JP2003300145A - Grinding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a grinding device capable of carrying out finer grinding machining, and improving smoothness. <P>SOLUTION: The grinding device grinds material to be ground by contacting an abrasive tape attached to a pressing portion 8 of an grinding head body 3 with the material to be ground installed on a grinding stand. In the grinding device, the pressing portion 8 is composed of a rotatable roller portion 81 around which the abrasive tape is slidably put, and a supporting shaft 82 supporting the roller portion 81 slidably in an axial direction. A vibrating mechanism 9 causing slight vibrations by axially reciprocating the roller portion 81 to the supporting shaft 82 is provided. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus for polishing a material to be polished installed on a polishing table with a polishing tape mounted on a pressing portion of a polishing head body.

[0002]

2. Description of the Related Art Conventionally, there is a polishing apparatus A shown in FIGS. 7 and 8 as an apparatus for polishing the surface of a plate-shaped member such as a liquid crystal display, a printed circuit board and a silicon wafer.

This polishing apparatus A is disclosed in Japanese Patent Laid-Open No. 11-1985.
As described in Japanese Patent Publication No. 9, a polishing head body C on which a polishing tape B is mounted, a support member D that supports the polishing head body C, and a material to be polished installed below the polishing head body C are And a polishing table (not shown) to be mounted.

The polishing head body C is rotatable about an axis extending in a direction orthogonal to the surface of the polishing table on which the material to be polished is placed. Further, inside the polishing head main body C, a supply roller F to which a tape reel around which the polishing tape B is wound is attached, and a take-up reel to wind up the polishing tape B pulled out from the supply roller F are attached. A roller G is provided to polish the material to be polished while the polishing tape B is running.

Specifically, by rotating the take-up roller G by a polishing tape transport motor H provided in the polishing head body C, the polishing tape B is pulled out from the tape reel and guided by a plurality of running rollers E. However, after passing through a pressing roller E1 which is provided at the lower end of the polishing head main body C and serves as a pressing portion, it is wound around a winding reel.

Further, the polishing apparatus A shown in FIGS. 7 and 8
Attach the pressing roller E1 of the polishing head body C to the polishing head body C such that the axis of the pressing roller E1 is orthogonal to the rotation center of the polishing head body C, and then press the polishing head body C The support member D is rotatably supported so that the roller surface of the roller E1 is parallel to the installation surface of the polishing table.

According to the polishing apparatus A shown in FIGS. 7 and 8, the polishing tape B is run while the polishing tape B is brought into contact with the material to be polished placed on the polishing table by the pressing roller E1. While rotating, the polishing head body rotation motor J provided on the support member D is rotated to rotate the polishing head body C to automatically polish the surface of the material to be polished.

[0008]

By the way, in the polishing apparatus A shown in FIGS. 7 and 8, the polishing head body C is rotated with respect to the material to be polished on the polishing table, and the material to be polished is polished with the polishing tape B. Therefore, the polishing of the material to be polished is
The polishing is simply performed by rotating the tape surface of the polishing tape B about the rotation axis of the polishing head body C.

As a result, since the polishing tape B can only be polished by sliding in the circumferential direction, there is a problem that fine polishing cannot be performed even when polishing is performed at high speed.
That is, since the polishing surface of the polishing tape B becomes faster in the circumferential direction with increasing distance from the rotation axis, the polishing amount differs between the center and the end of the polishing tape B in the width direction. In the part, it is difficult to perform fine polishing.

In view of the above problems, it is an object of the present invention to provide a polishing apparatus capable of performing finer polishing processing and improving the smoothness.

[0011]

According to a first aspect of the present invention, a polishing tape mounted on a pressing portion of a polishing head body is brought into contact with a material to be polished provided on a polishing table to polish the material to be polished. In the polishing apparatus configured as described above, the pressing unit is configured to include a vibration mechanism that causes a slight vibration.

According to a second aspect of the present invention, in the polishing apparatus according to the first aspect, the pressing portion is a rotatable roller portion around which the polishing tape is slidably slid, and the roller portion is slid in the axial direction. It is composed of a support shaft that supports possible
The vibrating mechanism is configured to cause a slight vibration by reciprocating the roller portion in the axial direction with respect to the support shaft.

According to a third aspect of the present invention, in the polishing apparatus according to the second aspect, the vibration mechanism includes an airtight pressure adjusting chamber formed between the inner surface of the roller portion and the outer surface of the support shaft. Two ports opened to the pressure adjusting chamber and fixed to the outer surface of the support shaft so as to be located in the pressure adjusting chamber, and either of the two ports can be closed by the sliding operation of the roller portion with respect to the support shaft. The pressure adjusting chamber is provided with a pressure adjusting valve and a fluid introducing means for alternately feeding the fluid into the pressure adjusting chamber from one of the two ports and drawing out the fluid from the other port. When the fluid is introduced to the pressure control valve, the roller slides in the direction in which the other port is closed by the fluid introduced, and the roller slides in the opposite direction when the port is switched. It was constructed to so that.

