lifting mechanism, a rotating mechanism I, a rotating mechanism II, an ultrasonic longitudinal vibration tool head, a laser ranging sensor, a liquid container, a modification work lower platform, a modification work upper platform, a three-way force sensor, a rotating lifting arm, a sensor mounting arm, a sound pressure sensor and a computer. The system can detect the stress condition and the maximum negative pressure area of the modified workpiece in the ultrasonic cavitation process, and control the target distance of the ultrasonic longitudinal vibration tool head and the included angle between the end face of the tool head and the modified workpiece according to the detection value.

Description

Force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system
Technical Field
The invention belongs to the technical field of ultrasonic cavitation control systems, and particularly discloses a force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system.
Background
Ultrasonic cavitation modification is to utilize ultrasonic as energy source to impact the surface of the workpiece to be modified continuously through the impact wave or micro jet released by the collapse of cavitation bubbles generated by acting on the liquid medium, and to induce the surface of the workpiece to be modified to generate strong plastic deformation so as to realize the modification of the surface of the material.
In the ultrasonic cavitation modification process, positive and negative pressure alternation occurs below the end face of the tool head due to vibration of the ultrasonic longitudinal vibration tool head, a large number of cavitation bubbles occur below the end face of the tool head, impact waves or microjet are released by collapse of the cavitation bubbles in a negative pressure state, and energy transmission is hindered by accumulation of the cavitation bubbles, so that the relative position (namely target distance) between the end face of the tool head and a modified workpiece has very important influence on a modification result. For example: 20 The amplitude of the ultrasonic longitudinal vibration tool head of kHz is only 3-4 mu m, the amplitude of the frequency increase is continuously reduced, generally, the closer distance leads to stronger cavitation intensity, the energy of microjet and impact wave is increased, the excellent mechanical properties of grain refinement, grain boundary aliasing degree increase, residual stress increase, fatigue resistance improvement, wear resistance improvement, hardness increase and the like are easily achieved, but the roughness increase and the surface finish decrease are easily caused, so that the control of the target distance has very important significance. And the included angle between the end face of the tool head and the modified workpiece can influence the uniformity of the surface modification of the modified workpiece.
The source of ultrasonic cavitation has been described above, namely, the positive and negative pressure are alternated, the cavitation bubbles in the negative pressure state collapse to release shock waves or microjet, the influence of wavelength must be considered in the alternation of positive and negative pressure, and the wavelength formula is adoptedλ=c/fThe position of the node antinode is judged, the maximum negative pressure region is determined, and the influence of cavitation shielding and energy attenuation in a water area is considered, so that the position of the maximum cavitation intensity can be determined, and the position can be used as a basis for controlling the target distance and the included angle between the end face of the tool head and the modified workpiece.
However, no related device can detect the stress condition and the maximum negative pressure area of the modified workpiece in the ultrasonic cavitation process, so that the target distance of the ultrasonic longitudinal vibration tool head and the included angle between the end face of the tool head and the modified workpiece are controlled.
Disclosure of Invention
The invention provides a force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system which can detect the stress condition and the maximum negative pressure area of a modified workpiece in the ultrasonic cavitation process and control the target distance of an ultrasonic longitudinal vibration tool head and the included angle between the end face of the tool head and the modified workpiece according to detection values.
