JP2003258369A5 - - Google Patents

Download PDF

Info

Publication number
JP2003258369A5
JP2003258369A5 JP2002057181A JP2002057181A JP2003258369A5 JP 2003258369 A5 JP2003258369 A5 JP 2003258369A5 JP 2002057181 A JP2002057181 A JP 2002057181A JP 2002057181 A JP2002057181 A JP 2002057181A JP 2003258369 A5 JP2003258369 A5 JP 2003258369A5
Authority
JP
Japan
Prior art keywords
laminated structure
laser
substrate
forming
stripe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002057181A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003258369A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002057181A priority Critical patent/JP2003258369A/ja
Priority claimed from JP2002057181A external-priority patent/JP2003258369A/ja
Publication of JP2003258369A publication Critical patent/JP2003258369A/ja
Publication of JP2003258369A5 publication Critical patent/JP2003258369A5/ja
Pending legal-status Critical Current

Links

JP2002057181A 2002-03-04 2002-03-04 半導体レーザ素子、マルチビーム半導体レーザ、及び製造方法 Pending JP2003258369A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002057181A JP2003258369A (ja) 2002-03-04 2002-03-04 半導体レーザ素子、マルチビーム半導体レーザ、及び製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002057181A JP2003258369A (ja) 2002-03-04 2002-03-04 半導体レーザ素子、マルチビーム半導体レーザ、及び製造方法

Publications (2)

Publication Number Publication Date
JP2003258369A JP2003258369A (ja) 2003-09-12
JP2003258369A5 true JP2003258369A5 (cg-RX-API-DMAC7.html) 2005-09-02

Family

ID=28667513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002057181A Pending JP2003258369A (ja) 2002-03-04 2002-03-04 半導体レーザ素子、マルチビーム半導体レーザ、及び製造方法

Country Status (1)

Country Link
JP (1) JP2003258369A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6493825B2 (ja) * 2014-08-22 2019-04-03 住友電工デバイス・イノベーション株式会社 半導体レーザ素子
JP6720506B2 (ja) * 2015-11-16 2020-07-08 住友電気工業株式会社 量子カスケードレーザデバイス

Similar Documents

Publication Publication Date Title
US9608165B2 (en) Light emitting diode and method of fabricating the same
CN112563878B (zh) 一种热调谐半导体芯片及其制备方法
JP2010050255A5 (cg-RX-API-DMAC7.html)
JPWO2020262560A5 (cg-RX-API-DMAC7.html)
US20100012970A1 (en) Light emitting diode chip and fabricating method thereof
JP2018157022A5 (cg-RX-API-DMAC7.html)
JP2006073618A5 (cg-RX-API-DMAC7.html)
JP2003258369A5 (cg-RX-API-DMAC7.html)
JP5515685B2 (ja) 発光素子及びそれを用いた発光装置の製造方法
JP2005183621A (ja) 半導体発光装置の製造方法
JP2003198057A5 (cg-RX-API-DMAC7.html)
JP2006278661A5 (cg-RX-API-DMAC7.html)
JP2003101121A (ja) 半導体発光装置
JP2002232080A5 (cg-RX-API-DMAC7.html)
JP4838857B2 (ja) シリコン発光素子
JP2006237471A5 (cg-RX-API-DMAC7.html)
JP2006041265A5 (cg-RX-API-DMAC7.html)
JPWO2023144960A5 (cg-RX-API-DMAC7.html)
JP2005322881A (ja) 半導体レーザ素子
JP2005311117A5 (cg-RX-API-DMAC7.html)
JP2000077726A (ja) 半導体素子とその製造方法
JP2010092903A (ja) 窒化物系半導体発光素子の製造方法
JP5047665B2 (ja) 半導体発光素子およびその製造方法
JP2004087564A5 (cg-RX-API-DMAC7.html)
JP2005129857A5 (cg-RX-API-DMAC7.html)