JP2003255050A - Radiation detecting apparatus, its manufacturing method, and radiation detecting system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To simplify a manufacturing process so as to both reduce the costs of radiation detecting apparatuses and mass produce them. <P>SOLUTION: In the radiation detecting apparatus, a light-shielding plate 4-1 for efficiently guiding light to the side of a photoelectric conversion element substrate 1, a fluorescent substance 2 for converting radiation into light, and the photoelectric conversion element substrate 1 for converting light into an electrical signal are located from the incidence side of radiation. The fluorescent substance 2 and the light-shielding plate 4-1 are glued to each other by an adhesive 7, and the fluorescent substance 2 and the photoelectric converting element substrate 1 are glued to each other by an adhesive 6. The side surfaces of the fluorescent substance 2 and the side surfaces of the photoelectric conversion element substrate 1 are sealed. The end parts of the light-shielding plate 4-1 are bent to the side of the photoelectric conversion element substrate 1 so as to cover the side surfaces of the fluorescent substance 2 and the side surfaces of the photoelectric conversion element substrate 1 by guiding to the side of the photoelectric converting element substrate 1 the adhesive 7 (8-1), which is applied between the fluorescent substance 2 and the light-shielding plate 4-1 and is extruded, when they are pressed against each other. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a radiation detection device,
The present invention relates to a manufacturing method and a radiation detection system, and more particularly, to a radiation detection apparatus used particularly for medical X-ray imaging apparatuses, industrial nondestructive inspection apparatuses, etc., a manufacturing method thereof, and a radiation detection system.

[0002] In the present specification, description will be given assuming that X-rays, α rays, β rays, γ rays and the like are included in the category of radiation.

[0003]

2. Description of the Related Art Conventionally, a reading system using a reduction optical system and a CCD type sensor has been used for an X-ray image pickup device or the like, but in recent years, hydrogenated amorphous silicon (hereinafter referred to as "a-
"Si". The development of a photoelectric conversion semiconductor material represented by (1) is remarkable in the development of a so-called contact type sensor in which a photoelectric conversion element and a signal processing unit are formed on a large-area substrate and read by an optical system having the same magnification as the information source.

In particular, a-Si is used not only as a photoelectric conversion material but also as a thin film field effect transistor (hereinafter referred to as "TFT").
Called. Since it can also be used as a), it has an advantage that the photoelectric conversion semiconductor layer and the semiconductor layer of the TFT can be simultaneously formed.

Further, it is well matched with a switch element and a capacitive element such as a thin film field effect transistor which are formed at the same time and can be formed as a common film at the same time because they can be formed with the same film structure. ,
The cost can be reduced.

Further, in addition to the capacitor including an insulating layer commonly used as an intermediate layer, the capacitor can be formed with good characteristics and the integrated value of the optical information obtained by a plurality of photoelectric conversion elements can be easily calculated. It is possible to provide a high-performance photoelectric conversion device that can output with a configuration. Further, it is possible to provide an X-ray roentgen apparatus and the like by taking advantage of its large area, high function, and high characteristics at low cost.

By the way, such a photoelectric conversion element is generally manufactured by a thin film layer composed of several layers on the surface of a thin glass plate in view of thinness, weight reduction, easiness of manufacturing, and cost. In this case, the larger the thin glass, the more likely it is that distortion or cracks will occur, and in order to deal with this, it is essential to adhere or mechanically fix it to a support base made of glass plate or metal. Become.

FIG. 9 is a schematic side view of a conventional X-ray detector. In FIG. 9, 101 is a photoelectric conversion element substrate on which a plurality of photoelectric conversion elements are arranged, 102 is a phosphor that is a sheet-shaped wavelength conversion element, 103 is a support base, 104 is a light shielding plate,
Reference numeral 51 is an adhesive for fixing the phosphor 102 to the photoelectric conversion element substrate 101, 52 is an adhesive for fixing the photoelectric conversion element substrate 101 to the support base 103, and 53 is the light shielding plate 10.
4 is an adhesive for fixing 4 to the phosphor 102, and 54 is a shield material that shields the photoelectric conversion device including four members (support base 103, photoelectric conversion element substrate 101, phosphor 102, and light shielding plate 104) from the outside air. is there.

