JP2003297748A5 - - Google Patents
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- Publication number
- JP2003297748A5 JP2003297748A5 JP2002101836A JP2002101836A JP2003297748A5 JP 2003297748 A5 JP2003297748 A5 JP 2003297748A5 JP 2002101836 A JP2002101836 A JP 2002101836A JP 2002101836 A JP2002101836 A JP 2002101836A JP 2003297748 A5 JP2003297748 A5 JP 2003297748A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- insulating substrate
- protective film
- manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010408 film Substances 0.000 claims 35
- 239000004065 semiconductor Substances 0.000 claims 22
- 230000001681 protective effect Effects 0.000 claims 18
- 239000000758 substrate Substances 0.000 claims 15
- 238000004519 manufacturing process Methods 0.000 claims 12
- 229920005989 resin Polymers 0.000 claims 8
- 239000011347 resin Substances 0.000 claims 8
- 238000000034 method Methods 0.000 claims 6
- 239000010409 thin film Substances 0.000 claims 6
- 238000005530 etching Methods 0.000 claims 5
- 238000002425 crystallisation Methods 0.000 claims 3
- 230000008025 crystallization Effects 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 229920001187 thermosetting polymer Polymers 0.000 claims 2
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 238000004080 punching Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002101836A JP2003297748A (ja) | 2002-04-03 | 2002-04-03 | 半導体装置の製造方法及び電気光学装置、電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002101836A JP2003297748A (ja) | 2002-04-03 | 2002-04-03 | 半導体装置の製造方法及び電気光学装置、電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003297748A JP2003297748A (ja) | 2003-10-17 |
| JP2003297748A5 true JP2003297748A5 (enrdf_load_stackoverflow) | 2005-09-15 |
Family
ID=29388787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002101836A Withdrawn JP2003297748A (ja) | 2002-04-03 | 2002-04-03 | 半導体装置の製造方法及び電気光学装置、電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003297748A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005209786A (ja) * | 2004-01-21 | 2005-08-04 | Seiko Epson Corp | 半導体装置およびその製造方法 |
| KR100777963B1 (ko) | 2006-06-21 | 2007-11-21 | 삼성전기주식회사 | 테이퍼 패턴의 스탬프 및 이를 이용한 고분자 스탬프의제조방법 |
| JP5287015B2 (ja) * | 2008-08-06 | 2013-09-11 | 富士ゼロックス株式会社 | パターニング方法、有機電気素子、有機電界発光素子、及び有機半導体トランジスタ |
| KR101184022B1 (ko) | 2010-06-29 | 2012-09-18 | 한국산업기술대학교산학협력단 | 반응성 이온 식각 장치 및 상기 반응성 이온 식각 장치를 이용한 태양전지의 텍스쳐링 방법 |
-
2002
- 2002-04-03 JP JP2002101836A patent/JP2003297748A/ja not_active Withdrawn
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