According to a fourth aspect of the present invention, in the polishing apparatus according to the second aspect, the vibrating mechanism forms a space between the inner surface of the roller portion and the outer surface of the support shaft, and one end of the vibration portion is formed in the space portion. A piezoelectric element is provided, which is fixed to the outer surface of the support shaft and the other end is fixed to the inner surface of the roller section.It also has a voltage input section for applying voltage to the piezoelectric element, and the voltage input section turns the voltage on and off The roller portion is configured to reciprocate in the axial direction with respect to the support shaft by expanding and contracting the element.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An overall configuration diagram of a polishing apparatus according to the present invention is shown in FIGS. The polishing apparatus of this embodiment is an apparatus for polishing the surface of a silicon wafer or a printed circuit board.

The polishing device comprises a box-shaped lower frame portion 11
And 4 attached to the upper four corners of the lower frame part 11.
Four support frame parts 12 and four support frame parts 12
And a support member 1 having an upper frame portion 13 supported at an upper position of.

On the lower frame portion 11 of the support member 1,
As shown in FIG. 2, this polishing table 2 is provided with a rubber-made endless belt 22 having a large number of small holes, and the endless belt 22. The polishing target material conveying mechanism 21 is composed of a plurality of drive rollers 23 that are stretched around to drive the endless belt 22. Drive roller 2
Although not shown, 3 is rotationally driven by a motor.

An installation surface 24 on which the material to be polished is installed
Are provided on the endless belt 22. As shown in FIG. 2, the endless belt 22 is movably supported by the driving roller 23 so that a horizontal portion is formed on the endless belt 22, and the horizontal traveling portion on the upper side is installed on the installation surface 24.
I am trying.

On the lower surface side of the installation surface 24 of the endless belt 22, suction means for adsorbing the material to be polished onto the endless belt 22 through a large number of through holes (not shown) formed in the endless belt 22. 25 are provided. The suction means 25 is composed of a vacuum device. The material to be polished is not limited to being fixed by the suction means 25, but the material to be polished may be fixed on the installation surface 24 by a fastener.

The polishing table 2 described above is based on the endless belt 22.
When the material to be polished is placed on the end portion of the upper horizontal traveling portion in the above, the endless belt 22 is driven by the rotation of the driving roller 23, the material to be polished is conveyed to a predetermined polishing position, and the material to be polished is sucked by the suction means 25. Endless belt 2
The movement of the material to be polished is prevented by being attracted to the second mounting surface 24.

Further, a polishing head body 3 on which a polishing tape T is movably mounted is attached to an upper frame portion 13 of a supporting member 1 provided above the polishing table 2.
The polishing head body 3 includes a horizontal moving device 4 and a lifting device 5.
It is attached to the upper frame portion 13 via.

The horizontal moving device 4 provided on the upper frame portion 13 has an X-axis direction moving mechanism 41 and Y for moving the polishing head body 3 in the X-axis direction (X direction shown in FIG. 1).
A Y-axis direction moving mechanism 42 for moving in the axial direction (Y direction shown in FIG. 2) is provided.

The X-axis direction moving mechanism 41 is composed of two X-axis direction moving rail members 41 fixed to the upper frame portion 13.
a, 41a and the rail members 41a for moving in the X-axis direction,
X-axis direction moving fitting member 41 fitted to 41a
b, 41b and X-axis direction moving fitting members 41b, 41b
An X-axis direction moving frame 41c fixed to the lower surface,
It is composed of an X-axis direction moving motor 41d for moving the X-axis direction moving frame 41c along the X-axis direction moving rail members 41a, 41a.

The Y-axis direction moving mechanism 42 includes two Y-axis direction moving rail members 42a and 42a fixed to the upper surface of the X-axis direction moving frame 41c, and the Y-axis direction moving rail members 42a and 42a. Fitting members 42b, 42b for moving in the Y-axis direction, Y-direction moving frame 42c in which the fitting members 42b, 42b for moving the Y-axis direction are fixed to the lower surface, and frame 42c for moving the Y-axis direction. And a Y-axis direction moving motor 42d for moving the Y-axis direction moving rail members 42a and 42a.

Further, an elevating device 5 is attached to the horizontal moving device 4, and the elevating device 5 can move the polishing head main body 3 in the vertical direction. The elevating device 5 is used to move the polishing head body 3 closer to or away from the material to be polished arranged on the installation surface 24 of the polishing table 2.

The elevating device 5 is composed of an air cylinder 51 for vertical movement and a contact cylinder 52 for finely adjusting the amount of vertical movement, and the air cylinder 51 for vertical movement and the contact cylinder 52 are Y-shaped. The air cylinder 51 for vertical movement and part of the contact cylinder 52 are fixed to the frame 42c for axial movement, and are fixed to the box-shaped head body mounting member 14 on which the polishing head body 3 is supported.

As described above, the main body mounting member 14 is supported by the Y-axis direction moving frame 42c of the horizontal moving device 4 via the vertical moving air cylinder 51 and the contact cylinder 52 which are the lifting devices 5. The main body mounting member 14 can be moved in the vertical direction by driving the vertically moving air cylinder 51 and the contact cylinder 52.