FIG. 10 is a schematic view of FIG. 9 seen from above. As shown in FIG. 10, in order to reduce the leakage of light from the peripheral end portions of the photoelectric conversion element substrate 101 and the phosphor 102, the size of the light shielding plate 104 is set to the photoelectric conversion element substrate 1
01 and the size of the phosphor 102 are made larger.

FIG. 11 is a schematic view of the photoelectric conversion element substrate 1 of FIG. As shown in FIG. 11, the photoelectric conversion element substrate 1 includes a plurality of photoelectric conversion elements 10 for receiving light from the phosphor 102 and converting the light into current, and photoelectric conversion elements corresponding to the respective photoelectric conversion elements 10. A plurality of integrated circuit elements 11 for processing the generated electric signal are formed, and the photoelectric conversion element 10 and the integrated circuit element 11 are paired, and they are two-dimensionally arranged in the photoelectric conversion element substrate 1.

By the way, the adhesives 51 to 53 and the shield agent 54 are those which are cured by being exposed to the air.
There are known ones that are hardened by moisture and ones that are hardened by heating or irradiating ultraviolet rays. However, since the photoelectric conversion element substrate 1 has a large area, the adhesives 51 to 53 are used.
Since it takes a certain amount of time to apply the coating, it is necessary that the curing does not proceed during the coating, and it is possible to start the curing after the coating is completed. Therefore, a thermosetting type is often used because a type other than light is required.

[0012] There are several specific bonding steps, but the outline is as follows. That is, the photoelectric conversion element substrate 101
The adhesive 52 is applied between the support base 103 and the support base 103. At this stage, the adhesive 52 may be heated to be hardened, or may not be heated at this stage as described later.

Next, an adhesive 51 is applied between the photoelectric conversion element substrate 101 and the phosphor 102. At this stage, the adhesive 51 may be heated to be hardened, or may not be heated at this stage as described later.

Further, an adhesive 53 is applied between the light shielding plate 104 and the phosphor 102. Adhesive 5 already at this stage
If the adhesives 1, 52 are cured, the adhesive 53 may be heated to be cured. On the other hand, if the adhesives 51 and 52 have not been cured, heat is applied to the adhesives 51 to 53 to cure them.

In this way, after the photoelectric conversion element substrate 101 and the phosphors 102 and 103 have been adhered to the support base and the light shielding plate 104, an adhesive is applied to the side surfaces of the photoelectric conversion element substrate 101 and the phosphor 102, and the adhesive is applied. The shield material 54 is formed by heating.

[0016]

However, the conventional technique requires at least a manufacturing process of applying and heating the adhesives 51 to 53 and a manufacturing process of forming the shield agent 54. Therefore, it is difficult to reduce the cost of the product and mass-produce the product.

Therefore, an object of the present invention is to simplify the manufacturing process so that the cost and mass production of the radiation detecting apparatus can be achieved.

[0018]

In order to solve the above-mentioned problems, the present invention provides a light-shielding plate that efficiently guides light from the incident side of radiation to the photoelectric conversion element substrate side, and a wavelength converter that converts the radiation into light. , A photoelectric conversion element substrate for converting light into an electric signal is located, and the wavelength conversion body and the light shielding plate, the wavelength conversion body and the photoelectric conversion element substrate are respectively bonded with an adhesive, and the wavelength conversion body In the radiation detection device in which the side surface of the photoelectric conversion element substrate and the side surface of the photoelectric conversion element substrate are sealed, the photoelectric conversion element is an adhesive that is extruded when the wavelength conversion body and the light shielding plate are pressed against each other after being applied. The end portion of the light shielding plate is bent toward the photoelectric conversion element substrate side so as to cover the side surface of the wavelength conversion body and the side surface of the photoelectric conversion element substrate by guiding the light shielding plate to the substrate side.

