JP2008114329A - Apparatus and method for polishing - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing apparatus capable of realizing polishing of double side surfaces of a groove formed in a work with high accuracy in a short time. <P>SOLUTION: This polishing apparatus includes: a pair of polishing members 80 for respectively polishing the double side surfaces 6 of the groove 4 formed in the work 2; a holder 62 to which both of the polishing members 80 are attached; a work driving part and an oscillation mechanism part which change a relative position of the groove 4 to the holder 62 in a longitudinal direction of the groove as a position change device; an expansion member 70 which is disposed between the respective polishing members 80 and is expanded by receiving air pressure to press the respective polishing members 80 to a side surface 6 of a polishing objected article; and a fluid pressure supply part which supplies air fluid pressure to the expansion member 70 as a supply device. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a polishing apparatus and a polishing method.

For example, as disclosed in Patent Document 1, in a link mechanism or the like in which one member is connected to a groove of another member by a sliding pair, smoothness is required on the side surface of the groove, so that the groove is polished. There is a need. Conventionally, various techniques for polishing a groove formed in a workpiece have been proposed in order to meet such a demand, but as one type, a polishing member is inserted into the groove obliquely on the side surface on the insertion tip side. A hitting technique is disclosed in Patent Document 2.
JP 2005-48707 A Japanese Utility Model Publication No. 5-352

  However, in order to shorten the processing time, if the polishing member is inserted from both sides of the groove width direction by applying the technique of Patent Document 2 and both side surfaces of the groove are simultaneously polished, the polishing members are moved in the groove width direction. Since they cannot be stacked, it is difficult to polish both side surfaces at the end of the groove. Further, in this case, a separate polishing member is applied obliquely to each side surface of the groove, so that the polishing pressure applied to each side surface can be made uniform with each other and in the groove depth direction. It becomes difficult and the surface accuracy of each side surface varies. In addition, when the technology of Patent Document 2 is applied to a groove having a curved shape in the longitudinal direction as in Patent Document 1, the polishing pressure also increases as the relative position between the groove and the polishing member in the longitudinal direction changes. Since it becomes easy to change, variation in surface accuracy becomes remarkable.

  The present invention has been made in view of these problems, and an object thereof is to provide a polishing apparatus and a polishing method that realize high-precision and short-time polishing on both side surfaces of a groove. is there.

  The invention according to claim 1 is a polishing apparatus for polishing a groove formed in a work, a pair of polishing members for polishing both side surfaces of the groove, and a holder to which both polishing members are mounted. And a vibration means for vibrating the holder, a position changing means for changing the relative position of the groove and the holder in the longitudinal direction of the groove, An expansion member that presses the polishing member against a side surface to be polished, and a supply unit that supplies fluid pressure to the expansion member.

  According to the first aspect of the present invention, fluid pressure is supplied to the expansion members disposed between the respective polishing members and the expansion members are expanded, so that the respective polishing members are simultaneously pushed onto both side surfaces of the groove. It will be hit. Therefore, each polishing member is positioned at a position where the forces are balanced by the action and reaction between the side surfaces of the grooves, so that a uniform polishing pressure can be applied to the side surfaces of the grooves. In addition, under such a state of uniform polishing pressure, the holder on which both polishing members are mounted vibrates and the relative position between the groove and the holder changes in the groove longitudinal direction, so that both side surfaces of the groove are simultaneously polished. It will be. Therefore, according to the first aspect of the present invention, high-precision and short-time polishing can be realized on both side surfaces of the groove.

  According to invention of Claim 2, a vibration means vibrates a holder in the depth direction of a groove | channel. According to this, since the relative position of the groove and the holder changes in the groove longitudinal direction while the holder vibrates, any contact point between each polishing member and the groove side surface can be displaced in a zigzag shape. Uneven polishing can be reduced.