As shown in FIG. 1, the main body mounting member 14 supports the polishing head main body 3 and a head main body driving motor 60 for rotating the polishing head main body 3, and the polishing head main body 3 is supported. Is supported by the main body mounting member 14 via the spindle mechanism 6 so as to be rotatable with respect to the upper frame portion 13 about a line orthogonal to the installation surface 24 of the polishing table 2 as an axis.

The spindle mechanism 6 to which the polishing head main body 3 is attached includes a cylindrical body 61 having a flange 63 as shown in FIG. 1 and a spindle 62 rotatably mounted in the cylindrical body 61. I have it.

Further, at the top end of the spindle 62,
As shown in FIG. 1, a spindle-side pulley 64 is attached, and this spindle-side pulley 64 and a motor-side pulley 66 provided on the head body driving motor 60 are connected by a belt 65.

Then, the spindle 62 is rotated by the rotational driving of the head body driving motor 60, and the spindle 62 is rotated.
The polishing head body 3 connected to is rotated.

Since the polishing head main body 3 is provided with a tape running motor 31 for running the polishing tape T, a lead wire for driving the tape running motor 31 is attached to the polishing head main body. Wiring is provided inside 3 so as not to hinder the rotation of the polishing head body 3.

The polishing head body 3 is fixed to the lower end of the spindle 62, and a tape running mechanism for running the polishing tape T is provided in the polishing head body 3.

The structure of the polishing head body 3 will be described below with reference to FIGS. 3 to 5. The polishing head body 3 is
The cylinder 62 is fixed to the spindle 62, and the case body 33 is connected to the lower end of the cylinder 32.

As shown in FIGS. 1 and 2, the case body 33 is covered with a cover 34.

As shown in FIG. 3, a tape reel 71 to which an unused polishing tape is attached and a take-up reel 72 are rotatably supported on the case body 33.

In this embodiment, both ends of the tape reel rotating shaft 71a to which the tape reel 71 is mounted are rotatably supported by the case body 33, so that the tape reel 71 can rotate the tape reel rotating shaft 71a. It is rotatably supported by the case main body 33 via the. Although not shown, the tape reel rotary shaft 71a is provided with a friction portion for braking the rotation of the tape reel rotary shaft 71a. By this friction portion, tension is always applied to the polishing tape T pulled out from the tape reel 71.

The both ends of the take-up reel rotating shaft 72a, to which the take-up reel 72 is mounted, are attached to the case main body 3
By rotatably supporting the take-up reel 72
The case body 3 via the take-up reel rotary shaft 72a.
3 is rotatably supported.

Further, as shown in FIG. 3, a tape running motor 31 for running the polishing tape T is fixed to the upper part of the case body 33.

The tape running motor 31 has a drive shaft 31a.
Are connected to each other, the drive shaft 31a is projected from the case main body 33 to the outside, and the drive shaft side pulley 35 is provided at the tip. Both ends of a transmission shaft 36 are rotatably supported on the lower portion of the case body 33, and both ends of the transmission shaft 36 are projected from the case body 33 to one end for winding reel side transmission. A pulley 37 and a pressing portion-side transmission pulley 38 are provided, and the take-up reel rotary shaft 7 is provided at the other end.
A gear for transmitting rotation is provided to 2a.

A tape traveling belt 39 is stretched over the drive shaft side pulley 35 and the take-up reel side transmission pulley 37, and the drive shaft side pulley 35 and the tape traveling are driven by the rotation of the tape traveling motor 31. Belt 39,
Transmission shaft 3 via the transmission reel pulley 37 on the take-up reel side
6 rotates, and the take-up reel rotation shaft 72a rotates from the transmission shaft 36 via a gear.

The take-up reel 72 is rotated by the rotation of the take-up reel rotary shaft 72a, pulls out the polishing tape T from the tape reel 71, and takes up the polishing tape T on the take-up reel 72.

In the case body 33, a plurality of transport rollers 30 for guiding the polishing tape T drawn from the tape reel 71 to the take-up reel 72 are rotatably provided.

Further, as shown in FIGS. 3 to 5, a polishing tape T is laid over the bottom of the case body 33.
The pressing portion 8 for contacting the suspended polishing tape T with the material to be polished fixed to the installation surface 24 of the polishing table 2 is rotatably attached to the case body 33.

The pressing portion 8 includes a rotatable roller portion 81 around which the polishing tape T is slidably mounted, and a roller portion 8
It is composed of a support shaft 82 which supports 1 to be slidable in the axial direction.

The roller portion 81 has roller center portions 84a, 84 which are inserted into the support shaft 82 through the bearing metal 83.
b, a grooved bearing 85 inserted into the support shaft 82 at both axial ends of the roller central portions 84a and 84b, and a tubular rubber roller fitted into the outer peripheral surfaces of the roller central portions 84a and 84b by press fitting. A core 86 and a cylindrical rubber roller 87 that is fitted in close contact with the outer peripheral surface of the rubber roller core 86 are provided.

