DE10196136T1 - Excimer-Laser Vorrichtung - Google Patents

Excimer-Laser Vorrichtung

Info

Publication number
DE10196136T1
DE10196136T1 DE10196136T DE10196136T DE10196136T1 DE 10196136 T1 DE10196136 T1 DE 10196136T1 DE 10196136 T DE10196136 T DE 10196136T DE 10196136 T DE10196136 T DE 10196136T DE 10196136 T1 DE10196136 T1 DE 10196136T1
Authority
DE
Germany
Prior art keywords
laser device
excimer laser
excimer
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE10196136T
Other languages
English (en)
Inventor
Natsushi Suzuki
Hisashi Nara
Shunsuke Yoshioka
Toshimitsu Barada
Atsushi Ooyama
Toshiharu Nakazawa
Shinichi Sekiguchi
Hiroyuki Shinozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Komatsu Ltd
Original Assignee
Ebara Corp
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000126117A external-priority patent/JP2001308418A/ja
Priority claimed from JP2000154609A external-priority patent/JP2001332795A/ja
Application filed by Ebara Corp, Komatsu Ltd filed Critical Ebara Corp
Publication of DE10196136T1 publication Critical patent/DE10196136T1/de
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F16C32/0461—Details of the magnetic circuit of stationary parts of the magnetic circuit
    • F16C32/0465—Details of the magnetic circuit of stationary parts of the magnetic circuit with permanent magnets provided in the magnetic circuit of the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/047—Details of housings; Mounting of active magnetic bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/44—Protection against moisture or chemical attack; Windings specially adapted for operation in liquid or gas
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/42—Application independent of particular apparatuses related to environment, i.e. operating conditions corrosive, i.e. with aggressive media or harsh conditions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
DE10196136T 2000-04-26 2001-04-26 Excimer-Laser Vorrichtung Ceased DE10196136T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000126117A JP2001308418A (ja) 2000-04-26 2000-04-26 エキシマレーザ装置
JP2000154609A JP2001332795A (ja) 2000-05-25 2000-05-25 エキシマレーザ装置
PCT/JP2001/003652 WO2001082423A1 (fr) 2000-04-26 2001-04-26 Appareil a laser excimere

Publications (1)

Publication Number Publication Date
DE10196136T1 true DE10196136T1 (de) 2003-06-12

Family

ID=26590865

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10196136T Ceased DE10196136T1 (de) 2000-04-26 2001-04-26 Excimer-Laser Vorrichtung

Country Status (3)

Country Link
US (1) US6809448B2 (de)
DE (1) DE10196136T1 (de)
WO (1) WO2001082423A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003056489A (ja) * 2001-08-21 2003-02-26 Ntn Corp エキシマレーザ装置のガス循環ファン
JP2004132441A (ja) * 2002-10-09 2004-04-30 Ntn Corp 磁気軸受装置、それを用いたエキシマレーザ用貫流ファン装置、磁気軸受のフィードバック制御をコンピュータに実行させるためのプログラム、および磁気軸受のフィードバック制御をコンピュータに実行させるためのプログラムを記録したコンピュータ読み取り可能な記録媒体
US8513826B2 (en) * 2008-06-26 2013-08-20 Ed Mazur Wind turbine
DE112009004787B4 (de) * 2009-05-19 2021-03-25 Mitsubishi Electric Corporation Gaslaseroszillator
FR2975147B1 (fr) * 2011-05-13 2014-04-25 Mecanique Magnetique Sa Palier magnetique actif chemise resistant a la corrosion
US20130069478A1 (en) * 2011-09-20 2013-03-21 Colin Hamer Electrical machine with winding conductor having ceramic insulation
ITCO20120045A1 (it) * 2012-09-20 2014-03-21 Nuovo Pignone Spa Cuscinetto reggi-spinta magnetico, turbomacchina e metodo
DE102013210726A1 (de) * 2013-06-10 2014-12-11 Robert Bosch Gmbh Naßbetriebener Anker
WO2020055540A1 (en) * 2018-09-12 2020-03-19 Cymer, Llc Metrology for a body of a gas discharge stage