Further, according to the present invention, a light-shielding plate for efficiently guiding light from the incident side of radiation to the photoelectric conversion element substrate side, a wavelength converter for converting radiation into light, and a photoelectric conversion element substrate for converting light into electric signals. Is located, and the wavelength converter and the light shielding plate, the wavelength converter and the photoelectric conversion element substrate are respectively bonded by an adhesive, and the side surface of the wavelength conversion body and the side surface of the photoelectric conversion element substrate are sealed. In the method of manufacturing the radiation detection device that has stopped, a step of bending the end portion of the light shielding plate, a step of applying an adhesive between the wavelength converter and the side where the end portion of the light shielding plate is bent, And a step of pressing the wavelength conversion body and the light shielding plate against each other.

Further, the radiation detection system of the present invention comprises:
The radiation detection device is provided.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1) FIG. 1 is a schematic side view of an X-ray detection apparatus according to Embodiment 1 of the present invention. In FIG. 1, 1 is a photoelectric conversion element substrate in which a plurality of photoelectric conversion elements are formed on the surface of a glass substrate, 2 is a phosphor as a wavelength converter for converting X-rays including X-rays into visible light, and 3 is Support base for fixing and holding the photoelectric conversion element substrate 1, 4
-1 is a light-shielding plate for efficiently entering the light converted by the phosphor 2 into the photoelectric conversion element, 5 is an adhesive for bonding the support base 3 and the photoelectric conversion element substrate 1, and 6 is a phosphor 2 is an adhesive for adhering the photoelectric conversion element substrate 1 to 2; 7 is an adhesive for adhering the phosphor 2 and the light shielding plate 4-1; 8 is a peripheral end portion of the photoelectric conversion device. It is a shield material.

In the present embodiment, in the step of adhering the phosphor 2 and the light shield plate 4, the surplus amount of the adhesive 7 extruded to the peripheral end portion of the photoelectric conversion device is deformed around the light shield plate 4-1. The secured adhesive is used as the shield material 8 for sealing the peripheral end portion of the photoelectric conversion device.

The photoelectric conversion element substrate 1 is the same as that shown in FIG.

As the material of the support base 3, a metal such as aluminum, magnesium, beryllium, etc., which can transmit X-rays, glass, ceramic, carbon or the like is used.

The phosphor 2 is composed of Gd ₂ O ₂ S, CsI, Y ₂ O ₂
It is a sheet-shaped material made of any one of S and the like.

The light-shielding plate 4-1 transmits X-rays and the like and blocks other than X-rays, and is a sheet-like member made of, for example, aluminum or amorphous carbon.
In order to reduce the leakage of light from the peripheral ends of the photoelectric conversion element substrate 1 and the phosphor 2, the size of the light shielding plate 4-1 is made larger than that of the photoelectric conversion element substrate 1 and the phosphor 2. There is. Further, the angle formed by the central portion and the peripheral portion of the light shielding plate 4-1 and the size of the peripheral portion are determined by the viscosity of the adhesive 7.

Next, mounting of each member will be described.

First, the surface of the photoelectric conversion element substrate 1 on which the photoelectric conversion elements are not arranged is adhered to the support base 3 with the adhesive 5. Although it is necessary to apply the adhesive 5 uniformly, as a method therefor, the applied adhesive is pushed out by using a roller to which a certain pressure is applied by an adhesive device (not shown).

The pressure applied to the roller may be obtained based on the strength of the photoelectric conversion element substrate 1. The adhesive 5 is
If the support base 3 is a member that transmits ultraviolet rays, an ultraviolet curable adhesive is effective in terms of time.

If the support base 3 is a member that does not transmit ultraviolet rays or visible light, a thermosetting adhesive may be used.

Next, the phosphor 2 is adhered to the surface of the photoelectric conversion element substrate 2 on which the photoelectric conversion elements are arranged by the adhesive 6. At that time, the bonding method is the same as in the case of the support base 3 and the photoelectric conversion element substrate 1. Since the adhesive 6 has a low ultraviolet ray and visible light transmittance of the phosphor 2, a thermosetting adhesive is used.