In this embodiment, the roller central portion 84a,
By press-fitting the grooved bearing 85 into the inner surface of 84b, the roller center portions 84a and 84b also slide as the grooved bearing 85 slides with respect to the support shaft 82. Further, the rubber roller core 86 fixed to the outer peripheral surfaces of the roller center portions 84a and 84b is covered with a rubber roller 87, and the polishing tape T is laid over the outer surface of the rubber roller 87.

As shown in FIGS. 4 and 5, the support shaft 82 has a small diameter shaft portion 82a formed at both ends in the axial direction.
And a large-diameter shaft portion 82b formed at the central portion in the axial direction, and is rotatably supported by the case main body portion 33 at the small-diameter shaft portion 82a.

A support shaft driving pulley 82c is attached to one end of the support shaft 82. A belt 38a is stretched around the support shaft driving pulley 82c and the pressing portion side transmission pulley 38. As a result, the support shaft 82 is also driven to rotate in accordance with the drive of the tape traveling motor 31.

Further, a flange-shaped diaphragm 91 serving as a pressure adjusting valve is provided on the outer peripheral surface of the axially central portion of the support shaft 82 (the axially central portion of the large diameter shaft portion 82b). The diaphragm 91 is adapted to be fitted into a fitting groove 82d provided at the axial center of the large-diameter shaft portion 82b and fixed to the support shaft 82, and is configured by stacking two ring plate members. Has been done. An annular protrusion 91a extending outward in the axial direction is formed on the outer peripheral portion of the diaphragm 91 when the two ring plate members are superposed on each other.

Further, the support shaft 82 has L-shaped support shaft-side air passages 92a, 92, one of which is opened at one end in the axial direction and which extends in the axial direction and the other of which is opened at the outer peripheral surface of the large diameter shaft portion 82b.
Two b are formed from both ends of the support shaft 82 toward the center of the shaft.

A rotary connector 93 is connected to each of the openings of the support shaft side air passages 92a and 92b formed at the end of the small diameter shaft portion 82a of the support shaft 82.
In each rotary connector 93, as shown in FIG.
Air tubes 94 are connected, and these air tubes 94
Is connected to the solenoid valve 95.

As shown in FIG. 4, the solenoid valve 95 sends the high-pressure air or is evacuated, and the first and second valve portions 95a and 95b to which the air action portion 96 is switchably connected. It has and. Solenoid valve 95 and air action part 96
Is, as shown in FIG.
It is also provided on the side of the tape running motor 31.

The first valve portion 95a communicates with one of the first support shaft side air passages 92a of the support shaft 82, and the second valve portion 95b has the other second support shaft side air passage of the support shaft 82. 9
It communicates with 2b.

When the air acting portion 96 is in communication with the first support shaft side air passage 92a by the first valve portion 95a, the second support shaft side air passage 92b is exposed to the atmosphere via the second valve portion 95b. I am trying to communicate, and the second
When the air acting portion 96 is communicated with the second support shaft side air passage 92b by the valve portion 95b, the first support shaft side air passage 92a is communicated with the atmosphere through the first valve portion 95a.

Further, as shown in FIG. 5, the roller central portions 84a and 84b of the roller portion 81 are composed of a first roller central portion 84a and a second roller central portion 84b which are two cylindrical bodies. First roller center portion 84a
When the first roller center portion 84a and the second roller center portion 84b are inserted into the support shaft 82 and brought into contact with the second roller center portion 84b, the pressure that the diaphragm 91 fixed to the support shaft 82 can be stored. The recess 84c is formed so that the adjustment chamber 97 can be formed.

One of the first roller center portion 84a and the second roller center portion 84b communicates with the support shaft side air passages 92a and 92b of the support shaft 82, and the other is in the pressure adjusting chamber 97 formed by the recess 84c. L-shaped air passages 98a, 98b on the roller portion side that communicate with each other are formed.

In this embodiment, since the roller center portions 84a and 84b are slidable with respect to the support shaft 82, the support shaft side air passage is always provided regardless of the sliding movement of the roller center portions 84a and 84b. 92a, 92b
And the roller portion side air passages 98a and 98b need to communicate with each other.

Therefore, a gap is formed between the outer surface of the support shaft 82 and the inner surfaces of the roller central portions 84a and 84b, and the bearing metal 83 is divided into a plurality of parts so that the inner surfaces of the roller central portions 84a and 84b can be formed. The support shaft side air passage 9 is prevented by avoiding the opening of the roller portion side air passages 98a, 98b and by the sliding operation of the roller center portions 84a, 84b.
These bearing metal 8 so that 2a and 92b are not closed
By fixing No. 3, the outer surface of the support shaft 82, the inner surfaces of the roller central portions 84a and 84b, and the end surface of the bearing metal 83 form airtight and annular intermediate air passages 99a and 99b.

In this embodiment, in order to obtain the airtightness of the pressure adjusting chamber 97, the first roller central portion 84a and the second roller central portion 84a are provided.
An O-ring 88 for sealing is provided between the first roller center portion 84a and the second roller center portion 84b when the roller center portion 84b is inserted through the support shaft 82 and is brought into contact with the support shaft 82.

