JP2003283010A5 - - Google Patents
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- Publication number
- JP2003283010A5 JP2003283010A5 JP2002086603A JP2002086603A JP2003283010A5 JP 2003283010 A5 JP2003283010 A5 JP 2003283010A5 JP 2002086603 A JP2002086603 A JP 2002086603A JP 2002086603 A JP2002086603 A JP 2002086603A JP 2003283010 A5 JP2003283010 A5 JP 2003283010A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- partition
- laser
- laser device
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 14
- 230000007797 corrosion Effects 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 4
- 230000010355 oscillation Effects 0.000 claims description 4
- 238000004804 winding Methods 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002086603A JP2003283010A (ja) | 2002-03-26 | 2002-03-26 | ガスレーザ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002086603A JP2003283010A (ja) | 2002-03-26 | 2002-03-26 | ガスレーザ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003283010A JP2003283010A (ja) | 2003-10-03 |
| JP2003283010A5 true JP2003283010A5 (enExample) | 2004-12-24 |
Family
ID=29233149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002086603A Pending JP2003283010A (ja) | 2002-03-26 | 2002-03-26 | ガスレーザ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003283010A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201107639A (en) * | 2007-04-27 | 2011-03-01 | Edwards Japan Ltd | Plate rotating device, exhaust path opening degree changing device, exhausted device, transfer device, beam device, and gate valve |
| JP2010272670A (ja) * | 2009-05-21 | 2010-12-02 | Panasonic Corp | ガスレーザ発振装置の制御方法およびガスレーザ発振装置およびレーザ加工機 |
| JP5780866B2 (ja) * | 2011-07-19 | 2015-09-16 | 株式会社アルバック | モータ |
| CN110848256B (zh) * | 2019-12-16 | 2021-04-20 | 常州工学院 | 一种磁悬浮轴承系统中转子所受干扰力实时补偿的方法 |
-
2002
- 2002-03-26 JP JP2002086603A patent/JP2003283010A/ja active Pending
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