Further, the light shielding plate 4-1 is adhered to the phosphor 2 with the adhesive 7. At that time, the bonding method is the same as in the case of the support base 3 and the photoelectric conversion element substrate 1. The adhesive 7 is
Since the light shielding plate blocks ultraviolet rays and visible light, a thermosetting adhesive is used.

The thermosetting adhesive is, for example, an acrylic adhesive having an isocyanate group or an epoxy group which is a reaction group for initiating thermosetting.

Next, the structure of the adhesive reservoir of the light shielding plate 4-1 will be described. As described above, the light shielding plate 4-1 has a larger area than the phosphor 2 and the photoelectric conversion element substrate 1, and the protruding portion outside the phosphor 2 and the photoelectric conversion element substrate 1 is located on the phosphor 2 side. It has a bent structure.

It is preferable that the four corners of the light shield plate 4-1 be provided with cuts so that the peripheral end portions can be easily bent. Further, when the light-shielding plate 4-1 is formed, there is no problem even if the bent portions are collectively molded.

In FIGS. 2 and 3, the light shielding plate 4 is provided on the phosphor 2 of FIG.
It is explanatory drawing of the process of adhering -1. As shown in FIG. 2, the adhesive 7 is applied to the upper portion of the phosphor 2, a light shielding plate 4-1 is placed on the upper portion thereof, and pressure is applied by a roller from above the light shielding plate 4-1. In this step, a part of the adhesive 7 is extruded to the peripheral edges of the phosphor 2 and the photoelectric conversion element substrate 1.

Next, as shown in FIG. 3, since the extruded adhesive is contained in the adhesive reservoir at the peripheral end of the light shielding plate 4-1, the adhesive 7 and the adhesive are adhered by heating in this state. The adhesive agent accumulated in the agent reservoir is cured, and as a result, the adhesive agent accumulated in the adhesive agent reservoir becomes the shield material 8.

(Second Embodiment) FIGS. 4 and 5 are explanatory views of a manufacturing process of an X-ray detection apparatus according to a second embodiment of the present invention, and correspond to FIGS. 2 and 3 of the first embodiment. .

In the first embodiment, the end of the light shield plate 4-1 is configured to contact the support base 3, but in the present embodiment, the end of the light shield plate 4-1 is supported by the support base 3. It is configured not to come into contact with.

When the amount of the adhesive 7 is sufficient or when the adhesive 7 is less sticky, the extruded adhesive 7 reaches the periphery of the photoelectric conversion element substrate 1, so that the end portion of the light shielding plate 4-1 is supported by the support substrate. It may be configured so that it does not touch the table 3,
In this case, there is an advantage that it is not necessary to strictly design the light shielding plate 4-1.

(Embodiment 3) FIGS. 6 and 7 are explanatory views of a manufacturing process of an X-ray detection apparatus according to Embodiment 3 of the present invention, and correspond to FIGS. 2 and 3 of Embodiment 1. .

The light shielding plate 4-3 of this embodiment forms an adhesive reservoir by bending the peripheral end portion. The distance between the ends of the light-shielding plate 4-3 is substantially matched with the width of the support base 3.
Although the adhesive reservoir has a semi-cylindrical shape in FIGS. 6 and 7, the shape is not limited. For example, as shown in FIG. 8, the end portion of the light shielding plate 4-4 is folded twice toward the phosphor 2 side. Therefore, the adhesive reservoir may be formed.

(Fourth Embodiment) FIG. 12 is a schematic configuration diagram of an X-ray detection system according to a fourth embodiment of the present invention.

X-ray 60 generated by X-ray tube 6050
60 passes through the chest 6062 of the patient or subject 6061 and enters the image sensor 6040 which is the X-ray detection device described in the first to third embodiments. The incident X-ray contains information on the inside of the body of the patient 6061. The phosphor emits light in response to the incident X-ray, and photoelectrically converts the light to obtain electrical information. This information is converted to digital, image-processed by the image processor 6070, and can be viewed on the display 6080 in the control room.

Further, this information can be transferred to a remote place by a transmission means such as a telephone line 6090, can be displayed on a display 6081 such as a doctor room at another place, or can be stored in a storage means such as an optical disc. It is also possible to diagnose. Also the film processor 6
It is also possible to record by 100 on the film 6110.