The invention provides a force-sound pressure detection type ultrasonic cavitation modification fine tuning control system which comprises a longitudinal lifting mechanism, a rotating mechanism I, a rotating mechanism II, an ultrasonic longitudinal vibration tool head, a laser ranging sensor, a liquid container, a modification work lower platform, a modification work upper platform, a three-way force sensor, a rotating lifting arm, a sensor mounting arm, a sound pressure sensor and a computer, wherein the longitudinal lifting mechanism I is arranged on the rotating mechanism II; the rotating mechanism I is connected with the longitudinal lifting mechanism and is driven by the longitudinal lifting mechanism to lift up and down; the rotating mechanism II is connected with the rotating mechanism I, and is driven by the rotating mechanism I to swing left and right; the ultrasonic longitudinal vibration tool head is connected with a rotating mechanism II, the rotating mechanism II drives the ultrasonic longitudinal vibration tool head to swing back and forth, and the bottom end of the ultrasonic longitudinal vibration tool head stretches into the liquid container; the plurality of laser ranging sensors are arranged on the ultrasonic longitudinal vibration tool head, and the planes of the plurality of laser ranging sensors are perpendicular to the central axis of the ultrasonic longitudinal vibration tool head; the lower platform of the modification work is arranged in the liquid container; the upper modifying work platform is arranged on the lower modifying work platform and is positioned below the ultrasonic longitudinal vibration tool head; the three-way force sensor is arranged between the upper modifying work platform and the lower modifying work platform; the rotary lifting arm is in threaded connection with the upper modified working platform and is vertical to the upper modified working platform; the sensor mounting arm is fixed on the rotary lifting arm and is positioned above the upper modifying work platform and parallel to the upper modifying work platform; the sound pressure sensor is arranged on the sensor mounting arm and is used for detecting the pressure of a designated position in the liquid medium; the computer receives detection values of the laser ranging sensor, the three-way force sensor and the sound pressure sensor and controls the longitudinal lifting mechanism, the rotating mechanism I and the rotating mechanism II.
Further, the force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system also comprises a rotating shaft, a C-shaped fixed block and a tool head loop; the first end of the rotating shaft is connected with the rotating mechanism II, and the second end of the rotating shaft is provided with a C-shaped mounting plate matched with the C-shaped fixing block; a plurality of C-shaped fixing blocks are arranged outside the tool head ring sleeve at equal intervals, and one C-shaped fixing block is fixedly connected with the C-shaped mounting plate; the laser ranging sensor vertically passes through the C-shaped fixed block; the tool head ring is sleeved outside the ultrasonic longitudinal vibration tool head.
Further, a step structure I is arranged outside the ultrasonic longitudinal vibration tool head; the inner side of the tool head ring sleeve is provided with an inner step structure, the outer side of the tool head ring sleeve is provided with an outer step structure, the tool head ring sleeve is sleeved outside the ultrasonic longitudinal vibration tool head, and the inner step structure is meshed with the step structure I; the C-shaped fixing block is provided with a step structure II, the step structure II of the C-shaped fixing block is meshed with the outer step structure and is connected with the outer step structure through a bolt, and the C-shaped fixing block is provided with a threaded hole; the laser ranging sensor is provided with external threads matched with the threaded holes.
Further, the laser ranging sensor is provided with an annular limiting table, the laser ranging sensor penetrates through the threaded hole in the C-shaped fixed block from bottom to top, and the annular limiting table abuts against the lower surface of the C-shaped fixed block.
Further, the top surface of the lower modified working platform and the bottom surface of the upper modified working platform are respectively provided with a lower sensor mounting groove and an upper sensor mounting groove; the three-way force sensor is a wireless sensor and is placed in the lower sensor mounting groove, the upper modifying work platform is buckled on the lower modifying work platform, and the upper sensor mounting groove is buckled on the three-way force sensor.
Further, a support column is arranged in the liquid container; the platform is installed on the top of support column under the modification work, is provided with the through-hole that runs through top surface and bottom surface.
Further, the longitudinal lifting mechanism is an air cylinder, the rotating mechanism I is a motor I, and the rotating mechanism II is a motor II; the piston end of the air cylinder is fixedly connected with the output shaft of the motor I; the force-sound pressure detection type ultrasonic cavitation modification fine tuning control system also comprises a swinging frame I and a swinging frame II; the swing frame I is of a right-angle platy structure, the first side plate is fixedly connected with the shell of the motor I, and the second side plate is fixedly connected with the swing frame II; the shell of the motor II is fixedly connected with the swing frame II, and the output shaft penetrates through the swing frame II to be connected with the rotating shaft through the connecting sleeve.
Further, the force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system further comprises a base; the cylinder and the liquid container are fixed on the base.
The invention has the following beneficial effects:
the force-sound pressure detection type ultrasonic cavitation modification fine tuning control system provided by the invention has the advantages that the adjustable parameters comprise ultrasonic longitudinal vibration frequency (realized by replacing an ultrasonic longitudinal vibration tool head), the angle between the end face of the tool head and the surface of a modified workpiece (realized by driving the ultrasonic longitudinal vibration tool head to swing back and forth and left and right through a rotating mechanism I and a rotating mechanism II), the target distance (realized by a lifting mechanism), a three-way force sensor and a sound pressure sensor respectively monitor and output the modifying force and the sound compaction in the test process, a time-force image is formed through computer processing, the real-time detection of the modifying process is realized, the guiding significance is realized on the control of the target distance of the ultrasonic longitudinal vibration tool head and the included angle between the end face of the tool head and the modified workpiece, the accurate adjustment of the target distance and the included angle between the end face of the tool head and the modified workpiece is realized, and the influence of cavitation shielding on the ultrasonic cavitation effect can be lightened. After the test is finished, the residual stress, the wear resistance, the grain refinement degree, the grain boundary stacking degree, the surface roughness and the surface microhardness of the modified workpiece are analyzed to obtain optimal technological parameters, and large-scale tests and applications are carried out, so that a research basis and a test tool are provided for further application of the ultrasonic cavitation modification technology.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a force-sound pressure detection type ultrasonic cavitation modification fine tuning control system;
FIG. 2 is a view in another direction of FIG. 1;
FIG. 3 is an enlarged view of portion A of FIG. 1;
fig. 4 is a mating view of a laser ranging sensor, a C-shaped mounting block and a tool head collar.
In the figure: 1-ultrasonic longitudinal vibration tool head; 2-a laser ranging sensor; 2.1-an annular limiting table; 3-a liquid container; 4-modifying a working lower platform; 5-modifying the upper working platform; 6-a three-way force sensor; 7-rotating the lifting arm; 8-a sensor mounting arm; 9-a sound pressure sensor; 10-rotating shaft; 11-C type fixed blocks; 12-tool head collar; 13-supporting columns; 14-cylinder; 15-a motor I; 16-motor II; 17-a swinging frame I; 18-a swinging frame II; 19-connecting sleeve; 20-base.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The embodiment provides a force-sound pressure detection type ultrasonic cavitation modification fine tuning control system, which comprises a longitudinal lifting mechanism, a rotating mechanism I, a rotating mechanism II, an ultrasonic longitudinal vibration tool head 1, a laser ranging sensor 2, a liquid container 3 for storing a liquid medium, a modification work lower platform 4, a modification work upper platform 5, a three-way force sensor 6, a rotating lifting arm 7, a sensor mounting arm 8, a sound pressure sensor 9 and a computer; the rotating mechanism I is connected with the longitudinal lifting mechanism and is driven by the longitudinal lifting mechanism to lift up and down; the rotating mechanism II is connected with the rotating mechanism I, and is driven by the rotating mechanism I to swing left and right; the ultrasonic longitudinal vibration tool head 1 is connected with a rotating mechanism II, is driven by the rotating mechanism II to swing back and forth, and the bottom end of the ultrasonic longitudinal vibration tool head extends into a liquid container 3; the plurality of laser ranging sensors 2 are arranged on the ultrasonic longitudinal vibration tool head 1, the planes of the plurality of laser ranging sensors 2 are perpendicular to the central axis of the ultrasonic longitudinal vibration tool head 1, and three laser ranging sensors 2 are arranged in the embodiment; the lower modifying platform 4 is arranged in the liquid container 3; the modification work upper platform 5 is arranged on the modification work lower platform 4 and is positioned below the ultrasonic longitudinal vibration tool head 1, and threaded holes are circumferentially distributed on the modification work upper platform 5 and used for fixing a modified workpiece or a clamp; the three-way force sensor 6 is arranged between the upper modification work platform 4 and the lower modification work platform 5; the rotary lifting arm 7 is in threaded connection with the modification work upper platform 4 and is vertical to the modification work upper platform 5; the sensor mounting arm 8 is fixed on the rotary lifting arm 7 and is positioned above the upper modification work platform 5 and parallel to the upper modification work platform 5; the sound pressure sensor 9 is arranged on the sensor mounting arm 8, and can be used for detecting the pressure of a designated position in the liquid medium by rotating the rotary lifting arm 7; the computer receives the detection values of the laser ranging sensor 2, the three-way force sensor 6 and the sound pressure sensor 9 and controls the longitudinal lifting mechanism, the rotating mechanism I and the rotating mechanism II.
The modified workpiece is placed on a modification work upper platform 5, the ultrasonic longitudinal vibration tool head 1 is aligned with the modified workpiece, positive and negative pressure is alternately changed due to the generated vibration, cavitation bubbles are caused to generate-grow-vibrate-break in extremely short time, continuous alternate impact action is carried out on the surface of the modified workpiece, the three-way force sensor 6 detects impact force, the sound pressure sensor 9 detects positive and negative pressure change conditions of a designated position in a liquid medium, signals are transmitted to a computer for processing, a time-force image is output, and the stress condition and the maximum negative pressure region of the modified workpiece in the ultrasonic cavitation process can be detected, so that the ultrasonic cavitation process has practical significance on reverse engineering and optimal technological parameter combination. Based on the method, the adjustment of the target distance of the ultrasonic longitudinal vibration tool head 1 is realized by controlling the longitudinal lifting mechanism, and the adjustment of the included angle between the end face of the tool head and the modified workpiece is realized by controlling the rotating mechanism I and the rotating mechanism II. The included angle between the end face of the tool head and the modified workpiece is detected by the laser ranging sensor 2, the included angle is 0 DEG, namely, the tool head is relatively horizontal, uniform modification can be realized, and if the tool head needs to be subjected to high-strength treatment at a local position, the tool head can be realized through an inclined angle.
Further, the force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system further comprises a rotating shaft 10, a C-shaped fixed block 11 and a tool head loop 12; the first end of the rotating shaft 10 is connected with the rotating mechanism II, and the second end is provided with a C-shaped mounting plate matched with the C-shaped fixed block 11; the C-shaped fixing blocks 11 are arranged outside the tool head annular sleeve 12 at equal intervals, and one C-shaped fixing block 11 is fixedly connected with the C-shaped mounting plate; the laser ranging sensor 2 vertically passes through the C-shaped fixed block 11; the tool head ring sleeve 12 is sleeved outside the ultrasonic longitudinal vibration tool head 1.
Further, a step structure I is arranged outside the ultrasonic longitudinal vibration tool head 1; the inner side of the tool head ring sleeve 12 is provided with an inner step structure, the outer side of the tool head ring sleeve 12 is provided with an outer step structure, the tool head ring sleeve 12 is sleeved outside the ultrasonic longitudinal vibration tool head 1, and the inner step structure is meshed with the step structure I, so that the stability of the ultrasonic longitudinal vibration tool head 1 in the machining process is facilitated; the C-shaped fixing block 11 is provided with a step structure II, the step structure II of the C-shaped fixing block 11 is meshed with the outer step structure and is connected through a bolt, and the C-shaped fixing block 11 is provided with a threaded hole; the laser ranging sensor 2 is provided with external threads matched with the threaded holes.
Further, the laser ranging sensor 2 is provided with an annular limiting table 2.1, the laser ranging sensor 2 penetrates through the threaded hole in the C-shaped fixed block 11 from bottom to top, the annular limiting table 2.1 abuts against the lower surface of the C-shaped fixed block 11, and the plurality of laser ranging sensors 2 are guaranteed to be on the same horizontal plane.
Further, a sensor lower mounting groove and a sensor upper mounting groove are respectively formed in the top surface of the modification work lower platform 4 and the bottom surface of the modification work upper platform 5; the three-way force sensor 6 is a wireless sensor and is placed in a sensor lower mounting groove, the upper modifying work platform 5 is buckled on the lower modifying work platform 4, and the sensor upper mounting groove is buckled on the three-way force sensor 6.
Further, a support column 13 is installed in the liquid container 3; the lower modified working platform 4 is arranged at the top end of the supporting column 13 and is provided with a through hole penetrating through the top surface and the bottom surface, so that the lower modified working platform 4 and the upper modified working platform 5 are prevented from forming a pressure cavity in the assembly process, assembly is unfavorable, and meanwhile, the working precision of the three-way force sensor 6 is influenced.
Further, the longitudinal lifting mechanism is an air cylinder 14, the rotating mechanism I is a motor I15, and the rotating mechanism II is a motor II 16; the piston end of the cylinder 14 is fixedly connected with the output shaft of the motor I15; the force-sound pressure detection type ultrasonic cavitation modification fine tuning control system also comprises a swinging frame I17 and a swinging frame II 18; the swing frame I17 is of a right-angle plate-shaped structure, the first side plate is fixedly connected with the shell of the motor I15 through bolts, and the second side plate is fixedly connected with the swing frame II 18 through bolts; the shell of the motor II 16 is fixedly connected with the swinging frame II 18 through bolts, and an output shaft penetrates through the swinging frame II 18 to be connected with the rotating shaft 10 through a connecting sleeve 19.
Further, the force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system further comprises a base 20; the cylinder 14 and the liquid container 3 are fixed to the base 20.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.

Claims (8)

1. The force-sound pressure detection type ultrasonic cavitation modification fine tuning control system is characterized by comprising a longitudinal lifting mechanism, a rotating mechanism I, a rotating mechanism II, an ultrasonic longitudinal vibration tool head, a laser ranging sensor, a liquid container, a modification work lower platform, a modification work upper platform, a three-way force sensor, a rotating lifting arm, a sensor mounting arm, a sound pressure sensor and a computer;
the rotating mechanism I is connected with the longitudinal lifting mechanism, and is driven by the longitudinal lifting mechanism to lift up and down;
the rotating mechanism II is connected with the rotating mechanism I, and is driven by the rotating mechanism I to swing left and right;
the ultrasonic longitudinal vibration tool head is connected with the rotating mechanism II, the rotating mechanism II drives the ultrasonic longitudinal vibration tool head to swing back and forth, and the bottom end of the ultrasonic longitudinal vibration tool head stretches into the liquid container;
the plurality of laser ranging sensors are arranged on the ultrasonic longitudinal vibration tool head, and the planes of the plurality of laser ranging sensors are perpendicular to the central axis of the ultrasonic longitudinal vibration tool head;
the lower platform for modification work is arranged in the liquid container;
the upper modifying work platform is arranged on the lower modifying work platform and is positioned below the ultrasonic longitudinal vibration tool head;
the three-way force sensor is arranged between the upper modifying work platform and the lower modifying work platform;
the rotary lifting arm is in threaded connection with the upper modified working platform and is vertical to the upper modified working platform;
the sensor mounting arm is fixed on the rotary lifting arm and is positioned above the upper modifying work platform and parallel to the upper modifying work platform;
the sound pressure sensor is arranged on the sensor mounting arm and is used for detecting the pressure of a designated position in the liquid medium;
the computer receives detection values of the laser ranging sensor, the three-way force sensor and the sound pressure sensor and controls the longitudinal lifting mechanism, the rotating mechanism I and the rotating mechanism II.
2. The force-acoustic pressure sensing ultrasonic cavitation modification fine tuning control system of claim 1, further comprising a rotating shaft, a C-shaped fixed block, and a tool head collar;
the first end of the rotating shaft is connected with the rotating mechanism II, and the second end of the rotating shaft is provided with a C-shaped mounting plate matched with the C-shaped fixing block;
a plurality of C-shaped fixing blocks are arranged outside the tool head ring sleeve at equal intervals, and one C-shaped fixing block is fixedly connected with the C-shaped mounting plate;
the laser ranging sensor vertically passes through the C-shaped fixed block;
the tool head ring is sleeved outside the ultrasonic longitudinal vibration tool head.
3. The force-sound pressure detection type ultrasonic cavitation modification fine tuning control system according to claim 2, wherein a step structure I is arranged outside the ultrasonic longitudinal vibration tool head;
the inner side of the tool head ring sleeve is provided with an inner step structure, the outer side of the tool head ring sleeve is provided with an outer step structure, the tool head ring sleeve is sleeved outside the ultrasonic longitudinal vibration tool head, and the inner step structure is meshed with the step structure I;
the C-shaped fixing block is provided with a step structure II, the step structure II of the C-shaped fixing block is meshed with the outer step structure and is connected with the outer step structure through a bolt, and the C-shaped fixing block is provided with a threaded hole;
and the laser ranging sensor is provided with external threads matched with the threaded holes.
4. The force-sound pressure detection type ultrasonic cavitation modification fine tuning control system according to claim 3, wherein the laser ranging sensor is provided with an annular limiting table, the laser ranging sensor penetrates through a threaded hole in the C-shaped fixed block from bottom to top, and the annular limiting table abuts against the lower surface of the C-shaped fixed block.
5. The force-sound pressure detection type ultrasonic cavitation modification fine tuning control system according to claim 4, wherein a sensor lower mounting groove and a sensor upper mounting groove are respectively formed in the top surface of the modification work lower platform and the bottom surface of the modification work upper platform;
the three-way force sensor is a wireless sensor and is placed in the lower sensor mounting groove, the upper modifying work platform is buckled on the lower modifying work platform, and the upper sensor mounting groove is buckled on the three-way force sensor.
6. The force-acoustic pressure sensing ultrasonic cavitation modification fine tuning control system of claim 5, wherein a support column is mounted in the liquid container;
the lower platform of the modification work is arranged at the top end of the supporting column and is provided with a through hole penetrating through the top surface and the bottom surface.
7. The force-sound pressure detection type ultrasonic cavitation modification fine tuning control system according to any one of claims 1 to 6, wherein the longitudinal lifting mechanism is a cylinder, the rotating mechanism i is a motor i, and the rotating mechanism ii is a motor ii;
the piston end of the air cylinder is fixedly connected with the output shaft of the motor I;
the force-sound pressure detection type ultrasonic cavitation modification fine tuning control system also comprises a swinging frame I and a swinging frame II;
the swing frame I is of a right-angle platy structure, the first side plate is fixedly connected with the shell of the motor I, and the second side plate is fixedly connected with the swing frame II;
the shell of the motor II is fixedly connected with the swing frame II, and the output shaft penetrates through the swing frame II to be connected with the rotating shaft through the connecting sleeve.
8. The force-acoustic pressure sensing ultrasonic cavitation modification fine tuning control system of claim 7, further comprising a base;
the cylinder and the liquid container are fixed on the base.
CN202310054565.7A 2023-02-03 2023-02-03 Force-sound pressure detection type ultrasonic cavitation modification fine adjustment control system Active CN115821029B (en)

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JP2002307266A (en) * 2001-04-12 2002-10-23 Matsushita Electric Ind Co Ltd Ultrasonic processing method and device
JP2003340710A (en) * 2002-05-30 2003-12-02 Brother Ind Ltd Ultrasonic machining apparatus
JP2004012149A (en) * 2002-06-03 2004-01-15 Seiko Epson Corp Liquid physical property measuring apparatus
WO2014168598A1 (en) * 2013-04-09 2014-10-16 Kudryavtsev Yuriy Ultrasonic tool for the impact treatment of workpiece surfaces
JP2020145439A (en) * 2015-05-26 2020-09-10 株式会社ディスコ Processing system
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CN107478722A (en) * 2017-05-18 2017-12-15 中北大学 A kind of new resonance acoustics the cannot-harm-detection device
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