JP2003333872A5 - - Google Patents

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Publication number
JP2003333872A5
JP2003333872A5 JP2002140429A JP2002140429A JP2003333872A5 JP 2003333872 A5 JP2003333872 A5 JP 2003333872A5 JP 2002140429 A JP2002140429 A JP 2002140429A JP 2002140429 A JP2002140429 A JP 2002140429A JP 2003333872 A5 JP2003333872 A5 JP 2003333872A5
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JP
Japan
Prior art keywords
vibration
drive
state detection
detection means
vibration state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002140429A
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English (en)
Japanese (ja)
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JP4125041B2 (ja
JP2003333872A (ja
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Priority to JP2002140429A priority Critical patent/JP4125041B2/ja
Priority claimed from JP2002140429A external-priority patent/JP4125041B2/ja
Publication of JP2003333872A publication Critical patent/JP2003333872A/ja
Publication of JP2003333872A5 publication Critical patent/JP2003333872A5/ja
Application granted granted Critical
Publication of JP4125041B2 publication Critical patent/JP4125041B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002140429A 2002-05-15 2002-05-15 積層振動型アクチュエータの駆動装置 Expired - Fee Related JP4125041B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002140429A JP4125041B2 (ja) 2002-05-15 2002-05-15 積層振動型アクチュエータの駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002140429A JP4125041B2 (ja) 2002-05-15 2002-05-15 積層振動型アクチュエータの駆動装置

Publications (3)

Publication Number Publication Date
JP2003333872A JP2003333872A (ja) 2003-11-21
JP2003333872A5 true JP2003333872A5 (enrdf_load_stackoverflow) 2005-10-06
JP4125041B2 JP4125041B2 (ja) 2008-07-23

Family

ID=29701317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002140429A Expired - Fee Related JP4125041B2 (ja) 2002-05-15 2002-05-15 積層振動型アクチュエータの駆動装置

Country Status (1)

Country Link
JP (1) JP4125041B2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4630676B2 (ja) * 2005-01-25 2011-02-09 キヤノン株式会社 駆動装置
JP5161436B2 (ja) * 2005-07-05 2013-03-13 ペンタックスリコーイメージング株式会社 超音波モータ駆動装置
JP2011120415A (ja) * 2009-12-07 2011-06-16 Murata Mfg Co Ltd 駆動システム
JP5854631B2 (ja) * 2011-04-27 2016-02-09 キヤノン株式会社 駆動制御方法、雲台装置、ステージおよびアクチュエータ
JP6592993B2 (ja) 2015-07-07 2019-10-23 セイコーエプソン株式会社 圧電駆動装置及びロボット

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