  According to the third and sixth aspects of the present invention, the holder has a pair of holding portions that hold the polishing members from the opposite side to the groove side surface on both sides of the expansion member, and the expansion member receives fluid pressure. As a result of the expansion, the respective holding portions are slid to press the respective polishing members against the groove side surfaces. According to this, since the holding portion that holds each polishing member is slid in order to press each polishing member against the groove side surface by utilizing the expansion of the expansion member, deformation of each polishing member is suppressed. Therefore, it is possible to prevent the polishing pressure on the groove side surfaces from becoming uneven due to the deformation of each polishing member.

  According to the fourth aspect of the present invention, the expansion member is formed into a bag shape with rubber, and expands when fluid pressure is supplied from the supply means to the inside. The expansion member formed in a bag shape with rubber in this way can be easily expanded according to the fluid pressure by supplying the fluid pressure to the inside. It can be pressed with force.

  According to the invention described in claim 5, since the bag-like expansion member has a cylindrical shape whose center line extends in the depth direction of the groove, the bag-like expansion member is evenly expanded toward both polishing members in the width direction of the groove. The polishing pressure from each polishing member to the side surface of the groove can be made uniform along each other and along the depth direction of the groove.

  According to the invention described in claim 6, the holder has a pair of holding portions that hold each polishing member from the opposite side to the side surface on both sides of the expansion member, and the center line extends along the depth direction of the groove. A surface is formed on the side opposite to the polishing member of each holding portion, and the expansion member expands by receiving fluid pressure and presses the arc surface of each holding portion, thereby sliding each holding portion to each polishing member. Press against the side of the groove. According to this, since the arc surface along the center line in the groove depth direction in each holding portion is positioned coaxially with the cylindrical expansion member along the center line in the direction, the expansion of these arc surfaces. The pressing area by the member can be increased. Therefore, each holding part can be reliably slid and the pressing of each polishing member to the groove side surface can be achieved.

  According to the seventh aspect of the present invention, the holder has a pair of restricting portions that are arranged between the holding portions in the circumferential direction of the inflating member and restrict the inflating of the inflating member in the groove longitudinal direction. According to this, since the expansion member in the longitudinal direction of the groove is restricted by the pair of restriction members arranged between the holding portions in the circumferential direction of the cylindrical expansion member along the center line in the groove depth direction, Expansion to each holding portion side in the groove width direction is promoted. Therefore, each holding part can be reliably slid by the expansion of the expansion member, and the pressing of each polishing member to the groove side surface can be achieved.

  According to the eighth aspect of the present invention, the holder is provided so as to be rotatable around an axis along the depth direction of the groove. According to this, even if the relative position of the groove and the holder changes in the groove longitudinal direction, the holder that can rotate around the axis along the groove depth direction rotates following the groove, thereby causing variations in polishing pressure. Is suppressed. Therefore, it is possible to expect further improvement in the polishing accuracy with respect to both side surfaces of the groove.

  The fluid pressure may be, for example, a gas pressure or a liquid pressure, but is preferably an air pressure as in the invention according to claim 9. This is because the use of air present in the surrounding environment is not only advantageous in terms of cost but also avoids contamination of the surrounding environment due to leakage from the apparatus.

  Further, the longitudinal groove shape may be, for example, a straight line shape or the like, but particularly in the case of a curved line shape as in the invention of claim 10, by adjusting the supply fluid pressure to the expansion member, The polishing pressure from each polishing member to the side surface of the groove can be made uniform regardless of the relative position in the groove longitudinal direction of the groove and the holder.

  According to the eleventh aspect of the present invention, there is provided a polishing apparatus for polishing a groove having a spiral shape in the longitudinal direction, wherein the position changing means is a work drive unit that rotationally drives the work around the spiral center of the groove. And a support portion that supports the holder so as to be swingable about an eccentric axis with respect to the spiral center. According to this, even if it is a spiral groove in which the polishing pressure from each polishing member to the groove side surface is easy to change when the relative position of the groove and the holder changes in the groove longitudinal direction according to the rotational drive of the workpiece, The fluctuation of the polishing pressure is suppressed by swinging the holder swingable around the eccentric axis with respect to the spiral center following the groove. Therefore, highly accurate polishing can be performed on both side surfaces of the spiral groove.

  The invention according to claim 12 is a polishing method for polishing a groove formed in a workpiece, wherein an expansion member is disposed between a pair of polishing members for polishing both side surfaces of the groove, and the expansion is performed. By supplying fluid pressure to the member to expand the expansion member, the holders with both polishing members are vibrated while the polishing members are pressed against the side surface of the object to be polished. The position is changed in the longitudinal direction of the groove.

  According to the twelfth aspect of the present invention, the polishing members can be simultaneously pressed against the both side surfaces of the groove by supplying the fluid pressure to the expanding members disposed between the polishing members to expand them. As a result, each polishing member can be positioned at a position where the forces are balanced by the action / reaction with the groove side surface, so that a uniform polishing pressure can be applied to the groove side surface. In addition, under the action state of the uniform polishing pressure, both sides of the groove can be polished simultaneously by changing the relative position between the groove and the holder in the groove longitudinal direction while vibrating the holder on which both polishing members are mounted. Can do. Therefore, according to the twelfth aspect of the present invention, it is possible to realize high-precision and short-time polishing on both side surfaces of the groove.

  The features of the apparatus invention according to claims 2 to 11 may be realized by the method invention according to claim 12.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  FIG. 2 shows a plan view of a work 2 to be polished according to an embodiment of the present invention. The workpiece 2 is formed in an annular plate shape from a metal such as steel. A pair of grooves 4 is formed in the workpiece 2 so as to be 180 ° rotationally symmetric about the circular center O. Each groove 4 is a longitudinal groove having a substantially constant width between both side surfaces 6. The shape of each groove 4 in the longitudinal direction is a curved shape, specifically, a spiral shape in which the distance from the circular center O increases as it goes from one end to the other end in the longitudinal direction. That is, the circular center O of the workpiece 2 coincides with the spiral center O of each groove 4. In the present embodiment, each groove 4 is a bottomed groove that does not penetrate the work 2, but may be a through groove that penetrates the work 2.

  3 and 4 show the mechanical configuration of the polishing apparatus 10 according to the present embodiment. The polishing apparatus 10 includes a workpiece driving unit 12, a tool driving system 20, a fluid pressure supply unit 50, and a pair of polishing tools 60.

  The work drive unit 12 includes a main shaft 14, a chuck 16, and a rotation drive motor 18. The main shaft 14 is provided so as to be rotatable around an axis P along the vertical direction (vertical direction in FIG. 3). The chuck 16 is mounted on the main shaft 14, and the work 2 with the opening of each groove 4 facing upward in the vertical direction is set coaxially with the main shaft 14. Therefore, in this set state (hereinafter simply referred to as “set state”), the depth direction of each groove 4 substantially coincides with the vertical direction. The rotation drive motor 18 is activated by energization, and rotates the main shaft 14 around the axis P. Therefore, when the rotary drive motor 18 is operated, the set workpiece 2 can be rotated around the spiral center O substantially coincident with the axis P.

  The tool drive system 20 includes an elevation drive unit 22, a vibration drive unit 30, a swing mechanism unit 40, and the like.

  The lift drive unit 22 includes a fixed base 24, a ball screw mechanism 26, and a lift drive motor 28. The fixed base 24 rotatably supports a screw shaft 26a of the ball screw mechanism 26. The movable nut 26b of the ball screw mechanism 26 moves up and down in the vertical direction according to the rotation of the screw shaft 26a. The elevating drive motor 28 is activated by energization, and rotates the screw shaft 26a to elevate the movable nut 26b.

  The vibration drive unit 30 includes a carrier 32, a vibration member 34, a rotation cam 36, a pressing spring 37, and a vibration drive motor 38. The carrier 32 is fixed to the movable nut 26b. The vibration member 34 is fitted to a guide rod 32 a extending along the vertical direction in the carrier 32, and can be displaced relative to the carrier 32 on both sides in the vertical direction. The rotating cam 36 is provided so as to be rotatable about an axis Q along the horizontal direction (left-right direction in FIG. 3), and has a cam surface 36a whose diameter from the axis Q changes in the rotating direction. The flat driven surface 34b perpendicular to the vertical direction in the vibration member 34 is pressed against the cam surface 36a by the biasing force of the pressing spring 37 that biases the vibration member 34. Thereby, the vibration member 34 vibrates in the vertical direction as the rotating cam 36 rotates. The vibration drive motor 38 is actuated by energization, and rotationally drives the rotary cam 36 to vibrate the vibration member 34 in the vertical direction. Therefore, the vibration member 34 can be vibrated in the depth direction of each groove 4 when the vibration drive motor 38 is operated in the set state of the workpiece 2.

  The swing mechanism 40 includes a pair of support links 42 and a pair of swing links 44. Each support link 42 is formed in an arm shape, and is disposed on both sides of the axis P of the main shaft 14. One end side of each support link 42 is fixed to the vibration member 34. Each swing link 44 is formed in an arm shape, and is arranged so as to be 180 ° rotationally symmetric about the axis P. One end portion side of each swing link 44 is supported by the end portion on the opposite side of the corresponding support link 42 from the vibration member 34 and is swingable about an axis R along the vertical direction. Here, the swing axis R of each swing link 44 is eccentric with respect to the axis P of the main shaft 14. Therefore, in the set state of the workpiece 2, the swing axis R of each swing link 44 becomes an eccentric axis R that is eccentric with respect to the spiral center O of each groove 4.

  As described above, when the lifting drive motor 28 is operated, each polishing tool 60 can be lifted and lowered in the vertical direction. Further, when the vibration drive motor 38 is operated, each polishing tool 60 can be vibrated in the vertical direction. Further, each polishing tool 60 can be swung around the axis R along the vertical direction by swinging each swing link 44.

  Further, the end of each swing link 44 opposite to the support link 42 supports the corresponding polishing tool 60 so as to be rotatable around the axis S along the vertical direction. Therefore, in the set state of the workpiece 2, each polishing tool 60 is rotatable around the axis S along the depth direction of each groove 4.

  As shown in FIGS. 3 and 4, the fluid pressure supply unit 50 includes a pressure increasing valve 52, a pair of flexible tubes 54, and a pair of pressure regulators 56. The pressure-increasing valve 52 is activated by energization, and increases the pressure of low-pressure factory air to about 0.7 MPa, for example. Each flexible tube 54 is connected between the corresponding polishing tool 60 and the pressure increasing valve 52, and allows the corresponding polishing tool 60 to move up and down, vibrate, swing and rotate by flexibility. Each flexible tube 54 supplies air pressure to the corresponding polishing tool 60 by conveying the air output from the pressure increasing valve 52. Each pressure regulator 56 is installed in the middle of the corresponding flexible tube 54. Each pressure regulator 56 is activated by energization, and adjusts the air pressure supplied to the corresponding polishing tool 60 in the range of 0.05 to 0.7 MPa, for example.

  FIG. 5 shows an electrical configuration of the polishing apparatus 10 according to the present embodiment. As shown in the figure, the polishing apparatus 10 further includes a workpiece position sensor 90, a tool position sensor 92, a fluid pressure sensor 94, and a control circuit 96.

  The workpiece position sensor 90 is provided in the workpiece driving unit 12 and detects the rotational position of the workpiece 2 in the set state indirectly or directly based on the rotational position of the rotational driving motor 18 or the like. The tool position sensor 92 is provided in the tool drive system 20 and detects the vertical position of each polishing tool 60 indirectly or directly based on the rotational position of the lift drive motor 28 or the like. The fluid pressure sensor 94 is provided in the fluid pressure supply unit 50 and detects the air pressure supplied to each polishing tool 60 indirectly or directly based on the adjustment value of the air pressure by each pressure regulator 56.

  The control circuit 96 includes an electric circuit such as a microcomputer, and is electrically connected to the drive motors 18, 28, 38, the pressure increasing valve 52, the pressure regulators 56, and the sensors 90, 92, 94. The control circuit 96 controls energization of the drive motors 18, 28, 38 and the pressure regulators 56 based on the detection results of the sensors 90, 92, 94.

  6 and 7 show in detail the configuration of the polishing tool 60 that is a characteristic part of the present embodiment. Since the configuration of each polishing tool 60 is practically equal, only one polishing tool 60 will be described below.

  The polishing tool 60 includes a holder 62, an expansion member 70, an introduction pipe 72, a pair of polishing members 80, and the like.

  The holder 62 includes a holder base 64, a pair of holding projections 66, a return spring 67, a pair of regulating projections 68 and a connection plate 69. The holder base 64 is formed of a metal in a hollow shape, and is supported by the corresponding swing link 44 so as to be rotatable around the axis S.

  Each holding protrusion 66 is formed in a plate shape from metal and is disposed on both sides of the axis S. Each holding projection 66 is fitted to the holder base 64 so as to protrude downward from the holder base 64 in the vertical direction. Accordingly, the holding protrusions 66 are opposed to each other with a space therebetween, and particularly in the present embodiment, the holding protrusions 66 can be slid in the opposing direction at the fitting portion between the base end 66b side and the holder base 64. ing. Further, in the present embodiment, the opposing surface 66a of each holding projection 66 is formed in an arcuate surface shape in which the center line T substantially coincides with the axis S, that is, the center line T extends in the vertical direction.

  The return spring 67 is formed in an annular shape by connecting both end portions of a tension coil spring, for example, and is held by a holder base 64. The return spring 67 urges the holding projections 68 toward each other by engaging with the base end portions 66b of the holding projections 68 from the outside in the opposing direction.

  Each restricting protrusion 68 is formed in a plate shape with metal, and is disposed on both sides of the axis S and at a position between the holding protrusions 66 in the circumferential direction around the axis S. Each restricting protrusion 68 is fixed to the holder base 64 so as to protrude downward in the vertical direction from the holder base 64, and the protruding end portions 68 b are interconnected via connection plates 69. As a result, the restricting protrusions 68 are opposed to each other with a gap therebetween, but the sliding in the facing direction is suppressed by the connection plate 69. In the present embodiment, the opposing surface 68 a of each regulating projection 68 is formed in a flat surface shape parallel to the axis S.

  The expansion member 70 is formed in a bag shape from rubber, and is arranged in a form sandwiched between the holding protrusions 66 and between the restricting protrusions 68. The expansion member 70 of the present embodiment has a bottomed cylindrical shape in which the center line U substantially coincides with the axis S, that is, the center line U extends in the vertical direction, and is positioned between the restricting protrusions 68 in the circumferential direction. The holding projections 66 are coaxial with the opposing surface 66a. The upper opening 70 a of the expansion member 70 is connected to the corresponding flexible tube 54 (see FIG. 3) via an introduction tube 72 fixed in the holder base 64. Thereby, when the supply air pressure from the flexible tube 54 is introduced into the internal space 70b of the expansion member 70, the expansion member 70 expands in the radial direction in response to the air pressure. At this time, as shown in FIG. 8, the expansion member 70 abuts against the opposing surface 68 a of each regulating projection 68, so that the radial direction along the opposing direction (substantially coincides with the longitudinal direction of the groove 4 during polishing). Restricted to expansion. As a result, as shown in FIGS. 1 and 8, the expansion member 70 expands substantially evenly in the radial direction along the opposing direction of each holding projection 66, presses the opposing surface 66 a, and returns the holding projection 66 to the return spring 67. Slide in the opposite direction against the urging force. At this time, the bottomed cylindrical expansion member 70 can press a wide area portion on the concentric arcuate opposing surface 66a, so that each holding projection 66 slides reliably.

  As shown in FIGS. 6 and 7, each polishing member 80 is made of a grindstone for polishing both side surfaces 6 of the corresponding groove 4 in the workpiece 2, for example, vitrified bond diamond. Each polishing member 80 is formed in a rectangular plate shape, and is mounted and held on the side opposite to the facing surface 66a of the corresponding holding projection 66. At the time of polishing, each polishing member 80 is inserted into the corresponding groove 4 of the workpiece 2 in the set state, and held on the holding protrusion 66 from the opposite side to the side surface 6 to be polished on both sides sandwiching the expansion member 70 therebetween. It becomes a form. Accordingly, during the polishing process, as shown in FIGS. 1 and 8, when the expansion member 70 expands due to the air pressure and each holding projection 66 slides, each polishing member 80 is pressed against the side surface 6 to be polished. Further, at this time, the deformation of each polishing member 80 is suppressed by sliding each holding projection 66. As a result, each polishing member 80 comes into close contact with the side surface 6 along the depth direction of the corresponding groove 4, so that the polishing pressure applied from each polishing member 80 to the side surface 6 becomes uniform in that direction.

  The configuration of this embodiment has been described above. Below, the action | operation of this embodiment is demonstrated.

  (1) When the polishing process of each groove 4 is started under the set state of the workpiece 2, the lifting drive motor 28 is operated by energization from the control circuit 96, and each polishing tool 60 is lowered. At this time, the control circuit 96 controls the energization to the elevating drive motor 28 based on the detection result of the tool position sensor 92, so that the pair of polishing members 80 of each polishing tool 60 correspond to the corresponding groove 4 as shown in FIG. Is inserted into. Further, at this time, the main shaft 14 is rotationally driven as necessary so that the insertion position of the polishing member 80 in the longitudinal direction of the groove 4 is an end portion on the side away from the spiral center O.

  (2) Next, the pressure increasing valve 52 is actuated by energization from the control circuit 96, air pressure is supplied to the expansion member 70 of each polishing tool 60, and the expansion member 70 expands as shown in FIGS. The pair of polishing members 80 of each polishing tool 60 are simultaneously pressed against both side surfaces 6 of the corresponding groove 4. At this time, the control circuit 96 controls energization to each pressure regulator 56 based on the detection result of the workpiece position sensor 90, whereby the air pressure to the expansion member 70, and hence the expansion member 70 corresponding to the air pressure, is controlled. The amount of expansion is adjusted accurately. As a result, each of the polishing tools 60 rotates about the axis S and swings about the axis R so that the pair of polishing members 80 of each polishing tool 60 follows the both side surfaces 6 of the corresponding groove 4. According to the pair of polishing members 80 of each of these polishing tools 60, as shown in FIG. 1, they are positioned at positions where the forces are balanced by the action / reaction with the both side surfaces 6 of the corresponding groove 4, so that they are uniform with each other. It is possible to apply an appropriate polishing pressure to both side surfaces 6.

  (3) Subsequently, the vibration drive motor 38 is activated by energization from the control circuit 96, and each polishing tool 60 vibrates in the vertical direction at a predetermined cycle. At this time, since the operation of the pressure increasing valve 52 and the energization control to each pressure regulating regulator 56 described in the above (2) are continued, as shown in FIG. Polishing is performed simultaneously while receiving uniform polishing pressure from 80. At this time, since the rotation drive motor 18 is activated by energization from the control circuit 96 and the workpiece 2 is rotationally driven at a predetermined speed, the holder 62 of each polishing tool 60 swings around the axis S while corresponding to the corresponding groove. The polishing member 80 is slid relative to the both side surfaces 6 of the four in the longitudinal direction. As a result, any contact point between the both side surfaces 6 of each groove 4 and the polishing member 80 is displaced in a zigzag shape, so that polishing unevenness is reduced.

  As described above, according to the present embodiment, even the both side surfaces 6 of the groove 4 having a spiral shape can be simultaneously polished with a uniform polishing pressure, so that highly accurate polishing can be realized in a short time. be able to.

  In the embodiment described above, the vibration driving unit 30 corresponds to the “vibrating unit”, the fluid pressure supply unit 50 corresponds to the “supplying unit”, the swing mechanism unit 40 corresponds to the “supporting unit”, The work driving unit 12 and the swinging mechanism unit 40 together constitute “position changing means”. Each holding projection 66 corresponds to a “holding portion”, the facing surface 66a of each holding projection 66 corresponds to an “arc surface”, and each regulating projection 68 corresponds to a “regulating portion”.

(Other embodiments)
Although one embodiment of the present invention has been described above, the present invention is not construed as being limited to such an embodiment, and can be applied to various embodiments without departing from the scope of the present invention. .

  For example, the number of grooves 4 formed in one work 2 is set as appropriate, and the number of links 42 and 44 of the swing mechanism 40 and the number of polishing tools 60 depends on the number of grooves 4 in one work 2. It can be set appropriately.

  Further, the longitudinal direction shape of the groove 4 formed in one workpiece 2 may be a curved shape or a straight shape other than the spiral shape, and the configuration of the workpiece driving unit 12 and the tool driving system 20 is appropriately changed accordingly. Can be done. Here, the work drive unit 12 and the tool drive system 20 may be configured so long as the relative position between the groove 4 and the holder 62 of the polishing tool 60 can be changed in the longitudinal direction of the groove 4. The polishing tool 60 may be driven, or both of them may be driven. Specifically, in the case of the linear groove 4, a linear motion mechanism that linearly drives the workpiece 2 can be appropriately employed.

  Further, the configuration of the vibration drive unit 30 of the tool drive system 20 can appropriately employ a mechanism using a linear motor in addition to a mechanism using the rotating cam 36.

  In addition, the fluid pressure supplied to the expansion member 70 may be a gas pressure or a liquid pressure other than the air pressure. However, depending on the type of the fluid, fluid leakage may occur for reasons such as avoiding contamination of the surrounding environment. It is desirable to take sufficient preventive measures.

It is a longitudinal cross-sectional view which shows the characteristic operation state of the polishing tool of the polishing processing apparatus by one Embodiment of this invention. It is a top view which shows the workpiece | work which grind | polishes by one Embodiment of this invention. It is a schematic diagram which shows the mechanical structure of the grinding | polishing processing apparatus by one Embodiment of this invention, Comprising: It corresponds to the III-III sectional view taken on the line of FIG. It is a schematic diagram which shows the mechanical structure of the grinding | polishing processing apparatus by one Embodiment of this invention, Comprising: It corresponds to the IV-IV sectional view taken on the line of FIG. 1 is a block diagram illustrating an electrical configuration of a polishing apparatus according to an embodiment of the present invention. It is a longitudinal section showing the composition of the polish tool of the polish processing device by one embodiment of the present invention. It is a cross-sectional view showing a configuration of a polishing tool of a polishing apparatus according to an embodiment of the present invention. It is a cross-sectional view showing the characteristic operating state of the polishing tool of the polishing apparatus according to an embodiment of the present invention.

Explanation of symbols

2 workpieces, 4 grooves, 6 side surfaces, 10 polishing processing device, 12 workpiece drive unit (position changing means), 14 spindle, 16 chuck, 18 rotation drive motor, 20 tool drive system, 22 lift drive unit, 24 fixed base, 26 Ball screw mechanism, 26a Screw shaft, 26b Movable nut, 28 Lifting drive motor, 30 Vibration drive unit (vibration means), 32 Carrier, 32a Guide rod, 32b Drive surface, 34 Vibration member, 36 Rotating cam, 36a Cam surface, 37 Pressing spring, 38 Vibration drive motor, 40 Oscillating mechanism (position changing means, supporting part), 42 Support link, 44 Oscillating link, 50 Fluid pressure supply part (supplying means), 52 Booster valve, 54 Flexible tube, 56 Pressure regulator, 60 Polishing tool, 62 Holder, 64 Holder base, 66 Holding protrusion Holding portion), 66a facing surface (arc surface), 66b proximal end portion, 67 return spring, 68 regulating projection (regulating portion), 68a facing surface, 68b projecting end portion, 69 connecting plate, 70a upper opening, 70b internal space, 70 expansion member, 72 introduction pipe, 80 polishing member, 90 work position sensor, 92 tool position sensor, 94 fluid pressure sensor, 96 control circuit, O spiral center, R swing axis (eccentric axis), S axis (rotation) Axis), T center line (circular arc center line), U center line (cylindrical center line)

Claims (12)

A polishing apparatus for polishing a groove formed in a workpiece,
A pair of polishing members for polishing both side surfaces of the groove, and
A holder to which both the abrasive members are mounted;
Vibration means for vibrating the holder;
Position changing means for changing the relative position of the groove and the holder in the longitudinal direction of the groove;
An expansion member that is disposed between each of the polishing members and that receives the fluid pressure to expand, thereby pressing each polishing member against the side surface to be polished;
Supply means for supplying the fluid pressure to the expansion member;
A polishing apparatus characterized by comprising:   The polishing apparatus according to claim 1, wherein the vibration unit vibrates the holder in a depth direction of the groove. The holder has a pair of holding portions that hold the polishing members from opposite sides to the side surfaces on both sides of the expansion member,
3. The polishing apparatus according to claim 1, wherein the expansion member is expanded by receiving the fluid pressure, thereby sliding the holding portions to press the polishing members against the side surfaces. .   The polishing apparatus according to any one of claims 1 to 3, wherein the expansion member is formed in a bag shape with rubber, and expands when the fluid pressure is supplied to the inside from the supply means. .   The polishing apparatus according to claim 4, wherein the expansion member has a cylindrical shape with a center line extending in a depth direction of the groove. The holder has a pair of holding portions that hold the polishing members from opposite sides to the side surfaces on both sides of the expansion member, and a circular arc surface having a center line in the depth direction is formed on each of the holding portions. Formed on the opposite side of the abrasive member;
The expansion member is expanded by receiving the fluid pressure and presses the arc surface of each holding portion, thereby sliding each holding portion and pressing each polishing member against the side surface. The polishing apparatus according to claim 5.   The said holder is arrange | positioned between each said holding | maintenance parts in the circumferential direction of the said expansion member, respectively, It has a pair of control part which controls expansion | swelling to the said longitudinal direction of the said expansion member, or characterized by the above-mentioned. 6. The polishing apparatus according to 6.   The polishing apparatus according to claim 1, wherein the holder is provided so as to be rotatable around an axis along the depth direction of the groove.   The polishing apparatus according to claim 1, wherein the fluid pressure is an air pressure.   The polishing apparatus according to claim 1, wherein the groove having a curved shape in the longitudinal direction is polished. A polishing apparatus for polishing the groove having a spiral shape in the longitudinal direction,
The position changing means includes
A workpiece drive unit that rotationally drives the workpiece around the spiral center of the groove;
A support portion for supporting the holder so as to be swingable about an eccentric axis with respect to the spiral center;
The polishing apparatus according to claim 10, further comprising: A polishing method for polishing a groove formed in a workpiece,
Each of the polishing members is polished by disposing an expansion member between a pair of polishing members for polishing both side surfaces of the groove, and supplying the fluid pressure to the expansion member to expand the expansion member. A polishing method characterized by changing the relative position of the groove and the holder in the longitudinal direction of the groove while vibrating the holder to which both of the polishing members are mounted while being pressed against the side surface of the groove.

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