JP2003222708A - Optical element and its manufacturing method - Google Patents

Optical element and its manufacturing method

Info

Publication number
JP2003222708A
JP2003222708A JP2002023201A JP2002023201A JP2003222708A JP 2003222708 A JP2003222708 A JP 2003222708A JP 2002023201 A JP2002023201 A JP 2002023201A JP 2002023201 A JP2002023201 A JP 2002023201A JP 2003222708 A JP2003222708 A JP 2003222708A
Authority
JP
Japan
Prior art keywords
mold
resin
optical element
demolding
light energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002023201A
Other languages
Japanese (ja)
Other versions
JP2003222708A5 (en
Inventor
Masaki Omori
正樹 大森
Senichi Hayashi
専一 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2002023201A priority Critical patent/JP2003222708A/en
Publication of JP2003222708A publication Critical patent/JP2003222708A/en
Publication of JP2003222708A5 publication Critical patent/JP2003222708A5/ja
Pending legal-status Critical Current

Links

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical element improving durability of a mold by reducing demolding force in starting demolding, controlling a start point and a direction of the demolding, and preventing peeling, deformation and breakage of a resin from a glass board. <P>SOLUTION: The optical element forming a light energy curable resin has a required shape on a base material by demolding a light energy curable resin after curing it by shape transfer and light irradiation by using the mold. Two regions different in the demolding exist on a resin/mold interface, the inside has an inferior demolding region, the outside has a good demolding region, and the optical element has a projection-like shape in viewing from an orthogonal direction to a base material face of an outer peripheral part of the inferior demolding region. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、非球面を有するレ
ンズや表面に微細な形状(凹凸)を有する光学素子、例
えば回折格子やフレネルレンズ、光ディスク基板及びそ
の製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lens having an aspherical surface, an optical element having a fine shape (unevenness) on the surface thereof, such as a diffraction grating, a Fresnel lens, an optical disk substrate, and a method for manufacturing the same.

【0002】[0002]

【従来の技術】光学素子の製造方法にはガラスの研削、
研摩や型を用いた精密成形、熱可塑性樹脂の射出成形や
プレス成形等があり、機能やコスト、要求精度等により
使い分けられている。例えば、カメラ等に使用される結
像系のレンズには球面レンズとしては温度、 湿度の環境
変動に関して性能劣化が少なく、経済的にも有利なガラ
スの研削、研摩により製造され、非球面レンズに関して
は、型を用いたガラスの精密成形により製造される。カ
メラでもファインダーに使用されるレンズは優れた結像
性能を要求されないため、コスト面から樹脂の射出成形
により製造される。
2. Description of the Related Art The method of manufacturing an optical element includes grinding glass,
There are polishing, precision molding using a mold, injection molding of thermoplastic resin, press molding, etc., and they are used properly depending on the function, cost, required accuracy, etc. For example, for aspherical lenses used for imaging lenses used in cameras, etc., aspherical lenses are manufactured by grinding and polishing glass, which has less performance deterioration due to environmental changes in temperature and humidity, and is economically advantageous. Is manufactured by precision molding of glass using a mold. Since lenses used for viewfinders in cameras are not required to have excellent imaging performance, they are manufactured by resin injection molding in terms of cost.

【0003】又、径が30mm以上の非球面レンズや表
面に微細な凹凸形状を有する光学素子では、ガラス基材
の上に光エネルギー硬化型樹脂の薄層を成形し、硬化さ
せることにより所要の表面形状を形成する方法が用いら
れる。大きな非球面レンズはガラスの精密成形では形状
精度が悪くなり、精度を確保しようとすると成形時間が
長くなりコスト高になる。微細な凹凸形状を有する光学
素子もガラスでは離型時に凹凸部が破壊し製造できず、
樹脂による製造が必須となるが、素子全体が樹脂では、
環境変動に対する性能劣化が大きく樹脂部を薄層にする
上記の方法によりその影響を小さくする。
Further, in an aspherical lens having a diameter of 30 mm or more and an optical element having fine irregularities on the surface, a required layer is formed by molding a thin layer of a light energy curable resin on a glass substrate and curing the resin. A method of forming a surface profile is used. The precision of shape of a large aspherical lens deteriorates in precision molding of glass, and if the precision is to be secured, the molding time becomes long and the cost becomes high. Even optical elements with fine irregularities cannot be manufactured with glass because the irregularities are destroyed during mold release,
Manufacturing with resin is essential, but if the entire element is resin,
The above-mentioned method, in which the performance is largely deteriorated due to environmental fluctuations and the resin portion is made into a thin layer, reduces its influence.

【0004】この光エネルギー硬化型樹脂の成形におけ
る離型方法としては、例えば特開昭63−131352
号の突き出しによる離型、特開平01−152015号
の加熱、冷却による熱応力を利用した離型、特開昭62
−117154号の振動による離型等がある。離型性の
改善としては、例えば特許第2680175号の離型性
の良い型、特許第3006199号の離型剤処理を施し
た型、特開平04−254801号の樹脂に内填離型剤
を含有させる等の提案がなされている。
As a mold releasing method in the molding of this light energy curable resin, for example, JP-A-63-131352 is used.
Release by protrusion of No. JP-A No. 01-152015, release using heat stress due to heating and cooling, JP-A-62-2015
-117154 vibration causes mold release. Examples of the mold releasability improvement include a mold having good mold releasability of Japanese Patent No. 2680175, a mold treated with a mold releasing agent of Japanese Patent No. 3006199, and a resin of Japanese Patent Application Laid-Open No. 04-254801 with an internal release agent. Proposals have been made to include it.

