JP2001308418A5 - - Google Patents

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Publication number
JP2001308418A5
JP2001308418A5 JP2000126117A JP2000126117A JP2001308418A5 JP 2001308418 A5 JP2001308418 A5 JP 2001308418A5 JP 2000126117 A JP2000126117 A JP 2000126117A JP 2000126117 A JP2000126117 A JP 2000126117A JP 2001308418 A5 JP2001308418 A5 JP 2001308418A5
Authority
JP
Japan
Prior art keywords
laser device
excimer laser
corrosion resistance
excimer
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000126117A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001308418A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000126117A priority Critical patent/JP2001308418A/ja
Priority claimed from JP2000126117A external-priority patent/JP2001308418A/ja
Priority to PCT/JP2001/003652 priority patent/WO2001082423A1/ja
Priority to US10/258,542 priority patent/US6809448B2/en
Priority to DE10196136T priority patent/DE10196136T1/de
Publication of JP2001308418A publication Critical patent/JP2001308418A/ja
Publication of JP2001308418A5 publication Critical patent/JP2001308418A5/ja
Pending legal-status Critical Current

Links

JP2000126117A 2000-04-26 2000-04-26 エキシマレーザ装置 Pending JP2001308418A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2000126117A JP2001308418A (ja) 2000-04-26 2000-04-26 エキシマレーザ装置
PCT/JP2001/003652 WO2001082423A1 (en) 2000-04-26 2001-04-26 Excimer laser apparatus
US10/258,542 US6809448B2 (en) 2000-04-26 2001-04-26 Excimer laser apparatus
DE10196136T DE10196136T1 (de) 2000-04-26 2001-04-26 Excimer-Laser Vorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000126117A JP2001308418A (ja) 2000-04-26 2000-04-26 エキシマレーザ装置

Publications (2)

Publication Number Publication Date
JP2001308418A JP2001308418A (ja) 2001-11-02
JP2001308418A5 true JP2001308418A5 (enExample) 2005-02-17

Family

ID=18635956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000126117A Pending JP2001308418A (ja) 2000-04-26 2000-04-26 エキシマレーザ装置

Country Status (1)

Country Link
JP (1) JP2001308418A (enExample)

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