JP2003224257A - 固体撮像装置及びその製造方法 - Google Patents
固体撮像装置及びその製造方法Info
- Publication number
- JP2003224257A JP2003224257A JP2002020871A JP2002020871A JP2003224257A JP 2003224257 A JP2003224257 A JP 2003224257A JP 2002020871 A JP2002020871 A JP 2002020871A JP 2002020871 A JP2002020871 A JP 2002020871A JP 2003224257 A JP2003224257 A JP 2003224257A
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- film
- solid
- photoelectric conversion
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000006243 chemical reaction Methods 0.000 claims abstract description 26
- 239000004065 semiconductor Substances 0.000 claims abstract description 19
- 238000003384 imaging method Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 22
- 238000001039 wet etching Methods 0.000 claims description 9
- 239000011159 matrix material Substances 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 230000000873 masking effect Effects 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 230000001788 irregular Effects 0.000 abstract 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 17
- 239000012535 impurity Substances 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 2
- 101001005708 Homo sapiens MARVEL domain-containing protein 1 Proteins 0.000 description 1
- 102100025069 MARVEL domain-containing protein 1 Human genes 0.000 description 1
- 101100219325 Phaseolus vulgaris BA13 gene Proteins 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002020871A JP2003224257A (ja) | 2002-01-30 | 2002-01-30 | 固体撮像装置及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002020871A JP2003224257A (ja) | 2002-01-30 | 2002-01-30 | 固体撮像装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003224257A true JP2003224257A (ja) | 2003-08-08 |
| JP2003224257A5 JP2003224257A5 (enrdf_load_stackoverflow) | 2005-07-07 |
Family
ID=27744250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002020871A Pending JP2003224257A (ja) | 2002-01-30 | 2002-01-30 | 固体撮像装置及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003224257A (enrdf_load_stackoverflow) |
-
2002
- 2002-01-30 JP JP2002020871A patent/JP2003224257A/ja active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041109 |
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| A621 | Written request for application examination |
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| A977 | Report on retrieval |
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| A131 | Notification of reasons for refusal |
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| A02 | Decision of refusal |
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