【0005】[0005]

【発明が解決しようとする課題】光エネルギー硬化型樹
脂の成形において、離型に支障を来すと樹脂が基材から
剥離してしまったり、樹脂の表面形状が変化したり、表
面に微細な凹凸を有する素子等ではその凹凸部が破壊し
たりする。又、形状精度への悪影響だけでなく離型性は
生産タクト(成形時間)や型の耐久の点からコストにも
大きく影響する。こうした離型性の改善が上記の提案で
あるが、先の3件は離型に対する負荷方法に関してであ
り、離型に要する力の低減を図ったものではない。よっ
て離型時には相当の応力が樹脂/型界面に働き上記の不
具合が全て改善される訳ではなかった。
In the molding of light energy curable resin, if the release is hindered, the resin peels from the base material, the surface shape of the resin changes, or the surface is fine. In an element having unevenness, the unevenness may be destroyed. Further, not only the shape accuracy is adversely affected, but also the releasability greatly affects the cost in terms of production tact (molding time) and mold durability. The above-mentioned proposals have been made to improve the releasability as described above, but the above three cases are related to the load method for the releasability and are not intended to reduce the force required for the releasability. Therefore, considerable stress acts on the resin / mold interface at the time of mold release, and not all of the above problems are solved.

【0006】又、後の3件は離型力自体の低減であり、
型表面材や樹脂組成の改良が考えられている。
Also, the latter three cases are reduction of the releasing force itself,
Improvements in mold surface materials and resin compositions have been considered.

【0007】しかし、型表面材で離型性が良いものは、
テフロン(登録商標)のように表面粗さが悪く光学用途
には使用できず、離型剤も耐久が短かったり、外観や成
形後の樹脂の環境耐久に悪影響を与える。又、樹脂の組
成改良では、内填離型剤での離型性の向上が図られてい
るが、これも型の汚れによる型耐久の低下や成形品の外
観、成形後の樹脂の環境耐久に悪影響を与える。
However, if the mold surface material has a good releasing property,
Like Teflon (registered trademark), it has a poor surface roughness and cannot be used for optical applications, and the release agent also has a short durability, and adversely affects the appearance and the environmental durability of the resin after molding. In addition, in the resin composition improvement, the releasability with the internal release agent is improved, but this also reduces the mold durability due to mold contamination, the appearance of the molded product, the environmental durability of the resin after molding. Adversely affect.

【0008】本発明は上記問題に鑑みてなされたもの
で、その目的とする処は、離型開始時の離型力を低減す
ることができるとともに、離型の開始地点や離型の方向
を制御することができ、ガラス基板からの樹脂の剥離や
変形、破壊を防止して型の耐久性向上を図ることができ
る光学素子及びその製造方法を提供することにある。
The present invention has been made in view of the above problems, and its object is to reduce the releasing force at the start of releasing, and to set the starting point of releasing and the direction of releasing. An object of the present invention is to provide an optical element that can be controlled and can prevent the resin from peeling off, deforming, and breaking from the glass substrate and improve the durability of the mold, and a method for manufacturing the same.

【0009】[0009]

【課題を解決するための手段】上記目的を達成するた
め、本発明は、光エネルギー硬化型樹脂を型を用いて形
状転写、 光照射により硬化後、離型することにより基材
上に所要の形状を有する光エネルギー硬化型樹脂を形成
した光学素子において、樹脂/型界面に離型性が異なる
2つの領域が存在し、内側が離型性が悪い領域、外側が
離型性が良い領域であり、離型性が悪い領域の外周部の
基材面と直角方向から見た形状が凸状である部分を有す
ることを特徴とする。
In order to achieve the above object, the present invention provides a light energy curable resin on a substrate by transferring a shape using a mold, curing by light irradiation, and then releasing. In an optical element formed with a light energy curable resin having a shape, there are two regions with different releasability at the resin / mold interface, the inner region is the region with poor releasability, and the outer region is the region with good releasability. It is characterized in that it has a portion having a convex shape when viewed in a direction perpendicular to the base material surface in the outer peripheral portion of the region having poor releasability.

【0010】又、本発明は、光エネルギー硬化型樹脂を
型を用いて形状転写、 光照射により硬化後、離型するこ
とにより基材上に所要の形状を有する光エネルギー硬化
型樹脂を形成した光学素子の製造方法において、型の樹
脂との接触面の材質が異なるものを使用することを特徴
とする。
Further, according to the present invention, a light energy curable resin having a desired shape is formed on a base material by transferring a shape of a light energy curable resin using a mold, curing by light irradiation, and releasing. The method of manufacturing an optical element is characterized in that different materials are used for the contact surface with the resin of the mold.

