JP2003240740A5

JP2003240740A5 -

Info

Publication number: JP2003240740A5
Application number: JP2002039763A
Authority: JP
Filing date: 2002-02-18
Publication date: 2005-08-25
Anticipated expiration: 2022-02-18

Claims

A substrate on which a plurality of elements are arranged;
A plurality of cap bodies placed on the substrate;
An electronic device provided at a portion where the element is disposed and including a cavity portion held in a reduced pressure atmosphere by the substrate and the cap body,
An output means for outputting, as a signal, a change in the amount of heat dissipated or absorbed by the element after performing a heat treatment in which the cavity or the element in the cavity is heated or cooled to a certain temperature and stopping the heat treatment; A featured electronic device.

The electronic device according to claim 1.
The electronic device further includes a Peltier element,
At least a part of the heat treatment is performed by heating or cooling the Peltier element.

A substrate on which a plurality of elements are arranged;
A plurality of cap bodies placed on the substrate;
A cavity provided in a portion where the element is disposed and held in a reduced-pressure atmosphere by the substrate and the cap body;
Output means for outputting a change in the amount of heat dissipated or absorbed by the element as a signal after performing a heat treatment for heating or cooling the cavity or the element in the cavity, and stopping the heat treatment; And a means for judging the degree of vacuum of each of the cavities in which the elements are arranged.

The system of claim 3, wherein
At least a part of the heat treatment is performed by causing the element to self-heat.

The system according to claim 3 or 4,
The system further includes a Peltier element,
At least a part of the heat treatment is performed by heating or cooling the Peltier element.

The system according to any one of claims 3 to 5,
At least one of the cap bodies is covered with a material that does not substantially transmit infrared light.

In the system according to any one of claims 3 to 6,
The system according to claim 1, wherein an opening is formed in at least one of the cap bodies.

The system of claim 3, wherein
The determination is performed by comparing a temperature difference between the temperature of the element measured after a certain period of time after the heat treatment is stopped and the temperature of the element measured before the heat treatment with a set temperature. Feature system.

The system of claim 8, wherein
The system further comprising a function of calculating the set temperature based on the average value of the temperature change values in the plurality of elements at the time of the determination.

The system according to any one of claims 3 to 7,
The determination is performed by measuring a time until the temperature of the element reaches a certain temperature after stopping the heat treatment, and comparing the time with a set time.

A substrate on which a plurality of elements are arranged, a plurality of cap bodies placed on the substrate, and a portion where the elements are arranged are held in a reduced-pressure atmosphere by the substrate and the cap body. A method for determining the degree of vacuum of an electronic device comprising a cavity,
(A) performing a heat treatment in which the cavity or the element in the cavity is heated or cooled;
After the step (a), a step (b) of outputting a change in the amount of heat dissipated or absorbed by the element as a signal;
And (c) determining the degree of vacuum of each of the cavities in which the elements are arranged in response to the signal.

The method for determining a degree of vacuum according to claim 11,
Before the step (a), a first signal output corresponding to the temperature of the element is performed,
In the step (b), a second signal output corresponding to the temperature of the element is performed after a lapse of a certain period after the heat treatment in the step (a) is stopped, and the first signal output and the second signal output are performed. The value of the difference from the signal output of is output as the signal corresponding to the temperature change value,
In the step (c), the degree of vacuum of the element is determined by comparing the signal with a set value.

The method for determining a degree of vacuum according to claim 11,
In the step (b), the time from when the heat treatment in the step (a) is stopped until the temperature of the element reaches a signal output corresponding to a constant temperature is measured,
In the step (c), the degree of vacuum is determined by comparing the time with a set time.

A substrate on which a plurality of elements are arranged;
  A plurality of cap bodies placed on the substrate;
  An electronic device provided at a site where the element is disposed, and including a cavity portion held in a reduced pressure atmosphere by the substrate and the cap body,
  A means for heating or cooling the cavity or the element in the cavity to control to a predetermined temperature, a means for obtaining a temperature change amount of the element before and after the heating or cooling, and outputting the temperature change amount And an electronic device.

The electronic device according to claim 14, comprising:
The electronic device is characterized in that the means for controlling the temperature heats the element by causing the element to self-heat.

The electronic device according to claim 14, comprising:
The temperature change amount is obtained from an output voltage of the element before and after the heating or cooling.

A substrate on which a plurality of elements are arranged;
  A plurality of cap bodies placed on the substrate;
  A system provided with a cavity portion provided in a portion where the element is disposed and held in a reduced-pressure atmosphere by the substrate and the cap body,
  Based on the temperature change amount, means for heating or cooling the cavity or the element in the cavity to control to a predetermined temperature, means for obtaining a temperature change amount of the element before and after the heating or cooling, and Means for determining the degree of vacuum of each of the cavities in which the elements are arranged.

The system of claim 17, comprising:
A system comprising means for storing, in a defect position memory, a position of the element that has not reached a predetermined degree of vacuum as a defect position by means for determining the degree of vacuum.

The system of claim 18, comprising:
The element is an infrared sensor element, and interpolates a signal obtained from a defective pixel stored in the defect position memory by using a signal of a pixel located around the defective pixel.

The system of claim 17, comprising:
The temperature change amount is obtained from an output voltage of the element before and after the heating or cooling.