As shown in FIG. 5, the grooved bearing 85 is inserted into both of the small-diameter shaft portions 82a of the support shaft 82 and press-fitted into the roller center portions 84a and 84b. , 84b, and a flange portion 85b that covers the outer side end faces of

Further, a plurality of annular grooves 85c extending in the circumferential direction are formed on the cylinder inner surface of the grooved bearing 85, and balls 85d are fitted into these annular grooves 85c.

The small diameter shaft portion 82a of the support shaft 82 is
A plurality of sliding grooves 82e into which the balls 85d are fitted are formed so as to extend in the axial direction.

In the present embodiment, the grooved bearing 85 is rotatably inserted into the support shaft 82, and the grooved bearing 85 is used.
The ball 85d is sandwiched between the annular groove 85c and the sliding groove 82e of the support shaft 82.

Thus, the annular groove 85c and the sliding groove 8 are formed.
Since the ball 85d is fitted in the 2e at the same time, the grooved bearing 85 can be guided by the sliding groove 82e through the ball 85d and smoothly slid with respect to the support shaft 82.

Moreover, the fact that the ball 85d tries to move along the annular groove 85c as the support shaft 82 rotates makes use of the fact that when the rotation speed of the support shaft 82 exceeds a predetermined rotation speed. The ball 85d receives the resistance of the annular groove 85c and the sliding groove 82e, so that the grooved bearing 85 also rotates along with the support shaft 82 at a predetermined rotation speed or more.

By the rotation of the grooved bearing 85, the roller center portions 84a and 84b into which the grooved bearing 85 is press fitted are also rotated in synchronization.

As shown in FIG. 5, a cylindrical rubber roller core 86 made of metal is fitted on the outer peripheral surfaces of the roller central portions 84a and 84b. Donut-shaped fixing plates 89 for preventing the rubber roller core 86 from coming off from the roller central portions 84a and 84b are fixed to both ends of the rubber roller core 86 in the axial direction by bolts 89a.

The inner diameter of the fixed plate 89 is smaller than the outer diameter of the roller center portions 84a and 84b, and the inner diameter side of the fixed plate 89 is located on the roller center portions 84a and 84b.
The rubber roller core 86 is prevented from coming off from the roller central portions 84a and 84b by tightening the bolt while being brought into contact with b as well.

On the outer peripheral surface of the rubber roller core 86, as shown in FIG. 5, a thin-walled cylindrical rubber roller 87 is inserted and attached. The rubber roller 87 is made of synthetic resin rubber.

In this embodiment, by sliding the roller central portions 84a and 84b with respect to the support shaft 82 in the axial direction, the outer surface of the support shaft 82 and the roller central portion 84a,
The annular projection 91a of the diaphragm 91 provided in the pressure adjusting chamber 97 formed by the recess 84c of the 84b is provided with the first port 98c of the first roller portion side air passage 98a or the second roller portion side air opening into the pressure adjusting chamber 97. Passage 98
One of the second ports 98d of b is closed.

The air acting portion 96, the solenoid valve 95, the air tube 94, the support shaft side air passages 92a and 92b, the intermediate air passages 99a and 99b, and the roller portion side air passage 98.
The a and 98b constitute a fluid introducing means for introducing a fluid (air) into the pressure adjusting chamber 97.

When the high-pressure air is introduced or the vacuum is drawn from the air action portion 96, the fluid introduction means is a solenoid valve 95.
By the switching operation of the first valve portion 95a and the second valve portion 95b of the first support shaft side air passage 9 via the air tube 94.
Air is sent to the pressure adjusting chamber 97 through either the air passage 2a or the second support shaft side air passage 92b.

When air is sent to the first support shaft side air passage 92a from the air acting portion 96, the first intermediate air passage 99 is formed.
Air is introduced into the pressure adjusting chamber 97 from the first roller portion side air passage 98a via a.

Air is introduced into the pressure adjusting chamber 97 from the first port 98c, and the air in the pressure adjusting chamber 97 is opened to the atmosphere from the second port 98d via the second valve portion 95b. ing.

At this time, the inflow of air from the first port 98c into the pressure adjusting chamber 97 and the second port 98d.
Since the pressure of the space between the diaphragm 91 and the first port 98c increases and the pressure of the space between the diaphragm 91 and the second port 98d decreases due to the outflow of air in the pressure adjusting chamber 97 from Roller central portions 84a, 84 in the direction in which the second port 98d approaches toward the diaphragm 91.
b slides on the support shaft 82.

Then, by the sliding operation, the second port 9
8d is covered with the diaphragm 91.

Next, when air is sent from the air acting portion 96 to the second support shaft side air passage 92b, the pressure adjusting chamber 97 is supplied from the second roller portion side air passage 98b via the second intermediate air passage 99b. Air is introduced into the inside.

Then, air is introduced into the pressure adjusting chamber 97 through the second port 98d, and the air in the pressure adjusting chamber 97 is opened to the atmosphere through the first port 98c and the first valve portion 95a.