【0011】[0011]

【発明の実施の形態】以下に本発明の実施の形態を添付
図面に基づいて説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings.

【0012】本発明では、離型力自体の低減、特に離型
開始時の離型力を低減するために、図13に示すように
成形された樹脂23の外周部に凸状の部分23aを設
け、この先端23bに応力を集中させ、この部分から低
応力で離型するようにしたものである。ここで、24は
ガラス基板である。しかし、外周部を図13の23aの
ような形状にするには、型構造が複雑になったり、供給
する樹脂量や型への充填過程の制御が必要となる。
In the present invention, in order to reduce the releasing force itself, particularly the releasing force at the time of starting the releasing, a convex portion 23a is formed on the outer peripheral portion of the resin 23 molded as shown in FIG. It is provided so that stress is concentrated on the tip 23b and the mold is released from this portion with low stress. Here, 24 is a glass substrate. However, in order to form the outer peripheral portion into a shape such as 23a in FIG. 13, the mold structure becomes complicated, and it is necessary to control the amount of resin supplied and the process of filling the mold.

【0013】そこで、本発明では、図14に示すように
成形された樹脂の外周部の形状にはこだわらず、例えば
円形状で、樹脂/型の界面に離型性が異なる領域が存在
し、外側が離型性が良い領域25aで、内側が離型性が
悪い領域25bで、その25bの外周部に、基材面と直
角方向から見た形状が凸状の25cを設け、離型性が良
い領域25aは低荷重で剥離が開始し、離型性が悪い領
域25bの離型開始時には、この部分25cに応力が集
中し、低荷重での離型が可能となる。
Therefore, according to the present invention, the shape of the outer peripheral portion of the resin molded as shown in FIG. 14 is not limited to a particular shape, and for example, a circular region having different releasability exists at the resin / mold interface. A region 25a having a good releasability on the outer side and a region 25b having a poor releasability on the inner side are provided with a convex shape 25c as viewed from the direction perpendicular to the substrate surface on the outer peripheral portion of the region 25b. Peeling starts in a region 25a with good stress under a low load, and stress is concentrated in this portion 25c at the start of mold release in a region 25b with a poor mold releasability, which enables mold release under a low load.

【0014】又、本発明では、凸状部の先端を曲率半径
2mm以下にすることにより、応力集中度を高めより低
荷重での離型を可能とする。
Further, in the present invention, the tip of the convex portion has a radius of curvature of 2 mm or less to enhance the stress concentration and enable the mold release under a lower load.

【0015】[実施例1]図1は本発明に係る光学素子
の実施態様を示す概略図、図2は本実施例で用いた型を
示す概略図、図3は本実施例での光学素子の製造方法を
示す概略図である。
[Embodiment 1] FIG. 1 is a schematic view showing an embodiment of an optical element according to the present invention, FIG. 2 is a schematic view showing a mold used in this embodiment, and FIG. 3 is an optical element in this embodiment. FIG. 3 is a schematic view showing a manufacturing method of.

【0016】図1において、1は光エネルギー硬化型樹
脂で、2はガラス基材である。1の表面1dには型によ
り転写された微細な凹凸が形成されている。1aは樹脂
の良離型部で1bは悪離型部であり、悪離型部の外周は
1cのように凸状になっている。この成形品は図2に示
す型を用いて作製した。
In FIG. 1, 1 is a light energy curable resin and 2 is a glass substrate. On the surface 1d of No. 1, fine irregularities transferred by the mold are formed. Reference numeral 1a denotes a resin good-releasing portion, 1b denotes a bad-releasing portion, and the outer periphery of the bad-releasing portion is convex like 1c. This molded product was produced using the mold shown in FIG.

【0017】図2は石英上にフォトリソ法とエッチング
法により形成した深さ0.5μmの溝3dを有する型で
あり、溝形成部の外側3aには1um以下のフッ素系離
型剤がコーティングされている。3bはフッ素系離型剤
がコーティングされていない、表面が石英のままの部分
であり、3aと3bの境界には3cのように先端が曲率
半径2mmの凸状部を有している。この型を用いて図3
に示す工程で表面に微細な凹凸を有する回折格子を作製
した。
FIG. 2 shows a mold having a groove 3d having a depth of 0.5 μm formed on quartz by photolithography and etching. The outside 3a of the groove forming portion is coated with a fluorine-based releasing agent of 1 μm or less. ing. 3b is a portion where the surface is still quartz, which is not coated with a fluorine-based releasing agent, and a tip has a convex portion with a radius of curvature of 2 mm like 3c at the boundary between 3a and 3b. Figure 3
A diffraction grating having fine irregularities on the surface was produced in the step shown in.

【0018】図3において、4は硬化前の光エネルギー
硬化型樹脂、5はスペーサー、6は不図示の駆動装置に
連結されている離型ピンである。先ず、型3の上に光エ
ネルギー硬化型樹脂4を滴化し(図3(a))、その上
にガラス基材2を載せ、不図示の装置で加圧する。ここ
で用いるガラス基材の樹脂との接触面は密着性向上のた
めシランカップリング剤を施してある。そして、スペー
サーで樹脂厚が決定されると(図3(b))、光を照射
し樹脂を硬化させる(図3(c))。硬化が終了する
と、ガラス部を離型ピンにより徐々に増圧しながら、離
型させた(図3(d))。3a部の端は20kN程度で
離型し始めそのまま20kNで、3c部まで離型し、3
c部はその先端のエッジ部より25kNで離型し始め、
そのまま25kNで10秒程度で全面離型した。
In FIG. 3, 4 is a light energy curable resin before curing, 5 is a spacer, and 6 is a releasing pin connected to a driving device (not shown). First, the light energy curable resin 4 is dropped onto the mold 3 (FIG. 3A), the glass base material 2 is placed thereon, and pressure is applied by an apparatus (not shown). A silane coupling agent is applied to the contact surface of the glass base material used with the resin for improving the adhesion. Then, when the resin thickness is determined by the spacer (FIG. 3B), light is irradiated to cure the resin (FIG. 3C). When the curing was completed, the glass part was released from the mold while gradually increasing the pressure with the release pin (FIG. 3 (d)). The end of 3a part starts to release at about 20 kN, and at 20 kN as it is, it releases to 3c part and 3
The part c begins to release from the edge of its tip at 25 kN,
The entire surface was released at 25 kN for about 10 seconds.

【0019】こうして成形された表面に回折格子が形成
された光エネルギー硬化型樹脂は、樹脂とガラス基材と
の剥離はなく、格子のエッジ部の欠けや変形もなかった
又、型も繰り返し1000shotの成形で変化は見ら
れなかった。
The light energy curable resin having a diffraction grating formed on the surface thus molded had no peeling between the resin and the glass substrate, and the edge portion of the grating was not chipped or deformed. Further, the mold was repeatedly used for 1000 shots. No change was observed in molding.

【0020】<比較例1>実施例1とフッ素系離型剤無
しの型を用いた以外は全て同様に成形したところ、離型
開始には150kNを要し、1秒以下で一気に離型し
た。成形品は樹脂がガラス基板から一部剥離していた。
<Comparative Example 1> Molding was carried out in the same manner as in Example 1 except that a mold having no fluorine-based mold release agent was used. It took 150 kN to start the mold release, and the mold was released at once in less than 1 second. . In the molded product, the resin was partly peeled from the glass substrate.

【0021】<比較例2>実施例1と凸状部の先端の曲
率半径を4mmとした以外は全て同様に成形したとこ
ろ、凸状部先端の離型開始には100kNを要し、1秒
以下で一気に離型した。成形品は樹脂がガラス基板から
一部剥離していた。
Comparative Example 2 The same molding as in Example 1 was carried out except that the radius of curvature of the tip of the convex portion was 4 mm. It took 100 kN to start releasing the tip of the convex portion for 1 second. The following was released at once. In the molded product, the resin was partly peeled from the glass substrate.

【0022】[実施例2]図4は本発明に係る光学素子
の実施態様を示す概略図、図5は本実施例で用いた型を
示す概略図、図6は本実施例での光学素子の製造方法を
示す概略図である。
[Embodiment 2] FIG. 4 is a schematic view showing an embodiment of an optical element according to the present invention, FIG. 5 is a schematic view showing a mold used in this embodiment, and FIG. 6 is an optical element in this embodiment. FIG. 3 is a schematic view showing a manufacturing method of.

【0023】図4において、7は光エネルギー硬化型樹
脂で、8はガラス基材である。7の表面7dには型によ
り転写されたフレネル形状が形成されている。7aは樹
脂の良離型部で7bは悪離型部であり、悪離型部の外周
は7cのように凸状になっている。この成形品は図5に
示す型を用いて作製した。
In FIG. 4, 7 is a light energy curable resin, and 8 is a glass base material. The surface 7d of 7 has a Fresnel shape transferred by a mold. Reference numeral 7a denotes a resin good-releasing portion, 7b denotes a bad-releasing portion, and the outer periphery of the bad-releasing portion has a convex shape like 7c. This molded product was produced using the mold shown in FIG.

【0024】図5の9は表面に最大深さ25μmのフレ
ネル形状を有する型で、りん青銅の母材9aの上にKN
メッキ9bを50μm施し、このメッキ層を切削加工に
よりフレネル形状9cを形成した。この型を用いて図6
に示す工程でガラス基材の上に表面にフレネル形状を有
する樹脂層が接着された光学素子を作製した。
Reference numeral 9 in FIG. 5 is a mold having a Fresnel shape with a maximum depth of 25 μm on the surface, and KN is formed on the phosphor bronze base material 9a.
The plating 9b was applied to a thickness of 50 μm, and the plating layer was cut to form a Fresnel shape 9c. Figure 6
An optical element having a Fresnel-shaped resin layer adhered on the surface of a glass substrate was produced in the step shown in FIG.