[0047]

As described above, according to the present invention,
It is possible to simplify the manufacturing process of the radiation detection apparatus, and it is possible to achieve cost reduction and mass production.

[Brief description of drawings]

FIG. 1 is a schematic side view of an X-ray detection device according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram of a step of adhering a light shielding plate 4-1 to the phosphor 2 of FIG.

FIG. 3 is an explanatory diagram of a step of adhering a light shielding plate 4-1 to the phosphor 2 of FIG.

FIG. 4 is an explanatory diagram of a manufacturing process of the X-ray detection apparatus according to the second embodiment of the present invention.

FIG. 5 is an explanatory diagram of a manufacturing process of the X-ray detection apparatus according to the second embodiment of the present invention.

FIG. 6 is an explanatory diagram of a manufacturing process of the X-ray detection apparatus according to the third embodiment of the present invention.

FIG. 7 is an explanatory diagram of a manufacturing process of the X-ray detection apparatus according to the third embodiment of the present invention.

FIG. 8 is an explanatory diagram of a light shielding plate 4-4 according to the second embodiment of the present invention.

FIG. 9 is a schematic side view of a conventional X-ray detection device.

FIG. 10 is a schematic view of FIG. 9 seen from above.

11 is a schematic view of the photoelectric conversion element substrate 1 of FIG.

FIG. 12 is a schematic diagram of an X-ray detection system according to a fourth embodiment of the present invention.

[Explanation of symbols]

1, 101 Photoelectric conversion element substrate 2,102 phosphor 3, 103 Support base 4-1, 4-2, 4-3, 4-4, 104 Light-shielding plate 5, 6, 7, 51, 52, 53 Adhesive 8 Shield 10 Photoelectric conversion element 11 Integrated circuit elements

Claims (7)

[Claims] 1. A light-shielding plate that efficiently guides light from the incident side of radiation to the photoelectric conversion element substrate side, a wavelength converter that converts the radiation into light, and a photoelectric conversion element substrate that converts the light into an electrical signal are located. Radiation detection in which the wavelength converter and the light-shielding plate, the wavelength converter and the photoelectric conversion element substrate are respectively bonded with an adhesive, and the side surface of the wavelength conversion body and the side surface of the photoelectric conversion element substrate are sealed. In the device, by applying an adhesive that is extruded when the wavelength converter and the light-shielding plate are applied to each other after applying between the wavelength converter and the light shielding plate to the photoelectric conversion element substrate side, the side surface of the wavelength converter and the photoelectric converter. A radiation detecting apparatus, wherein an end portion of the light shielding plate is bent toward the photoelectric conversion element substrate side so as to cover a side surface of the conversion element substrate. 2. The radiation detecting apparatus according to claim 1, wherein the adhesive is a thermosetting adhesive or an ultraviolet curable adhesive. 3. The bending angle of the light shielding plate and the length from the bent position to the tip of the light shielding plate are determined based on the application amount and the viscosity of the adhesive. The radiation detection device according to 1 or 2. 4. The radiation detecting apparatus according to claim 1, wherein the bent position of the light shielding plate is determined according to the size of the wavelength conversion body. 5. A light-shielding plate that efficiently guides light from the radiation incident side to the photoelectric conversion element substrate side, a wavelength converter that converts the radiation into light, and a photoelectric conversion element substrate that converts the light into an electric signal are located. Radiation detection in which the wavelength converter and the light-shielding plate, the wavelength converter and the photoelectric conversion element substrate are respectively bonded with an adhesive, and the side surface of the wavelength conversion body and the side surface of the photoelectric conversion element substrate are sealed. In the method of manufacturing a device, a step of bending an end portion of the light shielding plate, a step of applying an adhesive between the wavelength conversion body and a side where the end portion of the light shielding plate is bent, the wavelength conversion body And a step of pressing the light shielding plate against each other. 6. The method according to claim 5, further comprising applying heat to the adhesive or irradiating it with ultraviolet rays. 7. A radiation detection system comprising the radiation detection device according to claim 1. Description: