JP2003283124A5 - - Google Patents
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- Publication number
- JP2003283124A5 JP2003283124A5 JP2002088265A JP2002088265A JP2003283124A5 JP 2003283124 A5 JP2003283124 A5 JP 2003283124A5 JP 2002088265 A JP2002088265 A JP 2002088265A JP 2002088265 A JP2002088265 A JP 2002088265A JP 2003283124 A5 JP2003283124 A5 JP 2003283124A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- hole
- intermediate electrode
- inner chamber
- conductor portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 46
- 239000004020 conductor Substances 0.000 claims 23
- 239000011229 interlayer Substances 0.000 claims 16
- 239000012212 insulator Substances 0.000 claims 10
- 238000000034 method Methods 0.000 claims 8
- 238000010884 ion-beam technique Methods 0.000 claims 5
- 238000004544 sputter deposition Methods 0.000 claims 4
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000011810 insulating material Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002088265A JP4030784B2 (ja) | 2002-03-27 | 2002-03-27 | 層間接続方法と装置及び多層基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002088265A JP4030784B2 (ja) | 2002-03-27 | 2002-03-27 | 層間接続方法と装置及び多層基板 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003283124A JP2003283124A (ja) | 2003-10-03 |
| JP2003283124A5 true JP2003283124A5 (OSRAM) | 2005-09-15 |
| JP4030784B2 JP4030784B2 (ja) | 2008-01-09 |
Family
ID=29234178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002088265A Expired - Fee Related JP4030784B2 (ja) | 2002-03-27 | 2002-03-27 | 層間接続方法と装置及び多層基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4030784B2 (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT201700083957A1 (it) * | 2017-07-24 | 2019-01-24 | Wise S R L | Metodo e apparato per il trattamento di pannelli |
-
2002
- 2002-03-27 JP JP2002088265A patent/JP4030784B2/ja not_active Expired - Fee Related
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