【0025】図6において、10は硬化前の光エネルギ
ー硬化型樹脂、11 はスペーサー、12はマスク、13
は不図示の駆動装置に連結されている離型ピンである。
先ず、型9の上に光エネルギー硬化型樹脂10を滴化し
(図6(a))、その上にガラス基材8を載せ、不図示
の装置で加圧する。ここで用いるガラス基材の樹脂との
接触面は密着性向上のためシランカップリング剤を施し
てある。そして、スペーサーで樹脂厚が決定されると
(図6(b))、光を照射し樹脂を硬化させる(図6
(c))。ここで、樹脂がゲル状態まで硬化した後、光
照射をマスク12を介して行った。マスク12は上から
見ると図7に示すようにな形状となっており、先端部が
曲率半径2mmの凸状部12aを有し、12bは光を透
過しないため、樹脂の7a部はゲル状態のままである
(図6(d))。
In FIG. 6, 10 is a light energy curable resin before curing, 11 is a spacer, 12 is a mask, 13
Is a release pin connected to a drive device (not shown).
First, the light energy curable resin 10 is dropped on the mold 9 (FIG. 6A), the glass base material 8 is placed thereon, and pressure is applied by an apparatus (not shown). A silane coupling agent is applied to the contact surface of the glass base material used with the resin for improving the adhesion. Then, when the resin thickness is determined by the spacer (FIG. 6B), light is irradiated to cure the resin (FIG. 6B).
(C)). Here, after the resin was cured to a gel state, light irradiation was performed through the mask 12. The mask 12 has a shape as shown in FIG. 7 when viewed from above, and the tip portion has a convex portion 12a with a radius of curvature of 2 mm, and 12b does not transmit light. Therefore, the resin 7a portion is in a gel state. It remains the same (FIG. 6 (d)).

【0026】樹脂7b部の硬化が終了すると、ガラス部
を離型ピンにより徐々に増圧しながら、離型させた(図
6(e))。7a部の端は10kN程度で離型し始め、
そのまま10kNで7cまで離型し、7c部はその先端
のエッジ部より25kNで離型し始め、そのまま25k
Nで10秒程度で全面離型した。離型後、今度は未硬化
部7a部のみに光照射を行い7a部を硬化させた。
When the curing of the resin 7b portion was completed, the glass portion was released from the mold while gradually increasing the pressure by the release pin (FIG. 6 (e)). The end of 7a begins to release at about 10 kN,
The mold is released as it is up to 7c at 10kN, and the part 7c begins to be released at 25kN from the edge part at the tip, and it is left at 25k.
The entire surface was released with N in about 10 seconds. After releasing the mold, this time only the uncured portion 7a was irradiated with light to cure the portion 7a.

【0027】こうして成形された表面にフレネル形状が
形成された光エネルギー硬化型樹脂は、樹脂とガラス基
材との剥離はなく、格子のエッジ部の欠けや変形もなか
った又、型も繰り返し1000shotの成形で変化は
見られなかった。
The light energy curable resin having the Fresnel shape formed on the surface thus molded did not separate the resin from the glass base material, did not have chipping or deformation of the edge portion of the lattice, and the mold was repeated 1000 shots. No change was observed in molding.

【0028】<比較例3>実施例2と硬化途中でマスキ
ングすることなく全面を硬化させた以外は全て同様に成
形したところ、離型開始には200kNを要し、1秒以
下で一気に離型した。成形品はフレネル部のエッジが欠
け、型に樹脂の付着が見られた。
Comparative Example 3 The same molding as in Example 2 was carried out except that the entire surface was cured without masking during curing, but 200 kN was required to start the mold release, and the mold was released at once in less than 1 second. did. The edge of the Fresnel part of the molded product was chipped, and resin adhesion was found on the mold.

【0029】[実施例3]図8は本発明に係る光学素子
の実施態様を示す概略図、図9は本実施例で用いた型を
示す概略図、図10は本実施例での光学素子の作製方法
を示す概略図である。
[Embodiment 3] FIG. 8 is a schematic view showing an embodiment of an optical element according to the present invention, FIG. 9 is a schematic view showing a mold used in this embodiment, and FIG. 10 is an optical element in this embodiment. FIG.

【0030】図8において、14は光エネルギー硬化型
樹脂で、15はガラス基材である。14の表面14gに
は型により転写されたフレネル形状が形成されている。
14aは樹脂の良離型部で14bは悪離型部であり、悪
離型部の外周は14c,14d,14e,14fのよう
に凸状になっている。この成形品は図5に示す型を用い
て作製した。
In FIG. 8, 14 is a light energy curable resin and 15 is a glass substrate. On the surface 14g of 14 is formed a Fresnel shape transferred by a mold.
Reference numeral 14a denotes a resin good-releasing portion, 14b denotes a bad-releasing portion, and the outer periphery of the bad-releasing portion is convex like 14c, 14d, 14e, and 14f. This molded product was produced using the mold shown in FIG.

【0031】図5の16は表面に最大深さ40μmのフ
レネル形状16iを有する型で、りん青銅の母材16a
の上にKNメッキ16bを100μm施し、このメッキ
層を切削加工によりフレネル形状16iを形成した。フ
レネル部の外側16cには1um以下のフッ素系離型剤
がコーティングされている。16dはフッ素系離型剤が
コーティングされていない、表面がKNのままの部分で
あり、16cと16dの境界には16e,16f,16
g,16hのように先端が曲率半径2mmの凸状部を有
している。この型を用いて図10に示す工程でガラス基
材の上に表面にフレネル形状を有する樹脂層が接着され
た光学素子を作製した。
Reference numeral 16 in FIG. 5 is a mold having a Fresnel shape 16i with a maximum depth of 40 μm on the surface, and a phosphor bronze base material 16a.
KN plating 16b was applied to 100 μm on the above, and the plating layer was cut to form Fresnel shape 16i. The outer side 16c of the Fresnel portion is coated with a fluorine-based release agent of 1 μm or less. 16d is a part where the fluorine-based release agent is not coated and the surface is KN, and 16e, 16f and 16 are formed at the boundary between 16c and 16d.
g and 16h, the tip has a convex portion with a radius of curvature of 2 mm. Using this mold, an optical element in which a Fresnel-shaped resin layer was adhered on the surface of the glass substrate was produced in the step shown in FIG.

【0032】図10において、17は硬化前の光エネル
ギー硬化型樹脂、18はスペーサー、19は不図示の駆
動装置に連結されている離型ピンである。先ず、型16
の上に光エネルギー硬化型樹脂17を滴化し(図10
(a))、その上にガラス基材18を載せて不図示の装
置で加圧する。ここで用いるガラス基材の樹脂との接触
面は密着性向上のためシランカップリング剤を施してあ
る。そして、スペーサーで樹脂厚が決定されると(図1
0(b))、光を照射し樹脂を硬化させる(図10
(c))。
In FIG. 10, 17 is a light energy curable resin before curing, 18 is a spacer, and 19 is a release pin connected to a driving device (not shown). First, the mold 16
The light energy curable resin 17 is dripping on the surface (see FIG. 10).
(A)), the glass base material 18 is placed thereon, and pressure is applied by an apparatus (not shown). A silane coupling agent is applied to the contact surface of the glass base material used with the resin for improving the adhesion. Then, when the resin thickness is determined by the spacer (Fig. 1
0 (b)), light is irradiated to cure the resin (FIG. 10).
(C)).

【0033】硬化が終了すると、14c,14d,14
e,14f 部の外側のガラス部4箇所を増圧しながら離
型させた(図10(d))。14a部の端は20kN程
度で離型し始め、そのまま20kNで14c,14d,
14e,14f 部まで離型し、14c,14d,14
e,14f 部はその先端のエッジ部より25kN程度で
離型し始めた。この凸部で各々剥離開始した直後に一旦
荷重を下げ剥離を停止し、4箇所とも剥離を開始した時
点で再度荷重をかけ4箇所から離型を同時に開始しさせ
た。すると、4箇所とも15kNで離型し始め、そのま
ま15kNで5秒程度で全面離型した。
When the curing is completed, 14c, 14d, 14
The four glass parts outside the e and 14f parts were released from the mold while increasing the pressure (FIG. 10 (d)). The end of the portion 14a starts to be released at about 20 kN, and at 20 kN, 14c, 14d,
14c, 14f, 14c, 14d, 14
The e and 14f parts began to release from the edge part of the tip at about 25 kN. Immediately after the peeling was started at each of the convex portions, the load was once reduced to stop the peeling, and when the peeling was started at all four points, the load was applied again and the mold releasing was simultaneously started from the four points. Then, the four parts started to be released at 15 kN, and the entire surface was released at 15 kN in about 5 seconds.

【0034】こうして成形された表面にフレネル形状が
形成された光エネルギー硬化型樹脂は、樹脂とガラス基
材との剥離はなく、格子のエッジ部の欠けや変形もなか
った。
The light energy curable resin having the Fresnel shape formed on the surface thus molded did not separate the resin from the glass substrate, and did not have chipping or deformation of the edge portion of the lattice.

【0035】又、型も繰り返し1000shotの成形
で変化は見られなかった。
Also, no change was found in the mold after repeated molding of 1000 shots.

【0036】<比較例3>実施例3と凸状部を1箇所に
した以外は同様に成形したところ、悪離型部の離型開始
は25kNを要し、10秒程度で全面離型した。成形品
は図11に示す離型時に加圧した20aと反対側のフレ
ネル部20bのエッジ部が一部欠けていた。これは離型
の方向がエッジが欠け易い力が掛かる方向であったため
であり、実施例3のように離型の方向が周囲から中心に
向かい、最終の離型地点が中心である場合には欠けが発
生しなかったと思われる。
<Comparative Example 3> The same molding as in Example 3 was carried out except that the convex portion was formed in one place, but it took 25 kN to start releasing the bad release portion, and the entire surface was released in about 10 seconds. . The molded product was partially chipped at the edge portion of the Fresnel portion 20b on the side opposite to 20a which was pressed at the time of release from the mold shown in FIG. This is because the mold release direction was a direction in which a force with which the edge is easily chipped was applied, and when the mold release direction was from the periphery to the center and the final mold release point was the center, as in Example 3. It seems that no chipping occurred.

【0037】以上のように樹脂/型界面に離型性が異な
る2つの領域が存在し、内側が離型性が悪い領域、外側
が離型性が良い領域であり、離型性が悪い領域の外周部
の、基材面と直角方向から見た形状が凸状である部分を
有することにより、低荷重での離型が可能となるととも
に、離型の開始点や離型の方向を制御できる。
As described above, there are two regions having different releasability at the resin / mold interface, the inner region is a region having a poor releasability, the outer region is a region having a good releasability, and the region having a poor releasability. By having a part of the outer peripheral part of the outer peripheral part of which the shape viewed from the direction perpendicular to the base material surface is convex, mold release under low load is possible and the mold release start point and mold release direction are controlled. it can.

【0038】[実施例5]図12は本実施例で用いた型
を示す概略図で、実施例1で用いた型の1μm以下のフ
ッ素系離型剤のコーティング部を21aのようにし、こ
の21a部の外側のガラス部を離型時に加圧した以外は
実施例1と同様に成形した。
[Embodiment 5] FIG. 12 is a schematic view showing the mold used in this embodiment. The mold used in Embodiment 1 has a coating portion of a fluorine-based releasing agent of 1 μm or less as 21a. The molding was performed in the same manner as in Example 1 except that the glass portion outside the 21a portion was pressed at the time of mold release.

【0039】こうして成形された表面に回折格子が形成
された光エネルギー硬化型樹脂は、実施例1と同様に樹
脂とガラス基材との剥離はなく、格子のエッジ部の欠け
や変形もなかった又、型も繰り返し1000shotの
成形で変化は見られなかった。
The light energy curable resin having the diffraction grating formed on the surface thus molded did not separate the resin from the glass base material as in Example 1, and did not have chipping or deformation of the edge portion of the grating. Also, no change was observed in the mold after repeated molding of 1000 shots.

【0040】[0040]

【発明の効果】以上説明したように、本願発明によれ
ば、樹脂/型界面に離型性が異なる2つの領域が存在
し、内側が離型性が悪い領域、外側が離型性が良い領域
であり、離型性が悪い領域の外周部の、基材面と直角方
向から見た形状が凸状である部分を有することにより、
離型開始時の離型力を低減できると共に離型の開始地点
や離型の方向を制御でき、ガラス基板からの樹脂の剥離
や変形、破壊を防止し、型の耐久も向上する。
As described above, according to the present invention, there are two regions having different releasability at the resin / mold interface, the inner region has poor releasability and the outer region has good releasability. By the region, the outer peripheral portion of the region having poor releasability, having a convex shape when viewed from the direction perpendicular to the substrate surface,
The release force at the start of release can be reduced, the start point of the release and the direction of the release can be controlled, peeling, deformation and destruction of the resin from the glass substrate can be prevented, and the durability of the mold can be improved.

【0041】又、本発明によれば、より低荷重での離型
が可能となり、型の表面材質を変更することにより容易
に離型性の差を実現できるるとともに、型の変更をする
ことなく離型性の差を実現することができる。
Further, according to the present invention, it is possible to release the mold with a lower load, and it is possible to easily realize the difference in the mold release property by changing the surface material of the mold and to change the mold. It is possible to realize a difference in releasability.

【図面の簡単な説明】[Brief description of drawings]

【図1】第1の実施例での光学素子を示す概略図であ
る。
FIG. 1 is a schematic view showing an optical element in a first example.

【図2】第1の実施例で用いる型を示す概略図である。FIG. 2 is a schematic view showing a mold used in the first embodiment.

【図3】第1の実施例での光学素子の製造方法を示す概
略図である。
FIG. 3 is a schematic diagram showing a method for manufacturing an optical element in the first embodiment.

【図4】第2の実施例での光学素子を示す概略図であ
る。
FIG. 4 is a schematic diagram showing an optical element according to a second embodiment.

【図5】第2の実施例で用いる型を示す概略図である。FIG. 5 is a schematic view showing a mold used in the second embodiment.

【図6】第2の実施例での光学素子の製造方法を示す概
略図である。
FIG. 6 is a schematic view showing a method for manufacturing an optical element in the second embodiment.

【図7】第2の実施例で用いたマスクを示す概略図であ
る。
FIG. 7 is a schematic view showing a mask used in a second embodiment.

【図8】第3の実施例での光学素子を示す概略図であ
る。
FIG. 8 is a schematic view showing an optical element in a third embodiment.

【図9】第3の実施例で用いる型を示す概略図である。FIG. 9 is a schematic view showing a mold used in the third embodiment.

【図10】第3の実施例での光学素子の製造方法を示す
概略図である。
FIG. 10 is a schematic view showing a method for manufacturing an optical element in the third example.

【図11】比較例3で成形した光学素子の不良部を示す
概略図である。
11 is a schematic view showing a defective portion of the optical element molded in Comparative Example 3. FIG.

【図12】第4の実施例で用いる型を示す概略図であ
る。
FIG. 12 is a schematic view showing a mold used in a fourth embodiment.

【図13】本発明に近い光学素子を示す図である。FIG. 13 is a diagram showing an optical element close to the present invention.

【図14】本発明による光学素子を示す図である。FIG. 14 shows an optical element according to the invention.

【符号の説明】[Explanation of symbols]

1,7,14,20,23,25 成形硬化後の光エ
ネルギー硬化型樹脂 2,8,15,21,24,26 ガラス基材 3,9,16,22 型 4,10,17 硬化前の光エネルギー硬化型樹
脂 5,11,18 スペーサー 6,13,19 離型ピン 12 マスク
1,7,14,20,23,25 Light energy curing type resin after molding and curing 2,8,15,21,24,26 Glass substrate 3,9,16,22 Mold 4,10,17 Before curing Light energy curing resin 5,11,18 Spacer 6,13,19 Release pin 12 Mask

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) G02B 5/18 G02B 5/18 G11B 7/24 538 G11B 7/24 538R 7/26 531 7/26 531 // B29K 105:24 B29K 105:24 B29L 11:00 B29L 11:00 Fターム(参考) 2H049 AA03 AA04 AA33 AA39 AA43 AA63 4F202 AH73 AJ03 AJ11 AR12 CA01 CB01 CD02 CD22 CD24 CD30 CK11 CM02 CM46 CM47 4F204 AA44 AD04 AH73 AH74 AH75 EA03 EA04 EB01 EB11 EF01 EF05 EK17 EK18 5D029 KB08 MA34 5D121 AA06 DD02 EE26 EE28 GG02 GG30 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 7 identification code FI theme code (reference) G02B 5/18 G02B 5/18 G11B 7/24 538 G11B 7/24 538R 7/26 531 7/26 531 / / B29K 105: 24 B29K 105: 24 B29L 11:00 B29L 11:00 F Term (reference) 2H049 AA03 AA04 AA33 AA39 AA43 AA63 4F202 AH73 AJ03 AJ11 AR12 CA01 CB01 CD02 CD22 CD24 CD30 CK11 CM02 CM46 CM44 A4H75A73 EA03 EA04 EB01 EB11 EF01 EF05 EK17 EK18 5D029 KB08 MA34 5D121 AA06 DD02 EE26 EE28 GG02 GG30

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 光エネルギー硬化型樹脂を型を用いて形
状転写、 光照射により硬化後、離型することにより基材
上に所要の形状を有する光エネルギー硬化型樹脂を形成
した光学素子において、 樹脂/型界面に離型性が異なる2つの領域が存在し、内
側が離型性が悪い領域、外側が離型性が良い領域であ
り、離型性が悪い領域の外周部の基材面と直角方向から
見た形状が凸状である部分を有することを特徴とする光
学素子。
1. An optical element in which a light energy curable resin having a desired shape is formed on a base material by transferring a shape of a light energy curable resin using a mold, curing by light irradiation, and releasing. There are two regions with different releasability at the resin / mold interface, the inside is the region with poor releasability, the outside is the region with good releasability, and the base material surface of the outer periphery of the region with poor releasability And an optical element having a convex shape when viewed in a direction perpendicular to.
【請求項2】 凸状の先端が曲率半径2mm以下である
ことを特徴とする請求項1記載の光学素子。
2. The optical element according to claim 1, wherein the convex tip has a radius of curvature of 2 mm or less.
【請求項3】 光エネルギー硬化型樹脂を型を用いて形
状転写、 光照射により硬化後、離型することにより基材
上に所要の形状を有する光エネルギー硬化型樹脂を形成
した光学素子の製造方法において、 型の樹脂との接触面の材質が異なるものを使用すること
を特徴とする光学素子の製造方法。
3. Production of an optical element in which a light energy curable resin having a desired shape is formed on a base material by transferring a shape of a light energy curable resin using a mold, curing by light irradiation, and releasing. A method for manufacturing an optical element, characterized in that different materials are used for the contact surface with the resin of the mold.
【請求項4】 光エネルギー硬化型樹脂の硬化状態を異
ならせることを特徴とする請求項3記載の光学素子の製
造方法。
4. The method of manufacturing an optical element according to claim 3, wherein the curing state of the light energy curable resin is different.
【請求項5】 マスキングをして光照射することを特徴
とする請求項4記載の光学素子の製造方法。
5. The method for manufacturing an optical element according to claim 4, wherein the masking is performed and light irradiation is performed.
JP2002023201A 2002-01-31 2002-01-31 Optical element and its manufacturing method Pending JP2003222708A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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Publication Number Publication Date
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JP2003222708A5 JP2003222708A5 (en) 2005-08-18

Family

ID=27745983

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Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006098428A (en) * 2004-09-28 2006-04-13 Shimadzu Corp Replica diffraction grating
US7690912B2 (en) 2005-02-28 2010-04-06 Canon Kabushiki Kaisha Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same
JP2013503064A (en) * 2009-08-31 2013-01-31 クーパーヴィジョン インターナショナル ホウルディング カンパニー リミテッド パートナーシップ Demolding during manufacture of ophthalmic lens mold assemblies

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006098428A (en) * 2004-09-28 2006-04-13 Shimadzu Corp Replica diffraction grating
JP4576961B2 (en) * 2004-09-28 2010-11-10 株式会社島津製作所 Method for manufacturing replica diffraction grating
US7690912B2 (en) 2005-02-28 2010-04-06 Canon Kabushiki Kaisha Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same
JP2013503064A (en) * 2009-08-31 2013-01-31 クーパーヴィジョン インターナショナル ホウルディング カンパニー リミテッド パートナーシップ Demolding during manufacture of ophthalmic lens mold assemblies

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