At this time, the inflow of air from the second port 98d into the pressure adjusting chamber 97 and the first port 98c.
Since the pressure of the space between the diaphragm 91 and the second port 98d increases and the pressure of the space between the diaphragm 91 and the first port 98c decreases due to the outflow of air in the pressure adjusting chamber 97 from Roller central portions 84a, 84 in a direction in which the first port 98c approaches toward the diaphragm 91.
b slides on the support shaft 82.

Then, by the sliding operation, the first port 9
8c is covered with the diaphragm 91.

In the present embodiment, the introduction of air from the first port 98c into the pressure adjusting chamber 97 and the introduction of air from the second port 98d into the pressure adjusting chamber 97 are alternately repeated to provide a support shaft. The roller portion 81 can be repeatedly reciprocated in the axial direction with respect to 82.

According to the present embodiment, as described above, the roller center portions 84a and 84b of the roller portion 81 and the grooved bearing 85 are configured to be slidable in the axial direction with respect to the support shaft 82, and the pressure is applied. The diaphragm 91 is provided in the adjustment chamber 97 to open the pressure adjustment chamber 97 in the first port 9
8c and high pressure air from the second port 98d are alternately introduced by the operation of the solenoid valve 95, and the roller portion 81 reciprocates with respect to the support shaft 82, so that a slight vibration is generated in the pressing portion 8. The vibration mechanism 9 is configured.

In the present embodiment, with the above configuration, the polishing head main body 3 is moved up and down by the lifting device 5 to set the surface 2 on which the polishing table 2 is mounted.
4, while the polishing tape T mounted on the pressing portion 8 of the polishing head body 3 is brought into contact with the material to be polished installed on the installation surface 24, while slightly vibrating by the vibration mechanism 9, It is possible to polish the material to be polished while moving the head body 3 back and forth and left and right by the horizontal moving device 4, and further to rotate the polishing head body 3 while slightly vibrating to polish the material to be polished. You can also do it.

In the polishing apparatus of this embodiment, first, the polishing tape T is set on the tape reel 71, and then the polishing tape T is wound around the conveying roller 30 and the rubber roller 87 of the roller portion 81 of the pressing portion 8. By fixing the polishing tape T to the take-up reel 72, the polishing tape T is set on the polishing head body 3.

Then, polishing or cleaning of the material to be polished is performed as follows. First, a flat material to be polished is placed on the installation surface 24 on the endless belt 22 of the polishing table 2, and the material to be polished on the endless belt 22 is carried to a predetermined position by the drive of the drive roller 23, and is polished by the suction means 25. The material is attracted to the endless belt 22 and the material to be polished is fixed to the polishing table 2.

Next, the horizontal moving device 4 is driven to horizontally move the polishing head body 3 to an appropriate position, and the lifting device 5 is driven to cover the polishing tape T mounted on the pressing portion 8 of the polishing head body 3. Contact the surface of the abrasive.

Then, the tape running motor 31 is driven to drive the take-up reel 72, the transport roller 30, and the pressing portion 8.
To rotate. By driving the take-up reel 72 and the like to rotate, a new polishing tape T is pulled out from the tape reel 71 and sequentially supplied to the pressing portion 8, and then the take-up reel 7
It is wound up to 2.

While the polishing tape T is running, the vibrating mechanism 9 causes the roller portion 8 to move against the support shaft 82.
It is possible to reciprocate 1 to cause a slight vibration in the pressing portion 9 and to polish the material to be polished smoothly by the slight vibration with the new polishing tape T constantly supplied.

Further, while the pressing portion 8 is slightly vibrated, the polishing head main body 3 is also rotated by driving the head main body drive motor 60, so that the material to be polished is polished by the slight vibration and polishing by the rotation. You can also

In this embodiment, depending on the polishing conditions, polishing by only slight vibration and polishing by slight vibration and rotation are performed.

Incidentally, at the time of this polishing work, in order to perform the polishing work smoothly, although not shown, water is supplied to the polishing surface of the material to be polished.

Further, by horizontally moving the polishing head main body 3 in the desired direction by the horizontal moving device 4 during polishing, the surface of the material to be polished can be evenly polished and cleaned.

In the present embodiment, the polishing apparatus for polishing a flat workpiece such as a liquid crystal glass plate has been described.
INDUSTRIAL APPLICABILITY The present invention can also be applied to a polishing apparatus for polishing the end surface of a plate-shaped material to be polished, such as polishing the end surface of a silicon wafer.

Further, in the present embodiment, polishing is performed while running a long polishing tape, but the polishing tape cut into a predetermined size is attached to the pressing portion of the polishing head body. Therefore, it can also be applied to a polishing apparatus for polishing a material to be polished. In this case, it is preferable that the pressing portion is not a rotatable roller but a pressing body fixed to the case body.

In the above-described embodiment, the vibration mechanism 9 is configured to utilize the pressure difference between the diaphragm 91 and the pressure adjusting chamber 97, and the roller portion 81 is slid on the support shaft 82. As in the other embodiments shown, the vibration mechanism 9 may be configured to utilize expansion and contraction of the piezoelectric element 90.

In the second embodiment shown in FIG. 6, the roller portion 8 is used.
A space 80 is formed between the inner surface of the first shaft 1 and the outer surface of the support shaft 82. In the space 80, one end is fixed to the outer surface of the support shaft 82 and the other end is fixed to the inner surface of the roller portion 81. The vibration mechanism 9 includes the piezoelectric element 90 and the voltage input unit 10 for applying a voltage to the piezoelectric element 90.
Are configured.

The piezoelectric element 9 using the voltage input section 10
The roller element 81 is reciprocated in the axial direction with respect to the support shaft 82 by expanding and contracting the piezoelectric element 90 by turning the voltage to 0 on and off.

More specifically, the roller portion 81 is
Similar to the first embodiment described above, the roller central portion 84
d, 84e, grooved bearing 85, rubber roller core 86
And a rubber roller 87 and a fixing plate 89.

The grooved bearing 85 and the rubber roller core 8
6, the rubber roller 87, and the fixing plate 89 have the same configurations as those in the first embodiment, and thus the description thereof will be omitted.

The support shaft 82 is composed of a small diameter shaft portion 82a at both ends in the axial direction and a large diameter shaft portion 82b at the central portion in the axial direction. The mechanism for supporting and rotating the case main body portion 33 is as follows. , Which is the same as that of the first embodiment, and therefore will be omitted.

The roller central portions 84d and 84e are three cylindrical members that are inserted into the support shaft 82, and the thin cylindrical central portion 8 for forming the space portion is disposed in the axial central portion.
4d and a thick-walled roller central portion 84e arranged axially on both sides of the space-forming roller central portion 84d.

The central portion 84d for forming the space portion is used as a spacer for keeping a predetermined length between the central portions 84e of the thick rollers.

In the present embodiment, the space 80 for disposing the piezoelectric element 90 is formed between the inner surface of the space forming roller central portion 84d and the outer surface of the large diameter shaft portion 82b of the support shaft 82. ing.

The thick roller center portion 84e is inserted into the support shaft 82 so as to be able to slide and rotate with respect to the large diameter shaft portion 82b of the support shaft 82 via the bearing metal 83, and the thick roller center portion 84e. The grooved bearing 85 is press-fitted into the cylinder inner surface of the portion 84e.

The support shaft 82 has an insertion passage 82f for inserting the lead wire 10a which is opened at the shaft end surface of one small diameter shaft portion 82a and is opened at the outer surface of the large diameter shaft portion 82b into the space portion 80. Is formed.

A rotary connector 93 is connected to the shaft end of the support shaft 82 where the passage 82f for insertion is opened, and the lead wire 10a is inserted through the rotary connector 93.
One end of the lead wire 10a is connected to the power supply 10b provided in the case body 33, and the other end is inserted into the insertion passage 82f and connected to the piezoelectric element 90 provided in the space 80.

In the present embodiment, the lead wire 10a and the power source 1
The voltage input unit 10 is composed of 0b.

Further, the piezoelectric element 9 provided in the space 80
Reference numeral 0 denotes a long plate member. This piezoelectric element 90 has one end in the longitudinal direction fixed to the outer surface of the large-diameter shaft portion 82b of the support shaft 82 via a mounting member 90a, and the other end in the longitudinal direction is thick. It is fixed to the end surface of the meat roller central portion 84e via a mounting member 90a.

Then, the lead wire 10a is connected to the central portion of the piezoelectric element 90, and a voltage is applied to the piezoelectric element 90 via the lead wire 10a by the ON operation of the power source 10b, and the piezoelectric element 90 contracts. When turned off, the contraction is released and the original length is restored.

In this embodiment, one end of the piezoelectric element 90 is fixed to the support shaft 82, and the other end is fixed to the roller portion 81. Therefore, when the piezoelectric element 90 contracts, the roller portion 81 moves relative to the support shaft 82. Slide in one direction,
When the voltage is released and the piezoelectric element 90 tries to return to the original state, the roller portion 81 slides in the opposite direction with respect to the support shaft 82.

In this embodiment, by repeatedly turning on and off the voltage to the piezoelectric element 90, the expansion and contraction operation of the piezoelectric element 90 is repeated, and the reciprocating operation of the roller portion 81 with respect to the support shaft 82 is repeatedly performed. 8 is caused to generate a slight vibration.

According to the second embodiment, fine polishing by fine vibration can be performed as in the first embodiment, and the airtight state is provided between the roller portion 81 and the support shaft 82 as in the first embodiment. Since it is not necessary to form a space (pressure adjusting chamber), a sealing material for maintaining airtightness and high processing accuracy are not required.

[0114]

As described above, according to the first aspect of the present invention, the polishing tape mounted on the pressing portion of the polishing head body is brought into contact with the material to be polished installed on the polishing table to be polished. In the polishing apparatus configured to polish the
Because it has a vibration mechanism that causes a slight vibration,
Can perform fine polishing and improve smoothness.

According to a second aspect of the present invention, in the polishing apparatus according to the first aspect, the pressing portion is a rotatable roller portion around which the polishing tape is slidably slid, and the roller portion is slid in the axial direction. It is composed of a support shaft that supports possible
Since the vibrating mechanism is configured to cause a slight vibration by reciprocally moving the roller portion in the axial direction with respect to the support shaft, fine grinding can be performed while the vibrating mechanism can be configured with a simple structure.

According to a third aspect of the present invention, in the polishing apparatus according to the second aspect, the vibration mechanism includes an airtight pressure adjusting chamber formed between the inner surface of the roller portion and the outer surface of the support shaft. Two ports opened to the pressure adjusting chamber and fixed to the outer surface of the support shaft so as to be located in the pressure adjusting chamber, and either of the two ports can be closed by the sliding operation of the roller portion with respect to the support shaft. The pressure adjusting chamber is provided with a pressure adjusting valve and a fluid introducing means for alternately feeding the fluid into the pressure adjusting chamber from one of the two ports and drawing out the fluid from the other port. When the fluid is introduced to the pressure control valve, the roller slides in the direction in which the other port is closed by the fluid introduced, and the roller slides in the opposite direction when the port is switched. Because you configured so that, quick reaction of the reciprocating movement of the roller unit relative to the support shaft, because it is caused a delicate micro-vibration, thereby enabling more fine polishing.

According to a fourth aspect of the present invention, in the polishing apparatus according to the second aspect, the vibrating mechanism forms a space between the inner surface of the roller portion and the outer surface of the support shaft, and one end of the vibration portion is formed in the space portion. A piezoelectric element is provided, which is fixed to the outer surface of the support shaft and the other end is fixed to the inner surface of the roller section.It also has a voltage input section for applying voltage to the piezoelectric element, and the voltage input section turns the voltage on and off Since the roller part is configured to reciprocate in the axial direction with respect to the support shaft by expanding and contracting the element, it is possible to perform fine polishing without the need for a sealing material to maintain airtightness or high processing accuracy. Becomes

[Brief description of drawings]

FIG. 1 is a schematic overall configuration diagram of a polishing apparatus of the present invention.

FIG. 2 is a schematic overall configuration diagram of the polishing apparatus shown in FIG. 1 as seen from a side surface.

FIG. 3 is a side view of the polishing head body according to the first embodiment of the present invention.

FIG. 4 is an explanatory diagram showing a relationship between a pressing unit and a vibration mechanism of the polishing head body according to the first embodiment of the present invention.

5 is a cross-sectional view of the pressing portion of FIG.

FIG. 6 is a sectional view of a pressing portion of a polishing head body according to a second embodiment of the present invention.

FIG. 7 is a partial cross-sectional view showing a polishing head body of a conventional polishing apparatus.

8 is a sectional view of a polishing head body of the conventional polishing apparatus shown in FIG.

[Explanation of symbols]

T polishing tape 2 polishing table 3 Polishing head body 33 Case body 8 Pressing part 81 Roller part 82 Support shaft 9 Vibration mechanism 91 Diaphragm (pressure control valve) 92a, 92b Support shaft side air passage 94 air tube 95 solenoid valve 96 Air acting part 97 Pressure adjustment chamber 98a, 98b Roller side air passage 98c, 98d port 99a, 99b Intermediate air passage 80 Space Department 90 Piezoelectric element 10 Voltage input section

Claims (4)

[Claims] 1. A polishing apparatus in which a polishing tape mounted on a pressing portion of a polishing head body is brought into contact with a material to be polished installed on a polishing table to polish the material to be polished, and the pressing portion causes slight vibration. A polishing apparatus having a vibrating mechanism. 2. The pressing portion is composed of a rotatable roller portion around which a polishing tape is slidably slid, and a support shaft for slidably supporting the roller portion in the axial direction. The polishing apparatus according to claim 1, wherein the polishing machine is configured to cause a slight vibration by reciprocating in the axial direction with respect to the support shaft. 3. The vibration mechanism comprises an airtight pressure adjusting chamber formed between an inner surface of the roller portion and an outer surface of the supporting shaft, two ports opened to the pressure adjusting chamber, and a position inside the pressure adjusting chamber. The pressure control valve is fixed to the outer surface of the support shaft so that either one of the two ports can be closed by the sliding operation of the roller part with respect to the support shaft, and the pressure control valve from either one of the two ports. The pressure adjusting valve is provided with a fluid introducing unit that alternately feeds the fluid and withdraws the fluid from the other port, and the fluid is introduced from the one port into the pressure adjusting chamber by the fluid introducing unit. The roller portion slides in the direction of closing the other port, and the roller portion slides in the opposite direction by switching the port.
The polishing apparatus according to. 4. The vibrating mechanism forms a space between the inner surface of the roller portion and the outer surface of the support shaft, wherein one end is fixed to the outer surface of the support shaft and the other end is fixed to the inner surface of the roller portion in the space portion. In addition to providing the piezoelectric element, it also has a voltage input section for applying a voltage to the piezoelectric element, and by expanding and contracting the piezoelectric element by turning on and off the voltage to the piezoelectric element by the voltage input section, the roller section is axially oriented with respect to the support shaft. The polishing apparatus according to claim 2, wherein the polishing apparatus is configured to reciprocate.