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3110339C2 (de) * 1981-03-17 1984-09-27 Thyssen Industrie Ag, 4300 Essen Verfahren zum Herstellen eines Blechpakets für einen Langstator-Linearmotor
FR2528923A1 (fr) * 1982-06-17 1983-12-23 Europ Propulsion Dispositif de suspension magnetique d'un rotor place dans une enceinte etanche
JPS59217013A (ja) 1983-05-25 1984-12-07 Nippon Seiko Kk ラジアル磁気軸受
US4562164A (en) * 1983-07-11 1985-12-31 Nikkiso Co. Ltd. Insulation of a coil used in electrical apparatus
JPS61165014A (ja) 1985-01-14 1986-07-25 Koyo Seiko Co Ltd 磁気軸受用電磁石
JPS6366150A (ja) 1986-09-08 1988-03-24 Teijin Yuka Kk ２，６−ナフタレンジカルボン酸の製造法
US5095237A (en) * 1990-03-20 1992-03-10 Nova Corporation Of Alberta Sectoral core for magnetic bearing
US5051637A (en) * 1990-03-20 1991-09-24 Nova Corporation Of Alberta Flux control techniques for magnetic bearing
JPH044526U (de) * 1990-04-27 1992-01-16
JPH0460214A (ja) 1990-06-29 1992-02-26 Ntn Corp 磁気軸受装置
JPH04156247A (ja) * 1990-10-16 1992-05-28 Toshiba Chem Corp 樹脂モールド小形電動機
JPH05196041A (ja) 1992-01-21 1993-08-06 Ebara Corp 磁気軸受装置
DE4218928A1 (de) * 1992-06-10 1993-12-16 Asea Brown Boveri Glimmschutzanordnung für die Statorwicklung einer elektrischen Maschine
US5300843A (en) * 1992-11-02 1994-04-05 General Electric Company Fault tolerant active magnetic bearing
US5300841A (en) * 1992-11-02 1994-04-05 General Electric Company Inductive air gap estimation method for active magnetic bearings
JP3696277B2 (ja) 1995-01-18 2005-09-14 Ｎｔｎ株式会社 磁気軸受
US6130495A (en) * 1996-05-15 2000-10-10 Siemens Aktiengesellschaft Supporting element for an electric winding, turbogenerator and method of producing a corona shield
JP3282521B2 (ja) * 1996-07-08 2002-05-13 トヨタ自動車株式会社 リラクタンスモータ
US5990588A (en) * 1996-12-13 1999-11-23 General Electric Company Induction motor driven seal-less pump
US5848089A (en) 1997-07-11 1998-12-08 Cymer, Inc. Excimer laser with magnetic bearings supporting fan
JP3696398B2 (ja) 1997-04-28 2005-09-14 Ｎｔｎ株式会社 静圧磁気複合軸受およびスピンドル装置
US6075304A (en) * 1997-04-30 2000-06-13 Alon Co., Ltd Stator with molded encasement for small motors and manufacturing process therefor
JPH10322944A (ja) * 1997-05-19 1998-12-04 Minebea Co Ltd モータ構造及びその製造方法
JP3930170B2 (ja) * 1998-02-18 2007-06-13 株式会社荏原製作所 循環ファン装置
JP2000166131A (ja) * 1998-12-02 2000-06-16 Yoho Han モ―タ或いは発電機用のステ―タ
US6437464B1 (en) * 1999-07-29 2002-08-20 Encap Motor Corporation Motor and disc assembly for computer hard drive
JP2001182746A (ja) 1999-12-27 2001-07-06 Ebara Corp 磁気軸受装置
JP2003032692A (ja) * 2001-07-19 2003-01-31 Olympus Optical Co Ltd 電子カメラ

Also Published As

Publication number Publication date
WO2001082423A1 (fr) 2001-11-01
US20030107283A1 (en) 2003-06-12
US6809448B2 (en) 2004-10-26

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection